• 제목/요약/키워드: Diagnostic sensor

검색결과 238건 처리시간 0.032초

Analysis of H-ICP Source by Noninvasive Plasma Diagnostics of Etching Process

  • Park, Kun-Joo;Kim, Min-Shik;Lee, Kwang-Min;Chae, Hee-Yeop;Lee, Hi-Deok
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.126-126
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    • 2009
  • Noninvasive plasma diagnostic technique is introduced to analyze and characterize HICP (Helmholtz Inductively Coupled Plasma) source during the plasma etching process. The HICP reactor generates plasma mainly through RF source power at 13.56MHz RF power and RF bias power of 12.56MHz is applied to the cathode to independently control ion density and ion energy. For noninvasive sensors, the RF sensor and the OES (Optical emission spectroscopy) were employed since it is possible to obtain both physical and chemical properties of the reactor with plasma etching. The plasma impedance and optical spectra were observed while altering process parameters such as pressure, gas flow, source and bias power during the poly silicon etching process. In this experiment, we have found that data measured from these noninvasive sensors can be correlated to etch results. In this paper, we discuss the relationship between process parameters and the measurement data from RF sensor and OES such as plasma impedance and optical spectra and using these relationships to analyze and characterize H-ICP source.

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Swan-Ganz Catheter를 이용한 심폐기능 이상자의 정확한 Cardiac Output 측정 플랫폼 개발 (Cardiac Output Measurement Platform Development Using Swan-Ganz Catheter in Cardiopulmonary Patients with More Accurate)

  • 정용현;나상신;김영길
    • 한국정보통신학회논문지
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    • 제15권7호
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    • pp.1591-1597
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    • 2011
  • 본 논문에서는 심폐기능에 이상이 있는 중환자의 상태를 진단하거나 치료 방향을 정하기 위하여 심박 출량을 측정하는 플랫폼 구현에 관한 연구로써, 센서가 내장된 Swan-Ganz Catheter를 체내에 삽입 후, 생리식염수를 투입하여 생기는 온도변화량을 열희석법을 이용하여 심박출량을 구하는 방법을 사용한다. Swan-Ganz Catheter는 온도센서와 압력센서를 포함하고 있으며 이를 통해 입력되는 센서 값을 보다 세밀하게 수집한다면 심박출량, 전선 및 폐혈관저항, 산소소모량 등을 보다 정확하게 계산해 낼 수가 있으므로 환자의 상태를 보다 정확하게 진단 및 치료가 가능하게 한다.

An Integrated On-Line Diagnostic System for the NORS Process of Maiden Reactor Project: The Design Concept and Lessons Learned

  • Kim, Inn-Seock
    • Nuclear Engineering and Technology
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    • 제32권3호
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    • pp.261-273
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    • 2000
  • During an extensive review made as part of the Integrated Diagnosis System project of the Maiden Reactor Project, MOAS (Maryland Operator Advisory System) was identified as one of the most thorough systems developed thus far. MOAS is an integrated on-line diagnosis system that encompasses diverse functional aspects that are required for an effective process disturbance management: (1) intelligent process monitoring and alarming, (2) on-line sensor data validation and sensor failure diagnosis, (3) on-line hardware (besides sensors) failure diagnosis, and (4) real-time corrective measure synthesis. The MOAS methodology was used at the Maiden Man-Machine Laboratory HAMMLAB of the OECD Maiden Reactor Project. The performance of MOAS, developed in G2 real-time expert system shell for the high-pressure preheaters of the NORS process in the HAMMLAB, was tested against a variety of transient scenarios, including failures of the control valves and sensors, and tube leakage of the preheaters. These tests showed that MOAS successfully carried out its intended functions, i.e., quickly recognizing an occurring disturbance, correctly diagnosing its cause, and presenting advice on its control to the operator. The lessons learned and insights gained during the implementation and performance tests also are discussed.

