• 한국전산유체공학회:학술대회논문집
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• 2010.05a
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• pp.365-367
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• 2010

In this paper, we presented the exact Riemann solver for the air-water two-phase shock tube problems where the strength of the propagated sock wave is moderately weak. The shock tube has a diaphragm in the middle which separates water medium in the left and air medium in the right. By rupturing the diaphragm, various waves such as rarefaction wave, shock wave and contact discontinuity are propagated into water and air. Both fluids are treated as compressible, with the linearized equations of state. We used the isentropic relations for the air and water assuming a weak shock wave. We solved the shock tube problem considering a high pressure in the water and a low pressure in the air. The numerical results cleary showed a left-traveling rarefaction wave in the water, a right-traveling shock wave in the air, and the right-traveling material interface.

• Journal of computational fluids engineering
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• v.15 no.3
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• pp.73-80
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• 2010

In this paper, we present the exact Riemann solver for the compressible liquid-gas two-phase shock tube problems. We hereby consider both isentropic and non-isentropic two-phase flows. The shock tube has a diaphragm in the mid-section which separates the liquid medium on the left and the gas medium on the right. By rupturing the diaphragm, various waves are observed on the phasic field variables such as pressure, density, temperature and void fraction in the form of rarefaction wave, shock wave and material interface (contact discontinuity). Both phases are treated as compressible fluids using the linearized equation of state or the stiffened-gas equation of state. We solve several shock tube problems made of a high/low pressure in the liquid and a low/high pressure in the gas. The wave propagations are well resolved by the exact Riemann solutions.

• Transactions on Electrical and Electronic Materials
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• v.18 no.1
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• pp.25-29
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• 2017

This paper presents a unique pressure sensor design for environmental applications. The design uses a new geometry for a multi bossed beam-membrane structure with a SOI (silicon-on-insulator) substrate and a mechanical transducer. The Intellisuite MEMS CAD design tool was used to build and analyze the structure with FEM (finite element modeling). The working principle of the multi bossed beam structure is explained. FEM calculations show that a sensing diaphragm with Mises stress can provide superior linear response compared to a stress-free diaphragm. These simulation results are validated by comparing the estimated deflection response. The results show that, the sensitivity is enhanced by using both the novel geometry and the SOI substrate.

• Electrical & Electronic Materials
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• v.10 no.9
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• pp.938-944
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• 1997

Cu-Ni thin film strain gauges for diaphragm-type pressure sensors were developed. Thin films of Cu-Ni alloys of various compositions were deposited onto glass and stainless steel substrates by RF magnetron sputtering. The effects of composition substrate temperature Ar partial pressure and aging on the electrical properties of Cu-Ni film strain gauges in the thickness range 500~2000$\AA$ are discussed. The maximum resistivity(95.6 $\mu$$\Omega$cm) is obtained from 53wt%Cu-47wt%Ni films while the temperature coefficient of resistance(TCR) becomes minimum(25.6ppm/$^{\circ}C$). The gauge factor is about 1.9.

• The Journal of the Acoustical Society of Korea
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• v.14 no.2E
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• pp.12-18
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• 1995

Capactive miro pressure sensor is simulated with finite element methods to analyze the effect of geometrical variation on its performace. Sensor material is th silicon single crystal. The sensor consists of a disk type diaphragm and several bridges connected to a rigid frame. Structural variables in consideration are the thickness of the diaphragm and the bridges, radius of the circular plate, and the number of bridges. Results of static, dynamic and sensitivity analyses reveal the best structure of the sensor among the fifteen cases under investigation.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.3
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• pp.228-233
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• 2007

Core technologies for integrating hydrogen gas sensor were investigated. In this study, the thermally isolated micro-hot-plate with areas of $100{\times}100-260{\times}260{\mu}m^2$ was fabricated by utilizing surface micromachining technique that provides better manufacturing yield than bulk micromachining counterpart. The optimum design of the sensor was peformed by analyzing the thermal profile of the structure obtained from a ANSYS simulator. The 400-nm-thick polysilicon films doped with phosphorus, the 300-nm-thick aluminum films, and the 200-nm-thick $SnO_2$(or ZnO)films were used as the micro-heater material, the temperature sensor material, and the gas sensitive material, respectively. The experimental results show that the developed gas sensors can detect $H_2$ concentration as low as 1 ppm.

