• 제목/요약/키워드: Discharge Tube

검색결과 335건 처리시간 0.03초

반도체 감광막 제거공정 적용을 위한 고농도 오존발생장치 개발 (Development on the High Concentration Ozone Generator System for the Semiconductor Photoresist Strip Process)

  • 손영수;함상용
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제55권12호
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    • pp.591-596
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    • 2006
  • we have been developed on the ultra high concentration ozone generator system which is the core technology in the realization of the semiconductor photoresist strip process using the ozone-vapor chemistry. The proposed ozone generator system has the structure of the surface discharge type which adopt the high purity ceramic dielectric tube. We investigate the performance of the proposed ozone generator system experimentally and the results show that the system has very high ozone concentration characteristics of $19.7[wt%/O_2]$ at the flow rate of $0.3[{\ell}/min]$ of each discharge cell. As a result of the silicon wafer photoresist strip test, we obtained the strip rate of about 400[nm/min] at the ozone concentration of $16[wt%/O_2]$ and flow rate of $8[{\ell}/min]$. So, we confirmed that it's possible to use the proposed high concentration ozone generator system for the ozone-vapor photoresist strip process in the semiconductor and FPD industry.

음향 공명 현상을 고려한 세라믹 메탈핼라이드의 특성 분석과 PSpice 시뮬레이션을 통한 인버터 설계 (The Property Analysis of Ceramic Metal-Halide Lamp Considering Acoustic Resonance Phenomenon and Design of Inverter by the PSpice Simulation)

  • 장혁진;김남군;양종경;이종찬;박대희
    • 전기학회논문지
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    • 제58권10호
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    • pp.1989-1994
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    • 2009
  • This study purposes are improvement of system (lamp & ballast) efficacy with and optical characteristics through the developed ceramic arc tube. The designed electronic ballast is substituted for conventional magnetic ballast. These electric signal and optical, thermal characteristics through the improving efficacy of lighting system compared with conventional magnetic ballast. properties of lamp by driving method is researching in ballast. Particularly, electronic ballasts, which improved against weakness of Magnetic Ballast, are researching and applying to control of ceramic metal-halide lamp. but One major limitation is the acoustic resonance problem in CMH lamps at high-frequency operation. In order to avoid acoustic resonance, driving frequency decided 21[kHz]. Before discharge in this paper. The PSpice simulation result obtained sufficient voltage gain and the ignition voltage obtained over 3[kV] at 75[kHz]. After discharge, driving voltage obtained approximately 90[Vrms] at 21[kHz].

구형파 및 PWM 인버터 조합에 의한 오존발생용 인버터 (The Invert for ozone generator by mixed square_wave and PWM)

  • 박노식;박성준;원태헌;안진우;김철우
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2004년도 하계학술대회 논문집 B
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    • pp.1193-1195
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    • 2004
  • Ozone gas is one of the strongest oxidizing and bleaching agents which leave no residues harmful to the global environment. In recent years, the ozone generator has been widely utilized, However, it has been known that a broader application of ozone is hindered primarily because of its low efficiency of generation. Thus, it is more indispensable to improve actual system efficiency of the silent discharge type ozonizer using high frequency inverter. This paper presents a multi level resonant ozone power regulation by association of high frequency transformers and full bridge invert. And proposed resonant inverter system can generate continuous output voltage. can control linearly quantity of ozone gas. This invert that add PWM forms within square forms of output voltage about one level range. The power regulation characteristics and operating performances of silent discharge (SD)type ozone generating tube load driven by this load proposed inverter using FET modules are illustrated from a practical point of view, which can operate under stable conditions of basic level and PWM hybrid control strategy implemented DSP(2406). The effectoveness of propsed invert type ozonizer is proved by experiment results.

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고압방전램프의 음향공명감소를 위한 주파수변조에 관한 연구 (A Study on Frequency-Modulated Methods for Reducing Acoustic Resonance in HID Lamp)

  • 김기중
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제50권12호
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    • pp.622-626
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    • 2001
  • HID(high intensity discharge)lamps are high pressure mercury lamp, high pressure sodium lamp and metalhalide lamp. metalhalide lamp among these lamps has considered to be one of the most effective artificial light sources and this lamp has good efficiency, good color rendition and good focusing capability, But the shortcorning of metalhalide lamp is known as acoustic resonance phenomena in the discharge tube when lighted by electronic ballast and then acoustic resonance cause various problems such as the arc instability, light output fluctuations. In this paper, to reduce the acoustic resonence phenomena, the electronic ballast was designed by three methods for high frequency operation wish frequency-modulated sinusodial waves in acoustic resonance frequency band. These frequency-modulated methods are resonance frequency and resonance frequency, resonance frequency and non-resonance frequency non-resonance frequency and non-resonance frequency Experiment results could't show the Presence of acoustic resonance visually and it proved that the resonance-generating conditions can be avoided by continuously changing the two operating frequencies in acoustic resonance band (20.59kHz∼94.2kHz).

