• 제목/요약/키워드: Dielectric measurement

검색결과 536건 처리시간 0.028초

차등 3$\omega$ 기법을 이용한 다층 유전체 박막의 열전도도 측정 및 검증 (Measurement and Verification of Thermal Conductivity of Multilayer Thin Dielectric Film via Differential 3$\omega$ Method)

  • 신상우;조한나;조형희
    • 정보저장시스템학회:학술대회논문집
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    • 정보저장시스템학회 2005년도 추계학술대회 논문집
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    • pp.254-259
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    • 2005
  • In this study, measurement of thermal conductivity of multilayer thin dielectric film has been conducted via differential 3$\omega$ method. Also, verification of differential 3$\omega$ method has been accomplished with various proposed criteria. The target film for measurement is 300 nm silicon dioxide and this thin film is covered with various thicknesses of upper protective layer. The upper protective layer is inserted between the target film and the heater line for purpose of electrical insulator or anti-oxidation barrier since the target film may be a good electrical conductor or a well-oxidizing material. However, the verification of differential 3$\omega$ method has not been conducted. Thus we have shown that the measurement of thermal conductivity of thin films with upper protective layer via differential 3$\omega$ method is verified to be reliable as long as the proposed preconditions are satisfied. Experimental results show that the experimental errors tend to increase with aspect ratio between upper protective layer thickness and width of the heater line due to heat spreading effect.

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차등 $3\omega$ 기법을 이용한 다층 유전체 박막의 열전도도 측정 및 검증 (Measurement and Verification of Thermal Conductivity of Multilayer Thin Dielectric Film via Differential $3\omega$ Method)

  • 신상우;조한나;조형희
    • 정보저장시스템학회논문집
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    • 제2권1호
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    • pp.85-90
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    • 2006
  • In this study, measurement of thermal conductivity of multilayer thin dielectric film has been conducted via differential $3\omega$ method. Also, verification of differential $3\omega$ method has been accomplished with various proposed criteria. The target film for the measurement is 300 nm thick silicon dioxide which is covered with upper protective layer of various thicknesses. The upper protective layer is inserted between the target film and the heater line for purpose of electrical insulator or anti-oxidation barrier since the target film may be a good electrical conductor or a well-oxidizing material. Since the verification of differential $3\omega$ method has not been conducted yet, we have shown that the measurement of thermal conductivity of thin films with upper protective layer via differential $3\omega$ method is verified to be reliable as long as the proposed preconditions of the samples are satisfied. Experimental results show that the experimental errors tend to increase with aspect ratio between thickness of the upper protective layer and width of the heater line due to heat spreading effect.

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유전체 원주공진기법에 의한 고주파 유전특성 측정에 관한 연구 (Study on the Microwave Dielectric properties in the Dielectric Rod Resonator Method)

  • 김경용;김왕섭;최환
    • 전자공학회논문지A
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    • 제32A권3호
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    • pp.471-481
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    • 1995
  • Measurement factors for the dielectric properties of low dielectric loss materials (tan${\dalta}{\le}10^{-4}$) were investigated using the dielectric rod resonator method. It was shown that the relative conductivity (${\sigma}_{r}$) should be controlled within a 5% to obtain the standard deviations of less than 0.07 for permittivity .epsilon.r and 0.06${\times}10^{-4}$ for tan.delta.respectively. Surface resistivity (R$_s$) could be reduced when the surface roughness of parallelled conducting plate was less than 0.07 .mu.m. Measurement error for the permittivity was $\pm$0.02% independent of probe loop size, whereas the error in Q value was reduced with the decrease in probe loop size and also with the increase in the absolute values of Q. Reliable Q values were determined with the probe loop size of less than 4mm. The accurate for the distance between the measuring probe loop and the sample could be obtained when the insertion loss of resonant frequency ranged -15dB - -30dB.

