• Title/Summary/Keyword: Dual Servo System

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Study of Dual Servo System for Measurement System of Mechanical Property (재료의 기계적 물성측정 시험장치를 위한 이중서보 시스템에 관한 연구)

  • 최현석;송치우;한창수;이형욱;최태훈;이낙규;나경환
    • Journal of the Semiconductor & Display Technology
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    • v.2 no.2
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    • pp.31-37
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    • 2003
  • This paper presents a measurement system of mechanical property using dual servo system. There are many kinds of method to measure material properties such as tensile test, indention and bending test. It is highly required to measure the properties of nano-sized material and structure. However, It is need more accurate measurement system, more stable and frequency response than conventional test. In this paper, we designed the dual servo system for a measuring instrument The dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.

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Ultra precision positioning system for Servo Motor-Piezo actualtor using dual servo loop (이중서보제어루프를 통한 서보모터-압전구동기의 초정밀위치결정 시스템)

  • 이동성;박종호;박희재
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.10a
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    • pp.437-441
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    • 1995
  • In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

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Ultra Precision Positining System for Servo Motor-piezo Actuator Using the Dual Servo Loop and Digital Filter Implementation (이중서보제어루프와 디지털 필터를 통한 서보모터-업전구동기의 초정밀위치결정 시스템 개발)

  • Lee, Dong-Sung;Park, Jong-Ho;Park, Heui-Jae
    • Journal of the Korean Society for Precision Engineering
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    • v.16 no.3 s.96
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    • pp.154-163
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    • 1999
  • In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

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Designing Compensators of Dual Servo System For High Precision Positioning (초정밀 위치 제어를 위한 이중 서보 시스템의 보상기 설계)

  • Choi, Hyeun-Seok;Song, Chi-Woo;Han, Chang-Soo;Choi, Tae-Hoon;Lee, Nak-Kyu;Na, Kyung-Whan
    • Proceedings of the KSME Conference
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    • 2003.04a
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    • pp.1309-1314
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    • 2003
  • The high precision positioning mechanism is used in various industrial fields. It is used in semiconductor manufacturing line, test instrument, Bioengineering, and MEMS and so on. This paper presents a positioning mechanism with dual servo system. Dual servo system consists of a coarse stage and a fine motion stage. The course stage is driven by VCM and the actuator of fine stage is the PZT. The purposes of dual servo system are stability, higher bandwidth, and robustness. Lead compensator is applied to this control system, and is designed by PQ method. Designed compensator can improve property of positioning mechanism.

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A Dual-Stage Servo System for an NFR Disk Drive using Iterative Learning Control (반복 학습 제어를 이용한 NFR 디스크 드라이브의 2단 서보 시스템)

  • 문정호;도태용
    • Journal of Institute of Control, Robotics and Systems
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    • v.9 no.4
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    • pp.277-283
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    • 2003
  • Recently, near-field recording (NFR) disk drive schemes have been proposed with a view to increasing recording densities of hard disk drives. Compared with hard disk drives. NFR disk drives have narrower track pitches and are exposed to more severe periodic disturbances resulting from eccentric rotation of the disk. It is difficult to meet servo system design specifications for NFR disk drives with conventional VCM actuators in that the servo system for an NFR disk drive generally requires a feater gain and higher bandwidth. To tackle the problem various dual-stage actuator systems composed of a microactuator mounted on top of a conventional VCM actuator have been proposed. This article deals with the problem of designing a tracking servo system far an NFR disk drive adopting a dual-stage actuator. We summarize design constraints pertaining to the dual-stage servo system and present a new servo scheme using iterative teaming control. We design feedback compensators and an iterative teaming controller for a target plant and verify the validity of the proposed control scheme through a computer simulation.

Experimental Considerations in Tracking Control of HDD Dual Stage Actuator (HDD의 2단구동기를 이용한 트랙 추종 제어의 실험적 고찰)

  • Park, Sung-Joon;Park, No-Cheol;Yang, Hyun-Seok
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2000.11a
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    • pp.237-242
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    • 2000
  • The areal recording density of HDD(Hard Disk Drive) has been increasing by about 60% a year. In order to achieve high areal density, less track pitch is expected and more servo bandwidth is required. Dual stage actuator and servo controller for HDD have been suggested for achieving high track density as a possible solution. Dual-loop servo system is generally classified into a two-input-two-output system, but if we use an estimator for a two-input-two-output system, it can be converted into two input one output system. Since we can't control the dual stage servo system by the classical method, it requires a special technique; for example, Parallel Loop System, Master-Slave Loop System, Decoupled Master-Slave Loop System, and Dual Feedback Loop System. In this paper, we performed experimental evaluations of several types of control algorithm. Further experiments will be made in the future.