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유전체장벽 방전에 의한 세라믹 방전관의 오존 특성 (Ozone Characteristics of Ceramic Discharge Tube using Dielectric Barrier Discharge)

  • 이창호;이상호;김종현;송현직;이상근;이광식
    • 한국조명전기설비학회:학술대회논문집
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    • 한국조명전기설비학회 2009년도 춘계학술대회 논문집
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    • pp.309-312
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    • 2009
  • 본 논문에서는 탈색, 탈취 및 상 하수 정수처리에 많이 이용되고 있는 오존의 효과적인 발생을 위하여 세라믹을 이용하여 유전체 장벽 방전에 의한 오존생성특성을 연구하였다. 세라믹과 전극으로 구성된 전극 수와 오존생성을 위한 반응가스인 Air와 Oxygen의 투입량 변화에 따른 오존생성농도, 오존발생량 및 오존생성수율 특성을 분석하였다. 그 결과, 세라믹과 전극으로 구성된 전극 수가 많을수록 오존생성특성은 증가하였고, 원료가스를 Air와 Oxygen으로 사용한 경우 Oxygen을 원료가스로 사용했을 때 전극 수 5 및 10개에서 모두 오존생성특성이 우수하게 나타났으며, 그 결과 전극 수가 5개인 경우, 오존생성농도는 약 4.2배, 오존발생량은 2.5배, 오존생성수율은 2.5배 증가하였으며, 전극 수가 10개인 경우, 오존생성농도는 약 5.1배, 오존발생량은 3.8배, 오존생성수율은 3.4배 증가하였다.

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수중 유전체장벽방전 플라즈마를 이용한 아조 염색폐수 색도제거 (Decolorization of Azo Dyeing Wastewater Using Underwater Dielectric Barrier Discharge Plasma)

  • 조진오;이상백;목영선
    • 공업화학
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    • 제24권5호
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    • pp.544-550
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    • 2013
  • 본 연구에서는 소수성 다공질 세라믹관이 결합된 수중 유전체장벽방전 플라즈마 반응기를 이용하여 모사 염색폐수의 색도저감을 조사하였다. 플라즈마에 의해 생성되는 활성성분들은 수명이 매우 짧으므로 생성되는 즉시 물과 접촉시켜야 효과적인 폐수처리가 가능하며, 또한 반응속도를 증가시키기 위해서는 기/액 접촉면적이 커야 하는데, 본 연구의 반응기는 두 가지 목적을 동시에 이룰 수 있다. 아조 염료로는 amaranth, 그리고 플라즈마 생성을 위한 기체로는 공기가 사용되었으며, 방전전력, 기체 유량, 용존 음이온, 염료 초기농도 등 색도 제거에 미치는 다양한 변수의 영향이 평가되었다. 기체유량이 $1.5Lmin^{-1}$일 때, 플라즈마 기체가 염색폐수와 가장 효과적으로 접촉하였으며, 색도 제거가 가장 빠르게 일어났다. 염료 초기농도 $40.2{\mu}molL^{-1}$ (폐수부피 : 0.8 L), 방전전력 3.37 W의 조건에서 색도를 99% 이상 제거하는데 약 25 min이 소요되었다. 그밖에 염료의 초기농도가 낮을수록, 방전전력이 높을수록 색도 제거 속도가 증가하는 것으로 나타났다. 염소이온이 존재할 경우 색도 제거 속도가 빨라졌으나, 질산이온은 색도 제거 속도에 영향을 주지 않았다.

개선된 전열증기화 속빈음극관 글로우 방전셀의 기초연구 및 개발 (The Fundamental Studies and Development of Modified Electrothermal Vaporization Hollow Cathode Glow Discharge Cell)

  • 이성훈;조원보;정종필;최우창;김규환;우정수;이장수;강동현;이상천
    • 분석과학
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    • 제15권6호
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    • pp.514-520
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    • 2002
  • 효율적인 시료의 분석을 위하여 개선된 전열증기화 속빈음극관 글로우 방전 우너자방출분광 장치를 제작하여 그에 대한 기초 연구를 수행하였다. 본 시스템은 개선된 속빈음극관 글로우 방잔에 개선된 전열증기화법을 이용한 샘플주입방법을 응용하였으며, ${\mu}{\ell}$단위의 적은 양으로도 분석가능하도록 순수한 텅스템 재질로 된 나선형 코일을 제작하여 증기화 효율을 최대한 높일수 있도록 하여 글로우 방전으로 최대한 많은 양이 주입될 수 있도록 개선하였다. 최적화된 분석조건을 위한 방전조건으로 시료운반기체 사용량과 방전 전력을 측정하였으며, 그 전에 글로우 방전셀의 냉각장치 및 내부의 구조적인 문제 여부에 따른 방출세기에 미치는 영향과 측정 정밀도를 관찰하였다. 방출되어 발생된 빛은 광전송용 광파이버에 의하여 효율적으로 검출기에 운반되도록 구성 제작하였으며, 마지막으로 본 연구결과에 의한 직선성을 관찰하였다.

