• 제목/요약/키워드: Dilution chamber

검색결과 39건 처리시간 0.023초

ALD 설비의 NH3(Ammonia)누출 시나리오에 대한 내부유동 및 제어 속도 해석 (Analysis of Internal Flow and Control Speed for NH3 (Ammonia) Leakage Scenario of ALD Facility)

  • 이성삼;안형환
    • 한국가스학회지
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    • 제26권5호
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    • pp.22-27
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    • 2022
  • 반도체 생산 설비 중 ALD는 열이나 플라즈마로 분해한 Gas를 Wafer에 증착시켜 원자층을 형성시키는 설비로 주로 인화성 물질인 NH3와 SIH4이 사용된다. 이중 NH3는 연소·폭발 범위가 상한(UFL) 33.6%, 하한(LEL) 15%로 폭발 범위가 비교적 좁지만 많은 양이 갑자기 한곳에 모이면 폭발할 수 있고, 피부에 닿거나 흡입하면 치명적이다. NH3는 ALD Gas inlet의 배관과 전기·기계 기구를 통해 Chamber로 공급되는데 많은 누출 가능점이 존재하여 누출 시 화재·폭발 또는 중독 사고로 이어질 수 있어 NH3 누출 시나리오에 대한 내부 유동과 제어 속도를 이해하고 고환기가 가능한 배기장치를 설계하는 것이 필요하여 본 연구자는 NH3의 누출시나리오를 CFD에 적용하여 내부유동과 제어 속도를 수치 분석하여 설계 시 반영할 수 있도록 하였다.

마이크로 터빈 연소기 주연소영역의 저 NOx 생성 특성 (The Low NOx Characteristics of the Primary Zone in Micro Turbine Combustor)

  • 손민규;안국영;이헌석;윤정중
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 추계학술대회논문집B
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    • pp.155-160
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    • 2001
  • The low NOx characteristics have been investigated to develop the combustor for micro turbine. The lean premixed combustion technology was applied to reduce the NOx emission. The test was conducted at the condition of high temperature and ambient pressure. The combustion air which has the temperature of $450\sim650K$ were supplied to the combustor through the air preheater. The temperature and emissions of NOx and CO were measured at the exit of combustor, The exit temperature and NOx were increased and CO was decreased with increasing inlet air temperature. The premixing chamber can be operated very lean condition of equivalence ratio around 0.35. The NOx was decreased with decreasing the equivalence ratio. The CO was decreased with decreasing the equivalence ratio, but the CO was increased with decreasing the equivalence ratio below 0.4. But, at the very lean condition of equivalence ratio below 0.35 both NOx and CO were increased because of the flame unstability. The NOx was decreased and CO was increased with increasing inlet air flowrate. This results can be used to determine the size of combustor. Consequently the performance of combustor shows the possibility of the application to the gas turbine system.

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평판디스플레이의 대기중 분진농도에 따른 수명예측 시험방법 개발 (Development of Test Method for Flat Panel Display Life Time Prediction during Atmospheric Particle Exposure)

  • 유동현;이건호;최정욱;안강호
    • 반도체디스플레이기술학회지
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    • 제12권4호
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    • pp.45-48
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    • 2013
  • The electronic device, such as flat panel display (FPD), is very important in our life as a means of communication between humans. Liquid crystal display (LCD), which is categorized as a flat panel display, has been used in many display products, especially in TV industry. An LED TV is composed of several electrical components, such as liquid critical module (LCM), analog to digital convertor (AD), power supplier, and inverter board. These modules are very vulnerable to particulate contamination, and causing malfunction or visibility degradation. In this study, we developed a test method for prediction of LCM's lifetime. The test system consists of carbon particle generation flame, dilution system, test chamber, and particle concentration monitoring instrument. Since the carbon particles are the most abundant in the atmosphere and easily absorb light, soot particles are used as a challenging material for this test. The concentration of generated soot particles is set around 4,000,000 #/cc, which is 400 times higher than that of usual atmospheric particles. Through this experiment, we deduced the relationship between the dust concentration and life time of the test specimen.

