• 제목/요약/키워드: Diffusion depth

검색결과 464건 처리시간 0.026초

Ti 쇼트키 배리어 다이오드의 Al 확산 방지를 위한 SC-1 세정 효과 (Effect of SC-1 Cleaning to Prevent Al Diffusion for Ti Schottky Barrier Diode)

  • 최진석;최여진;안성진
    • 한국재료학회지
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    • 제31권2호
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    • pp.97-100
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    • 2021
  • We report the effect of Standard Clean-1 (SC-1) cleaning to remove residual Ti layers after silicidation to prevent Al diffusion into Si wafer for Ti Schottky barrier diodes (Ti-SBD). Regardless of SC-1 cleaning, the presence of oxygen atoms is confirmed by Auger electron spectroscopy (AES) depth profile analysis between Al and Ti-silicide layers. Al atoms at the interface of Ti-silicide and Si wafer are detected, when the SC-1 cleaning is not conducted after rapid thermal annealing. On the other hand, Al atoms are not found at the interface of Ti-SBD after executing SC-1 cleaning. Al diffusion into the interface between Ti-silicide and Si wafer may be caused by thermal stress at the Ti-silicide layer. The difference of the thermal expansion coefficients of Ti and Ti-silicide gives rise to thermal stress at the interface during the Al layer deposition and sintering processes. Although a longer sintering time is conducted for Ti-SBD, the Al atoms do not diffuse into the surface of the Si wafer. Therefore, the removal of the Ti layer by the SC-1 cleaning can prevent Al diffusion for Ti-SBD.

고주파 유도가열을 통한 알루미늄 기판재위 Ni-Al계 금속간화합물의 연소합성코팅에 관한 연구 (A Study for Ni-Al based Intermetallics Coating onto Aluminum Substrate by Induction Heating)

  • 이한영
    • Tribology and Lubricants
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    • 제28권2호
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    • pp.56-61
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    • 2012
  • In order to investigate the possibility of Ni-Al based intermetallics coating onto aluminum substrate, the coating process for induction heating has been evaluated by microscopically analyzing the intermetallic layers coated at temperatures lower than the melting temperature of aluminum. The coating layers were divided into two parts with different microstructure along the depth. Hard $NiAl_3$ layer was found at lower parts of the coatings near the interface with aluminum substrate. This layer was formed by the diffusion of aluminum atoms from the substrate into the coating layer across the interface during the induction heating. Meanwhile, at the upper parts of the coating near the surface, a large amount of un-reacted Ni was still remained and surrounded by several Ni-Al based intermetallic compounds, such as $Ni_3Al$, NiAl and $Ni_2Al_3$ formed by the lattice diffusion.

Study on Neutralization Progress Model of Concrete with Coating Finishing Materials in Outdoor Exposure Conditions Based on the Diffusion Reaction of Calcium Hydroxide

  • Park, Jae-Hong;Hasegawa, Takuya;Senbu, Osamu;Park, Dong-Cheon
    • International Journal of Concrete Structures and Materials
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    • 제6권3호
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    • pp.155-163
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    • 2012
  • In order to predict the neutralization of concrete which is the reaction of carbonation dioxide from the outside and cement hydration product, such as calcium hydroxide and C-S-H, it was studied the numerical analysis method considering change of the pore structure and relative humidity during the neutralization reaction. Diffusion-reaction neutralization model was developed to predict the neutralization depth of concrete with coating finishing material. In order to build numerical analysis models considering outdoor environment and finishing materials, the adaption of proposed model was shown the results of existing outdoor exposure test results and accelerated carbonation test.

유동관에 형성된 Cavity로부터의 입자확산현상 연구 (A Study of Particle Diffusion from a Cavity in Flow Tube)

  • 이진원;구재학;김현영
    • 설비공학논문집
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    • 제6권1호
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    • pp.29-38
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    • 1994
  • Particle contamination into and out of a cavity-cylindrical cavities with aspect ratios(width/depth) less than, equal to 1 and langer than 1, and also three dianensional T's attached to a cylindrical flow tube was studied numerically, using a finite difference method. In the process of unsteady particle diffusion, the particles contained in a concentration boundary layer near the tube wall plays an important role in the initial stage, after which a quasi-steady concentration profile is developed inside the cavity, resulting in an exponential change of concentration with time. Average concentration and its rate of change are observed to be closely correlated by a power law function in terms of Reynolds number and the logarithm of Schmidt number. Effects of the three parameters-Re, Sc, and aspect ratio-are analysed and well explained.

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포졸란계 혼화재를 혼입한 모르타르 및 콘크리트의 내염해 저항성 평가에 관한 실험적 연구 (An experimental study on the evaluation of chloride attack resistance in mortar and concrete mixed with pozzolanic admixtures)

  • 박정준;김도겸;하진규
    • 한국콘크리트학회:학술대회논문집
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    • 한국콘크리트학회 2000년도 가을 학술발표회논문집(I)
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    • pp.461-466
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    • 2000
  • To improve the quality of concrete, we usually consider the reduction of water/cement ratio, the increase of concrete cover depth and the use of mineral admixtures. Reportedly, the use of admixtures make concrete more durable and tighten against water. But, it is needed to study more about the relationship between the admixtures and the chloride ion diffusion. Therefore, in this study, we focused on the chloride ion diffusion properties of the pozzolanic admixtures such as fly-ash, slag and silica fume which are known as being useful on chloride attack resistance when mixed into mortar or concrete. Furthermore, we treed to analyze the correlation between mortar and concrete using the admixture, which is useful for analyzing chloride ion diffusion mechanism.

