• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2003.11a
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• pp.50-55
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• 2003

Tribological testing of DLC films was conducted using a rotating type ball on a disk friction tester in a dry chamber. This study made use of four kinds of mating balls that were made with stainless steel but subjected to diverse annealing conditions in order to achieve different levels of hardness. In all load conditions using martensite mating balls, the test results demonstrated that the friction coefficient was lower when the mating materials were harder. The high friction coefficient found in soft martensite balls appeared to be caused by the larger contact areas. The wear track on the mating balls indicated that a certain amount of material transfer occurs from the DLC film to the mating ball during the high friction process. Raman Spectra analysis showed that the transferred materials were a kind of graphite and that the contact surface of the DLC film seemed to undergo a phase transition from carbon to graphite during the high friction process.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.177-179
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• 2011

The purpose of this study is to enhance an adhesion between substrate and Diamond-like Carbon (DLC) film. DLC has many outstanding properties such as low friction, high wear resistance and corrosion resistance. However, it is difficult to achieve enough adhesion because of weak bonding between DLC film and the substrate. For improvement adhesion, a layer between DLC film and the substrate was prepared by dual post plasma. DLC film was deposited on nitrided layer by linear ion source. The composed compound layer between substrate and DLC film was investigated by Glow Discharge Spectrometer (GDS) and Scanning Electron Microscope (SEM). The synthesized bonding structure of DLC film was analyzed using a micro raman spectrometer. Mechanical properties were measured by nano-indentation. In order to clarify the mechanism for improvement in adhesive strength, it was observed by scratch test.

• Korean Journal of Materials Research
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• v.6 no.12
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• pp.1162-1169
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• 1996

rf 플라즈마 화학증착을 이용하여 증착된 hydrogenated DLC막의 잔류응력 거동에 대해 조사하였다. 합성된 DLC막의 압축 잔류응력은 이온 에너지뿐만 아니라 이온/원자 유입량 비에 의해 영향을 받는 것으로 조사되었다. 잔류응력의 최대치는 이온/원자 유입량비가 증가할수록 낮은 이온 에너지 구간에서 일어나며 그 값은 증가하였다. 이온 에너지에 따른 DLC막의 결합 구조의 변형을 Raman 스펙트럼을 이용하여 분석하였다. DLC막의 잔류응력은 sp3결합의 net working이 최대가 되는 점에서 최대치를 보이며, 이는 sp3 net working에 의한 부피팽창 요인에 기인하는 것으로 생각된다. DLC막 내의 유입되는 수소는 잔류응력의 직접적인 원인으로 작용하지 않는 것으로 분석되었다.

• Korean Journal of Materials Research
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• v.7 no.1
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• pp.27-32
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• 1997

본 연구에서는 고밀도 플라즈마를 형성하는 planar magnetron RF 플라즈마 CVD를 이용하여 DLC(diamond-like carbon) 박막을 합성하였다. 이 방법을 이용하여 DLC 박막을 합성한다면 고밀도 플라즈마 때문에 종래의 플라즈마 CVD(RF-PECVD)법보다 증착속도가 더욱더 향상될 것이라는 것에 착안하였다. 이를 위해 magnetron에 의한 고밀도 플라즈마가 존재할 때도 역시 DLC박막형성에 미치는 RF 전력과 반응가스 압력이 중요한 반응변수인가에 대해 조사하였고, 일정한 자기장의 세기에서 RF전력과 DC self-bias 전압과의 관계를 조사하였다. 또한 RF전력변화에 따른 박막의 증착속도와 밀도를 측정하였다. 본 연구에 의해 얻어진 박막의 증착속도는 magnetron에 의한 이온화율이 매우 높아 기존의 RF-PECVD 법보다 매우 빠르며, DLC박막의 구조와 물질특성을 알아보기 위해 FTIR(fourier transform infrared)및 Raman 분광분석을 행한 결과 전형적인 양질의 고경질 다이아몬드상 탄소박막임을 알 수 있었다.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07a
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• pp.543-546
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• 2005

We have investigated the alignment ability of multi-domains by using ion beam irradiation on diamond-like carbon (DLC) thin film layers. The DLC thin films were deposited by plasma enhanced chemical vapor deposition (PECVD) system and the low energy ion beam is irradiated from Kaufman type ion gun. The direction of liquid crystal alignment is varied by the direction of Ar ion beam irradiation.

