• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.287.1-287.1
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• 2013

The Isolation of few-layered transition metal dichalcogenides has mainly been performed by mechanical and chemical exfoliation with very low yields. in particular, the two-dimensional layer of molybdenum disulfide (MoS2) has recently attracted much interest due to its direct-gap property and potential application in optoelectronics and energy harvesting. However, the synthetic approach to obtain high-quality and large-area MoS2 atomic thin layers is still rare. In this account, a controlled thermal reductionsulfurization method is used to synthesize large-MoOx thin films are first deposited on Si/SiO2 substrates, which are then sulfurized (under vacuum) at high temperatures. Samples with different thicknesses have been analyzed by Raman spectroscopy and TEM, and their photoluminescence properties have been evaluated. We demonstrated the presence of single-, bi-, and few-layered MoS2 on as-grown samples. It is well known that the electronic structure of these materials is very sensitive to the number of layer, ranging from indirect band gap semiconductor in the bulk phase to direct band gap semiconductor in monolayers. This synthetic approach is simple, scalable, and applicable to other transition metal dichalcogenides. Meanwhile, the obtained MoS2 films are transferable to arbitrary substrates, providing great opportunities to make layered composites by stacking various atomically thin layers.

• Journal of Welding and Joining
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• 제32권4호
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• pp.10-14
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• 2014

Laser aided Direct Metal Tooling(DMT) process is a kind of Additive Manufacturing processes (or 3D-Printing processes), which is developed for using various commercial steel powders such as P20, P21, SUS420, H13, D2 and other non-ferrous metal powders, aluminum alloys, titanium alloys, copper alloys and so on. The DMT process is a versatile process which can be applied to various fields like the mold industry, the medical industry, and the defense industry. Among of them, the application of DMT process to the mold industry is one of the most attractive and practical applications since the conformal cooling channel core of injection molds can be fabricated at the slightly expensive cost by using the hybrid fabrication method of DMT technology compared to the part fabricated with the machining technology. The main objectives of this study are to provide various characteristics of the parts made by DMT process compared to the same parts machined from bulk materials and prove the performance of the injection mold equipped with the conformal cooling channel core which is fabricated by the hybrid method of DMT process.

• 한국환경과학회지
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• 제8권5호
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• pp.593-600
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• 1999

In order to determine the changes of sediment facies and metal levels in surface sediments after the construction of Shiwha Lake, surface sediments were sampled at 8 sites located on the main channel monthly from June, 1995 to August, 1996 and analysed for 12 metals (Al, Fe, Mn, V, Cr, Co, Ni, Cu, Zn, Cd, As and Pb) by ICP/AES and ICP/MS. Two groups of sampling sites(the inner lake with 3 sites and the outer lake with 5 sites) are subdivided by the surface morphology ; the inner lake is a shallow channel area with a gentle slope, while the outer lake is relatively deep and wide channel with a steep slope which has many small distributaries. After the construction of dam, fine terrestrial materials were deposited near the outer lake, which resulted in the change of major sediment facies from sandy silt to mud. With the deposition of fine sediments in the outer lake, anoxic water column induced the formation of sulfide compounds with Cu, Cd, Zn and part of Pb. Metal (Cr, Ni, Cu, Zn and Cd) contents in sediments increased up to twice within 2 years after the construction of dam. This is due to the direct input of industrial and municipal wastes into the lake and the accumulation of metals within the lake. In addition, frequent resuspension of contaminated sediments in a shallow part of the lake may make metal-enriched materials transport near the outer lake with fine terrestrial materials. As the enrichment of Cu, Zn, Cd and part of Pb in the Shiwha Lake may be related to the formation of unstable sulfide compounds by sulfate reduction in anoxic water or sediment column, the effect of mixing with open coastal seawater is discussed.

• 생태와환경
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• 제41권1호
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• pp.66-72
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• 2008

대도시의 기본 생활수준 향상을 위해 건립된 인공호는 지역적 환경요인에 의한 퇴적물 중금속 오염이 우려된다. 본 연구의 퇴적물 조사대상인 도심의 소형인공호들은 저수용량이 적고, 체류시간이 길며, 도시대기오염으로 인한 침적물낙하와 함께 호수에 유입될 수 있는 중금속이 최종적으로 퇴적물에 축적된다. 본 연구에서는 도시지역에 조성된 인공호를 대상으로 퇴적물매체에 축적된 총중금속, 용존중금속, 그리고 생물이용성 중금속의 상호연관성을 규명하고자 시도하였다. 생물이용량은 약전해질추출법(Weak-Electrolyte Extraction, WEE)에 의해 측정하였다. 도심인공호 전체 조사지역에 대한 퇴적물의 총중금속 검출빈도는 아연, 구리, 크롬, 니켈, 비소, 카드뮴 순으로 확인되었고, 총량에 대한 검출은 아연이 가장 높은 수치를 나타내었다. 총중금속에 대한 생물이용성 중금속의 비율은 중금속별, 측정지역별로 매우 상이하였으며 전반적으로 중금속의 생물이용성은 구리 (Cu)가 높은 것으로 나타났다. 높은 생물이용성을 나타낸 구리의 경우 기존독성연구 결과와 비교한 결과 높은 생태독성을 나타내고 있어 본 연구에서 예측한 현상을 지지하고 있으나, 차후 생물검정법(Bioassay)을 통한 검증이 필요할 것으로 사료된다.

