• 제목/요약/키워드: Device fabrication

검색결과 1,412건 처리시간 0.034초

압전층의 2단 증착법을 이용한 체적 음향파 박막형 공진기의 제작과 성능향상에 관한 연구 (A Study of the Fabrication and Enhancement of Film Bulk Acoustic Wave Resonator using Two-Step Deposition Method of Piezoelectric Layer)

  • 박성현;추순남;이능헌
    • 대한전기학회논문지:전기물성ㆍ응용부문C
    • /
    • 제54권7호
    • /
    • pp.308-314
    • /
    • 2005
  • The 2 GHz film bulk acoustic wave resonator(FBAR), one of the most necessary device of the next generation mobile communication system, consisted of solidly mounted resonator(SMR) structure using Brags reflector, was researched in this paper The FBAR applied SiO$_{2}$ and W had large difference of the acoustic impedance to reflector Al to electrode and ZnO to piezoelectric layer. Specially, the FBAR applied the two-step deposition method to improve the c-axis orientation and increase reproducibility of the fabrication device had good performance. The electrical properties of plasma such as impedance, resistance, reactance, $V_{pp},\;I{pp}$, VSWR and phase difference of voltage and current, was analyzed and measured by RF sensor with the variable experiment process factors such as gas ratio, RF power and base vacuum level about concerning the thickness, c-axis orientation, adhesion and roughness. The FBAR device about the optimum condition resulted reflection loss(S$_{11}$) of -17 dB, resonance frequency of 1.93 GHz, electric-mechanical coefficient(k$_{eff}$) of 2.38 $\%$ and Qualify factor of 580. It was seen better qualify than the common dielectric filter at present and expected on business to the filter device of 2 GHz bandwidth with the MMIC technology.

Development of an Electrostatic Drop-On-Demand inkjet Device for Display Fabrication Process

  • Son, Sang-Uk;Choi, Jae-Yong;Lee, Suk-Han;Kim, Yong-Jae;Ko, Han-Seo;Kim, Hyun-Cheol;Byun, Do-Young
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
    • /
    • pp.655-659
    • /
    • 2006
  • This paper presents a novel electrostatic drop-on-demand inkjet device featured by a MEMS fabricated pole-type and hole-type nozzle with tube shaped orifice and investigates the feasibility of applying the inkjet device to display fabrication process. The electric voltage signal applied to the ring shaped upper electrode plate, against the hole-shaped ground or pole-shaped ground, referred here pole-type and hole-type nozzle respectively, allows ejection of small droplet to take place: That is, a tiny droplet is taken away from the peak of the mountain shaped liquid meniscus formed at the nozzle orifice. It is verified experimentally that the use of the pole type nozzle allows a stable and sustainable micro-dripping mode of droplet ejection for a wider range of applied voltages and of liquid viscosities. This demonstrates a feasibility of electrostatic drop-on-demand inkjet device as a disruptive alternative to conventional print heads such as thermal bubble or piezoelectric inkjet heads.

  • PDF

0.7 MJ $\mu$SMES코일 제작을 위한 소형 초전도코일의 특성 (Characteristics of a Small SC Coil for fabrication of the 0.7 MJ $\mu$SMES Coil)

  • 류경우;김해종;성기철;류강식
    • 대한전기학회논문지:전기기기및에너지변환시스템부문B
    • /
    • 제48권1호
    • /
    • pp.13-18
    • /
    • 1999
  • To fabricate a 0.7 FJ, 100 kVA $\mu$SMES device for improving power quality in sensitive electric loads, we developed a design code for a $\mu$SMES device and designed the 0.7 MJ $\mu$SMES device by using it. In this study special emphasis was placed in influence of winding tensions on quench currents of superconducting coils because dry superconducting coils are usually quenched by local disturbances due to strand motions. We first investigated the quench currents of a few kA class superconducting cables for various winding tensions experimentally. To prove the validity of the code and develop all techniques related to fabrication and test of the 0.7 MJ $\mu$SMES device, a smaller size superconducting coil was wound with high winding tension of about 15 kgf/$mm^2$ based on the test results of superconducting cables and tested. It isshown form the test results that designed parameters for the smaller size superconducting coil are in good agreements with measured ones and the quench current of the coil with high winding tension reaches nearly to the critical current of the superconducting cable without any training effects.

