• 한국대기환경학회지
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• 제16권2호
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• pp.165-178
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• 2000

In this study the effects of block distance have been investigated on the particle deposition efficiency in the collecting cell of two-stage electrostatic precipitator by numerical analysis. Particle trajectories have been changed by the electrostatic and inertial force of particle with the inlet velocity electrostatic number and particle diameter. The total deposition efficiency has a minimum value by the interaction between the effect of particle inertial force and electrostatic force in the collecting cell. The increase of block distance makes the total deposition efficiency decrease under the range of the particle size which has the minimum deposition efficiency. However beyond the range of particle size which has minimum deposition efficiency total deposition efficiency has no trend with the variation of block distance.

• 열처리공학회지
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• 제3권1호
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• pp.1-7
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• 1990

To investigate the influence of r.f. power and electrode distance on the TiN deposition, TiN films were deposited onto STC3, STD11 steel and Si-wafer from gas mixtures of $TiC_4/N_2/H_2$ using the radio frequency plasma assisted chemical vapor deposition. The crystallinity of TiN film could be improved by the increase of r.f. power and the decrease of electrode distance. The TiN coated layer contains chlorine, its content were decreased with increasing r.f. power as well as decreasing electrode distance. And the thickness of deposited TiN was largely affected by r.f. power and electrode distance. The hardness of deposited TiN reached a maximum value of about Hv 2,000.

• 한국재료학회지
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• 제9권2호
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• pp.144-148
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• 1999

We have studied the deposition characteristics of thick silicon dioxide film on Si substrate by $O_3$/TEOS APCVD(Atmospheric Pressure Chemical Vapor Deposition). The effect of deposition parameters such as the distance between showerhead and substrate, deposition temperature, TEOS flow rate and $O_3$/TEOS ratio on deposition rate, surface morphology, and properties of films as investigated. As deposition temperature increased, deposition rate decreased but the surface morphology and adhesion of film to substrate improved. As the distance between showerhead and substrate decreased, the deposition rate increased. Etching rate using the BOE increased as TEOS flow rate increased, but was independent of$ O_3$/TEOS ratio. Deposition rate of $5\mu\textrm{m}$/hour was obtained under the condition that the distance between showerhead and substrate was 5mm and the deposition temperature was $370^{\circ}C$.

• 한국표면공학회지
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• 제23권2호
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• pp.24-29
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• 1990

The TiN filmms were deposited on the stainless steel substrates by BARE techinique in order to investigate the effects of process parameters such as source-to-substate distance (15-35cm), N2 pressure(4$\times$10-10 -1$\times$10-3mb)and bias voltage(O-2000V), on the deposition rate, the concentration ratio [N/Ti] and the surface color of the films. The deposition rate was deduced from the weight measurement, the [N/ti] ratio by ESCA. The deposition rate decreased with a relationship of=40.2/D2 where D was source-to-substrate distance. The effect of the bias voltage and the N2pressure on the deposition rate, however, appeared negligble. The [N/Ti] ratio was in the narrow range of 0.7 tp 0.8 It increased slightly with the N2 partial pressure and deceased with the source-to-substrate distance. It was confired by ESCA that a significant amount of oxygen and carbon was contaminated after deposition in the top surface of TiN films. The surface color of TiN film was changed from light gold yellow to reddish gold yellow with increasing [N/Ti] ratio.

• 한국농공학회논문집
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• 제58권1호
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• pp.11-17
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• 2016

Dredging and land reclamation works has actively carried out for the efficient use of land and secure of agricultural and industrial site. During the reclamation, a portion of landfills are lost from the desired location due to a variety of causes. However, these causes has been rarely studied, and water flow velocity has a great influence on the movement of landfills. For the economical and efficient reclamation, it is important to predict the movement of landfills in water. In this paper, an experimental study was carried out to investigate the deposition distance according to the flow velocity and soil grain size. We have made a large open-channel apparatus that can reproduce a laminar flow, and the deposition test was carried out on the four grain size (0.638, 1.425, 3.375, 7.125 mm) and four flow velocity (0.1, 0.3, 0.5, 0.67 m/s) with high definition video recording. As a results, average deposition distance increased with the flow velocity, and its relationship is shown linearly. For the grain size, the average deposition distance were drastically increased as the grain size becomes smaller.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2003년도 하계종합학술대회 논문집 II
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• pp.1049-1052
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• 2003

This study shows the change of the structural characteristic of AIN thin film deposition with the change of the deposition conditions such as Ar/$N_2$ gas ratio, operating pressure in chamber, and the distance between substrate and target in RF Magnetron Sputtering. The orientation and surface roughness of AIN thin film are studied by using XRD and AFM and the thickness is measured by using STYLUS PROFILER. While we can not identify the orientation of the thin film deposited in Ar only, we can obtain the (100) orientation of the thin film with the addition of $N_2$ to Ar. Especially the thin film deposited at 10% of Ar/$N_2$ gas ratio appears to be the most (100) oriented. The (100) orientation of thin film becomes weaker as the operating pressure becomes higher. The further distance between substrate and target is stronger the (100) orientation of the thin film is. The (100) orientation becomes weaker and (002) orientation starts to appear as the distance is shorter.