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삼결정 실리콘 태양전지의 19%변환 효율 최적요건 고찰에 관한 연구 (The study of High-efficiency method usign Tri-crystalline Silicon solar cells)

  • 이욱재;박성현;고재경;김경해;이준신
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.318-321
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    • 2002
  • This paper presents a proper condition to achieve high conversion efficiency using PC1D simulator on sri-crystalline Si solar cells. Various efficiency influencing parameters such as rear surface recombination velocity and minority carrier diffusion length in the base region, front surface recombination velocity, junction depth and doping concentration in the Emitter layer, BSF thickness and doping concentration were investigated. Optimized cell parameters were given as rear surface recombination of 1000 cm/s, minority carrier diffusion length in the base region 200 $\mu\textrm{m}$, front surface recombination velocity 100 cm/s, sheet resistivity of emitter layer 100 Ω/$\square$, BSF thickness 5 $\mu\textrm{m}$, doping concentration 5${\times}$10$\^$19/ cm$\^$-3/. Among the investigated variables, we learn that a diffusion length of base layer acts as a key factor to achieve conversion efficiency higher than 19 %.

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고속 열확산에 의해 제작된 다이오드의 Rapid Thermal Alloy (Rapid Thermal Alloy of Fabricated Diode by Rapid Thermal Diffusion)

  • 이동엽;이영희
    • 전자공학회논문지A
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    • 제29A권2호
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    • pp.63-67
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    • 1992
  • Shallow $p^{+}-n,n^{+}-p$ diodes have been fabricated using rapid thermal diffusion by solid diffusion source and rapid thermal alloying with pure Aluminum. Diode area and junction depth are designed about 2.83$[\times}10^{-3}cm^{2}$ and 250nm, respectively. Electrical characteristics of $p^{+}-n$ diode show that the ideality factor is 1.04 and reverse current density is 29.3nA/$cm^{2}$, respectively. On the other hand, those of $n^{+}-p$ diode show that the ideality factor is 1.05 and reverse current density is 85.2pA/$cm^{2}$. The reverse currents are measured at 5V reverse bias after rapid thermal alloying for all the measurement.

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Effect of Metal Barrier Layer for Flexible Solar Cell Devices on Tainless Steel Substrates

  • Kim, Kyoung-Bo
    • Applied Science and Convergence Technology
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    • 제26권1호
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    • pp.16-19
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    • 2017
  • A thin metal layer of molybdenum is placed between the conventional barrier layer and the stainless steel substrate for investigating the diffusion property of iron (Fe) atoms. In this study, the protection probability was confirmed by measuring the concentration of out-diffused Fe using a SIMS depth profile. The Fe concentration of chromium (Cr) barrier layer with 10 nm molybdenum (Mo) layer is 5 times lower than that of Cr barrier without the thin Mo layer. The insertion of a thin Mo metal layer between the barrier layer and the stainless steel substrate effectively protects the out-diffusion of Fe atoms.

복합열처리(複合熱處理)한 연강(軟鋼)의 표면경화(表面硬化)에 관한 연구 (A Study on Surface Case Hardening of Blend Heat Treated Mild Steel)

  • 정인상;전해동;신석목
    • 열처리공학회지
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    • 제5권1호
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    • pp.23-31
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    • 1992
  • It is investigated that Fe-C-N compound layer, defusion layer, and induction hardened layer produced by nitrocarburizing blend heat treatment in austenitic temperature with high frequency induction heating of mild steel specimen sprayed sursulf salt-bath. As the temperature of blend-heat treatment got increased, the thickness and hardness of compound layer and diffusion layer were increased. Compound layer(max. $35{\mu}m$), diffusion layer (max. 2.5mm) and induction hardened layer were gained in the shortest time 10 sec and in the case of $1000^{\circ}C$ total hardness depth of those was about 3.5mm. When the blend-heat treated specimen was reheated, maximum hardness of compound layer was dropped more than that of the reheated compound layer after sursulf treated, whereas hardness of diffusion layer was increased.

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광전자 분광법으로 분석한 스테인레스 강 304의 산화 표면 (The Oxidized Surface of Stainless Steel 304 Analyzed with X-ray Photoelectron Spectroscopy)

  • 이경철;함경희;안운선
    • 한국표면공학회지
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    • 제24권3호
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    • pp.144-150
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    • 1991
  • The stainless steel 304 oxidized at $70^{\circ}C$ in 2.5M CrO3/5.0M H2SO4 solution and at $200^{\circ}C$ , $300^{\circ}C$, and $400^{\circ}C$ in the air are analyzed with X-ray Photoelectron Spectroscopy (XPS) to obtain depth composition profile of the surface region. It is confirmed that the surface region has a quite different composition from that of the bulk. This is due to a difference in the outward diffusion rates of the oxidized species in the surface region. The order of diffusion rates is Fe > Cr > Ni in the experimental temperature range. In spite of the inferior rate of diffusion, Cr is enriched in the surface when it is oxidized in the CrO3/H2SO4 solution. This is due to preferential dissolution of oxidized Fe.

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