• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.1500-1503
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• 2009

In this paper, we studied about atmospheric pressure remote plasma ashing of photoresist(PR), by using a modified dielectric barrier discharge(DBD). The effect of various gas combinations such as $N_2/O_2$, $N_2/O_2+SF_6$ on the changes PR ashing rate was investigated as a function of power. The maximum PR ashing rate of 1850 nm/min was achieved at $N_2$ (70 slm)/ $O_2$ (200 sccm) + $SF_6$ (3 slm). We found that as the oxygen and fluorine radical peaks were increased, the ashing rate is increased, too.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.176-177
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• 2016

In the last few decades, attention toward atmospheric pressure plasma (APP) has been greatly increased due to the numerous advantages of those applications, such as non-necessity of high vacuum facility, easy setup and operation, and low temperature operation. The practical applications of APP can be found in a wide spectrum of fields from the functionalization of material surfaces to sterilization of medical devices. In the secondary battery industry, separator film has been typically treated by APP to enhance adhesion strength between adjacent films. In this process, the plasma is required to have high stability and uniformity for better performance of the battery. Dielectric barrier discharge (DBD) was usually adopted to limit overcurrent in the plasma, and we developed the pre-discharge technology to overcome the drawbacks of streamer discharge in the conventional DBD source which makes it possible to produce a super-stable plasma at atmospheric pressure. Simulations for the fluid flow and electric field were parametrically performed to find the optimized design for the linear jet plasma source. The developed plasma source (Plasmapp LJPS-200) exhibits spatial non-uniformity of less than 3%, and the adhesion strength between the separator and electrode films was observed to increase 17% by the plasma treatment.

• Applied Chemistry for Engineering
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• v.23 no.6
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• pp.608-613
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• 2012

Dielectric barrier discharge plasma reactor was applied to the removal of ethylene from a simulated storage facility ($1.0m^3$) of fruits and vegetables. The system operated in a closed-loop mode by feeding the contaminated gas to the plasma reactor and recirculating the treated gas back to the storage facility. The experiments were carried out with parameters such as discharge power, circulation flow rate, initial ethylene concentration and treatment time. The rate of ethylene decomposition was mainly controlled by the discharge power and the treatment time. With the other conditions kept constant, the ethylene decomposition rate in the presence of the manganese oxide ozone control catalyst installed downstream from the plasma reactor was lower than that in the absence of it. The suggests that unreacted ozone from the plasma reactor accumulated in the storage facility where it additionally decomposed ethylene. On the basis of an initial ethylene concentration of 50 ppm, the energy requirement for completing the decomposition was about 60 kJ.

• Korean Journal of Materials Research
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• v.16 no.9
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• pp.543-549
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• 2006

Polyimides (PI) are treated with $He/O_2$ and $He/O_2/NF_3$ atmospheric pressure rf dielectric barrier discharge in order to investigate the roles of $NF_3$ that is one of the PI etching gases. Surface changes are analyzed by x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and contact angle measurement. The surface roughness of PI and the ratio of C=O, which is hydrophilic functional group, is more increased by $He/O_2/NF_3$ discharge than by $He/O_2$ discharge. The C=O species on the PI surface is increased up to 30 percent with rf power. The surface roughness of PI is increased from 0.4 to 11 nm with rf power. The water drop contact angles on PI, however, are reduced from $65^{\circ}\;to\;9^{\circ}$ by plasma treatment independently of $NF_3$.

• Journal of Environmental Science International
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• v.27 no.8
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• pp.621-629
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• 2018

Many chemically active species such as ${\cdot}H$, ${\cdot}OH$, $O_3$, $H_2O_2$, hydrated $e^-$, as well as ultraviolet rays, are produced by Dielectric Barrier Discharge (DBD) plasma in water and are widely use to remove non-biodegradable materials and deactivate microorganisms. As the plasma gas containing chemically active species that is generated from the plasma reaction has a short lifetime and low solubility in water, increasing the dissolution rate of this gas is an important challenge. To this end, the plasma gas and water within reactor were mixed using the air-automizing nozzle, and then, water-gas mixture was injected into water. The dissolving effect of plasma gas was indirectly confirmed by measuring the RNO (N-Dimethyl-4-nitrosoaniline, indicator of the formation of OH radical) solution. The plasma system consisted of an oxygen generator, a high-voltage power supply, a plasma generator and a liquid-gas mixing reactor. Experiments were conducted to examine the effects of location of air-automizing nozzle, flow rate of plasma gas, water circulation rate, and high-voltage on RNO degradation. The experimental results showed that the RNO removal efficiency of the air-automizing nozzle is 29.8% higher than the conventional diffuser. The nozzle position from water surface was not considered to be a major factor in the design and operation of the plasma reactor. The plasma gas flow rate and water circulation rate with the highest RNO removal rate were 3.5 L/min and 1.5 L/min, respectively. The ratio of the plasma gas flow rate to the water circulation rate for obtaining an RNO removal rate of over 95% was 1.67 ~ 4.00.