• 한국기계가공학회지
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• 제19권8호
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• pp.56-63
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• 2020

The heat transfer phenomenon in the vicinity of the irradiated region of a focused laser beam of a DMT process greatly affects both the deposition characteristics of powders on a substrate and the properties of the deposited region. The goal of this paper is to investigate the heat transfer characteristics of a single bead deposition of Inconel 718 powders on S45C structural steel using a laser-aided direct metal tooling (DMT) process. The finite element analysis (FEA) model with a Gaussian volumetric heat flux is developed to simulate a three-dimensional transient heat transfer phenomenon. The cross-section of the bead for the FEA is estimated with an equivalent area method using experimental results. Through the comparison of the results of the experiments and those of the analysis, the effective beam radius of the bottom region of the volumetric heat flux and the efficiency of the heat flux model for different powers and travel speeds of the laser are predicted. From the results of the FEA, the influence of the power and the travel speed of the laser on the creation of a steady-state heat transfer region and the formation of the heat-affected zone (HAZ) in the substrate are investigated.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.96-97
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• 2012

In nitride and oxide film deposition, sputtered metals react with nitrogen or oxygen gas in a vacuum chamber to form metal nitride or oxide films on a substrate. The physical properties of sputtered films (metals, oxides, and nitrides) are strongly influenced by magnetron plasma density during the deposition process. Typical target power densities on the magnetron during the deposition process are ~ (5-30) W/cm2, which gives a relatively low plasma density. The main challenge in reactive sputtering is the ability to generate a stable, arc free discharge at high plasma densities. Arcs occur due to formation of an insulating layer on the target surface caused by the re-deposition effect. One current method of generating an arc free discharge is to use the commercially available Pinnacle Plus+ Pulsed DC plasma generator manufactured by Advanced Energy Inc. This plasma generator uses a positive voltage pulse between negative pulses to attract electrons and discharge the target surface, thus preventing arc formation. However, this method can only generate low density plasma and therefore cannot allow full control of film properties. Also, after long runs ~ (1-3) hours, depends on duty cycle the stability of the reactive process is reduced due to increased probability of arc formation. Between 1995 and 1999, a new way of magnetron sputtering called HIPIMS (highly ionized pulse impulse magnetron sputtering) was developed. The main idea of this approach is to apply short ${\sim}(50-100){\mu}s$ high power pulses with a target power densities during the pulse between ~ (1-3) kW/cm2. These high power pulses generate high-density magnetron plasma that can significantly improve and control film properties. From the beginning, HIPIMS method has been applied to reactive sputtering processes for deposition of conductive and nonconductive films. However, commercially available HIPIMS plasma generators have not been able to create a stable, arc-free discharge in most reactive magnetron sputtering processes. HIPIMS plasma generators have been successfully used in reactive sputtering of nitrides for hard coating applications and for Al2O3 films. But until now there has been no HIPIMS data presented on reactive sputtering in cluster tools for semiconductors and MEMs applications. In this presentation, a new method of generating an arc free discharge for reactive HIPIMS using the new Cyprium plasma generator from Zpulser LLC will be introduced. Data (or evidence) will be presented showing that arc formation in reactive HIPIMS can be controlled without applying a positive voltage pulse between high power pulses. Arc-free reactive HIPIMS processes for sputtering AlN, TiO2, TiN and Si3N4 on the Applied Materials ENDURA 200 mm cluster tool will be presented. A direct comparison of the properties of films sputtered with the Advanced Energy Pinnacle Plus + plasma generator and the Zpulser Cyprium plasma generator will be presented.

• 한국전기전자재료학회논문지
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• 제31권5호
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• pp.345-350
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• 2018

Nanomaterials have considerable potential to solve several key challenges in various electrochemical devices, such as fuel cells. However, the use of nanoparticles in high-temperature devices like solid-oxide fuel cells (SOFCs) is considered problematic because the nanostructured surface typically prepared by deposition techniques may easily coarsen and thus deactivate, especially when used in high-temperature redox conditions. Herein we report the synthesis of a self-regenerated Pd metal nanoparticle on the perovskite oxide anode surface for SOFCs that exhibit self-recovery from their degradation in redox cycle and $CH_4$ fuel running. Using Pd-doped perovskite, $La(Sr)Fe(Mn,Pd)O_3$, as an anode, fairly high maximum power densities of 0.5 and $0.2cm^{-2}$ were achieved at 1,073 K in $H_2$ and $CH_4$ respectively, despite using thick electrolyte support-type cell. Long-term stability was also examined in $CH_4$ and the redox cycle, when the anode is exposed to air. The cell with Pd-doped perovskite anode had high tolerance against re-oxidation and recovered the behavior of anodic performance from catalytic degradation. This recovery of power density can be explained by the surface segregation of Pd nanoparticles, which are self-recovered via re-oxidation and reduction. In addition, self-recovery of the anode by oxidation treatment was confirmed by X-ray diffraction (XRD) and scanning electron microscopy (SEM).

