• Journal of the Semiconductor & Display Technology
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• v.22 no.2
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• pp.30-34
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• 2023

Since dishing in the CMP process is a major factor that hinders the uniformity of the semiconductor thin film, many studies have focused this issue to improve the non-uniformity of the film due to dishing. In the metal layer, the dishing mainly occurs in the central part of the metal due to a difference in a selection ratio between the metal and the dielectric, thereby generating a step on the surface of the metal layer. Factors that cause dishing include the shape of the thin film, the chemical reaction of the slurry, thermal deformation, and the rotational speed of the pad and head, and dishing occurs due to complex interactions between them. This study analyzed the stress generated on the metal layer surface in the CMP process using ANSYS software, a commercial structure analysis program. The stress caused by the vertical load applied from the pad was analyzed by changing the area density and line width of the dummy metal. As a result of the analysis, the stress in the active region decreased as the pattern density and line width of the dummy metal increased, and it was verified that it was valid compared with the previous study that studied the dishing according to the dummy pattern density and line width of the metal layer. In conclusion, it was confirmed that there is a relationship between dishing and normal stress.

• The Journal of the Acoustical Society of Korea
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• v.26 no.5
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• pp.220-226
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• 2007

The two major objectives of acoustical measurements in a cavitation tunnel are measuring the noise levels generated by rotating propellers behind a hull and localizing possible noise sources in order to reduce noise levels. Propeller noise measurement experiments were performed in MOERI cavitation tunnel at December, 2006. In order to put the propeller into cavitating conditions, a wake-generating dummy body was devised. In addition, ten hydrophones are put inside a wing-shaped casing in order to minimize the unexpected flow induced self noise around hydrophone itself. After measuring both of the noises of the rotating propeller behind the dummy body and signals generated by a virtual source, respectively the data were matched field processed using the frequency incoherent Bartlett processor to localize noises on the propeller plane. In this paper, we presented the measured noise analysis and the localization results.

• Science of Emotion and Sensibility
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• v.20 no.3
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• pp.141-150
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• 2017

The purpose of this study was to analyze the effect of the shape and attached position of E-textile-based stretchable sensors on motion-sensing performance and to investigate the requirements for the optimal structure of clothes for sensing limb motions. An experimental garment was prepared with different sensor shapes, and attachment positions. A child subject, wearing the experimental garment, performed arm and leg bending and extension motions at $60^{\circ}$, $90^{\circ}$ and $120^{\circ}$ motion angles, at a rate of 60 deg/sec. The changes in voltage triggered by the stretching and contracting of the fabric-sensor were measured, and an acceleration sensor was utilized to verify that the experimental motions were correctly performed. Dummy arms and legs of a child were manufactured to perform an identical test, in order to compare the dummy results with the actual human body experiment results. The analysis showed that the reproducibility and reliability of the rectangular sensor, showing uniform and stable were higher than those of the boat-shaped sensor, in both the dummy and the human body experiments. The attachment position of the sensor was more reproducible and reliable when placed on 4 cm below the elbow and knee joints in the dummy test, when placed in the joints of the elbow and knee, in children experiment. The appropriate shapes and attached positions of the sensor for sensing the motions were analyzed, and the results proved that motion-sensing of the human body is possible by utilizing flexible fabric-sensors integrated into clothes.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.42 no.3 s.333
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• pp.25-34
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• 2005

In this paper, we analyzed and measured the electrical crosstalk characteristics of a triplex transceiver module for ethernet Passive optical networks(EPONS). And we improved the electrical crosstalk levels using Dummy ground lines with signal lines. The triplex transceiver module consists of a laser diode as a transmitter, a digital photodetector as a digital data receiver, and a analog photodetector as a community antenna television signal receiver. And there are integrated on silicon substrate. The digital receiver and analog receiver sensitivity have to meet -24 dBm at $BER=10^{-l2}$ and -7.7 dBm at 44 dB SNR. And the electrical crosstalk levels have to maintain less than -86 dB from DC to 3 GHz. From analysis and measurement results, the proposed silicon substrate structure that contains the Dummy ground line with $100\;{\mu}m$ space from signal lines and separates 4 mm among devices respectively, is satisfied the electrical crosstalk level compared to simple structure. This proposed structure can be easily implemented with design convenience and greatly reduced the silicon substrate size about $50\%$.

• The Journal of Korean Institute of Information Technology
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• v.16 no.11
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• pp.51-59
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• 2018

The Multi-Mission Unmanned Surface Vehicle(MMUSV), which is manufactured using glass Fiber Reinforced Plastic(FRP) material, is designed to perform a surveillance and reconnaissance on the sea. Various navigation sensors, such as RADAR, RIDAR, camera, are mounted on a mast to perform an autonomous navigation. And a dummy gun is mounted on the deck of the MMUSV for a target tracking and disposal. It is necessary to analyze a strength for structures mounted on the deck because the MMUSV performs missions under a severe sea state. In this paper, a strength analysis of the mast structure is performed on static loads and lateral external loads to verify an adequacy of the designed mast through a series of simulations. Based on the results of captive model tests, a strength analysis for a heave motion of the mast structure is conducted using a simulation tool. Also a simulation and fatigue test for a mounting part between the MMUSV and the dummy gun are performed using a specimen. The simulation and test results are represented that a structure of the mast and mounting part of the dummy gun are appropriately designed.he impact amount are performed through simulation and experiments.

• Proceedings of the Korean Nuclear Society Conference
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• 2004.10a
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• pp.839-840
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• 2004

• Proceedings of the IEEK Conference
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• 2002.06b
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• pp.141-144
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• 2002

Several charge Injection compensation circuits, such as, the dummy transistor circuit, the switched OP-amp circuit, the switched capacitor circuit, were fabricated and the test results were compared. The differences between SPICE simulation results and measurements were within around 10%.

• International Journal of Safety
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• v.7 no.1
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• pp.30-34
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• 2008

For the purpose of establishing basic design standards for the manufacture of wheelchairs, a dummy for an ISO-standard wheelchair was modeled for use with a manufactured wheelchair, and the safety and performance of the wheelchair were examined through numerical simulations.

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2011.10a
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• pp.101-101
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• 2011

• Proceedings of the KIEE Conference
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• 1993.07a
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• pp.42-44
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• 1993

As for the organization of actual test facilities, we carried out the conceptual design for the actual test facilities related to PAFC simulater, PCS, distribution feeder, dummy load, measurement system and fault generation equipment.