• 설비공학논문집
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• 제21권1호
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• pp.33-40
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• 2009

In the present experimental study, the pumping performances of diffuser/nozzle based piezoelectric micropumps are estimated with different operating factors and geometries. Here, the effects of the input voltage and frequency on the pumping performances have been examined together with the influences of the positions of the inlet and outlet. The results show that the flow rate of the micropump is larger with larger input voltage with the largest flow rates for the frequency to be close to 6.0 Hz all through the current experimental study. Also, it has been found that the positions of the inlet and outlet affect much on the performance of the piezoelectric micropumps. Error estimation has been carried out for the evaluation of the pumping performance in association with the uncertainty of the measurement.