• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1532-1535
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• 1996

Diamond-like carbon (DLC) films have been prepared by a widely-used plasma CVD with an rf (13.56MHz) plasma of $CH_4$ gas. The hydrogen incorporated in DLC films plays an important role of determining the film properties, but its exact role has not been clear. In this study, the effect of hydrogen on the film properties of DLC has been examined by adding the hydrogen gas to the $CH_4$ gas during deposition and by exposing the prepared film to the hydrogen plasma. As the content of additive hydrogen gas increases, the density and hardness of the film increase, but the growth rate decreases. The FT-IR spectroscopy results show that the number of C-H bonds decreases with increasing the hydrogen gas. Also, the variation in the position of "G" and "D" peaks due to additive hydrogen, which has been measured by the Raman spectroscopy, indicates of $sp^3$ fraction.

• 한국재료학회지
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• 제7권1호
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• pp.8-14
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• 1997

DLC막은 여러가지 기술적인 응용에 매우 기대된느 재료이다. 탄화수소 가스의 플라즈마 분해에 의해 증착되는 DLC 막은 높은 경도, 화학적 안정성, 높은 전기 저항성, 적외선 영역의 투과성 등의 여러가지 우수한 성질을 지니고 있다. 그러나 이들막은 높은 내부응력으로 인하여 실제 응용에 상당한 제약을 받고 있다. 본 연구에서는 rf PECVD 법에 의해 합성된 다이아몬드상 탄소막을 보조가스 첨가에 따른 영향에 대하여 조사하였다. 수소가스를 첨가하여 합성된 DLC막의 잔류응력 거동은 낮은 이온 에너지 (V$_{b}$ $P^{1}$2/-20Volt/m Torr)에서 최대 잔류응력이 발생되지만, 질소 가스를 첨가시키면 높은 이온(V$_{b}$ P$_{1}$2/->70Volt/m Torr)에너지 영역에서 잔류응력의 감소가 나타났다. 수소 량이 증가하면 ion bombardment와 식각 작용을 하고, 질소의 경우 막의 표면 스퍼터링 현상이 발생되었다. 보조가스 첨가에 따라 S$P^{3}$net work구조의 생성과 소멸의 결합 구조를 형성하여, 보조가스 첨가는 DLC막의 잔류응력 거동에 영향을 미치는 것을 알 수 있었다. 이온 에너지에 따른막의 비저항은 막 합성 공정 조건에 관계없이 $10^{6}$-$10^{7}$ Ωm 의 범위에서 분포하고 있는 것으로 조사되었다. 이는 메탄가스(rf PECVD)로 합성된 DLC막의 비저항과 거의 일치하는 것으로 나타났다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.487-488
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• 2006

As DLC coating possesses such features as, high hardness, high elasticity, abrasion resistance and chemical stability, there have been exerted continuous efforts in research works in a variety of fields, and this technology has also been applied widely to industrial areas. In this research work, the optimal grinding condition was identified using Microlens Process Machine in order to contribute to the development of aspheric glass which is to be used for mobile phone module having 2 megapixel and $2.5{\times}$ zoom, and mold core (WC) was manufactured having performed ultra-precision machining and effects of DLC coating on shape accuracy(P-V) of mold core and surface roughness(Ra) as well were measured and evaluated.

• Tribology and Lubricants
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• 제38권6호
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• pp.227-234
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• 2022

Recently, the demand for improving energy efficiency has rapidly increased because of the growing concerns over environmental issues. In this work, the tribo-test and simulation for the initial wear and lubrication performance were performed for the piston pin in the small end system of the connecting rod of a marine engine, to obtain useful data for improving the efficiency of marine engine systems. In addition, a diamond-like carbon (DLC) coating was applied to the piston pin to explore feasibility of eliminating the bush used in the system. The initial wear and lubrication characteristics between the uncoated piston pin and bush were compared with that between the DLC-coated piston pin and connecting rod in the tribo-test. The simulation for the wear and lubrication performance according to the wear progression was conducted based on the data obtained from the test. The wear characteristics were quantitatively assessed by the wear depth and wear volume, and the lubrication performance was characterized with the change of pressure and minimum oil film thickness with respect to the crank angle. It was found that the DLC-coated piston pin may provide better initial wear characteristics and lubrication performance. The results of this work may provide fundamental information for marine engines with improved efficiency.