• Journal of Environmental Health Sciences
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• v.38 no.2
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• pp.159-165
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• 2012

Objectives: This experiment was carried out to elucidate the effect of discharged water on the disinfection of $Phytophthora$ $capsici$ and evaluate the water characteristics. Methods: The dielectric barrier discharges (DBD) plasma reactor system used in this study consisted of a plasma component [discharge, ground electrode and quartz dielectric tube], high voltage source, and air supply. The effects of water characteristics such as pH, ORP and conductivity and the disinfection effect of discharged water were investigated. Results: Experimental results showed that in the process of discharge, the pH decreased, whereas ORP and electric conductivity increased. When the discharge time was 30 min, $Phytophthora$ $capsici$ of 2.94 log was disinfected within 300 seconds. Disinfection performance of stored discharged water was maintained for three days; however the disinfection effect vanished after five days. When $Phytophthora$ $capsici$ was injected into the discharged water, the disinfection effect decreased after two days. Conclusions: It is considered that the main disinfection parameters of the discharged water were chemically active species such as $H_2O_2$ and $O_3$ and high ORP.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2344-2347
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• 2007

To generate negative ion, a small dielectric barrier discharge (DBD) plasma reactor was used in this study and operated by high AC voltage. With increasing of voltage, we can get more negative ions. However unfortunately, if the input voltage is too high, it will also cause formation of ozone which is very harmful to human being health. So the work of finding out the best condition of Voltage and frequency was carried out firstly. After several times of measurement, operating at 20 kHz frequency is the best condition generating high ion concentration without ozone. For the purpose of finding out the best reactor structure, two types of surface dielectric barrier discharge (DBD) reactors were examined to produce negative oxygen ions at the conditions of 20 kHz frequency. The results indicated that the surface DBD reactor with several small tips showed better characteristics for generation of negative oxygen ions at the same condition.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.4
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• pp.524-533
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• 2003

DBD(Dielectric Barrier Discharge) plasma in air is well established for the production of large quantities of ozone and is more recently being applied to aftertreatment processes for HAPs(Hazardous Air Pollutants). Aim of this work is to determine design and operating parameters of a hybrid air cleaning system. DBD and ESP(Electrostatic Precipitator) are used as nano particle charger and collector, respectively. Pelletized MnO$_2$ catalyst or activated carbon is used fer ozone decomposition or adsorption material. AC voltage of 7～10 KV(rms) and 60 Hz is used as DBD plasma source. DC - 8 KV is applied to the ESP for particle collection. The overall particle collection efficiency for the hybrid system is over 85 % under 0.64 m/s face velocity. Ozone decomposition efficiency with pelletized MnO$_2$ catalyst or activated carbon packed bed is over 90 % when the face velocity is under 0.4 m/s in dry air.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.9
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• pp.421-426
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• 2005

A wire-plate discharge system with a slit barrier has been proposed and investigated experimentally by focusing on the discharges on the slit barrier and ozone generation characteristics. This wire-plate discharge system with a slit barrier can generate an intensive corona discharges, and produce corona discharge twice, once from the corona wire electrode and second time from the surface and the slits of the slit dielectric barrier. As a result this propose wire-plate discharge system with the slit barrier can produce greatly increased ozone than without the slit barrier. This type of wire-plate discharge system with the slit barrier could be used for effective ozone generation as a means with retard to the removal of pollutant gas

• Journal of Korean Society of Water and Wastewater
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• v.33 no.4
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• pp.243-250
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• 2019

This objective of this study was to investigate the degradation characteristics of phenol, a refractory substance, by using a submerged dielectric barrier discharge (DBD) plasma reactor. To indirectly determine the concentration of active species produced in the DBD plasma, the dissolved ozone was measured. To investigate the phenol degradation characteristics, the phenol and chemical oxygen demand (COD) concentrations were evaluated based on pH and the discharge power. The dissolved ozone was measured based on the air flow rate and power discharged. The highest dissolved ozone concentration was recorded when the injected air flow rate was 5 L/min. At a discharge power of 40W as compared to 70W, the dissolved ozone was approximately 2.7 - 6.5 times higher. In regards to phenol degradation, the final degradation rate was highest at about 74.06%, when the initial pH was 10. At a discharged power of 40W, the rate of phenol decomposition was observed to be approximately 1.25 times higher compared to when the discharged power was 70W. It was established that the phenol degradation reaction was a primary reaction, and when the discharge power was 40W as opposed to 70W, the reaction rate constant(k) was approximately 1.72 times higher.