• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제53권3호
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• pp.133-136
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• 2004

Low-Pressure inductively coupled RF discharge sources have important industrial applications mainly because they can provide a high-density electrodeless plasma source with low ion energy and low power loss. In an inductive discharge, the RF power is coupled to the plasma by an electromagnetic interaction with the current flowing in a coil. In this paper, the experiments have been focussed on the electric characteristic and carried out using a single Langmuir probe. The internal electric characteristics of inductively coupled Ar RF discharge at 13.56(MHz) have been measured over a wide range of power at gas pressure ranging from 1∼70(mTorr).

• 한국전기전자재료학회논문지
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• 제13권12호
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• pp.1039-1044
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• 2000

Breakdown voltage model and expertiments are compared for discharge cells of AC plasma display panel. In the model, discharge paths are assumed to be initial electric field lines and the one-dimensional continuity equation is applied to the charged particle transport at each field line. The comparisons are performed in the wide range of gas pressure (50-600torr), Xe partial pressure over total pressure (1-6%), sustain electrode gap(100-1000$\mu\textrm{m}$), wall height(130, 300$\mu\textrm{m}$), and voltage pulse width(2-6${\mu}$s). The presented breakdown voltage model well agree with experiments in the above wide range. The increase of breakdown voltage with the decrease of the width(L) of protruding electrode is also described by the model.

• 한국유체기계학회 논문집
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• 제9권3호
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• pp.22-28
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• 2006

The discharge coefficient in segmental wedge haying ninety degrees yeller angle for the five kinds of opening ratio with differential pressure taps located at both upstream and downstream of one diameter of pipe was measured. Main purpose of this work is placed on specifying the characteristic of discharge coefficient of a segmental wedge used as a primary element of flow metering devices, and suggestion for the fixed location of pressure taps useful. Although the range of the opening ratio over this work is more expanded than previous studies. The opening ratios of segmental wedge, namely 0.3, 0.4, 0.5, 0.6 and 0.7 were investigated. The Reynolds number based on the spool inside diameter ranges from 12,000 to 380,000.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.180-180
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• 2012

A microplasma system source based on microwave parallel stripline resonator (MPSR) was developed for the generation of microplasmas in a wide range of pressure from some torr to 760 torr. This source was operated at its resonance frequency that much depends upon not only its discharge gap size but also operated pressure. This paper applied a simple circuit model to analyze the effects of discharge gap size and pressure to resonance frequency and impedance of MPSR in the cases with and without plasma exist inside the discharge gap. In the process of calculating, the conformal mapping method was used to estimate the capacitance of the MPSR. The calculating results by using circuit model agree well with the simulation results that using commercial CST microwave studio software.

• 한국자동차공학회논문집
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• 제6권4호
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• pp.47-55
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• 1998

A new ignition system concept was developed to improve ignition performance, accuracy of control and the reliability of the ignition system. The new ignition system has ho호 frequency discharge characteristics with 1.5-2.0 ms discharge duration, in place of the usual solitary longer duration event. We applied the system to a commercial engine to study its influence on the maximum combustion pressure attained during the cycle, when this peak pressure occurred, imep, variation rate of the engine speed and the flammability limit of a lean mixture. In this study, we clarified that the new ignition system had a beneficial effect of the lean mixture flammability limit. Also for a given mixture strength we found that the mew ignition system gave a higher peak cylinder pressure than in the case of the conventional ignition system.

• 대한기계학회논문집
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• 제19권9호
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• pp.2308-2315
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• 1995

We studied the effects on the ignitability of mixture, the combustion duration, and the maximum combustion pressure, of various initial combustion factors such as temperature, pressure, and each equivalence ratio in order to identify the combustion characteristics of lean mixture and improve ignitability through the proper control of the ignition energy. It is concluded that there is an optimum turbulent intensity that enables the combustion to have the best ignitability and the shortest duration under each equivalent ratio, and the combustion duration is only dependent upon the distribution and magnitude of discharge energy within the limit of inflammability.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.1500-1503
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• 2009

In this paper, we studied about atmospheric pressure remote plasma ashing of photoresist(PR), by using a modified dielectric barrier discharge(DBD). The effect of various gas combinations such as $N_2/O_2$, $N_2/O_2+SF_6$ on the changes PR ashing rate was investigated as a function of power. The maximum PR ashing rate of 1850 nm/min was achieved at $N_2$ (70 slm)/ $O_2$ (200 sccm) + $SF_6$ (3 slm). We found that as the oxygen and fluorine radical peaks were increased, the ashing rate is increased, too.

• 분석과학
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• 제8권1호
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• pp.69-77
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• 1995

원자흡수용 gas-jet assisted RF 글로우 방전시스템을 제작하고 시료손실량과 원자흡광도에 미치는 실험변수들에 관한 연구를 수행하였다. 시료손실량과 흡광도는 방전전력, 압력 및 가스흐름에 큰 영향을 받았다. 원자흡광도와 시료손실량을 가스흐름이 600ml/min로 증가할 때 까지 계속 증가하였으며, 방전 압력은 3mbar에서 최대 흡광도를 나타내었다. 방전전력이 증가할수록 시료손실량과 흡광도는 증가하였으나 시스템의 안정도에 영향을 미치는 관계로 적당한 값의 선택이 필요하였다. 스테인리스 스틸 시료 중의 Ni과 황동시료 중의 Cr의 검량선을 작성한 결과 양호한 직선성이 얻어졌다.

• 분석과학
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• 제7권4호
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• pp.483-492
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• 1994

Glow Discharge를 이용한 고체 시료의 극미량 원소분석은 흡광, 방출, 형광 그리고 질량 분석 방법들이 특히 금속 시료들의 분석을 위해 많이 연구되어지고 있다. 본 연구에서는 자체 제작한 Gas-Jet-assisted Glow Discharge(GJGD)를 이용하여 각 실험변수에 따른 영향을 비교하여 보았다. 제작한 글로우 방전의 특성화 실험에 사용한 실험 변수로는 전류, 방전 가스의 흐름 속도, 압력 등이었고 시료는 황동을 사용하였다. 시료의 주원소인 구리(Cu)와 아연(Zn)의 방출선세기와 방전가스인 아르곤(Ar)의 상대적인 세기를 비교하여 보았는데, 대체적으로 전류의 증가는 튕겨나옴(Sputtering) 현상을 촉진시켜 방출선의 세기가 증가하였고 가스 흐름 속도는 플라즈마 속으로의 수송과 확산에 관여하여 증가될수록 방출선의 세기를 감소시켰다. 글로우 방전 내의 압력의 증가는 튕겨나옴 현상을 감소시킴과 더불어 시료 표면으로의 재부착을 증가시켜 방출선의 세기가 급격히 감소함을 보여 주었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.540-541
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• 2005