• Journal of Advanced Marine Engineering and Technology
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• 제32권1호
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• pp.57-65
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• 2008

The characteristics of soot deposition on the cold wall in laminar diffusion flames have been numerically analyzed with a two-dimension with the FDS (Fire Dynamics Simulator). In particular, the effects of surrounding air temperature and wall temperature have been discussed. The fuel for the flame is an ethylene ($C_2H_4$). The surrounding oxygen concentration is 35%. Surrounding air temperatures are 300K, 600K, 900K and 1200K. Wall temperatures are 300K, 600K and 1200K. The soot deposition length defined as the relative approach distance to the wall per a given axial distance is newly introduced as a parameter to evaluate the soot deposition tendency on the wall. The result shows that soot deposition length is increased with increasing the surrounding air temperatures and with decreasing the wall temperature. And the numerical results led to the conclusion that it is essential to consider the thermophoretic effect for understanding the soot deposition on the cold wall properly.

• 한국지반공학회논문집
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• 제29권5호
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• pp.19-27
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• 2013

여름철 강우로 인한 산사태는 대부분 토석류의 형태로 나타난다. 토석류는 빠른 이동속도와 체적 때문에 경제적 손실 뿐만 아니라 많은 인명피해를 일으킨다. 토석류 해석 프로그램인 FLO-2D를 사용하여 유동학적 인자인 점성과 항복응력에 따른 토석류의 이동과 퇴적 특성을 분석하였다. 수치해석을 수행한 결과, 점성이 증가할수록 토석류 입자간의 응집력이 증가하여 토석류의 퇴적거리와 속도가 감소한다. 그에 따라 유동심은 증가하고 충격력은 감소하였다. 항복응력은 토석류의 발생과 퇴적에 큰 영향을 미치는 요인이다. 항복응력이 증가할수록 충격력은 증가하였다. 수치 해석 결과에 의하면, 토석류의 이동속도는 주로 점성에 의존하나 토석류의 퇴적 특성(퇴적거리, 퇴적 폭, 퇴적면적)은 점성과 항복응력에 의존한다.

• JSTS:Journal of Semiconductor Technology and Science
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• 제5권1호
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• pp.30-37
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• 2005

We present an air bridge type electrode system with tunable electrode distance for detecting electroactive biomolecules. It is known that the narrower gap between electrode fingers, the higher sensitivity in IDA (interdigitated array) electrode. In previous researches on IDA electrode, narrower patterning required much precise and expensive equipment as the gap goes down to nanometer scale. In this paper, an improved method is suggested to replace nano gap pattering with downsizing electrode distance and showed that the patterning can be replaced by thickness control using metal deposition methods, such as electroplating or metal sputtering. The air bridge type electrode was completed by the following procedures: gold patterning for lower electrode, copper electroplating, gold deposition for upper electrode, photoresist patterning for gold film support, and copper etching for space formation. The thickness of copper electroplating is the distance between upper and lower electrodes. Because the growth rate of electroplating is $0.5{\mu}m\;min^{-1}$, the distance is tunable up to hundreds of nanometers. Completed electrodes on the same wafer had $5{\mu}m$ electrode distance. The gaps between fingers are 10, 20, 30, and $40{\mu}m$ and the widths of fingers are 10, 20, 30, 40, and $50{\mu}m$. The air bridge type electrode system showed better sensitivity than planar electrode.

• 한국지반환경공학회 논문집
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• 제22권2호
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• pp.25-33
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• 2021

본 연구는 토석류의 퇴적 특성을 파악하고 소단을 설치함에 따른 토석류 피해의 저감효과를 분석하기 위해 수행되었다. 다양한 수로경사 및 토사체적농도를 고려하여 수로실험을 수행하였으며, 소단 설치에 따른 토석류 피해의 저감효과를 분석하기 위해 소단을 설치하지 않은 경우와 소단을 설치한 경우를 비교하였다. 본 연구에서는 토석류의 퇴적 특성 중 도달거리, 총 이동거리 및 이동비에 대한 분석을 진행하였다. 먼저 수로경사 변화에 따른 토석류의 퇴적 특성을 분석하였고, 토사체적농도 변화에 따른 토석류의 퇴적 특성을 분석하였다. 또한, 소단을 설치하지 않은 경우를 기준으로 소단을 설치한 경우의 퇴적 특성 변화율을 산정하였다. 실험결과, 수로경사와 토사체적농도가 토석류의 퇴적 특성에 상당한 영향을 미치는 것을 확인하였다. 또한, 사면에 소단을 설치할 경우 토석류의 도달거리와 이동비가 크게 감소하였으며, 총 이동거리가 증가하였다. 이는 소단을 설치하는 것이 토석류의 이동을 지연시키고, 토석류의 잠재적인 이동성을 감소시키는 것을 의미한다. 본 연구의 결과는 토석류의 퇴적 특성을 이해하는 데 유용한 정보를 제공할 것이며, 나아가 소단의 설계에 도움을 줄 것으로 기대된다.