• Journal of the Institute of Electronics and Information Engineers
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• v.51 no.8
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• pp.195-201
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• 2014

In this paper, we developed a LGP(Light Guide Panel) dry cleaning system for particle cleaning using corona discharge and dry adhesive roll. Therefore, we design a cleaning mechanism that can be applied dry adhesive dust removal roll and ESD(electrostatic discharge) by using corona discharge. Also, we design and implementation of equipment, which can loading, unloading and transfer LGP automatically. The developed equipment is dust and particle cleaning experimental results to demonstrate its stability.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09b
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• pp.1259-1260
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• 2006

Intensive technological research on the Dry-bag CIP equipment was carried out to improve the dimensional accuracy and the productivity. The rubber mold design technology using FEM simulation during pressing was introduced, in order to achieve higher dimensional preciseness, and criteria for the selection of the In-line type or Off-line type, were established based on the powder flowability index proposed by Carr. Based on these research results, high productivity Off-line Dry-bag CIP equipment, which can realize good dimensional accuracy with high productivity, was developed even for non-granulated powders with poor packing density.

• Journal of the Semiconductor & Display Technology
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• v.21 no.3
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• pp.125-129
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• 2022

The current display technology tends to be highly integrated with high resolution, the element size is gradually downsized, and the structure becomes complicated. Inductively coupled plasma (ICP) dry etcher of various types of etching equipment is a structure that places a large multi-divisional antenna source on the top lid, passes current to the Antenna, and generates plasma using the induced magnetic field generated at this time. However, in the case of a device of a large area size, a support that can withstand a load structurally is necessary, and when these support portions are applied, arrangement of antenna becomes difficult, which causes reduction in uniformity. As described above, the development of antenna source of a large area having a uniform plasma density on the whole surface is difficult to restrict hardware (H/W). As a solution to this problem, we confirmed the change in uniformity of plasma by applying two kinds of specific shape faraday shield(FICP) to the lower part of the large area upper lid antenna of 6 and 8th more than that generation size. In this thesis, we verify the faraday shield effect which can improve plasma uniformity control of ICP dry etcher equipment applied to medium and large displays.

• Journal of Korea Technical Association of The Pulp and Paper Industry
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• v.39 no.2 s.120
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• pp.1-8
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• 2007

To examine the feasibility of dry forming technology for papermaking, a dry forming mold (DFM) was developed and evaluated. Main fanning section of DFM was a cylindrical tube, and at the top of the mold a stirring equipment was placed to disperse dry fibers. These fibers were screened using a hole type screen plate placed just under the stirring equipment and dropped freely on the fanning wire located 0.9 m below of the screen plate to form a dry fiber pad. The vertical and horizontal velocity of air flow in the forming cylinder were evaluated and analyzed to find the most effective method of air flow control in the cylinder. Humidification and pressing conditions to obtain a decent dry fanned papers were examined. Results showed dry fanned papers can be prepared with this dry forming mold. And this mold can be used to examine the effect of the papermaking process factors including pressing pressure, drying temperature, humidification on sheet quality of dry formed papers.

• Journal of the Korea Safety Management & Science
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• v.11 no.1
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• pp.15-26
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• 2009

This research has so far found out problems including the second damage of extinguishant and the short time of emission when using the existing dry chemical extinguisher and gas type extinguisher, and impossibility of constant extinguishing due to the inability of recharge at the field. To solve such problems, a mobile water mist system was developed and used. However, it is judged that more improved mobile water mist system is necessary because the force of the fire changed diversely and remote villages in mountains or islands where the force of fire extinguishing is short or delayed, require high capacity of fire extinguishing. Therefore a new equipment was developed and tested focusing on the improvement of extinguishing capacity and the performance of extinguishing was found out to be improved, compared to the existing mobile water mist system. It also showed a superior extinguishing capacity to dry chemical extinguisher or gas type extinguisher. Afterward an additional research is required of simplification of equipment, price cutting and the development of additive to enable high performance even with just small extinguishant.

• Nuclear Engineering and Technology
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• v.56 no.5
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• pp.1913-1924
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• 2024

This paper presents the design and operation of an autonomous robot for pyroprocess automation, which requires unique approaches beyond those used in industrial applications to achieve the desired performance. Maintaining an extremely dry atmosphere is crucial to handle various materials, including chloride, and an autonomous system ensures this dry environment. The drying room dehumidifier was carefully selected and designed to generate dry air, and different types of dry air conditioning performance were evaluated, including assessing worker accessibility inside the mock-up to determine the system's feasibility. Containers used for process materials were modified to fit the gripper system of the gantry robot for automation. The loading and unloading of process materials in each equipment were automatically performed to connect the process equipment with the robotic system. The gantry robot primarily operated through macro motion to approach waypoints containing process materials, eliminating the need for precise approach motion. The robot's tapered jaw design allowed it to grasp the target object even with imperfect positioning. Robot motions were programmed using a robot simulator for initial positioning and motion planning, and real accuracy was tested in a mock-up facility using the OPC platform.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.24 no.8
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• pp.142-149
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• 2010

This paper describes dielectric characteristics of $SF_6$ and dry-air gases under lightning impulse voltages in a quasi-uniform electric field. In order to simulate to a quasi-uniform electric field, electric field utilization factor of the used sphere-plane electrode is 71[%]. The gas pressure of $SF_6$ ranges from 0.1 to 0.2[MPa] and that of dry-air ranges from 0.2 to 0.6[MPa]. Electrical breakdown voltages of $SF_6$ and dry-air gases are measured and analyzed as functions of the polarity of lightning impulse voltage and gas pressure. As a result, the electrical breakdown voltage of both gases under the positive lightning impulse voltage is higher than that under the negative one. The electrical breakdown voltage in $SF_6$ is almost higher than 2.67 times compared to dry-air. The results presented in this paper can be used as a useful information to evaluate the capability of alternative insulation gases for $SF_6$ in power distribution equipment with prominent ability against lightning surge.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.30 no.3
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• pp.86-93
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• 2016

It is very desirable that a mixture gas possessing excellent insulation performance is suggested for insulation on increasing high voltage. This paper proposes a $SF_6$ mixture gas based on the factors including dielectric strength, environmental impact and economic feasibility of manufacture for the insulation in eco-friendly power equipment. A suitable-$SF_6$ content was determined to improve the dielectric strength in $N_2$ and Dry Air. The examination results of the factors revealed that a $SF_6$/Dry Air mixture gas possessing the $SF_6$ content was more appropriate than a $SF_6/N_2$ mixture gas to the eco-friendly power equipment. In addition to the selection of the suitable $SF_6$ mixture gas, insulation characteristics as a function of $SF_6$ content were described from electron-detachment mechanism.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.29 no.12
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• pp.33-39
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• 2015

This paper examines the insulation performance of synthetic air and dry air. This examination was conducted based on dielectric strength in uniform and non-uniform field, electric field distribution by interior structure and defects in gas insulation switchgear (GIS) and insulation performance in different temperatures. From this review, it was found that eco-insulation gas required to possess low moisture content for power equipment in the distribution class. The results of this paper are valuable to ensure the insulation design and insulation reliability of GIS using air.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2008.05a
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• pp.23-29
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• 2008

- High Density Plasma Source-CCP-Dual/Triple, RF Frequency Control - Radical/Flux Analysis - Low Pressure Process - Chamber Design (Process gap/Wall gap) - Chamber Temp. Control. - ESC Dielectric Materials - Uniform Gas Injection