• Journal of the Korean Vacuum Society
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• v.7 no.s1
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• pp.7-14
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• 1998

Details are given of an study of the characteristics of field-induced electron emission from hydrogen-free high $sp^3$ content(>90%) amorphous diamond (a-D) film deposited on heavily doped ($\rho$<0.01 $\Omega\cdot\textrm{cm}$) n-type monocrystalline Si(111) substrate. It is demonstrated that a-D film has excellent electron field emission properties. Emission current can reach 0.9 $\mu$A at applied field as low as 1 V/$\mu\textrm{m}$, and emission current density can be obtained about several mA/$\textrm{cm}^2$. The emission current is stable when the beginning current is at 50 $\mu$A within 72 hours. Uniform fluorescence display of electron emission from whole face of the a-D film under the electric field of 10~20 V/$\mu\textrm{m}$ was also observed. It can be considered that the contribution of excellent electron emission property results from its smooth, uniform, amorphous surface and high $sp^3$ content of the a-D films.

• Proceedings of the Korean Magnestics Society Conference
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• 2002.12a
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• pp.124-125
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• 2002

최근 자성막의 놀은 자기기록 밀도증가에 따른 고밀도 자성기록매체인 하드디스크(HDD)는 현재 80GByte까지의 저장용량을 가진 하드디스크의 자성합금층 보호막으로 DLC(Diamond-Like Carbon)가 이용되고 있다. 고저장용량을 가지는 하드디스크의 보호막 두께가 점차 얇아짐에 따라 보호막 재료의 경도 및 윤활성은 더욱 중요시되고 있다. 그러나, 보호막의 두께가 감소하면서 현재 적용되고 있는 DLC막으로는 조만간 물리적 한계에 도달할 것으로 예상된다. (중략)

• Journal of the Korean institute of surface engineering
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• v.29 no.5
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• pp.474-477
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• 1996

The solid state cesium ion beam sputter deposition system has been developed for negative carbon ion beam deposition. The negative carbon ion beams are effectively produced by cesium ion bombardment. The C-ion beam current and deposition energy can be independently controlled for the deposition of a-D films. This system is very compact, reliable and high flux without any gas discharge or plasma and has been successfully used in the studies of the ion beam deposited amorphous diamond(a-D)

• Journal of the Korean institute of surface engineering
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• v.48 no.3
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• pp.87-92
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• 2015

Carbon thin films were deposited on STS 316L sheets by inductively coupled plasma enhanced magnetron sputtering with or without substrate bias voltage. Typical Raman spectrum for amorphous diamond-like carbon (DLC) was obtained, and the interfacial contact resistance (ICR) was measured to show its conductive nature. The electrochemical impedance spectroscopy (EIS) was used to investigate the corrosion mechanism of the carbon coating under the polymer electrolyte membrane fuel cell (PEMFC) condition. According to the pore-corrosion mechanism, the electrolyte penetrates the carbon coating through the pores and reacts with the substrate. As the substrate corrosion proceeds, the pore enlargement occurs and the surface area of the substrate exposed to the electrolyte. Applicability of the carbon coating for the PEMFC bipolar plate was evaluated by potentiodynamic polarization experiments. Finally, an adhesion problem was briefly considered.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.6 s.171
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• pp.159-167
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• 2005

This work focuses on the effects of crack free friction on Mode II stress intensity factors, $K_{II}$, for a vertical surface crack in a two-dimensional finite element model of TiN/steel subject to rolling contact. Results indicate that maximum $K_{II}$ values, which occur when the load is adjacent to the crack, may be significantly reduced in the presence of crack face friction. The reduction is more significant for thick coatings than for thin. Crack extension and increased layer thickness result in increased $K_{II}$ values. The effect of crack face friction on compressive $K_I$ values appears negligible. Comparative results are presented for $MoS_2/steel$ and diamond-like carbon(DLC)/Ti systems.