• 제목/요약/키워드: Disk-type Drag Pump

검색결과 18건 처리시간 0.025초

2단 원판형 드래그펌프의 배기 성능에 관한 실험적 연구 (An Experimental Study on the Pumping Performance of the Two-Stage Disk-Type Drag Pump)

  • 황영규;허중식;권명근;양성민
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 추계학술대회논문집B
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    • pp.347-352
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    • 2001
  • In this paper, the pumping performance of the two-stage disk-type drag pump which works in the outlet pressure range from 3 to 0.001 Torr is studied experimentally. The rotational speed of the pump is 24,000rpm, and nitrogen is used as a test gas. The pumping characteristics of various drag pumps are performed. The inlet pressures are measured for various outlet pressures of the test pump. The maximum compression ratios for zero throughput are 1000(two-stage BSC type), 740(helical-type), 90(BSC type) and 85(OSC type), respectively. The ultimate pressure of the two-stage disk-type drag pump is $8.1\times10^6$ Torr.

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터보형 드래그펌프의 배기특성에 관한 실험적 연구 (An Expreimental Study on the Pumping Performance of Various Turbo-Type Drag Pumps)

  • 황영규;허중식;최욱진;권명근
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2000년도 춘계학술대회논문집B
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    • pp.555-560
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    • 2000
  • An experimental study on pumping characteristics of various turbo-type drag pumps is purformed. The inlet pressures are measured for various outlet pressures of the test pump. The maximum compression ratios for nitrogen are 100,000(Disk-type drag pump+ turbo molecular pump), 10000(Helical-type drag pump+turbo molecular pump), 850 (Helical-type drag pump), 100(disk-type drag pump).

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3단 원판형 드래그펌프의 배기 성능에 관한 실험적 연구 (An Experimental Study on the Pumping Performance of the Three-Stage Disk-Type Drag Pump)

  • 황영규;허중식;권명근;양성민
    • 유체기계공업학회:학술대회논문집
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    • 유체기계공업학회 2001년도 유체기계 연구개발 발표회 논문집
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    • pp.203-208
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    • 2001
  • In this paper, the pumping performance of the three-stage disk-type drag pump which works in the outlet pressure range from 4 to 0.01 Torr is studied experimentally. The rotational speed of the pump is 24,000rpm, and nitrogen is used as a test gas, The pumping characteristics of various drag pumps are investigated. The inlet pressures are measured for various outlet pressures of the test pump. The maximum compression ratios for zero throughput are measured for three-stage, two-stage BSC type, helical-type, one-stage BSC type and one-stage OSC type, respectively.

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터보형 원판형 드래그펌프의 배기특성에 관한 실험적 연구 (An Experimental Study on the Pumping Performance of the Turbo-Type Disk-Type Drag Pump)

  • 황영규;허중식;권명근;이승재
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2002년도 학술대회지
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    • pp.577-580
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    • 2002
  • In this paper, the pumping performance of the disk-type drag pump which works in the outlet pressure range from 4 to 0.001 Torr is studied experimentally. The pumping characteristics of various drag pumps are performed. The inlet pressures are measured for various outlet pressures of the test pump. The flow-meter method is adopted to calculate the pumping speed. Compression ratios and pumping speeds for the nitrogen gas are measured. The present experimental data show the leak-limited value of the compression ratio in the molecular transition region. The rotational speed of the pump is 24,000rpm. The inlet pressures are measured for various outlet pressures of the test pump. The ultimate Pressures for zero throughput are measured for three-stage, two-stage and single-stage disk-type, respectively.

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원판형 드래그펌프 회전자의 채널이 성능에 미치는 영향에 관한 실험적 연구 (An Experimental Study on the Effect of Performance for Channel of Disk-type Drag Pump Rotors)

  • 권명근;이수용;황영규
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2004년도 춘계학술대회
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    • pp.1703-1708
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    • 2004
  • In this study, we are investigated experimentally the pumping characteristics about the pumping channel shapes of disk-type drag pump (DTDP). We are experimented the pumping performance about the rotors which have channel or do not exist. The channel disk-type rotor has spiral channels both upper and lower part, and stator is planar. The planar disk-type rotor hasn't channel and stator has spiral channels both upper and lower part. The flow-meter method is adopted to calculate the pumping speed. Compression ratio and pumping speeds for the nitrogen gas are measured under the inlet pressure range of 0.001 ${\sim}$ 4 Torr. The maximum of compression ratio was about 3300 for three-stage DTDP (channel disk-type rotor), 1000 for four-stage (planar disk-type rotor) and two-stage DTDP (channel disk-type rotor) at zero throughput. The ultimate pressure was $1.6{\times}10^{-6}$ Torr for three-stage DTDP (channel disk-type rotor), $2.5{\times}10^{-6}$ Torr for four-stage DTDP (planar disk-type rotor).

