• 제목/요약/키워드: Dielectric loss factor

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BST 박막 소자의 유전특성 (The Dielectric Characteristics of BST Thin Film Devices)

  • 홍경진;민용기;신훈규;조재철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.660-663
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    • 2001
  • The devices of BST thin films to composite (Ba$\_$0.7/ Sr$\_$0.3/)TiO$_3$using sol-gel method were fabricated by changing of the depositing layer number on Pt/Ti/SiO$_2$/Si substrate. The thin film capacitor to be ferroelectric devices was investigated by structural and electrical properties. The thickness of BST thin films at each coating numbers 3, 4 and 5 times was 2500[${\AA}$], 3500[${\AA}$], 3800[${\AA}$]. The dielectric factor of thin film when the coating numbers were 3, 4 and 5 times was 190, 400 and 460 on frequency 1[MHz]. The dielectric loss of BST thin film was linearly increased by increasing of the specimen area.

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Piezoelectric and Dielectric Properties of Low Temperature Sintering Pb(Zn1/2W1/2)O3-Pb(Mn1/3Nb2/3)O3-Pb(Zr,Ti)O3 Ceramics

  • Yoo, Ju-Hyun;Lee, Kab-Soo;Lee, Su-Ho
    • Transactions on Electrical and Electronic Materials
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    • 제9권3호
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    • pp.91-95
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    • 2008
  • In this study, in order to develop the composition ceramics for low loss multilayer piezoelectric actuator application, $Pb(Zn_{1/2}W_{1/2})O_3-Pb(Mn_{1/3}Nb_{2/3})O_3-Pb(Zr,Ti)O_3$ (abbreviated as PZW-PMN-PZT)ceramics according to the amount of $MnO_2$ addition were fabricated using two-stage calcinations method. And also, their dielectric and piezoelectric properties were investigated. At the 0.2 wt% $MnO_2$ added PZW-PMN-PZT ceramics sintered at $930^{\circ}C$, density, electromechanical coupling factor $k_p$, dielectric constant ${\varepsilon}_r$, piezoelectric $d_{33}$ constant and mechanical quality factor $Q_m$ showed the optimum value of $7.84g/cm^3$, 0.543, 1,392, 318.7 pC/N, 1,536, respectively for low loss multilayer ceramics actuator application.

$Pb(Sc_{1/2}Nb_{1/2}$O$_3$-$PbTiO_3$계 세라믹스의 강유전성 (Ferroelectricity of the $Pb(Sc_{1/2}Nb_{1/2}$O$_3$-$PbTiO_3$ based Ceramics)

  • 김진수;김소정;김호기;이덕출
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1997년도 추계학술대회 논문집
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    • pp.149-152
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    • 1997
  • High-power piezoelectric materials are being developed for applications such as actuators and ultrasonic motors. In this paper, ferroelectric property of iron-doped 0.57 (Sc$_{1}$2//Nb$_{1}$2/)O$_3$-0.43 PbTiO$_3$. which is the morphotropic phase boundary composition for the PSN-PT system, was investigated. The maximum dielectric constant ( $\varepsilon$$_{33}$/$\varepsilon$$_{0}$ = 2551) and the minimum dielectric loss(tan $\delta$ = 0.51 %) at room temperature were obtained at 01. wt% and 0.3 wt% of iron additions. With additions of the Fe$_2$O$_3$ the electromechanical coupling factor of radial mode k$_{p}$ and the piezoelectric coefficient d$_{33}$ were slightly decreased, on the other hand the mechanical quality factor was increased significantly. The highest mechanical quality factor (Qm= 297) was obtained at 0.3 wt% Fe$_2$O$_3$, which is 4.4 times larger than that of pure 0.57 PSN-0.43PT ceramics. The temperature dependence of the dielectric constant and dielectic loss was observed between 2$0^{\circ}C$ and 35$0^{\circ}C$ .X> .X> .