실내공기질 모델을 이용한 환기 시스템의 공기 정화 효율성 평가 (Evaluation of Ventilation System Performance Using Indoor Air Quality Model)

  • 최성우
    • 한국환경보건학회지
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    • 제23권4호
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    • pp.57-66
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    • 1997
  • Successful energy conservation and good indcfor air quality (IAQ) are highly dependent on ventilation system. Air filtration is a primary solution of indoor air control strategies in terms of reducing energy consumption and improving ihdoor air quality. A conventional system with bypass filter, as it is called variable-air-volume/bypass filtration system (VAV/BPFS), is a variation of the conventional variable air volume (VAV) systems, which is designed to eliminate indoor air pollutant and to save energy. Bypass filtration system equipped with a high-efficiency particulate filter and carbon absorbent provides additional cleaned air into indoor environments and maintain good IAQ for human health. The objectives of this research were to compare the relative total decay rate of indoor air pollutant concentrations, and to develop a mathematical model simulating the performance of VAV/BPFS. All experiments were performed in chamber under the controlled conditions. The specific conclusions of this research are: 1. The VAV/BPFS system is more efficient than the VAV system in removing indoor air pollutant concentration. The total decay rates of aerosol, and total volatile organic compound (TVOC) for the VAV/BPFS system were higher than those of the conventional VAV system. 2. IAQ model predictions of each pollutant agree closely with the measured values. 3. According to IAQ model evaluation, reduction of outdoor supply air results in decreased dilution removal rate and on increased bypass filtration removal rate with the VAV/BPFS. As a results, we recommends the VAV/BPFS as an alternative to conventional VAV systems.

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조리실내의 유해오염물질 제거율에 관한 연구 (A Study on the Removal Efficiency of Harmful Pollutants in the Cooking Chamber)

  • 권우택;이우식
    • 한국조리학회지
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    • 제22권8호
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    • pp.149-156
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    • 2016
  • 본 연구의 목적은 조리과정에서 발생한 총휘발성 유기화합물질, 미세먼지, 악취, 총부유세균 등의 오염물질들이 조리실내로 분산되어 실내공간이나 조리업 종사자에게는 나쁜 냄새나 작업환경 및 건강피해를 감소하고자 하는 것이다. 이를 위해 기존 공기청정기의 단점을 보완하고, 반영구적이며, 각종 오염물질을 효율적으로 제거하기 위하여 활성탄과 황토를 결합한 바이오세라믹 필터를 bar type으로 제작한 실내용 소형 공기청정기 개발에 중점을 두었다. 측정항목은 총휘발성 유기화합물, 미세먼지, 복합악취, 총부유세균 등 모두 4가지 항목으로 개발된 공기청정기 가동 전과 일정시간 가동 후를 비교하여 측정하였다. 측정결과, 총휘발성 유기화합물의 농도는 평균 $2,500{\mu}g/m^3$에서 $223{\mu}g/m^3$으로 약 91.02%의 높은 제거효율을 보였으며, 미세먼지의 제거율은 평균 농도가 $26.68{\mu}g/m^3$로서 97.51%의 우수한 제거효과가 나타났으며, 복합악취의 희석배수를 측정한 결과 평균 144로 평균 95.20% 감소하였다. 또 총부유세균은 초기 농도가 $787{\sim}814CFU/m^3$에서 $47{\sim}40CFU/m^3$로 약 94% 이상 제거되는 것을 확인하였다. 결론적으로 개발되어진 공기청정기의 바이오세라믹 필터는 오염물질을 제거하는데 우수한 제거효과를 나타냈다. 따라서 공기청정기를 조리실내에서 환기장치와 렌지후드를 병행하여 사용하면 기존의 열악한 조리실 내의 환경이 크게 개선되어질 것으로 사료된다.

일체형 전해조에서 생산된 강알카리성 전해수의 특성 (Characteristics of Strong Alkaline Electrolyzed Water Produced in All-in-one Electrolytic Cell)