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.76.1-76.1
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• 2015

Optical resonances of metallic or dielectric nanoantennas enable to effectively convert free-propagating electromagnetic waves to localized electromagnetic fields and vice versa. Plasmonic resonances of metal nanoantennas extremely modify the local density of optical states beyond the optical diffraction limit and thus facilitate highly-efficient light-emitting, nonlinear signal conversion, photovoltaics, and optical trapping. The leaky-mode resonances, or termed Mie resonances, allow dielectric nanoantennas to have a compact size even less than the wavelength scale. The dielectric nanoantennas exhibiting low optical losses and supporting both electric and magnetic resonances provide an alternative to their metallic counterparts. To extend the utility of metal and dielectric nanoantennas in further applications, e.g. metasurfaces and metamaterials, it is required to understand and engineer their scattering characteristics. At first, we characterize resonant plasmonic antenna radiations of a single-crystalline Ag nanowire over a wide spectral range from visible to near infrared regions. Dark-field optical microscope and direct far-field scanning measurements successfully identify the FP resonances and mode matching conditions of the antenna radiation, and reveal the mutual relation between the SPP dispersion and the far-field antenna radiation. Secondly, we perform a systematical study on resonant scattering properties of high-refractive-index dielectric nanoantennas. In this research, we examined Si nanoblock and electron-beam induced deposition (EBID) carbonaceous nanorod structures. Scattering spectra of the transverse-electric (TE) and transverse-magnetic (TM) leaky-mode resonances are measured by dark-field microscope spectroscopy. The leaky-mode resonances result a large scattering cross section approaching the theoretical single-channel scattering limit, and their wide tuning ranges enable vivid structural color generation over the full visible spectrum range from blue to green, yellow, and red. In particular, the lowest-order TM01 mode overcomes the diffraction limit. The finite-difference time-domain method and modal dispersion model successfully reproduce the experimental results.

• 한국기계가공학회지
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• 제17권2호
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• pp.83-88
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• 2018

Additive manufacturing (AM) technologies have attracted wide attention as key technologies for the next industrial revolution. Among AM technologies using various materials, powder bed fusion (PBF) processes and direct energy deposition (DED) are representative of the metal 3-D printing process. Both of these processes have a common feature that the laser is used as a heat source to fabricate the 3-D shape through melting of the metal powder and solidification. However, the material properties of the deposited metals differ when produced by different process conditions and methods. 17-4 precipitation-hardening stainless steel (17-4PH SS) is widely used in the field of aircraft, chemical, and nuclear industries because of its good mechanical properties and excellent corrosion resistance. In this study, we investigated the differences in microstructure and mechanical properties of deposited 17-4PH SS by PBF and DED processes, including the heat treatment effect.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.490-490
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• 2011

Graphene, hexagonal network of carbon atoms forming a one-atom thick planar sheet, has been emerged as a fascinating material for future nanoelectronics. Huge attention has been captured by its extraordinary electronic properties, such as bipolar conductance, half integer quantum Hall effect at room temperature, ballistic transport over ${\sim}0.4{\mu}m$ length and extremely high carrier mobility at room temperature. Several approaches have been developed to produce graphene, such as micromechanical cleavage of highly ordered pyrolytic graphite using adhesive tape, chemical reduction of exfoliated graphite oxide, epitaxial growth of graphene on SiC and single crystalline metal substrate, and chemical vapor deposition (CVD) synthesis. In particular, direct synthesis of graphene using metal catalytic substrate in CVD process provides a new way to large-scale production of graphene film for realization of graphene-based electronics. In this method, metal catalytic substrates including Ni and Cu have been used for CVD synthesis of graphene. There are two proposed mechanism of graphene synthesis: carbon diffusion and precipitation for graphene synthesized on Ni, and surface adsorption for graphene synthesized on Cu, namely, self-limiting growth mechanism, which can be divided by difference of carbon solubility of the metals. Here we present that large area, uniform, and layer controllable graphene synthesized on Cu catalytic substrate is achieved by acetylene-assisted CVD. The number of graphene layer can be simply controlled by adjusting acetylene injection time, verified by Raman spectroscopy. Structural features and full details of mechanism for the growth of layer controllable graphene on Cu were systematically explored by transmission electron microscopy, atomic force microscopy, and secondary ion mass spectroscopy.