• 제목/요약/키워드: Diamond nano-powder

검색결과 21건 처리시간 0.032초

나노급 다이아몬드 파우더에 ALD로 제조된 ZnO 박막 연구 (Microstructure of ZnO Thin Film on Nano-Scale Diamond Powder Using ALD)

  • 박종성;송오성
    • 한국진공학회지
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    • 제17권6호
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    • pp.538-543
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    • 2008
  • 나노급 다이아몬드는 최근 폭발법이나 증착법에 의한 신공정으로 100 nm 이하의 분말형태의 제조가 가능하다. 나노급 다이아몬드의 소결을 이용하면 이상적인 연마기기의 제작이 가능하다. 이러한 나노급 다이아몬드의 소결 공정에서 생기는 비이상적인 나노결정의 결정립성장과 다이아몬드 결합장애를 방지하기 위해서 나노급 무기물을 균일하게 코팅하는 공정개발이 필요하다. 본 연구에서는 나노급 다이아몬드의 소결 특성을 향상시키기 위해서 ALD(atomic layer deposition)을 이용하여 진공에서 $20{\sim}30\;nm$ 두께의 ZnO 박막을 코팅해 보았다. 나노급 다이아몬드 분말 전면에 경제적으로 ZnO ALD를 위해서 기존의 기계적 진동효과 또는 전용 fluidized bed reactor를 대치하여 새로이 20 mm 석영튜브 안에 다이아몬드 분말을 넣고 다공성 유리필터로 막은 후 펄스와 퍼지 공정시의 압력에 의한 다이아몬드의 부유를 이용한 변형된 fluidized bed 공정을 채용하였다. 다공성 유리필터로 양쪽이 막힌 석영튜브 안에 전구체 DEZn (diethylzinc : $C_4H_{10}Zn$)와 반응기체 $H_2O$를 사용하여 ZnO 박막을 캐니스터 온도 $10^{\circ}C$에서 원자층증착하였다. 공정 순서 및 반응물질 주입 시간은 DEZn pulse-0.1초, DEZn purge-20초, $H_2O$ pulse-0.1초, $H_2O$ purge-40초와 같이 설정하였으며, 이 네 단계를 1 cycle로 정의하여 100 cycle 반복 실시하였다. 다이아몬드 분말과 ZnO 박막이 증착된 다이아몬드 분말의 미세구조를 확인하기 위하여 투과전자현미경 (transmission electron microscope)을 이용하였다. TEM 측정결과, ALD 증착 전 나노급 다이아몬드 분말의 직경이 약 $70{\sim}120\;nm$이었고 사면체, 육면체 등의 다양한 형태를 보임을 확인하였다. ZnO 박막이 ALD코팅된 다이아몬드 분말의 직경은 약 $90{\sim}150\;nm$이었고, 다이아몬드 분말과 ZnO의 명암차이에 의해 약 $20{\sim}30\;nm$ 두께의 균일한 ZnO 박막이 다각형 형태의 다이아몬드 파우더 표면에 성공적으로 증착되었음을 확인하였다.

단결정 다이아몬드 공구에 의한 비철금속과 폴리머 소재의 마이크로 트렌치 가공특성 비교 (Comparison of Micro Trench Machining Characteristics with Nonferrous Metal and Polymer using Single Diamond Cutting Tool)

  • 최환진;전은채;최두선;제태진;강명창
    • 한국분말재료학회지
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    • 제20권5호
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    • pp.355-358
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    • 2013
  • Micro trench structures are applied in gratings, security films, wave guides, and micro fluidics. These micro trench structures have commonly been fabricated by micro electro mechanical system (MEMS) process. However, if the micro trench structures are machined using a diamond tool on large area plate, the resulting process is the most effective manufacturing method for products with high quality surfaces and outstanding optical characteristics. A nonferrous metal has been used as a workpiece; recently, and hybrid materials, including polymer materials, have been applied to mold for display fields. Thus, the machining characteristics of polymer materials should be analyzed. In this study, machining characteristics were compared between nonferrous metals and polymer materials using single crystal diamond (SCD) tools; the use of such materials is increasing in machining applications. The experiment was conducted using a square type diamond tool and a shaper machine tool with cutting depths of 2, 4, 6 and 10 ${\mu}m$ and a cutting speed of 200 mm/s. The machined surfaces, chip, and cutting force were compared through the experiment.