• Journal of Biomedical Engineering Research
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• v.22 no.5
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• pp.403-412
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• 2001

The Present study analyzed the pressure-flow characteristics of a Korean shunt valve. Changes in the characteristic currie depending on the design parameters were also investigated. The Korean shunt valve used in the present study was constant pressure type and our analyses were validated through experiments. We applied fluid-structure interaction to solve the flow dynamic Problem because the small diaphragm in the valve was made from flexible silicone elastomers. Considering the material nonlinearity of the hyper-elastic material. the Mooney-Rivlin approximation was employed. The results of the numerical analyses were close to the experimental results The major Pressure drop was observed to happen in the small diaphragm. The slope of the pressure-flow characteristic curve was computed to be 0.37mm$H_2O$.hr/cc, which was similar to the average value of commercial shunt valves. 0.40mm$H_2O$.hr/cc. Therefore. our valves analyzed in the Present study showed a Proper Pressure control characteristics of the constant pressure type shunt valves. The opening pressure could be controlled by adjusting the amount of predeflection of the valve diaphragm. In order to obtain opening pressures of 25mm$H_2O$ and 80mm$H_2O$, respectively, and the required predeflection was found to be 10.2$\mu$m and 35.3$\mu$m. The flow orifice size was found to be within 10$\mu$m during valve operation Therefore, Precision design and manufacturing techniques are necessary for successful operations of the shunt valve. The study indicated the amount of predeflection as well as the magnitude of corner rounding of the diaphragm edge are important design parameters to influence the slope of the pressure-flow characteristic curve.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1401-1406
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• 2003

Mechanical behavior of a piezoelectric actuator is studied as a preceding research for the manufacturing of three-dimensional micro-structures. It is needed to examine the simulation of a piezoelectric actuator according to applied direction of voltage, by researching displacement characterization of piezoelectric material through piezoelectric theory. To this end, finite element modeling is employed to study the response of a piezoelectric material under the various input voltages. Where the actuator is simulated by use of ANSYS. To avoid direct contact piezoelectric material with working fluid, silicon, polymer, etc., the actuator is modeled with nickel fixed diaphragm.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.416-417
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• 2005

In this study, we optimized the process of Si anisotropy etching by combing tetramethyl ammonium hydroxide (TMAH) etching process with ultrasonic wave technology. New ultrasonic TMAH etching apparatus was developed and it was used for fabricating a $20{\mu}m$ thick diaphragm for Si piezoresistive pressure sensors. Based on comparison study on etch rate and surface flatness, it was observed that the Si anisotropy etching methode with new ultrasonic TMAH etching apparatus (at 40 kHz/ 500 watt) was superior to conventional etching methods with TMAH or TMAH+ammonium persulfate(AP) solutions.

• Transactions on Electrical and Electronic Materials
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• v.13 no.5
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• pp.215-220
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• 2012

Miniature ultrasonic and tactile sensors on Si substrate have been proposed, fabricated and characterized to detect objects for a dexterous robot. The ultrasonic sensor consists of piezoelectric PZT thin film on a Pt/Ti/$SiO_2$ and/or Si diaphragm fabricated using a micromachining technique; the ultrasonic sensor detects the piezoelectric voltage as an ultrasonic wave. The sensitivity has been enhanced by improving the device structure, and the resonant frequency in the array sensor has been equalized. Position detection has been carried out by using a sensor array with high sensitivity and uniform resonant frequency. The tactile sensor consists of four or three warped cantilevers which have NiCr or $Si:B^+$ piezoresistive layer for stress detection. Normal and shear stresses can be estimated by calculation using resistance changes of the piezoresitive layers on the cantilevers. Gripping state has been identified by using the tactile sensor which is installed on finger of a robot hand, and friction of objects has been measured by slipping the sensor.