  • 이호일;이영우;강경석
    • 청정기술
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    • 제18권4호
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    • pp.446-450
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    • 2012
  • 격막식 전해조에서 전해질(염화나트륨, 탄산칼륨 등)을 첨가시킨 수용액을 전해하여 음극에서 생산되는 강알카리성 전해수는 세정효과가 있고, 친환경적이어서 화학적 세정제의 대체물질로 검토되고 있다. 일본에서는 일부 자동차나 정밀부품업계 등에서 세정제로 사용되고 있다. 격막식 전해조를 사용하여 강알카리성전해수를 생산할 경우 필연적으로 양극에서 강산성전해수가 생성된다. 생성되는 강산성전해수는 용도를 찾지 못할 경우 배출되어 폐기되므로 결과적으로 전해수의 생산효율이 저하된다. 또한 격막의 오염으로 인하여 전해효율이 저하되는 단점이 있다. 이러한 단점을 보완하고자 전극반응실과 희석실이 일체화된 무격막 일체형 전해조를 사용하고 전해질의 조성을 변화시키면서 강알카리성전해수를 생성하였으며, 이의 물성 및 특성을 확인하였다. 격막식 전해조에서 생산된 강알카리성전해수와 일체형 전해조에서 생산된 강알카리성전해수의 물성을 비교한 결과 산화환원전위(oxidation reduction potential, ORP), 염소농도에서 차이가 관찰되었다. 계면활성력을 확인하기위한 유화시험에서도 유사한 결과를 얻었으며 이로부터 무격막 일체형 전해조에서 생산된 강알카리성 전해수는 격막식 전해조에서 생산된 강알카리성 전해수처럼 세정용도로 사용 가능함을 확인하였다. 방청력 시험에서는 격막식 전해조에서 생산된 강알카리성 전해수가 우수함을 확인하였다. 무격막 일체형 전해조에서 생산된 강알카리성 전해수는 격막식 전해조에서 생산된 강알카리성 전해수와 달리 유효염소를 함유하고 있어 살균력을 보유하고 있을 것으로 사료된다.

Effect of feeding garlic leaves on rumen fermentation, methane emission, plasma glucose kinetics, and nitrogen utilization in sheep

  • Panthee, Arvinda;Matsuno, Ayana;Al-Mamun, Mohammad;Sano, Hiroaki
    • Journal of Animal Science and Technology
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    • 제59권6호
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    • pp.14.1-14.9
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    • 2017
  • Background: Garlic and its constituents are reported to have been effective in reducing methane emission and also influence glucose metabolism in body; however, studies in ruminants using garlic leaves are scarce. Garlic leaves contain similar compounds as garlic bulbs, but are discarded in field after garlic bulb harvest. We speculate that feeding garlic leaves might show similar effect as garlic constituents in sheep and could be potential animal feed supplement. Thus, we examined the effect of freeze dried garlic leaves (FDGL) on rumen fermentation, methane emission, plasma glucose kinetics and nitrogen utilization in sheep. Methods: Six sheep were fed Control diet (mixed hay and concentrate (60:40)) or FDGL diet (Control diet supplemented with FDGL at 2.5 g/kg $BW^{0.75}$ of sheep) using a crossover design. Methane gas emission was measured using open-circuit respiratory chamber. Plasma glucose turnover rate was measured using isotope dilution technique of [$U-^{13}C$]glucose. Rumen fluid, feces and urine were collected to measure rumen fermentation characteristics and nitrogen utilization. Result: No significant difference in rumen fermentation parameters was noticed except for rumen ammonia tended to be higher (0.05 < P < 0.1) in FDGL diet. Methane emission per kg dry matter ingested and methane emission per kg dry matter digested were lower (P < 0.05) in FDGL diet. Plasma glucose concentration was similar between diets and plasma glucose turnover rate tended to be higher in FDGL diet (0.05 < P < 0.1). Nitrogen retention was higher (P < 0.05) and microbial nitrogen supply tended to be higher (0.05 < P < 0.1) in FDGL diet. Conclusion: FDGL diet did not impair rumen fermentation, improved nitrogen retention; while absence of significant results in reduction of methane emission, glucose turnover rate and microbial nitrogen supply, further studies at higher dose would be necessary to conclude the merit of FDGL as supplement in ruminant feedstuff.