유도초음파를 이용한 열 교환기 튜브 결함 탐상 (Inspection of Heat Exchanger Tubing Defects with Ultrasonic Guided Waves)

  • 신현재;;송성진
    • 비파괴검사학회지
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    • 제20권1호
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    • pp.1-9
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    • 2000
  • 본 연구에서는 유도초음파를 이용하여 열 교환기와 증기발생기 튜브의 결함을 비파괴적으로 탐상하고 그 크기를 산정하였다. 이론적인 해석을 위해 인코넬 (Inconel) 튜브에 대한 위상 및 군속도 분산선도를 Longitudinal 모드와 Flexural 모드에 대해 구하였다. 튜브의 원주방향 레이저노치와 튜브 지지대 하단의 방전가공결함(EDM wear)을 각각 비대칭 및 대칭 탐촉자 세트를 사용하여 탐상하였다. 실험결과 방전가공결함은 L(0, 2), L(0, 3), L(0, 4) 모드로 탐상되었으며, 그 중 L(0, 4) 모드가 결함으로부터 가장 잘 반사되었다. 레이저노치의 경우에는 L(0, 1) 모드 주변의 Flexural 모드가 결함을 탐상하고 크기를 산정하는데 사용될 수 있음을 보였다.

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발변전용 피뢰기의 구조 및 ZnO 바리스터 소자의 전기적 특성 (Structure of Station Class Lightning Arresters and Electrical Characteristics of ZnO Varistor Blocks)

  • 조한구;한세원;이운용;윤한수;최인혁
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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    • pp.1158-1161
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    • 2004
  • This paper presents structural characteristics of station class lightning arresters and electrical characteristics of manufactured ZnO varistor blocks which are usable in those arresters. Three types of station class lightning arresters were investigated and those are a ceramic arrester, a FRP tube type polymer arrester, and a FRP rod type polymer arrester. Each arrester has merits and demerits with structural characteristics. In general, polymer arresters were made of silicon rubber for housing materials, FRP tube or rod for mechanical strength, ZnO blocks for electrical characteristics, and metal parts for electrical contact and the silicon rubber, the housing materials, was directly injected to the arrester module which was assembly composed of electrodes, ZnO blocks and FRP tube or rod, and to prevent the nonlinear electric fields distribution on upper parts of arresters, the grade ring was adopted to the upper electrodes. The reference voltage, nonlinear coefficient, residual voltage, and voltage ratio of manufactured ZnO varistors are 4.90kV, 50, 9.54kV, 1.94, respectively. Compared to designed electrical characteristics, the reference voltage was low for 600v and the voltage ratio was slightly high. However, the characteristics of discharge withstand was so excellent that the mechanical destruction does not occur at the impulse current of $8/20{\mu}s$ 10kA for 100 times.

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Transanal Tube Drainage as a Conservative Treatment for Anastomotic Leakage Following a Rectal Resection

  • Shalaby, Mostafa;Thabet, Waleed;Buonomo, Oreste;Di Lorenzo, Nicola;Morshed, Mosaad;Petrella, Giuseppe;Farid, Mohamed;Sileri, Pierpaolo
    • Annals of Coloproctology
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    • 제34권6호
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    • pp.317-321
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    • 2018
  • Purpose: We evaluate the role of transanal tube drainage (TD) as a conservative treatment for patients with anastomotic leakage (AL). Methods: Patients treated for AL who had undergone a low or an ultralow anterior resection with colorectal or coloanal anastomosis for the treatment of rectal cancer between January 2013 and January 2017 were enrolled in this study. The data were collected prospectively and analyzed retrospectively. The primary outcomes were the diagnosis and the management of AL. Results: Two hundred thirteen consecutive patients, 122 males and 91 females, were included. The mean age was $66.91{\pm}11.15years$, and the median body mass index was $24kg/m^2$ (range, $20-35kg/m^2$). The median tumor distance from the anal verge was 8 cm (range, 4-12 cm). Ninety-three patients (44%) received neoadjuvant therapy for nodal disease and/or locally advanced rectal cancer. Only 13 patients (6%) developed AL. Six patients developed subclinical AL as they had a defunctioning ileostomy at the time of the initial procedure. They were treated conservatively with TD under endoscopic guidance in the endoscopy unit and received intravenous antibiotics. Six weeks after discharge, these 6 patients underwent follow-up flexible sigmoidoscopy which showed a completely healed anastomotic defect with no residual stenosis. Seven patients developed a clinically significant AL and required reoperation with pelvic abscess drainage and Hartmann colostomy formation. Conclusion: These results suggest that TD for management of patients with AL is safe, cheap, and effective. Salvaging the anastomosis will help decrease the need for Hartmann colostomy formation. Proper patient selection is important.