• Korean Journal of Materials Research
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• v.12 no.4
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• pp.254-258
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• 2002

To realize channel cross-connecting in optical communications systems, a high speed optical matrix switch was fabricated using z-cut $LiNbO_3$. For switch fabrication was design bending structure and coupling length and four $2{\times}2$ directional couplers were integrated on one substrate far construction of a $4{\times}4$ switch. Single-mode optical waveguides were formed by Ti-diffusion at a wet $O_2$ atmosphere. Ti-diffusion profile, refractive index variation and waveguide morphology were analyzed by Prism coupler and optical microscopy, respectively.

• Journal of the Korea Institute of Military Science and Technology
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• v.24 no.6
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• pp.610-618
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• 2021

In this paper, a photonic-based microwave system technology is described, and a traveling-wave electro-optic modulator is designed and manufactured as a key component. The fabricated modulator is composed of a metal diffusion waveguide for optical transmission and a planar waveguide electrode on lithium niobate substrate for microwave transmission. The electro-optic response bandwidth of I and Q channels in a fabricated dual parallel Mach-Zehnder modulator were measured for 27.67 and 28.11 GHz, respectively. Photonic four times up-converted X-band frequency and linear frequency modulated signal were confirmed using the fabricated electro-optic modulator by S-band input signal. The confirmed broadband signal can be applied to a microwave system for surveillance and high-resolution ISAR imaging.

• Proceedings of the KIEE Conference
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• 1989.11a
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• pp.502-504
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• 1989

An electro-optic cutoff modulator with self-aligned electrode that utilizes a single-mode proton-diffused well-guided channel waveguide in a X-cut Y-propagating $LiNbO_3$ substrate is reported. The self-aligned electrode is formed during proton diffusion process of itself. Nearly linear voltage-intensity relationship has been observed. Over 90 % modulation has been achieved with applied voltage of 25 V.

• Electrical & Electronic Materials
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• v.9 no.6
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• pp.584-592
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• 1996

Coupling optical modulator which on the $LiTaO_3$ substrate is fabricated by using proton exchange method and self-aligned method. Proton exchange of proton diffusion method was applied to pattern a waveguide on $LiTaO_3$ substrate. The annealing at >$400^{\circ}C$ was carded out to control waveguide width and depth. The depths of the two annealed optical waveguides, which were measured by using .alpha.-step, were 1.435 K.angs. and 1.380 K.angs. Using .alpha.-step facility, we examined that the width of waveguides is increased from 5.mu.m to 6.45 .mu.m and 6.3.mu.m due to the annealing effects. The process of proton exchange was done at 150.deg. C for 120 min, >$200^{\circ}C$ for 60 min and annealing process was done at >$400^{\circ}C$ for 90 min, >$400^{\circ}C$ for 60 min. The high speed coupling optical modulator has very good figures of merits; the measured high frequency power were achieved.

• Proceedings of the IEEK Conference
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• 1999.06a
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• pp.319-322
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• 1999

In this paper, we report characteristics of a internal chip of LiNbO$_3$ modulator with low-driving-voltage at 150nm wavelength. A Ti diffusion method for LiNbO$_3$ optical waveguide and a buffer layer for improving phase velocity mismatch between optical and microwave waves were employed. The traveling-wave coplanar waveguide electrode of 35mm is used for reducing the driving voltage. From this work, wideband modulation of 10㎓ and low-driving voltage of 3.9volts are realized.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.05a
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• pp.264-268
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• 1996

Directional coupling optical switch which on the LiNbO$_3$ substrate is fabricated by using proton exchange method and self-aligned method. Proton exchange of proton diffusion method was applied to pattern a waveguide on LiNbO$_3$ substrate. The annealing at 400[$^{\circ}C$] was caroled out to control waveguide width and depth. The process of proton exchange was done at 150[$^{\circ}C$] for 120[min], 200[$^{\circ}C$] for 60[min] and annealing process was done at 400[$^{\circ}C$] for 90[min], 400[$^{\circ}C$] for 60[min]. The high speed directional coupling optical switch has very good figures of merits:the measured high frequency power were achieved.

• Proceedings of the Optical Society of Korea Conference
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• 1990.02a
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• pp.264-268
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• 1990

A guided-wave electro-optic Mach-Zehnder interferometric modulator was fabricated on X-cut LiNbO3 . The channel waveguides were formed by proton diffusion with self-aligned SiO2-cladding. A mach-Zehnder interferometric modulator with arm lengths of 7mm has been fabricated and tested at 0.6328${\mu}{\textrm}{m}$. Its modulation depth with V$\pi$ of only 3.5V was 85% and the 3dB bandwidth was 1.6KHz. For high speed operation, the electrode dimension should be reduced to have smaller R, L, and C.

• Proceedings of the Optical Society of Korea Conference
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• 1990.02a
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• pp.269-273
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• 1990

The proton conserving effect of diffusion with self-aligned SiO2-cladding is investigated by infrared transmission spectra. Based on the proton conserving effect, proton-diffused channel waveguides with self-aligned SiO2-cladding substrates. And an electro-optic cutoff modulator with self aligned electrode that utilizes a single-mode proton-diffused channel waveguide in a Y-cut XX-propagating LiNbO3 substrate is fabricated. Over 20 dB extinction has been achieved with applied voltage of 15V.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.2
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• pp.146-153
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• 1998

The optical near-field patterns, propagation loss and mode sizes of x-cut $Ti:LiNbO_3$ optical waveguide which was fabricated by Ti-diffusion varying with Ti strip thickness in wet oxygen atmosphere were discussed at optical wavelength 1550nm. As Ti thickness increased from $760{\AA}$, the insertion loss of waveguide was decreased. But at Ti thickness $1500{\AA}$, mode sizes are widely broadened. The Ti thickness of below $1100{\AA}$ and above $1500{\AA}$ showed negative effects to propagation loss and fiber coupling. The best Ti thickness for fabricating low propagation loss and good fiber coupling was inferred to be between $1100{\AA}-1500{\AA}$ in our conditions. And for Ti thickness $1150{\AA}$, its propagation loss, horizontal/vertical mode sizes were showed 1.61 dB/cm, $11.9/8.9{\mu}m$ for TM, 0.22 dB/cm, $12.0/9.1{\mu}m$ for TE respectively.

• Korean Journal of Optics and Photonics
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• v.17 no.5
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• pp.430-436
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• 2006

Polarization-independent $Ti:LiNbO_3\;2{\times}2$ optical add/drop multiplexer for the 1550nm wavelength region is fabricated. The device consists of two input waveguides, two polarization beam splitters. two polarization conversion/electrooptic tuning waveguide sections, and two output waveguides. The single mode channel waveguides for both TE and TM polarizations are fabricated on a x-cut $Ti:LiNbO_3$substrate by Ti diffusion. Spectral section is based on phase-matched polarization conversion due to shear strain induced by a thick $SiO_2$ grating overlay film. An applied voltage tunes the device by changing the waveguide birefringence, hence the optical wavelength at which most efficient polarization conversion occurs. Tuning rate of 0.094nm/V with a maximum range of 17nm has been obtained. The nearest side-lobe is about 8.2dB. The FWHM is 3.72nm.