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마이크로파에서 Dielectric rod resonator method에 의한 저유전 손실 물질의 유전 특성 측정에 관한 연구 (The Microwave Measurement of the Dielectric Properties of Low-Loss Materials by the Dielectric Rod Resonator Method)

  • 심화섭;이한영;김근영;김진헌
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1989년도 춘계학술대회 논문집
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    • pp.21-25
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    • 1989
  • Theory and experimental results are presented to show the possibility of using a dielectric rod resonator method for characterizing dielectric materials at microwave frequency. The measuring structure is a resonator made up of a cylindrical dielectric rod placed between two parallel conducting plates. In this system, the TE$\_$011/ mode frequency was adapted to minimize the effect of the air-gap between the rod and the conducting plates. The dielectric properties are computed from the resonance frequencies, structure dimensions and 3-dB bandwidth.

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$Al_{2}O_{3}$ crystal의 유전손실계수 측정에 관한 연구 (A study on dielectric loss tangent measurement with $Al_{2}O_{3}$ crystal)

  • 이종찬;인여훈;이래덕;박대희
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1996년도 하계학술대회 논문집 C
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    • pp.1466-1468
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    • 1996
  • The standards of the capacitance arc measured and analyzed by the dry nitrogen or mica film as a dielectric. In this paper, respectively the standard capacitors of 10 pF and 100 pF for the establishment of the dielectric loss tangent are made by $Al_{2}O_{3}$ crystal disc with the low dielectric loss tangent, and then measured the dielectric loss tangent with precision. To regard for the existence of capacitances just in the dielectric, 3-terminal configuration electrode is used. With using the 2D electric field simulator, precise design values are derived in addition to stray capacitance. As stated above method, respectively the standards of the capacitances with 10 pF and 100 pF arc made with the low dielectric loss tangent less than $10^{-4}$.

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Dielectric Relaxation of Siloxane-Epoxy Copolymers

  • Kim, Chy-Hyung;Shin, Jae-Sup
    • Bulletin of the Korean Chemical Society
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    • 제23권3호
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    • pp.413-416
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    • 2002
  • The dielectric responses of 10 and 40 wt% siloxane-epoxy copolymers were investigated in temperature range near the glass transition of polydimethylsiloxane at which the dielectric transitions were also observed. On the other hand, the pure epoxy did not show any dielectric transition in measurement temperature range -90 to 150 $^{\circ}C.$ The experimental data showed that for the copolymer investigated, the temperature-frequency super-position principle could be applied to the dielectric response. From the Cole-Cole equation, the dielectric relaxation of the 10 wt% siloxane near the glass transition temperature resulted in a broad distribution with ${\beta}=$ 0.19 and the relaxation time at -70 $^{\circ}C$ was 5.3 ${\times}$ $10^{-2}$s. The glass transition temperature, 188 K, was estimated by using WLF relation, which was consistent with the data presented in experiment.

에폭시/마이크로/나노알루미나 혼합된 멀티-콤포지트의 유전 특성 (Dielectric Properties of Epoxy/Micro/Nano Alumina Multi-Composites)

  • 박재준
    • 한국전기전자재료학회논문지
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    • 제29권9호
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    • pp.565-570
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    • 2016
  • In this work, the complex permittivity of epoxy resins is measured. Epoxy resins, epoxy with micro size fillers and epoxy with micro+nano alumina composites have been evaluated for dielectric properties according to frequency variation. The dielectric spectroscopy measurement and analyses are carried out in the frequency range of $10^{-2}Hz$ to 1MHz and constant to room temperature. The results of dielectric loss suggest that significant improvement in the electrical performance can be expected by using samples containing nano and micro fillers mixture when compared to materials containing only microfillers. As the result, we verified the specific characteristics of dielectric permittivity and dielectric loss namely, relative permittivity become low with improving dispersibility of nano+micro mixture composites and become rise with agglomerate of nano particles.