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Sol-gel 법으로 제작된 BST 박막의 Bi 첨가에 따른 구조적, 유전적 특성 (Fabrication of BST Thin films with Bi Addition by Sol-gel Method and their Structural and Dielectric Properties)

  • 김경태;김창일
    • 한국전기전자재료학회논문지
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    • 제17권8호
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    • pp.852-858
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    • 2004
  • An alkoxide-based sol-gel method was used to fabricate $Ba_{0.6}Sr_{0.4}TiO_{3}$thin films doped by Bi from 5 to 20 mol% on a Pt/Ti/$SiO_2$/Sisubstrate. The structural and dielectric properties of BST thin films were investigated as a function of Bi dopant concentration. The dielectric properties of the Bi doped BST films were strongly dependent on the Bi contents. The dielectric constant and dielectric loss of the films decreased with increasing Bi content. However, the leakage current density of the 10 mol% Bi doped $Ba_{0.6}Sr_{0.4}TiO_{3}$ thin film showed the lowest value of 5.13$\times 10^{-7} A/{cm}^2$ at 5 V. The figure of merit (FOM) reached a maximum value of 32.42 at a 10 mol% Bi doped $Ba_{0.6}Sr_{0.4}TiO_{3}$thin films. The dielectric constant, loss factor, and tunability of the 10 mol% Bi doped $Ba_{0.6}Sr_{0.4}Tio_{3}$ thin films were 333, 0.0095, and 31.1%, respectively.

Tunable 소자 응용을 위한 Sol-gel 법으로 제작된 BST 박막의 Bi 첨가에 따른 구조적, 유전적 특성 (Structure and Dielectric properties of BST Thin Films prepared by Sol-gel method for Tunable element application)

  • 김태형;김경태;김창일
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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    • pp.565-568
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    • 2004
  • An alkoxide-based sol-gel method was used to fabricate $Ba_{0.6}Sr_{0.4}TiO_3$ thin films doped by Bi from 5 to 20 mol% on a Pt/Ti/SiO2/Si substrate. The structural and dielectric properties of BST thin films were investigated as a function of Bi dopant concentration. The dielectric properties of the Bi doped BST films were strongly dependent on the Bi contents. The dielectric constant and dielectric loss of the films decreased with increasing Bi content. However, the leakage current density of the 10 mol% Bi doped $Ba_{0.6}Sr_{0.4}TiO_3$ thin film showed the lowest value of 5.13 10-7 at 5 V. The figure of merit (FOM) reached a maximum value of 32.42 at a 10 mol% Bi doped $Ba_{0.6}Sr_{0.4}TiO_3$ thin films. The dielectric constant, loss factor, and tunability of the 10 mol% Bi doped $BBa_{0.6}Sr_{0.4}TiO_3$ thin films were 333,0.0095, and 31.1%, respectively.

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Phase shifters 응용을 위한 Sol-gel 법으로 제작된 BST 박막의 Ce 첨가에 따른 구조적, 유전적 특성 (Dielectric and Structural of BST Thin Films with Ce-doped prepared by Sol-gel method for Phase shifters)

  • 김동표;김창일
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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    • pp.776-779
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    • 2004
  • The dielectric and electrical characteristics of Ce doped (Ba0.6Sr0.4)TiO3 (BST) thin films were investigated as a function of Ce content. Both atomic force microscopy (AFM) and x-ray diffraction (XRD) analysis showed that increasing the Ce doping ratio causes the decrease in grain size while the surface remains smooth and crack-free. The dielectric properties of the Ce doped BST films were found to be strongly dependent on the Ce contents. The dielectric constant and dielectric loss of the BST films decreased with increasing Ce content. However, it was also found that, compared with undoped films, the increase of Cecontent improves the leakage-current characteristics. The improvement of the electrical properties of Ce-doped BST films may be related to the decrease in the concentration of oxygen vacancies. The figure of merit (FOM) reached the maximum value of 48.9 at the 1 mol % of Cedoping. The dielectric constant, loss factor, and tunability of the 1 mol% Ce doped Ba0.6Sr0.4TiO3 thin films were 320, 0.011, and 46.3%, respectively.