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이동통신망의 SMS방식을 이용한 변전기기 무선진단 시스템 개발 (Development of Wireless Diagnostic System for Substation Equipments Using SMS Mode of Mobile Communication Network)

  • 김진철;김지호;윤만식;송호준;이향범
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 하계학술대회 논문집 A
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    • pp.259-261
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    • 2003
  • This paper suggests wireless diagnosis and monitoring system using SMS mode of mobile communication network for distribution transformer which could prevent electrical accident in the near future. Data are acquired by measuring the temperature of insulator oil in the distribution transformer and load current. Data acquisition of sensor using mobile communication network carried out filtering of sensor's output to optimize the size of send data Merit of this inspection method is that management, control and monitoring some transformers can be carried out using only one server. This inspection method will be the way of inspection to be worth spotlight in the near future because it is able to solve easily with the minimum facility inspection about state of transformer which is operating, to wide coverage about machine's wrong operation in other field.

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DSP를 이용한 주상변압기 $tan{\delta}$ 측정기법 연구 (Research of $tan{\delta}$ Measurement on Pole Transformer Using DSP)

  • 이보호;김재철;윤용한;임성정;김언석;이수길
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1996년도 추계학술대회 논문집 학회본부
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    • pp.462-463
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    • 1996
  • This study describes the dissipation factor measuring techniques of insulating oil on the operating, transformer by using digital signal processing. After applying voltage to the sensor which is installed in a transformer, acquiring source voltage and current of sensor and using cross-correlation techniques, we can check the dissipation factor of insulating oil. To improve measuring accuracy and the speed of process, we use hardware such as TMS320C31 DSP board and analog filter and software such as fast cross-correlation techniques, rectangular window, and digital filtering techniques. We simulated the measuring accuracy and the degree of the noise effect of this new measuring techniques by computer simulation, and compared the simplified measuring devices with Schering Bridge on degraded insulating oil. The result showed that this measuring technique can be used as diagnostic method on the pole transformers.

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유중 부분방전의 음향검출에 관한 연구 (A Study on the Acoustic Detection of Partial Discharges in Insulation Oil)

  • 길경석;김성욱;박대원;김선재;송재만
    • 한국전기전자재료학회논문지
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    • 제23권1호
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    • pp.53-60
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    • 2010
  • This paper dealt with the acoustic detection of partial discharge (PD) in insulation oil for insulation diagnostics of oil immersed transformers. Electrode systems such as needle to plane, plane to plane, and floating were fabricated to simulate some defects in transformers. A wide band acoustic emission(AE) sensor with the frequency ranges of 100 kHz~1 MHz and a narrow band AE sensor with the resonant frequency of 140 kHz were used in the experiment. Also, a decoupler and an amplifier were designed to detect and amplify the acoustic signal only. The decoupler separates acoustic signal from DC source without any distortion, and the amplifier has the gain of 40 dB in frequency ranges of 11 kHz~4 MHz. In the experiment, frequency components and propagation characteristics of acoustic signal were analyzed, and an algorithm of positioning of PD occurrence by the time difference of arrival was proposed. From the results, the frequency components of the acoustic signal exist from 50 kHz to 200 kHz and the positioning error of PD calculated by three AE sensors was within 1%.

Integration Technique of Smart Infra Management for Smart City Construction

  • Yeon, Sangho;Yeon, Chunhum
    • International Journal of Contents
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    • 제15권2호
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    • pp.75-78
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    • 2019
  • The Integration technique of combining the measurement method with the fine precision of the sensor collecting the satellite-based information to determine the displacement space is available to a variety of diagnostic information. The measurement method by a GNSS with the sensors is needed since there will always be occasional occurrence of natural disasters caused by various environmental factors and the surroundings. Such attempts carried out nationally by distributed torsional displacement of the terrain and facilities. The combination of the various positioning analysis of mm-class for the facility of main area observed is required constantly in real time information of the USN/IoT Smart sensors and should be able to utilize such information as a precisely fine positioning information for the precisely fine displacement of the semi-permanent main facilities. In this study, for the installation of the receiving system, the USN/IoT base line positioning are easily accessible for the target bridges. Transmitting hourly from the received data is also executed in real time using the wireless Wi-Fi/Bluetooth bridges and related facilities to automatically process a fine position displacement. The results obtained from this method can be analyzed by real-time monitoring for a large structure or facilities for disaster prevention.