Characterization of Heterogeneous Interaction Behaviour in Ternary Mixtures by Dielectric Analysis: The H-Bonded Binary Polar Mixture in Non-Polar Solvent

  • Sengwa, R.J.;Madhvi;Sankhla, Sonu;Sharma, Shobha
    • Bulletin of the Korean Chemical Society
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    • 제27권5호
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    • pp.718-724
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    • 2006
  • The heterogeneous association behaviour of various concentration binary mixtures of mono alkyl ethers of ethylene glycol with ethyl alcohol were investigated by dielectric measurement in benzene solutions over the entire concentration range at 25 ${^{\circ}C}$. The values of static dielectric constant $\epsilon_0$ of the mixtures were measured at 1 MHz using a four terminal dielectric liquid test fixture and precision LCR meter. The high frequency limiting dielectric constant $\epsilon_\infty$ values were determined by measurement of refractive index $n_D$ ($\epsilon_\infty\;=\;n_D\;^2$). The measured values of $\epsilon_0$ and $\epsilon_\infty$ were used to evaluate the values of excess dielectric constant $\epsilon^E$, effective Kirkwood correlation factor $g^{eff}$ and corrective correlation factor $g_f$ of the binary polar mixtures to obtain qualitative and quantitative information about the H-bond complex formation. The non-linear behaviour of the observed $\epsilon_0$ values of the polar molecules and their mixtures in benzene solvent confirms the variation in the associated structures with change in polar mixture constituents concentration and also by dilution in non-polar solvents. Appearance of the maximum in $\epsilon^E$ values at different concentration of the polar mixtures suggest the formation of stable adduct complex, which depends on the molecular size of the mono alkyl ethers of ethylene glycol. Further, the observed $\epsilon^E$ < 0 also confirms the heterogeneous H-bond complex formation reduces the effective number of dipoles in these polar binary mixtures. In benzene solutions these polar molecules shows the maximum reduce in effective number of dipoles at 50 percent dilutions. But ethyl alcohol rich binary polar mixtures in benzene solvent show the maximum reduce in effective number of dipoles in benzene rich solutions.

지하댐 지반 물성치 측정을 위한 유전율 측정 시스템 개발 (A Development of Dielectric Measurement System for Detecting Physical Parameters of Ground in Subsurface Dam)

  • 김만일;정교철;박창근
    • 지질공학
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    • 제14권4호
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    • pp.361-369
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    • 2004
  • 매질이 가지는 고유의 유전율 특성을 이용하여 체적함수비를 실시간으로 측정할 수 있는 유전율 측정장비인 Frequency Domain Reflectometry (FDR) system 및 측정 센서를 제안하였다. 특히 측정 센서의 형태는 7m, 10cm,15cm 길이로 각기 제작하여 유전율상수의 특성을 파악하였다. 본 장비의 유전율측정은 $0.1\~1.7GHz$의 고주파수 범위 내에서 발생된 전자파를 방향성결합기를 통과하여 매질에 설치된 측정센서에서 입사파와 반사파의 간섭현상을 이용함으로써 측정이 가능하다. 본 실내시험 연구에서 획득된 연구결과는 유전율상수의 변화로부터 체적함수비를 지속적으로 측정할 수 있는 점에서 비파괴 모니터링 기술로 구분할 수 있다. 체적함수비와 유전율상수의 관계에서 측정센서의 로드길이에 따른 측정오차는 다소 파악되나, 이들의 관계로부터 Topp et al.(1980) 교정곡선과 비교하여 표준사에 대한 1차원 관계식과 관계곡선을 유도할 수 있었다. 결론적으로 제안된 FDR system과 측정센서로부터 측정된 측정 결과들은 Topp et al.(1980) 교정곡선과 매우 흡사한 형태를 보여준다.

유전이력곡선 및 전류이력곡선을 통한 강유전성 확인 방법 (Measurement of Dielectric Hysteresis and Current Hysteresis for Determining Ferroelectricity)

  • 박재환;박재관;김윤호
    • 한국결정학회지
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    • 제12권2호
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    • pp.65-91
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    • 2001
  • Sawyer-Tower 회로를 이용한 강유전 이력곡선의 측정에서 직류 누설성분에 의한 오차요인을 검토하고 그 해결책을 제안하였다. 강유전체 시편에 존재하는 직류 누설성분에 의한 잔류분극과 항전계는 항상 과대 평가될 수 있는 위험성이 있음을 알 수 있었으며 이러한 오차는 직류누설성분이 크고 측정시간이 길수록 심화되었다. Sawyer-Tower 회로를 이용한 강유전 이력곡선과 함께 보완적으로 활용할 수 있는 전류이력곡선을 새롭게 제안하였다.

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