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Sol-gel 법으로 제작된 BST 박막의 Bi 첨가에 따른 구조적, 유전적 특성 (Fabrication of BST thin films with Bi addition by Sol-gel method and their Structure and Dielectric properties)

  • 김경태;김창일
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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    • pp.18-21
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    • 2004
  • An alkoxide-based sol-gel method was used to fabricate $Ba_{0.6}Sr_{0.4}TiO_3$ thin films doped by Bi from 5 to 20 mol% on a $Pt/Ti/SiO_2/Si$ substrate. The structural and dielectric properties of BST thin films were investigated as a function of Bi dopant concentration. The dielectric properties of the Bi doped BST films were strongly dependent on the Bi contents. The dielectric constant and dielectric loss of the films decreased with increasing Bi content. However, the leakage current density of the 10 mol% Bi doped $Ba_{0.6}Sr_{0.4}TiO_3$ thin film showed the lowest value of $5.13{\times}10^{-7}\;A/cm^2$ at 5 V. The figure of merit (FOM) reached a maximum value of 32.42 at a 10 mol% Bi doped $Ba_{0.6}Sr_{0.4}TiO_3$ thin films. The dielectric constant, loss factor, and tunability of the 10 mol% Bi doped $Ba_{0.6}Sr_{0.4}TiO_3$ thin films were 333, 0.0095, and 31.1%, respectively.

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Tunable 소자 응용을 위한 솔젤법으로 제작한 PST 박막의 유전 특성 (Dielectrical properties of PST thin films for tunable microwave device)

  • 김경태;김창일;이철인;김태형
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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    • pp.288-291
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    • 2002
  • An alkoxide-based sol-gel method was used to fabricate $(Pb_{x},Sr_{1-x})$TiO3 (PST) thin films on a Pt/Ti/SiO2/Si substrate, and the dielectric properties of the PST thin films were investigated as a function of the Pb/Sr composition for use in tunable microwave device applications. The dielectric properties of the PST films were strongly dependent on the Pb/Sr ratio. The dielectric constant and dielectric loss of the PST films increased with increasing Pb content, and the figure of merit (FOM) reached a maximum value of 27.5 at a Pb/Sr ratio of 4:6. The tunability increased with increasing Pb content. The dielectric constant, loss factor, and tunability of PST (50/50) thin films were 404, 0.023, and 51.73%, respectively. From the result, the PST films with good dielectric properties are useful candidates for tunable microwave device.

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PNST세라믹스의 유전 및 변형특성에 관한 연구 (A Study on the Dielectric and Strain Properties of PNST Ceramics)

  • 김진수;이덕출
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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    • pp.331-334
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    • 1998
  • The solid solutions of the Pb(Sc$\_$0.5/Nb$\_$0.5/)$\_$0.57/Ti$\_$0.43/O$_3$ system were prepared. In the PSNT system, it had been known that two-phase region between the rhombohedral and tetragonal phases was observed between 0.425 of PT at room temperature. In this paper, Fe$_2$O$_3$-doped 0.57PSN-0.43PT composition was prepared by conventional method. The dielectric and strain properties were examined using an computerized measuring apparatus, and the resonance characteristics were measured using an impedance gain phase analyzer. We got the data of dielectric constant, dielectric loss, piezoelectric coefficient, piezoelectric voltage coefficient, frequency constant strain constant mechanical quality factor and electromechanical coupling factor.

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MnO2가 첨가된 PSN-PNN-PT 세라믹스의 유전 및 압전특성 (Dielectric and Piezoelectric Properties of MnO2-doped PSN-PNN-PT Ceramics)

  • 이종덕
    • 센서학회지
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    • 제13권2호
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    • pp.152-156
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    • 2004
  • The dielectric and piezoelectric properties of 0.36Pb($Sc_{1/2}Nb_{1/2}$)$O_{3}$-0.25Pb($Ni_{1/3}Nb_{2/3}$)$O_{3}$-0.39Pb$TiO_{3}$ (hereafter PSNNT) at the morphotropic phase boundary (MPB) composition were investigated with $0{\sim}2.5$ mot% $MnO_{2}$ doping. Bulk density, dielectric loss and tetragonality of crystal structure were all improved with increasing $MnO_{2}$ additive content. With increasing $MnO_{2}$ additive content, the electromechanical coupling factor and quality factor were also increased: Electromechanical coupling $k_{p}$ and quality factor $Q_{m}$ at 2.0 mol% $MnO_{2}$ doping with were showed highest values of 55.6 % and 252, respectively.