희박연소를 이용한 가스터빈 연소기의 저 $NO_{x}$ 특성 (The Low $NO_{x}$ Characteristics of a Lean Premixed Gas Turbine Combustor)

  • 손민규;안국영;김한석;김용모
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 춘계학술대회논문집D
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    • pp.66-70
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    • 2001
  • The combustion characteristics have been investigated to develop the low $NO_{x}$ gas turbine combustor. The lean premixed combustion technology was applied to reduce the $NO_{x}$ emission. Also, the conventional combustor was designed and tested for the baseline of low $NO_{x}$ combustor performance. The test was conducted at the condition of high temperature and ambient pressure. The combustion air which has the temperature of 500K were supplied to the combustor through the air preheater. The temperature and emissions of $NO_{x}$ and CO were measured at the exit of combustor. The premixing chamber can be operated very lean condition of equivalence ratio around 0.35. The $NO_{x}$ was decreased with decreasing the equivalence ration. The CO was decreased with decreasing the equivalence ratio, but the CO was increased with decreasing the equivalence ratio below 0.45. But, at the very lean condition of equivalence ratio below 0.35 both NOx and CO were increased because of the flame unstability. The $NO_{x}$ was decreased slightly and CO was increased with increasing inlet air flowrate. This results can be used to determine the size of combustor. The low $NO_{x}$ combustor has lower values of $NO_{x}$ and CO compared with conventional one. Consequently the performance of combustor shows the possibility of the application to the gas turbine system.

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살균제 Iprovalicarb 잔류물의 신속한 검출을 위한 바이오센서 (A Biosensor for the Rapid Detection of the Fungicide Iprovalicarb Residuess)

  • 조한근;김운호;경기성;이은영
    • Journal of Biosystems Engineering
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    • 제32권6호
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    • pp.440-447
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    • 2007
  • In this study, a biosensor was developed using an enzyme-linked immunosorbent assay (ELISA) to rapidly measure the fungicide iprovalicarb residues in agricultural products. The biosensor was designed to include micro-pumps and solenoid valves for fluid transport, a spectrophotometer cuvet as a reaction chamber, a photodiode with a light-emitting diode for optical density measurement, and a control microcomputer to implement assay. The rate of change in optical density of the cuvet was read as final signal output. Micro-pumps were evaluated to investigate their delivery capability, the highest values of the error and the coefficient of variation were 4.3% and 4.6% respectively. As the incubation period was reduced from 15 minutes to 11 minutes to shorten the total processing time, the sensor sensitivity was decreased as the antibody dilution ratio was reduced to a half. The maximum usable period of the coated cuvet was found to be two days with 1% error limit. To predict the concentration of the iprovalicarb residue in agricultural products, a linear calibration model was obtained with r-square values of 0.992 for potato and 0.985 for onion. In validation test for the samples of potatoes and onions against the high performance liquid chromatography, very high correlation values were obtained as 0.996 and 0.993 respectively. Using the cuvet immobilized with antigen, it took 21-minutes for the biosensor to complete the measuring process of the iprovalicarb residues.

미세입자(PM2.5)의 배출원 구성물질 성분비 개발에 관한 연구 (A Study on the Development of Source Profiles for Fine Particles (PM2.5))

  • 이학성;강충민;강병욱;이상권
    • 한국대기환경학회지
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    • 제20권3호
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    • pp.317-330
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    • 2004
  • The Purpose of this study was to develop the P $M_{2.5}$ source Profiles, which are mass abundances (fraction of total mass) of a chemical species in P $M_{2.5}$ source emissions. The source categories studied were soil, road dust, gasoline and diesel vehicles, industrial source, municipal incinerator, coal-fired power plant, biomass burning, and marine. The chemicals analyzed were ions. elements. and carbons. From this study, soil source had the crustal components such as Si, hi, and Fe. In the case of road dust. Si, OC, Ca, Fe had large abundances. The abundant species were S $O_4$$^{2-}$, C $l^{[-10]}$ , N $H_4$$^{+}$, and EC in the gasoline vehicle and EC, OC, C $l^{[-10]}$ , and S $O_4$$^{2-}$ in the diesel vehicle. The main components were S $O_4$$^{2-}$, S N $H_4$$^{+}$, and EC in the industrial source using bunker C oil as fuel, C $l^{[-10]}$ , N $H_4$$^{+}$, Fe, and OC in the municipal incinerator source, and Si, Al, S $O_4$$^{2-}$, and OC in the coal -fired power plant source. In the case of biomass burning, OC, EC, and C $l^{[-10]}$ were mainly emitted. The main components in marine were C $l^{[-10]}$ , N $a^{+}$, and S $O_4$$^{2-}$.EX> 2-/.