• 제목/요약/키워드: Diamond IC

검색결과 14건 처리시간 0.021초

도시고속도로 진출램프 하류부교차로 운영 분석 (중동 IC 사례 분석을 중심으로) (Operation Analysis of Downstream Intersections at Urban Freeway Off-ramps)

  • 전재현;김영찬;정영제
    • 대한교통학회지
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    • 제26권4호
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    • pp.7-16
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    • 2008
  • 서울시 도시고속도로 진출부에 극심한 정체가 다수 발생하고 있는데, 이러한 진출부 정체의 주원인으로 진출램프 하류부교차로의 처리용량 부족, 비효율적인 신호운영 등이 지적되고 있다. 이에 하류부교차로의 설계 및 운영 개선을 통한 진출램프 하류부 교차로의 혼잡 관리가 필요하다. 본 연구에서는 도시고속도로 진출램프 하류부교차로의 개선 사례인 중동 IC를 중심으로 분석하였다. 고속도로와 간선도로가 교차 시 다이아몬드 IC가 주로 사용되고 양자택일로 SPUI가 사용되는데, 이 다이아몬드 IC와 SPUI의 운영을 중동 IC에 적용해 시뮬레이션 등으로 분석하여 그 효율성을 비교하였다. 분석 결과 다이아몬드 IC로 운영 시 4 phase with overlaps 적용 등의 신호운영 개선으로 진출부 혼잡 개선이 가능하고, frontage road가 없는 경우 SPUI가 다이아몬드 IC보다 더 효과적일 수 있으나 frontage road가 있으면 다이아몬드 IC가 SPUI보다 더 효율적인 것으로 나타났다. 본 연구 결과를 토대로 진출램프 하류부교차로의 효율적인 운영을 통해 하류부교차로 뿐만 아니라 도시고속도로 본선의 혼잡을 최소화할 수 있을 것으로 기대된다.

Thermal, Tribological, and Removal Rate Characteristics of Pad Conditioning in Copper CMP

  • Lee, Hyo-Sang;DeNardis, Darren;Philipossian, Ara;Seike, Yoshiyuki;Takaoka, Mineo;Miyachi, Keiji;Furukawa, Shoichi;Terada, Akio;Zhuang, Yun;Borucki, Len
    • Transactions on Electrical and Electronic Materials
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    • 제8권2호
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    • pp.67-72
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    • 2007
  • High Pressure Micro Jet (HPMJ) pad conditioning system was investigated as an alternative to diamond disc conditioning in copper CMP. A series of comparative 50-wafer marathon runs were conducted at constant wafer pressure and sliding velocity using Rohm & Haas IC1000 and Asahi-Kasei EMD Corporation (UNIPAD) concentrically grooved pads under ex-situ diamond conditioning or HPMJ conditioning. SEM images indicated that fibrous surface was restored using UNIPAD pads under both diamond and HPMJ conditioning. With IC1000 pads, asperities on the surface were significantly collapsed. This was believed to be due to differences in pad wear rates for the two conditioning methods. COF and removal rate were stable from wafer to wafer using both diamond and HPMJ conditioning when UNIPAD pads were used. Also, HPMJ conditioning showed higher COF and removal rate when compared to diamond conditioning for UNIPAD. On the other hand, COF and removal rates for IC1000 pads decreased significantly under HPMJ conditioning. Regardless of pad conditioning method adopted and the type of pad used, linear correlation was observed between temperature and COF, and removal rate and COF.

Patterning of CVD Diamond Films For MEMS Application

  • Wang, Xiaodong;Yang, Yirong;Ren, Congxin;Mao, Minyao;Wang, Weiyuan
    • 한국진공학회지
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    • 제7권s1호
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    • pp.167-170
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    • 1998
  • To apply diamond films in microelectromechanical systems(MEMS), it is necessary to develop the patterning technologies of diamond films in the micrometer scale. In this paper, three different kinds of technologies for patterning CVD diamond films carried out by us were demonstrated: selective growth by improved diamond nucleation in DC bias-enhanced microwave plasma chemical vapor deposition (MPCVD) system, selective growth of seeding using diamond-particle-mixed photoresist, and selective etching of oxygen ion beam using Al as the mask. It was show that high selectivity and precise patterns had been achieved, and all the processes were compatible with IC process.

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Bonding and Etchback Silicon-on-Diamond Technology

  • Jin, Zengsun;Gu, Changzhi;Meng, Qiang;Lu, Xiangyi;Zou, Guangtian;Lu, Jianxial;Yao, Da;Su, Xiudi;Xu, Zhongde
    • The Korean Journal of Ceramics
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    • 제3권1호
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    • pp.18-20
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    • 1997
  • The fabrication process of silicon-diamond(SOD) structure wafer were studied. Microwave plasma chemical vapor deposition (MWPCVD) and annealing technology were used to synthesize diamond film with high resistivity and thermal conductivity. Bonding and etchback silicon-on-diamond (BESOD) were utilized to form supporting substrate and single silicon thin layer of SOD wafer. At last, a SOD structure wafer with 0.3~1$\mu\textrm{m}$ silicon film and 2$\mu\textrm{m}$ diamond film was prepared. The characteristics of radiation for a CMOS integrated circuit (IC) fabricated by SOD wafer were studied.