윤활유 분석 센서를 통한 기계상태진단의 문헌적 고찰(적용사례) (Review of Application Cases of Machine Condition Monitoring Using Oil Sensors)

  • 홍성호
    • Tribology and Lubricants
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    • 제36권6호
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    • pp.307-314
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    • 2020
  • In this paper, studies on application cases of machine condition monitoring using oil sensors are reviewed. Owing to rapid industrial advancements, maintenance strategies play a crucial role in reducing the cost of downtime and improving system reliability. Consequently, machine condition monitoring plays an important role in maintaining operation stability and extending the period of usage for various machines. Machine condition monitoring through oil analysis is an effective method for assessing a machine's condition and providing early warnings regarding a machine's breakdown or failure. Among the three prevalent methods, the online analysis method is predominantly employed because this method incorporates oil sensors in real-time and has several advantages (such as prevention of human errors). Wear debris sensors are widely employed for implementing machine condition monitoring through oil sensors. Furthermore, various types of oil sensors are used in different machines and systems. Integrated oil sensors that can measure various oil attributes by incorporating a single sensor are becoming popular. By monitoring wear debris, machine condition monitoring using oil sensors is implemented for engines, automotive transmission, tanks, armored vehicles, and construction equipment. Additionally, such monitoring systems are incorporated in aircrafts such as passenger airplanes, fighter airplanes, and helicopters. Such monitoring systems are also employed in chemical plants and power plants for managing overall safety. Furthermore, widespread application of oil condition diagnosis requires the development of diagnostic programs.

식각공정의 신뢰성 향상을 위한 모니터링 기술에 관한 연구 (A Study on Monitoring Technology to Improve the Reliability of Etching Processes)

  • 김경남
    • 한국표면공학회지
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    • 제57권3호
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    • pp.208-213
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    • 2024
  • With the development of industry, miniaturization and densification of semiconductor components are rapidly progressing. Particularly, as demand surges across various sectors, efficiency in productivity has emerged as a crucial issue in semiconductor component manufacturing. Maximizing semiconductor productivity requires real-time monitoring of semiconductor processes and continuous reflection of the results to stabilize processes. However, various unexpected variables and errors in judgment that occur during the process can cause significant losses in semiconductor productivity. Therefore, while the development of a reliable manufacturing system is important, the importance of developing sensor technology that can complement this and accurately monitor the process is also growing. In this study, conducted a basic research on the concept of diagnostic sensors for thickness based on the physical changes of thin films due to etching. It observed changes in resistance corresponding to variations in thin film thickness as etching processes progressed, and conducted research on the correlation between these physical changes and thickness variations. Furthermore, to assess the reliability of thin film thickness measurement sensors, it conducted multiple measurements and comparative analyses of physical changes in thin films according to various thicknesses.

Preclinical study of a novel ingestible bleeding sensor for upper gastrointestinal bleeding

  • Kimberly F. Schuster;Christopher C. Thompson;Marvin Ryou
    • Clinical Endoscopy
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    • 제57권1호
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    • pp.73-81
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    • 2024
  • Background/Aims: Upper gastrointestinal bleeding (UGIB) is a life-threatening condition that necessitates early identification and intervention and is associated with substantial morbidity, mortality, and socioeconomic burden. However, several diagnostic challenges remain regarding risk stratification and the optimal timing of endoscopy. The PillSense System is a noninvasive device developed to detect blood in patients with UGIB in real time. This study aimed to assess the safety and performance characteristics of PillSense using a simulated bleeding model. Methods: A preclinical study was performed using an in vivo porcine model (14 animals). Fourteen PillSense capsules were endoscopically placed in the stomach and blood was injected into the stomach to simulate bleeding. The safety and sensitivity of blood detection and pill excretion were also investigated. Results: All the sensors successfully detected the presence or absence of blood. The minimum threshold was 9% blood concentration, with additional detection of increasing concentrations of up to 22.5% blood. All the sensors passed naturally through the gastrointestinal tract. Conclusions: This study demonstrated the ability of the PillSense System sensor to detect UGIB across a wide range of blood concentrations. This ingestible device detects UGIB in real time and has the potential to be an effective tool to supplement the current standard of care. These favorable results will be further investigated in future clinical studies.