단결정 다이아몬드공구를 사용한 Cu 도금된 몰드의 미세 구조체 가공특성 (Machining Characteristics of Micro Structure using Single-Crystal Diamond Tool on Cu-plated Mold)

  • 김창의;전은채;제태진;강명창
    • 한국분말재료학회지
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    • 제22권3호
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    • pp.169-174
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    • 2015
  • The optical film for light luminance improvement of BLU that is used in LCD/LED and retro-reflective film is used as luminous sign consist of square and triangular pyramid structure pattern based on V-shape micro prism pattern. In this study, we analyzed machining characteristics of Cu-plated flat mold by shaping with diamond tool. First, cutting conditions were optimizing as V-groove machining for the experiment of micro prism structure mold machining with prism pattern shape, cutting force and roughness. Second, the micro prism structure such as square and triangular pyramid pattern were machined by cross machining method with optimizing cutting conditions. Burr and chip shape were discussed with material properties and machining method.

평삭공정에서 경면가공을 위한 단결정 및 다결정 다이아몬드 다중공구의 가공성 평가 (Comparison of Machinability Between PCD Tool and SCD Tool for Large Area Mirror Surface Machining Using Multi-tool by Planer)

  • 김창의;최환진;전은채;제태진;강명창
    • 한국분말재료학회지
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    • 제20권4호
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    • pp.297-301
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    • 2013
  • Mirror surface machining for large area flattening in the display field has a problem such as a tool wear and a increase in machining time due to large area machining. It should be studied to decrease machining time and tool wear. In this paper, multi-tool machining method using a PCD tool and a SCD tool was applied in order to decrease machining time and tool wear. Machining characteristics (cutting force, machined surface and surface roughness) of PCD tool and SCD tool were evaluated in order to apply PCD tool to flattening machining. Based on basic experiments, the PCD/SCD multi-tool method and the SCD single-tool method were compared through surface roughness and machining time for appllying large area mold machining.

Photocatalytic activity of $TiO_2$ on nano-diamond powder prepared by Atomic Layer Deposition

  • Kim, Kwang-Dae;Dey, Nilay Kumar;Seo, Hyun-Ook;Kim, Dong-Wun;Nam, Jong-Won;Sim, Chae-Won;Jeong, Myung-Geun;Kim, Young-Dok
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.425-425
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    • 2011
  • The photocatalytic decomposition of toluene gas was investigated with $TiO_2$ on nano-diamond powder (NDP) under UV irradiation. Atomic layer deposition (ALD) was used for the growth of $TiO_2$ on the NDP. The structure and surface properties of catalysts were characterized by X-ray Diffraction (XRD), X-ray Photoelectron Spectroscopy (XPS) and Transmission Electron Microscopy (TEM). The photocatalytic activity for the toluene decomposition was evaluated by measuring the concentration change of toluene and $CO_2$ gas with gas chromatography (GC)-flame ionization detector (FID) system. The photocatalytic activities of $TiO_2$/NDP catalysts were compared with that of P-25. The rate of initial photocatalytic decomposition of toluene for the $TiO_2$/NDP catalysts was relatively lower when compared to P-25. The photocatalytic activity of P-25 was rapidly decreased with time, whereas, the deactivation of $TiO_2$/NDP catalysts was less pronounced. Therefore, as the reaction time increased, the photocatalytic activity of $TiO_2$/NDP catalysts became higher than that of P-25. The intermediates such as benzaldehyde or benzoic acid, etc were more easily adhered to the active site on the P-25 surface during reaction, resulting in easier deactivation of P-25. These results could be confirmed using FT-IR spectroscopy. We suggest that the NDP used as substrate can reduce the deactivation of $TiO_2$ on the surface.

