• 한국화재소방학회논문지
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• 제28권6호
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• pp.108-113
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• 2014

유해물질처리를 효율적으로 개선하기 위해 슬라이딩아크방전(sliding arc plasma)과 corona dielectric barrier discharge(CDBD공정)의 복합공정을 이용하였다. 이장치는 OH 라디칼과 음이온을 생성하여 강력한 산화력으로 탈취 및 살균 효과를 가진다. 실험결과 SAP 반응기의 크기를 80 A를 50 A로 축소하여도 유해물질의 농도는 큰 변화가 없는 것으로 나타나 반응기의 규모를 최소화할 수 있을 것으로 판단된다. 그리고 CDBD 반응기에서 생성된 음이온과 오존은 유해물질과 반응한 후 음이온은 510,000 ppb에서 470 ppb, 오존은 98 ppb에서 22 ppb로 낮아짐을 확인하였다. 또한 플라즈마 발생장치의 안정성 및 내구성이 우수한 것으로 판단되었다. 따라서 본 연구를 통하여 향후 플라즈마복합공정을 이용하여 실내공기중에 존재하는 유해물질 제거를 효율적으로 할 수 있을 것으로 생각된다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 B
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• pp.1521-1523
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• 2005

High voltage plasma power supply was adopted to control polluted gases and an ozone generation. Bidirectional pulse power supply consisted of power semiconductor switch devices, a high voltage transformer, and a control board adapted switching method. Plasma power supply with sinusoidal bidirectional pulse, which has output voltage range of 0-20kV and output frequency range of 1kHz-20kHz, is realized. Using proposed system, pulsed high voltage/high frequency discharges were tested in a DBD(dielectric barrier discharge) reactor, and the spatial distribution of a glow discharge was observed. The system showed stable operational characteristics, even though the voltage and the frequency increased. Above features were verified by experiments.

• 반도체디스플레이기술학회지
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• 제15권2호
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• pp.26-31
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• 2016

The Townsend to glow discharge mode transition was investigated in the dielectric barrier discharge (DBD) helium plasma source which was powered by 20 kHz / $4.5 kV_{rms}$ high voltage at atmospheric pressure. The spatial profile of the electric field strength at each modes was measured by using the intensity ratio method of two helium emission lines (667.8 nm ($3^1D{\rightarrow}2^1P$) and 728.1 nm ($3^1S{\rightarrow}2^1P$)) and the Stark effect. ICCD images were analyzed with consideration for the electric field property. The Townsend discharge (TD) mode at the initial stage of breakdown has the light emission region located in the vicinity of the anode. The electric field of the light emitting region is close to the applied field in the system. Immediately, the light emitting region moves to the cathode and the discharge transits to the glow discharge (GD) mode. This mode transition can be understood with the ionization wave propagation. The electric field of the emitting region of GD near cathode is higher than that of TD near anode because of the cathode fall formation. This observation may apply to designing a DBD process system and to analysis of the process treatment results.

• 한국식품영양학회지
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• 제30권2호
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• pp.290-296
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• 2017

In this study, using the surface dielectric barrier discharge (DBD) produced at atmospheric pressure to improve the physiological activities of quercetin was investigated. Quercetin (at 200 ppm) was treated using air DBD with an input power of 250 W. The tyrosinase inhibition effect and total phenolic content of quercetin increased from 38.96 to 91.58% and from 134.53 to 152.93 ppm, respectively, after 20 min of plasma treatment. The antioxidant activity of quercetin treated for 20 min in the lipid models was higher than that of quercetin treated for 0, 5, and 10 min. Furthermore, plasma-treated quercetin exhibited antimicrobial activity against Listeria monocytogenes, Salmonella Typhimurium, and Staphylococcus aureus, whereas activity was not shown in the control. Structural modifications of the quercetin molecule induced by plasma might be responsible for the improvements in its physiological activity. These results indicate that DBD plasma could be used to enhance the physiological activity of quercetin for various applications in food.

• 한국표면공학회지
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• 제48권5호
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• pp.245-252
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• 2015

In recent years, the cleaning and activation technology of surfaces using atmospheric plasma as well as the deposition technology for coating using atmospheric plasma have been demonstrated conclusively and drawn increasing industrial attention. Especially, due to the simplicity, the technology using atmospheric plasma enhanced chemical vapor deposition has been widely studied from many researchers. The plasma source type commonly used as the stabilization of diffuse glow discharges for atmospheric pressure plasma enhanced chemical vapor deposition pressure is the dielectric barrier discharge. In this review paper, some kinds of modified dielectric barrier discharge type will be presented. And, the characteristics of silicon based compound such as SiOx and SiNx deposited using atmospheric plasma enhanced chemical vapor system will be discussed.

