• Proceedings of the KIEE Conference
• /
• 1996.07c
• /
• pp.1960-1962
• /
• 1996

A thermopneumatic micropump with two micronozzles has been fabricated and tested. The actuator consists of a p+ diaphragm and a pyrex glass on which a microheater is deposited. Two micronozzles are fabricated on either side of a single silicon wafer and behave as a dynamic passive valves. The actuator and the micronozzle are assembled to make a micropump. The center deflection of the actuator diaphragm to step voltage input has been measured. The dynamic test hag been performed by measuring the center deflection of the diaphragm under various input voltages and duty ratios. Also dynamic pumping test is performed. The measured built-up pressure between inlet and outlet of the micropump is 80 Pa for the actuation at 20V, 10 Hz.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2003.07a
• /
• pp.160-163
• /
• 2003

This paper describes on anodic bonding characteristics of MLCA(Multi Layer Ceramic Actuator) to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with same properties were deposited on MLCA under optimum RF magneto conditions(Ar 100 %, input power $1\;/cm^2$). After annealing in $450^{\circ}C$ for 1 hr, the anodic bonding of MLCA to Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in - 760 mmHg. Then, the MLCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity is 0.05-008 %FS. Moreover, any damages or separation of MICA/Si bonded interfaces do not occur during actuation test. Therefore, it is expected that anodic bonding technology of MICA/Si wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

• Proceedings of the KIEE Conference
• /
• 1994.07a
• /
• pp.141-143
• /
• 1994

In this paper, an electrostatic micro-actuator is fabricated using flat p+ diaphragm. To avoid the buckling of the flat p+ diaphragm, the processes are designed appropriately. The fabrication processes of the actuator are the anisotropic etching with EPW, the boron diffusion process, Al deposition and the silicon to glass bonding using the negative photoresist. The distance between the p+ and Al electrodes is $10{\mu}m$, and the thickness of the p+ diaphragm is $2{\mu}m$. The measurement of the characteristic of the actuator is performed at 50V. The center displacement of the diaphragm is $1.5{\mu}m$ at 10Hz. In comparison with the experimental data of the actuator with corrugated diaphragm, it is confirmed that the actuator with flat diaphragm is more effective than that with corrugated one in the small deflection region.

• Proceedings of the Computational Structural Engineering Institute Conference
• /
• 2006.04a
• /
• pp.725-732
• /
• 2006

This study has been started for the development of a refined live load distribution formula that has safety and precision toward I type prestressed concrete girder bridge. This type of bridge is mainly applied to short span bridges that are $25{\sim}40m$ in length. Based on various structure analysis models that are currently being applied as preceding studies for the development of live load distribution method. an analysis of flexural stiffness ratio for barrier and diaphragm has been performed. As the result of parametric analysis for the changes in flexural stiffness ratio, the effect of barrier on load distribution showed as insignificant in all structural analysis models while analyzing the deflection distribution. Also. the deflection distribution of the models with stiffness of 25% in which the diaphragm eccentricity is accounted for as same as the models with stiffness of 100% in which the diaphragm eccentricity is unaccounted for. This results are verified through the comparison with a experimental data.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.14 no.12
• /
• pp.987-993
• /
• 2001

In this paper, we presents the construction details and output characteristics of a thick film piezoresistive strain gage. The thick film was printed on the ceramic diaphragm back side by screen printing and cured at 850$^{\circ}C$. The strain distribution and deflection on ceramic diaphragm were performed with finite-element method(FEM tool ANSYS-5.3). Various thick film strain gage characteristics were analysed, including nonlinearity, hysteresis, stability and sensitivity of thick film strain gages.

• 한국신재생에너지학회:학술대회논문집
• /
• 2009.06a
• /
• pp.769-772
• /
• 2009

Diaphragm compressors are used for a hydrogen compression because it can achieve high gas pressure with high purity. But diaphragm's lifetime may depend on the shape of the cavity and deflection from fluctuation the pressure change, which is necessary to monitored. In this study, the gas and hydraulic oil pressure in the cavity were measured as piston speed varies for diaphragm compressor. The results show pressure change quantities were reduced and maximum pressure points are delayed as the piston moves faster. And the hydraulic pressure were elevated as gas pressure elevated. And the compression period was more faster than expansion period.

• Proceedings of the KIEE Conference
• /
• 1999.11d
• /
• pp.1154-1156
• /
• 1999

This paper presents the novel fabrication of an electromagnetic micro actuator with a corrugated diaphragm and a flat one. The actuator consists of a Parylene diaphragm with a spiral copper coil and a permanent magnet. The cower coil is fabricated by electroplating and patterning. As the further works, the frequency response of the actuator are obtained by using a laser vibrometer and the static deflection of the actuator diaphragm are measure by using laser displacement meter. The corrugated diaphragm is expected to be better than the flat one with respect to the actuator performance.

• Journal of the Optical Society of Korea
• /
• v.16 no.1
• /
• pp.22-28
• /
• 2012

We report a focal-length tunable liquid lens based on thermopneumatically driven fluidic pressure. The fluidic pressure is generated by deformation of an elastomeric diaphragm induced by thermopneumaticity from a laterally integrated microheater sealed within an air chamber. The pressure is transmitted by a confined liquid to a lens diaphragm through an internal fluid channel. The liquid filling under the lens diaphragm functions as a liquid lens for dynamic focusing with properties depending on the curvature of the deformed diaphragm. The diaphragm area of the air chamber is designed five times larger than that of the lens cavity to yield high focal-length tunability by amplified deflection of the lens diaphragm. With our method, we achieved excellent focal-length tunability from infinity (without an input current) to 4 mm (with an input current of 12 mA) with a lens aperture diameter of 2 mm.

• Journal of Mechanical Science and Technology
• /
• v.15 no.7
• /
• pp.1061-1071
• /
• 2001

The present study investigated design parameters of shunt valves and anti-siphon device used to treat patients with hydrocephalus. The shunt valve controls drainage of cerebrospinal fluid (CSF) through passive deflection of a thin and small diaphragm. The anti-siphon device(ASD) is optionally connected to the valve to prevent overdrainage when the patients are in the standing position. The major design parameters influencing pressure-flow characteristics of the shunt valve were analyzed using ANSYS structural program. Experiments were performed on the commercially available valves and showed good agreements with the computer simulation. The results of the study indicated that predeflection of the shunt valve diaphragm is an important design parameter to determine the opening pressure of the valve. The predeflection was found to depend on the diaphragm tip height and could be adjusted by the diaphragm thickness and its elastic modulus. The major design parameters of the ASD were found to be the clearance (gap height) between the thin diaphragm and the flow orifice. Besides the gap height, the opening pressure of the ASD could be adjusted by the diaphragm thickness, its elastic modulus, area ratio of the diaphragm to the flow orifice. Based on the numerical simulation which considered the increased subcutaneous pressure introduced by the tissue capsule pressure on the implanted shunt valve system, optimum design parameters were proposed for the ASD.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.25 no.4
• /
• pp.602-609
• /
• 2001

This paper is concerned with the orthotropic problem of diaphragm-type air springs which consist of rubber linings, nylon reinforced rubber composite and bead ring. The analysis is carried out with a finite element method developed to consider the orthotropic properties, geometric nonlinearity using four-node degenerated shell element with reduced integration. Physical stabilization scheme is used to control the zeroenergy mode of the element. The analysis includes an inflation analysis and a lateral analysis of an air spring for the deformed shape and the spring load with respect to the vertical and l ateral deflection. Numerical results demonstrate the variation of the outer diameter, the fold height, the vertical force and the lateral force with respect to the inflation pressure and the lateral deflection.