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원판형 드래그펌프 회전자와 고정자 사이의 간극이 성능에 미치는 영향 (Effect of Vertical Clearance Between a Rotor and Stater of a Disk-Type Drag Pump on the Performance)

  • 권명근;황영규
    • 대한기계학회논문집B
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    • 제28권12호
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    • pp.1501-1510
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    • 2004
  • The pumping characteristics of a single-stage disk-type drag pump (DTDP) are calculated for the variation of the vertical clearance between a rotor and stator by the three-dimensional direct simulation Monte Carlo (DSMC) method. The gas flow mainly belongs to the molecular transition flow region. Spiral channels of a DTDP are cut on the both the upper and lower sides of a rotating disk, but a stationary disk is planar. The interaction between molecules is described by the variable hard-sphere model. The no time counter method is used as a collision sampling technique. The vertical clearance has a significant effect on the pumping performance. Experiments are performed under the outlet pressure range of 0.4∼533 Pa. When the numerical results are compared with the experimental data, the numerical results agree well quantitatively

원판형 분자 드래그펌프 회전자에 대한 압력 측정 (The Measurement of Vacuum Pressure for the Rotors of Disk-type Molecular drag Pumps)

  • 권명근;김도행;황영규
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회B
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    • pp.2725-2730
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    • 2007
  • Turbo-type molecular drag pumps ( MDPs ) are used in the liquid crystal display ( LCD ), semiconductor and other thin film industries. Siegbahn ( disk-type ) molecular drag pumps are used as high-pressure stages in the hybrid-type turbomolecular pumps, where they can operate in the viscous, the transition and the free molecular flow regime. In this study is performed to investigate the pumping characteristics of three-stage disk-type molecular drag pump ( DTDP ) in the molecular transition flow region. The experiments are measured using five vacuum pressure gauges in the positions for rotors of DTDP. The test is performed with nitrogen gas ( $N_2$ ).

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고속 회전하는 원판형 드래그펌프 회전익과 고정익 사이 간극이 배기 성능에 미치는 영향 (Effect of Clearance between a Rotor and Stator of a Disk-Type Drag Pump on the Pumping Performance)

  • 권명근;이수용;황영규
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2004년도 추계학술대회
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    • pp.1640-1645
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    • 2004
  • The pumping characteristics of a single-stage disk-type drag pump ( DTDP ) are calculated,for the variation of the vertical clearance between a rotor and stator and of the radial clearance between a rotor and casing wall, by the three-dimensional direct simulation Monte Carlo (DSMC)method. The gas flow mainly belongs to the molecular transition flow region. Spiral channels of a DTDP are cut on the both the upper and lower sides of a rotating disk, but the stationary disks are planar. As a consequence of results, the vertical and radial clearances have a significant effect on the pumping performance. Experiments are performed under the outlet pressure range of 0.4 $^{\sim}$ 533 Pa. When the numerical results are compared to the experimental data, the numerical results agree well qualitatively.

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원판형 드래그펌프내의 희박기체유동 (Rarefied Gas Flows in Spiral Channels of a Disk-Type Drag Pump)

  • 황영규;허중식
    • 유체기계공업학회:학술대회논문집
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    • 유체기계공업학회 2000년도 유체기계 연구개발 발표회 논문집
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    • pp.82-87
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    • 2000
  • The direct simulation Monte Carlo (DSMC) method is applied to investigate the flow field of a disk-type drag pump. The pumping channels are cut on both sides of a rotating disk. The rotor has 10 Archimedes' spiral blades. In the present DSMC method, the variable hard sphere model is used as a molecular model, and the no time counter method is employed as a collision sampling technique. For simulation of diatomic gas flows, the Larsen-Borgnakke phenomenological model is adopted to redistribute the translational and internal energies.

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An Experimental Study on the Pumping Performance of Molecular Drag Pumps

  • Kwon, Myoung-Keun;Hwang, Young-Kyu
    • Journal of Mechanical Science and Technology
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    • 제20권9호
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    • pp.1483-1491
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    • 2006
  • The pumping performance of molecular drag pumps (MDP) has been investigated experimentally. The exporimented MDPs are a disk-type drag pump (DTDP), helical-type drag pump(HTDP) and compound drag pump (CDP), respectively In the case of the DTDP, spiral channels of a rotor are cut on both upper surface and lower surface of a rotating disk, and the corresponding stator is a planar disk. In the case of the HTDP, the rotor has six rectangular grooves. The CDP consists with the DTDP, at lower part, and with the HTDP, at upper part. The experiments are performed in the outlet pressure range of $0.2{\sim}533Pa$. The inlet pressure and compression ratio are measured under the various conditions of outlet pressure and throughputs, and nitrogen is used for the test gas. At the outlet pressure of 0.2Pa, the ultimate pressure has been reached to $1.0{\times}10^{-2}Pa$ for the HTDP, $1.3{\times}10^{-4}Pa$ for the DTDP, and $3.6{\times}10^{-5}Pa$ for the CDP. The maximum compression ratio of the CDP is much higher than those of the DTDP or HTDP. Consequently, the ultimate pressure of the CDP is the lowest one.