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Design of a Dual-Drive Mechanism for Precision Gantry

  • Park, Heung-Keun;Kim, Sung-Soo;Park, Jin-Moo;Daehie Hong;Cho, Tae-Yeon
    • Journal of Mechanical Science and Technology
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    • v.16 no.12
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    • pp.1664-1672
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    • 2002
  • Gantry mechanisms have been widely used for precision manufacturing and material handling in electronics, nuclear, and automotive industries. Dual-drive servo mechanism is a way to increase control bandwidth, in which two primary axes aligned in parallel are synchronously driven by identical servo motors. With this mechanism, a flexible coupling (compliance mechanism) is often introduced in order to avoid the damage by the servo mismatch between the primary drives located at each side of gantry. This paper describes the design guidelines of the dual-drive servo mechanism with focus on its dynamic characteristics and control ramifications. That is, the effect on the system bandwidth which is critical on the system performance, the errors and torques exerted on guide ways in case of servo mismatch, the vibration characteristics concerned with dynamic error and settling time, and the driving force required at each axis for control are thoroughly investigated.

Implementation of Dual Servoing Using a Linear Motor and a Piezoelectric Actuator (리니어모터 및 압전구동기를 이용한 이중서보의 구현)

  • Ahn, Hyun-Sik
    • Proceedings of the KIEE Conference
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    • 2002.11c
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    • pp.249-252
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    • 2002
  • For a precise position control with the resolution of a micrometer, a dual servo system is constructed using a linear motor and a piezoelectric actuator. The switching mode dual servo algorithm is implemented on a DSP board in which A/D and D/A converters are also mounted. It is shown by the experimental results that the precise position control is performed within a few micrometer of position error by using the dual servo system.

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Dual-Stage Servo System using Electrostatic Microactuator for Super-High Density HDD (정전형 마이크로 액추에이터를 이용한 초고밀도 HDD용 Dual-Stage 서보 시스템)

  • Kim, Seung-Han;Seong, U-Gyeong;Lee, Hyo-Jeong;Lee, Jong-Won;Choe, Jeong-Hun;An, Yeong-Jae;Jeon, Guk-Jin;Kim, Bong-Hwan
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.48 no.2
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    • pp.153-160
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    • 1999
  • Dual-stage servo system for super-high density HDD has the chances of being composed of the coarse actuator(VCM) for track-seeking control and the fine actuator(microactuator) for-following control in near future. This paper presents the concept design of dual-stage servo system and the track-following control using an electrostatic microactuator for super-high density HDD. The electrostatic microactuator is designed and fabricated by MEMS(micro-electro-mechanical system) process. Both the nonlinear plant(voltage/displacement-to-electrostatic force) and the linear plant(electrostatic force-to-displacement) of the microactuator are established. Inverse function of the nonlinear plant is employed for a feedforward nonlinear compensator design. And feedforward control effect of this compensator is shown by time-domain experiments. A track-following feedback controller is designed using the feedback nonlinear compensator which is derived from the feedforward nonlinear compensator. The track-following control experiment is done to show the control efficiency of the proposed control system. And, excellent track-following control performance(2.21kHz servo-bandwidth, 7.51dB gain margin, $50.98^{\circ}$phase margin) is achieved by the proposed control system.

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Design of a VCM actuator for dual servo system

  • Choi, Hyeun-Seok;Han, Chang-Soo;Kim, Seung-Soo;Kim, Eung-Zu;Choi, Tae-Hoon;Na, Kyoung-Hwan
    • 제어로봇시스템학회:학술대회논문집
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    • 2004.08a
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    • pp.301-306
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    • 2004
  • In this study, Dual servo mechanism with VCM(Voice Coil Motor) and PZT is designed for a high precision force and position control. We designed the VCM actuator and dual servo mechanism with leaf spring. VCM actuators, with their high linearity, simple structure, low weight, and high efficiency, are increasingly being used in micro-positioning applications. There are many kinds of VCM with a structure. VCM actuators are divided into two types by moving parts. One is moving magnet type and the other moving coil type. We described the properties of these two types of VCM. Design parameters of VCM are defined through the FEM simulation analysis of magnetic field and dynamic model of dual servo mechanism. These researches help to for decreasing loss in the air gap of VCM. We present dual servo mechanism is effective mechanism for a force control in hi h precision, properties of designed VCM.

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