• 한국수산과학회지
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• 제55권6호
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• pp.910-916
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• 2022

The purpose of this study is to evaluate the effect of underwater non-thermal dielectric barrier discharge plasma (DBD plasma) on the sterilization of three types of pathogenic bacteria that cause diseases in freshwater fish and the reduction of a tetracycline antibiotics. This experiment was conducted in the DBD plasma generator, and the voltages used to generate plasma were 11.6 kV and 23.1 kV. The measurement intervals were 0, 1, 5, 10 and 15 min. As a result of DBD plasma treatment, Aeromonas hydrophila, Edwardsiella tarda and Pseudomonas fluorescens were removed 93-99% after 5 min at 23.1 kV, and the tetracycline antibiotics were reduced 70-95% after 15 min at 23.1 kV. In this study, as a result of treating the effluent with DBD plasma at a fish farm where the medicinal bath was conducted with oxytetracycline-HCl (OTC-HCl) products, OTC-HCl decreased by 62% after 10 min at 23.1 kV.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.552-552
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• 2013

In our study we consider Al2O3 ceramic substrates for Plasma Surface Treatments in order to improve deposited diamond surface and increase diamond deposition rate by applying DBD (Dielectric Barrier Dischrge) system. Because Plasma Surface Treatments was used as a modification method of material surface properties like surface free energy, wettability, and adhesion. By applying Plasma Surface Treatments diamond films are deposited on the Al2O3 ceramic substrates. DC Arc Plasmatron with mathane and hydrogen gases is used. Deposited diamond films are investigated by SEM (Scanning Electron Microscopy), AFM (Atomic Force Microscopy) and XRD (X-ray Diffractometer). Then the C-H stretching of synthetic diamond films by FTIR (Fourier Transform Infrared Spectroscopy) is studied. As a result, nanocrystalline diamond films were identified by using SEM and diamond properties in XRD peaks at (111, $43.8{\Box}$, (220, $75.3{\Box}$ and (311, $90.4{\Box}$ were shown. Absorption peaks in FTIR spectrum, caused by CHx sp3 bond stretching of CVD diamond films, were identified as well. Finally, we improved such parameters as depostion rate ($2.3{\mu}m$/h), diamond surface uniformity, and impurities level by applying Plasma Surface Treatments. These experimental results show the importance of Plasma Surface Treatments for diamond deposition by a plasma source.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2006년도 제33회 KOSCO SYMPOSIUM 논문집
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• pp.117-121
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• 2006

Non-thermal plasma technology has many applications in various areas. One of the applications is regenerating diesel particulate filter (DPF). DPF is a widely applied device to control the particulate emission of diesel engines. But it needs periodic removal of clogged soot for the smooth running of engine. Conventional high-temperature removal processes easily leads to the breakage of DPF. Herein, low-temperature plasma formed in a dielectric barrier discharge (DBD) reactor was used to form active oxidants such as ozone and nitrogen dioxide. Experimentally, the effects of discharge power and frequency on the performance of DBD reactor were studied. Two oxidants, $O_3$ and $NO_2$, were synthesized and used for incinerating soot in the used DPF. Performances of the two oxidants on the reduction of soot were compared, and it was found that $NO_2$ is more effective than $O_3$ for getting rid of soot

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2009년도 춘계학술대회 논문집
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• pp.95-95
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• 2009

대기압 플라즈마 발생장치를 이용한 식각장비 개발은 낮은 공정단가, 저온 공정, 다양한 표면처리 응용 효과와 같은 이점을 가지고 있어 현재, 많은 분야에서 연구되고 있다. 본 연구에서는, dielectric barrier discharge(DBD) 방식을 이용한 대기압 발생장치를 통해 평판형 디스플레이 제작에 응용이 가능한 $SiO_2$ 층의 식각에 대한 연구를 하였다. $N_2/NF_3$ gas 조합에 $CF_4$ 또는 $C_{4}F_{8}$ gas를 부가적으로 첨가하였다. 이때 N2 60 slm / NF3 600 sccm/CF4 7 slm/Ar 200 sccm의 gas composition에서 최대 260 nm/min의 식각 속도를 얻을 수 있었다.

• 산업식품공학
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• 제15권4호
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• pp.398-403
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• 2011

비열살균기술로서 저온플라즈마 활용 가능성을 탐색하고자 유전체장벽 방전 플라즈마(DBDP)생성장치를 제작하여 최적 플라즈마생성 조건을 도출하고 Staphyloocus aureus를 대상으로 살균성능을 조사하였다. DBDP생성장치는 전력공급장치, 변압기, 전극, 시료처리부 등 네 부분으로 구성하였다. 인가전압은 단상 200 V AC를 사용하고, 변압기를 통하여 10.0-50.0 kV로 변환하고 10.0-50.0 kHz의 주파수의 펄스 구형파를 유전체인 세라믹 블록 내에 장치한 전극에 투입함으로써 상압에서 플라즈마를 생성하였다. 주파수를 올림에 따라 높은 전류가 유입되었고, 이에 비례하여 전력소비량이 증가하였다. 전류세기 1.0-2.0 A, 주파수32.0-35.3 kHz 범위에서 균일하고 안정적인 플라즈마 발생이 이루어졌으며 시료를 투입하지 않은 상태에서의 최적 전극간격은 1.85 mm 이었다. 전극간격을 높임에 따라 소비전력이 증가하였으나 시료 처리에 적합한 전극간격은 2.65 mm였다. DBDP 처리에 의한 온도상승은 최대 20$^{\circ}C$에 불과하여 열에 의한 생물학적 효과는 무시할 수 있었으며 따라서 비열기술임이 확인되었다. Staphyloocus aureus를 대상으로 DBDP 처리할 경우 초기 5분 동안은 살균치가 직선적인 증가를 보이다가 이후 다소 완만해지는 경향을 보였으며 1.25 A에서 10분간 처리 시 살균치는 5.0을 상회하였다.