• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.113-118
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• 2005

Small form factor optical disks for near-field optics using solid immersion lens were developed. Disk durability properties in terms of head-disk interface (HDI) properties were investigated by drag test, diamond like carbon film and lubricant film were coated on the small form factor disk to enhance HDI. Disks with glass substrates and lubricant films after heat treatment showed more durable characteristics. Coverlayers made of UV resin were uniformly coated by spin coating In which the ski-jump could not be formed by adopting outer ring technique.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.05a
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• pp.116-117
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• 2015

수소가 없는 고경도 카본막의 수요가 증대됨에 따라, 자장 여과 아크법으로 증착되는 ta-C막을 1um 이상 증착하는 공정 기술에 대한 연구 내용을 발표하고자 한다.

• Transactions of the Society of Information Storage Systems
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• v.2 no.1
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• pp.26-31
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• 2006

Small form factor optical disks for near-field optics using solid immersion lens were developed. Diamond like carbon film and lubricant film were coated on the small form factor optical disk to enhance the head-disk interface(HDI) characteristics. The disk durability properties in terms of HDI phenomena were investigated by drag test. Disks with glass substrates and the lubricant films experienced heat treatment showed more durable characteristics. Coverlayers made of UV resin were uniformly coated by spin coating in which the ski-jump could be removed by adopting outer ring technique

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.05a
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• pp.128-128
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• 2012

Korea institute of materials science (KIMS) has researched an anode layer linear ion source (ALIS) for various roll-to-roll treatment processes. The ALIS can be used to Ar ion beam (1~2 keV) treatment, and diamond-like carbon coating and so on. The treatment width of ALIS is 500 mm with a uniformity below 5 % (=(Max-min)/(Max+min)). We also demonstrate the status of development of ALIS in a roll-to-roll industry.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.14 no.5
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• pp.22-27
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• 2015

Processing of low toughness graphite material requires high-speed machine tools and DLC coating. In this study, results of investigation of the tool wear and machining properties of the DLC coating according to the thickness, and the machining time of the tool used for the machining of graphite electrodes, were as follows. 1. DLC coating thickness shows a larger wear amount of the tool center in accordance with thickness; the wear amount of the tool increases in proportion to the machining time. 2. The difference between the amount of wear depending on the processing time shows edge portions larger than the tool wear amount in the center. This amount of wear of the tool edge is formed since the rotating torque is in contact with the graphite material surface significantly more than the central portion. 3. The thicker the DLC coating, the more the coating tool eliminated of the coating area by the interface between the cemented carbide tool being coated with an increased friction of the graphite material and the DLC coating area.

• Journal of the Korean institute of surface engineering
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• v.36 no.2
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• pp.148-154
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• 2003

Short ($\tau$=40 $mutextrm{s}$) and high-voltage ($U_{sub}$=2~8 kV) negative substrate bias pulses were used to assist pulsed magnetron sputtering DLC films deposition. Space- and time-resolved probe measurements of the plasma characteristics have been performed. It was shown that in case of high-voltage substrate bias spatial non-uniformity of the magnetron discharge plasma density greatly affected DLC deposition process. By Raman spectroscopy it was found that maximum percentage of s $p^3$-bonded carbon atoms (40 ~ 50%) in the coating was attained at energy $E_{c}$ ~700 eV per deposited carbon atom. Despite rather low diamond-like phase content these coatings are characterized by good adhesion due to ion mixing promoted by high acceleration voltage. Short duration of the bias pulses is also important to prevent electric breakdowns of insulating DLC film during its growth.wth.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.356-356
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• 2010

Tribological behaviors of the hard film on soft substrate system were explored using the hard thin film of diamond-like carbon (DLC) coated the soft polymer of polydimethysiloxane (PDMS). A DLC film with the Young's modulus of 100 GPa was coated on PDMS substrate with Young's modulus of 10 MPa using plasma enhanced chemical vapor deposition (PECVD) technique. The deposition time was varied from 10 sec to 10 min, resulting in nanoscale roughness of wrinkle patterns with the thickness of 20 nm to 510 nm, respectively, at a bias voltage of $400\;V_b$, working pressure 10 mTorr. Nanoscale wrinkle patterns with 20-100 nm in width and 10-30 nm height were formed on DLC coating due to the residual stress in compression and difference in Young's modulus. Nanoscale roughness effect on tribological behaviors was observed by performing a tribo-experiment using the ball-on-disk type tribometer with a steel ball of 6 mm in diameter at the sliding speed of 220 rpm, normal load of 1N and 25% humidity at ambient temperature of $25^{\circ}C$. Friction force were measured with respect to thickness change of coated DLC thin film on PDMS. It was found that with increases the thickness of DLC coating on PDMS, the coefficient of friction decreased by comparison to that of the uncoated PDMS. The wear tracks before and after tribo-test were analyzed using SEM and AFM.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.363-363
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• 2010

The high capillarity of a plastic fiber network having superhydrophilic Si-DLC coating is studied. Although the superhydrophilic surface maximize wetting ability on the flat surface, there remains a requirement for the more wettable surface for various applications such as air-filters or liquid-filters. In this research, the PET non-woven fabric surface was realized by superhydrophilic coating. PTE non-woven fabric network was chosen due to its micro-pore structure, cheap price, and productivity. Superhydrophobic fiber network was prepared with a coating of oxgyen plasma treated Si-DLC films using plasma-enhanced chemical vapor deposition (PECVD). We first fabricated superhydrophilic fabric structure by using a polyethylene terephthalate (PET) non-woven fabric (NWF) coated with a nanostructured films of the Si-incorporated diamond-like carbon (Si-DLC) followed by the plasma dry etching with oxygen. The Si-DLC with oxygen plasma etching becomes a superhydrophilic and the Si-DLC coating have several advantages of easy coating procedure at room temperature, strong mechanical performance, and long-lasting property in superhydrophilicity. It was found that the superhydrophobic fiber network shows better wicking ability through micro-pores and enables water to have much faster spreading speed than merely superhydrophilic surface. Here, capillarity on superhydrophilic fabric structure is investigated from the spreading pattern of water flowing on the vertical surface in a gravitational field. As water flows on vertical flat solid surface always fall down in gravitational direction (i.e. gravity dominant flow), while water flows on vertical superhydrophilic fabric surface showed the capillary dominant spreading.

• Corrosion Science and Technology
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• v.10 no.2
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• pp.65-70
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• 2011

DLC is considered as the candidate material for application of moving parts in automotive components relatively in high pressure and temperature operating conditions for its high hardness with self lubrication and chemical inertness. The properties of interlayer between the substrate and the DLC film were studied. Arc ion plating method have been employed to deposit onto substrate and sputtering method was used for synthesizing DLC onto interlayer. Among these six types of interlayer, deposited DLC film onto TiCN showed excellent value for characteristics. From the results of analysis for physical properties of DLC films, it seems that the adhesion forces were more important factors than intrinsic mechanical properties such as hardness, roughness and wear resistance of DLC films. AFM(Atomic Force Microscope) was used for understanding roughness of DLC films. Hardnesses of the coating layers were identified by nano-indentation method and adhesions were checked by scratch method.

• Tribology and Lubricants
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• v.21 no.3
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• pp.130-135
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• 2005

Dry sliding wear resistance of DLC coated silicon disk with different surface roughness has been evaluated using a ball-on-disk sliding tester. It was found that the transfer layer formed on steel ball produced a low friction regime and the formation of transfer layer was more active with increasing the substrate surface roughness. Wear life of DLC coating was increased as increasing the real area of contact.