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나노유체의 열전도율 실험과 열전달 메커니즘의 제시 (Heat Conductivity Test and Conduction Mechanism of Nanofluid)

  • 박권하;이진아;김혜민
    • Journal of Advanced Marine Engineering and Technology
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    • 제32권6호
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    • pp.862-868
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    • 2008
  • Many studies have been conducted to increase heat transfer in fluid. One of the various heat transfer enhancement techniques is suspending fine metallic or nonmetallic solid powder in traditional fluid. Nanofluid is defined as a new kind of heat transfer fluid containing a very small quantity of nanometer particles that are uniformly and stably suspended in a liquid. This study investigates the effect of nanofluid containing diamond, CuNi and CuAg nanometer particles, and proposes the heat transport mechanism of nanofluid. The test result shows that the thermal conductivity of nanofluid is much higher than that of traditional fluid, and the increasing rate of the conductivity is dependent on the conductivity of the solid metal.

Al-Fe 레이저 오버레이층 경계면에서의 금속간화합물 거동 (Intermetallic Compounds Behavior at Laser Overlay Interface of Aluminum and Fe-based Powder)

  • 강남현;유연곤;이창우;김정한
    • Journal of Welding and Joining
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    • 제25권3호
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    • pp.51-56
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    • 2007
  • A $CO_2$ laser overlay was conducted by using a Fe-based powder on the AC2B aluminum substrate. Cracks and intermetallic compounds (IMC) were observed inconsistently along the interface between the overlay and post-molten layer. A scanning electron microscopy (SEM) with energy dispersive spectroscopy (EDS) detected some Fe-rich IMC ($Fe_3Al$, FeAl) as well as the brittle Al-rich IMC ($Fe_2Al_5,\;FeAl_3$). Micro vickers hardness proved the formation of Al-rich IMC ($FeAl_3$) along the interface by showing HV0.1 $800{\sim}900$. Furthermore, nano indentation was successfully applied to investigate the behavior of IMC more precisely than the micro vickers hardness.

미세공구와 자기체인구조를 이용한 초정밀 폴리싱 특성 (Nano-scale Precision Polishing Characteristics using a Micro Quill and Magnetic Chain Structure)

  • 박성준;안병운;이상조
    • 한국정밀공학회지
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    • 제21권8호
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    • pp.34-42
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    • 2004
  • A new polishing technique for three dimensional micro/meso-scale parts is suggested using a micro quill and a magnetic chain structure. The principle of this method is to polish the target surface with the collected magnetic brushes at a micro tool by the non-uniform magnetic field generated around the tool. In a typical magnetic abrasive finishing process magnetic particles and abrasive particles are unbonded each other. But, to finish the three dimensional small parts bonded magnetic abrasive have to be used. Bonded magnetic abrasives are made from direct bonding, and their polishing characteristics are also examined. Alumina, silicon carbide and diamond micro powders are used as abrasives. Base metal matrix is carbonyl iron powder. It is found that bonded magnetic abrasives are superior to unbonded one by experiment. finally, the polished surface roughness is evaluated by atomic force microscope.

나노 다이아몬드 분말이 크롬 복합 도금층의 표면 물성에 미치는 영향 연구 (Investigation on the Effect of the Nano-diamond Powder on the Surface Properties of Chromium Composite Layers)

  • 이주열;;김만;권식철
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2007년도 추계학술대회 논문집
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    • pp.85-86
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    • 2007
  • 상용으로 사용되고 있는 Sargent bath에 수십 나노크기의 다이아몬드 분말을 혼입하여 전기도금법에 의해 매우 우수한 표면 특성을 갖는 크롬 복합 도금층을 얻었다. 상기 복합 도금층은 순수 크롬 도금층의 미세 경도(Hy. 801)보다 높은 값(Hy. 920)을 나타내었고, 내마모성은 약 3-4배 뛰어난 성능을 보였다. 또한, NaCl 수용액에서 수행한 내식성 테스트에서는 크롬 복합 도금층이 순수 크롬 도금층대비 1/6 수준의 passive current를 가졌다. SEM을 통한 표면 형상 관찰 결과 크롬 도금층에 혼입된 나노 다이아몬드 분말은 단결정 혹은 다결정의 형태로 존재하였다.

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