  • PDF

다층구조 배색 유기발전소자의 제작 및 특성 분석에 관한 연구 (A Study on the Fabrication and Characteristic Analysis of Multiheterostructure White Organic Light Emitting Device)

  • 노병규;강명구;오환술
    • 한국전기전자재료학회논문지
    • /
    • 제15권5호
    • /
    • pp.429-434
    • /
    • 2002
  • In this paper, multiheterostructure white organic light-emitting device was fabricated by vacuum evaporation. The structure of white organic light-emitting device is ITO/CuPc/TPD/DPBi:DPA/$Alq_3/Alq_3$:DCJTB/BCT/$Alq_3$/Ca/Al. Three primary colors are implemented with DPVBi, Alq$_3$and DCJTB. The maximum EL wavelength of the fabricated white organic light-emitting device is 647nm. And the CIE coordinate is (0.33, 0.33) at 13 V. In the fabrication of white organic light-emitting devices with DCJTB, $Alq_3$, DPVBi, the EL spectrum has two peaks at 492nm, 647nm. Two peaks appeared because the blue light is combined with green light. The maximum wavelength of red light is not changed with applied voltage. After voltage applied, for the first time, the electrons met the holes in the red emission layer and emitted red light. And then the electrons moved to the green emission layer, and blue emission layer continuously. Finally, when all of the emission layer activated, the white light is emitted.

Towards Thermally Stable Tandem Organic Solar Cells

  • Yang, Feng;Wang, Sihan;Kim, Ji-Hwan;Kim, Yong-Sang
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
    • /
    • pp.410.2-410.2
    • /
    • 2016
  • Tandem structure is promising in organic solar cells because of its double open-circuit voltage (VOC) and efficient photon energy conversion. In a typical tandem device, the two single sub-cells are stacked and connected by an interconnecting layer. The fabrication of two sub-cells are usually carried out in a glovebox filled with nitrogen or argon gas, which makes it expensive and laborious. We report a glovebox-free fabricated inverted tandem organic solar cells wherein the tandem structure comprises sandwiched interconnecting layer based on p-doped hole-transporting, metal, and electron-transporting materials. Complete fabrication process of the tandem device was performed outside the glove box. The tandem solar cells based on poly(3-hexylthiophene) (P3HT) and (6,6)-phenyl C61-butyric acid methyl ester (PCBM) can realize a high VOC, which sums up of the two sub-cells. The tandem device structure was ITO/ZnO/P3HT:PCBM/PEDOT:PSS/MoO3/Au/Al/ZnO-d/P3HT:PCBM/PEDOT:PSS/Ag. The separate sub-cells were morphologically and thermally stable up to 160 oC. The high stability of the active layer benefits in the fabrication processes of tandem device. The performance of tandem organic solar cells comes from the sub-cells with an 50 nm thick active layer of P3HT:PCBM, achieving an average power conversion efficiency (PCE) of 2.9% (n=12) with short-circuit current density (JSC) = 4.26 mA/cm2, VOC = 1.10 V, and fill factor (FF) = 0.62. Based on these findings, we propose a new method to improve the performance and stability of tandem organic solar cells.

  • PDF

수직전류 인가형 나노 스핀소자의 제조 및 자기저항 특성 (The Fabrication and Magnetoresistance of Nanometer-sized Spin Device Driven by Current Perpendicular to the Plane)

  • 전명길;이현정;정원용;김광윤;김철기
    • 한국자기학회지
    • /
    • 제15권2호
    • /
    • pp.61-66
    • /
    • 2005
  • 서브 마이크론 크기의 셀을 제조하기 위하여 종래의 방식인 전체시료구조를 증착한 후 이온밀링 방식으로 제조하는 대신에 Pt 스텐실 마스크 공정과 e-beam 리소 및 습식 식각 공정을 이용하여 배치형 submicron 셀을 lift-off 방식으로 제조하였다. $500nm{\times}500 nm,\;200nm{\times}300 nm$ 크기에 $CoFe(30 {\AA})/Cu(100{\AA})/CoFe(120{\AA}$) 3층 구조를 셀내에 증착하고 수직전류를 인가하여 자기저항 특성을 조사하였다. 자기저항 특성은 두 자성층의 보자력 차이를 이용하여 스핀의 반평형 구조를 유도하여 슈도 스핀밸브이며 각 셀의 크기에서 1.1, $0.8{\%}$의 자기저항비가 얻어졌다. 또한 전류인가에 따른 저항변화로부터 스핀전달 효과에 따른 스위칭 변화가 일어남을 확인하였으며, 이 구조에서 저항의 변화로부터 측정된 임계전류밀도는 약 $7.65{\times}10^{7}A/cm^2$였다.