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배추좀나방(Plutella Xylostella Linnaeus)에 대한 새로운 살충활성 분자의 설계 (Design of the New Insecticidal Active Molecule against Diamond-Back Moth (Plutella Xylostella Linnaeus))

  • 조윤기;최우영;성낙도
    • 농업과학연구
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    • 제34권2호
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    • pp.171-179
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    • 2007
  • The new insecticidal active molecules from the based on the holographic quantitative structure-activity relationships (HQSAR) between a series of $1-(R_1)-2-(n-octyl)-3-(R_2)$, $3-(R_3)-pseudothiourea$ derivatives and their insecticidal activities against Diamond-back moth (Plutella Xylostella Linnaeus) were designed and discussed quantitatively. The most active molecule from the based graphical analyses of atomic contribution maps with the optimized HQSAR C-1 model ($q^2=0.764$ & $r^2{ncv}=0.942$) was 1-(n-butyl)-2-(t-butyl)-3,3-diisopropylpseudothiourea (P1: $pI_{50}=5.30$, $IC_{50}=1.397ppm$). Therefore, it is suggested that the new designed molecule would increased the activity as much as 23.5 times as compared to X=n-octyl substituent 17($pI_{50}=4.00$, $IC_{50}=32.86ppm$) which was the highest active molecule in training set compounds.

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경취재료에 있어 압자압입시의 균열진전에 관한 연구 (Micro Cracking and Elastic/Plastic Transition Radii Associated with Indenting on Ceramics by Diamond Indenter)

  • Park, G.H.
    • 한국정밀공학회지
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    • 제13권5호
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    • pp.164-172
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    • 1996
  • In hard and brittle materials as advanced ceramics indented by a hard indenter, the indenter's transition radius, was defined as critical radius which distinguishes the occurrence of the first plastic deformation from the elastic cracking as the first damaging event, is analytically and experimentally investigated. The analytical result is shown that the critical load, which not enlarge pre-existing cracks as the form of median crack beneath a indenter, is constant, and is determined by the order of $k_{IC}$$^{4}$ $P_{Y}$$^{3}$(where, $K_{IC}$ , $P_{Y}$are the fracture toughness of materials and the applied pressure by indenting, respectively). And the size of transiton radii were experimentally obtained with the similar values to the analytical results.lts..

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WS2 윤활제를 첨가한 마이크로 다이아몬드 블레이드의 절삭성능과 기계적 특성 (Cutting Efficiency and Mechanical Characteristics of Diamond Micro-blades Containing WS2 Lubricant)

  • 김송희;장재철
    • 한국표면공학회지
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    • 제45권1호
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    • pp.37-42
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    • 2012
  • $WS_2$ powder was added to the Cu/Sn bond metal of diamond micro-blades for machining of semi-conductor and IC chips to improve cutting efficiency. The effect of $WS_2$ additive on cutting efficiency was investigated and compared with the micro-blades with $MoS_2$ developed in previous research. Flexural strength, frictional coefficient, and wear resistance of blades decreased with $WS_2$ but wear depth increased. It was found that the blades including $WS_2$ consumed less momentary energy than the blades containing $MoS_2$ during dicing test. Micro-blades containing $WS_2$ exhibited lower flexural strength than the blades with $MoS_2$ resulting from higher amount of sintering defects relevant to the less effectiveness of $WS_2$ on fluidity. The effect of $WS_2$ and $MoS_2$ on fluidity during sintering was analyzed in terms of mismatching degree between the longitudinal direction of lubricant particles and the perpendicular direction to the compact loading. The blade with 8.1 vol.% of $WS_2$ showed the best cutting efficiency.

Computer Generated Hologram을 이용한 포물명경 형상측정 (Parabolic mirror test using Computer Generated Hologram)

  • 김성하;곽종훈;최옥신;송재봉;이윤우;이인원
    • 한국광학회지
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    • 제11권2호
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    • pp.80-84
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    • 2000
  • Diamond turning machine으로 알루미늄을 가공하여 f/1.5, 구경 50mm인 포물명경을 제작하였다. 이진위상(binary phase) 홀로그램으로 포물면경 현상측정을 위한 computer generated hologram(CGH)을 encoding하였으며 staircase encodling 방법으로 간섭무늬 곡선의 직선근사를 하였다. 간섭무늬 데이터를 포스트스크립트(PostScript) 파일로 변환한 후 CGH 원도를 레이저 프린터로 확대 출력하고 축소 촬영하여 CGH를 제작하였다. 측정부(viewing arm)에 CGH가 위치하는 Twyman-Green 간섭계를 구성하여 포물면경의 표면형상을 측정하였다. 측정결과를 직접표면형상측정법 및 간섭계를 이용한 자동시준법의 측정 결과와 비교하고 오치를 분석하였다.

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다이아몬드 마이크로블레이드의 내구성과 절삭성능에 미치는 흑연과 MoS2의 첨가효과 (The Effect of Graphite and MoS2 on Endurance and Cutting Performance of Diamond Micro Blades)

  • 문종철;김송희
    • 한국표면공학회지
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    • 제41권6호
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    • pp.335-340
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    • 2008
  • Cutting performance and wear behavior were studied with the diamond micro-blade of Cu/Sn bond materials containing various amount of lubricant materials such as graphite and $MoS_2$. Measurement of instantaneous electric power consumption for cutting glass workpiece at the constant velocity was conducted and proposed as a method to assess cutting efficiency. The energy consumption of micro-blade for glass cutting decreased with the content of graphite and $MoS_2$ while wear amount of blade in volume increased with the amount of lubricant addition during the dicing test. It is because that hardness, flexural strength, and fracture toughness ($K_{IC}$) reduced with the amount of lubricant addition. Blades with $MoS_2$ additive showed higher mechanical properties than those with graphite additives when the same amount of the lubricant additive in wt.% was added. Due to the lower density of graphite than $MoS_2$, higher volume fraction of graphite could result in stronger effect on lowering electric power consumption by reducing the friction between blade and work piece however increasing wear rate due to the reduction in strength and fracture toughness. Adhesive wearing mode of micro blade could be remarkably improved by the addition of graphite as well as $MoS_2$.