• Title/Summary/Keyword: Direct current sputtering

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Comparison of Electrical Signal Properties about Top Electrode Size on Photoconductor Film (광도전체 필름 상부 전극크기에 따른 전기적 신호 특성 비교)

  • Kang, Sang-Sik;Jung, Bong-Jae;Noh, Si-Cheul;Cho, Chang-Hoon;Yoon, Ju-Sun;Jeon, Sung-Pyo;Park, Ji-Koon
    • Journal of the Korean Society of Radiology
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    • v.5 no.2
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    • pp.93-96
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    • 2011
  • Currently, the development of direct conversion radiation detector using photoconductor materials is progressing in widely. Among of theses photoconductor materials, mercuric iodide compound than amorphous selenium has excellent absorption and sensitivity of high energy radiation. Also, the detection efficiency of signal generated in photoconductor film varies by electric filed and geometric distribution according to top-bottom electrode size. Therefore, in this work, the x-ray detection characteristics are investigated about the size of top electrode in $HgI_2$ photoconductor film. For sample fabrication, to solve the problem that is difficult to make a large area film, we used the spatial paste screen-print method. And the sample thickness is $150{\mu}m$ and an film area size is $3cm{\times}3cm$ on ITO-coated glass substrate. ITO(Indium-Tin-Oxide) electrode was used as top electrode using a magnetron sputtering system and each area is $3cm{\times}3cm$, $2cm{\times}2cm$ and $1cm{\times}1cm$. From experimental measurement, the dark current, sensitivity and SNR of the $HgI_2$ film are obtained from I-V test. From the experimental results, it shows that the sensitivity increases in accordance with the area of the electrode but the SNR is decreased because of the high dark current. Therefore, the optimized size of electrode is importance for the development of photoconductor based x-ray imaging detector.