• 한국해양공학회지
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• 제25권6호
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• pp.60-65
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• 2011

A low temperature plasma carburizing process was performed on AISI 316L austenitic stainless steel to achieve an enhancement of the surface hardness without degradation of its corrosion resistance. Attempts were made to investigate the influence of the processing temperatures on the surface hardened layer during low temperature plasma carburizing in order to obtain the optimum processing conditions. The expanded austenite (${\gamma}_c$) phase, which contains a high saturation of carbon (S phase), was formed on all of the treated surfaces. Precipitates of chromium carbides were detected in the hardened layer (C-enriched layer) only for the specimen treated at $550^{\circ}C$. The hardened layer thickness of ${\gamma}_c$ increased up to about $65{\mu}m$ with increasing treatment temperature. The surface hardness reached about 900 $HK_{0.05}$, which is about 4 times higher than that of the untreated sample (250 $HK_{0.05}$). A minor loss in corrosion resistance was observed for the specimens treated at temperatures of $300^{\circ}C{\sim}450^{\circ}C$ compared with untreated austenitic stainless steel. In particular, the precipitation of chromium carbides at $550^{\circ}C$ led to a significant decrease in the corrosion resistance. A diamond-like carbon (DLC) film coating was applied to improve the wear and friction properties of the S phase layer. The DLC film showed a low and stable friction coefficient value of about 0.1 compared with that of the carburized surface (about 0.45). The hardness and corrosion resistance of the S phase layer were further improved by the application of such a DLC film.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1446-1449
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• 1996

Thin films of diamond-like carbon(DLC) have been deposited using a magnetron plasma-enhanced chemical vapor deposition(PECVD) method with an rf(13.56 MHz) plasma of $C_{3}H_{8}$. From the Langmuir probe I-V characteristics, it can be observed that increasing the magnetic field yields an increase of the temperature($T_e$) and density($N_e$) of electron. At a magnetic field of 82 Gauss, the estimated values of $T_e$ and $N_e$ are approximately $1.5\;{\times}\;10^5$ K(13.5 eV) and $1.3\;{\times}\;10^{11}\;cm^{-3}$, respectively. Such a highly dense plasma can be attributed to the enhanced ionization caused by the cyclotron motion of electrons in the presence of a magnetic field. On the other hand, the negative dc self-bias voltage($-V_{sb}$) decreases with an increasing magnetic field, which is irrespective of gas pressure in the range of $1{\sim}7$ mTorr. This result is well explained by a theoretical model considering the variation of $T_e$. Deposition rates of DLC films increases with a magnetic field. This may be due to the increased mean free path of electrons in the magnetron plasma. Structures of DLC films are examined by using various techniques such as FTIR and Raman spectroscopy. Most of hydrocarbon bonds in DLC films prepared consist of $sp^3$ tetrahedral bonds. Increasing the rf power leads to an enhancement of cross-linking of carbon atoms in DLC films. At approximately 140 W, the maximum film density obtained is about 2.4 $g/cm^3$.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1997년도 제13회 학술발표회 논문개요집
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• pp.163-164
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• 1997

Indium thin oxide(ITO) 가 코팅된 유리위에 Ion beam spputtering depposition (IBSD)방법으로 다이아몬드상 카본(Diamond-like Carbon ; DLC)을 합성하여 전계방출 특성을 조사하였다. 박막의 합성은 이온 빔 전압을 1250 V, 전류를 20mA인 상태에스 합성 시간만을 조절하여 박막의 두계에 대한 변화를 주었다. 두께에 대한 전류-전압 특성은 두께가 약 750$\AA$인 경우 전기장이 10V/$\mu$m 일 때 $ extrm{cm}^2$당 1.3mA 정도의 전류를 방출하였으며 두께가 얇은 경우와 아주 두꺼운 경우에는 오히려 방출전류가 감소하는 경향을 보여 주었다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2015년도 춘계학술대회 논문집
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• pp.116-117
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• 2015

수소가 없는 고경도 카본막의 수요가 증대됨에 따라, 자장 여과 아크법으로 증착되는 ta-C막을 1um 이상 증착하는 공정 기술에 대한 연구 내용을 발표하고자 한다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2009년도 추계학술대회 초록집
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• pp.140-140
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• 2009

• 한국진공학회지
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• 제4권S2호
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• pp.34-39
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• 1995

we have studied the possibility of n-type doping in diamond and DLC films. After ion doping of either p-type or n-type, the electrical conductivities were remarkably increased and conductivity activation energies were decreased. The Raman intensity at 1330 cm-1 decreases slightly by ion doping of $7.2\times 10^{16}\; \textrm{cm}^{-2}$. The increase in conductivity by ion doping appears to be arised from the combined effects by substitutional doping and graphitization by ion damage.