• 신재생에너지
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• 제18권1호
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• pp.29-34
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• 2022

The most prevalent cause of solar cell efficiency loss is reduced recombination at the metal electrode and silicon junction. To boost efficiency, a a SiO_X/poly-Si passivating interface is being developed. Poly-Si for passivating contact is formed by various deposition methods (sputtering, PECVD, LPCVD, HWCVD) where the ploy-Si characterization depends on the deposition method. The sputtering process forms a dense Si film at a low deposition rate of 2.6 nm/min and develops a low passivation characteristic of 690 mV. The PECVD process offers a deposition rate of 28 nm/min with satisfactory passivation characteristics. The LPCVD process is the slowest with a deposition rate of 1.4 nm/min, and can prevent blistering if deposited at high temperatures. The HWCVD process has the fastest deposition rate at 150 nm/min with excellent passivation characteristics. However, the uniformity of the deposited film decreases as the area increases. Also, the best passivation characteristics are obtained at high doping. Thus, it is necessary to optimize the doping process depending on the deposition method.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2002년도 추계종합학술대회
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• pp.143-147
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• 2002

본 논문에서는 FBAR소자에서 중요한 역할을 하는 Reflector의 최적 증착조건을 RF/DC마그네트론 스퍼터링을 이용하여 조사하였다. Reflector를 구성하는 SiO$_2$와 W박막의 증착속도, 결정성, 표면거칠기 둥을 다양한 증착조건에서 관찰한 결과 빠른 증착속도를 보이면서 치밀하고 결정성이 좋은 박막을 얻을 수 있는 조건을 찾을 수 있었고, 이 조건으로 5층의 Acoustic Bragg Reflector 구조를 제작하였다.

• 한국지반환경공학회 논문집
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• 제22권2호
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• pp.25-33
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• 2021

본 연구는 토석류의 퇴적 특성을 파악하고 소단을 설치함에 따른 토석류 피해의 저감효과를 분석하기 위해 수행되었다. 다양한 수로경사 및 토사체적농도를 고려하여 수로실험을 수행하였으며, 소단 설치에 따른 토석류 피해의 저감효과를 분석하기 위해 소단을 설치하지 않은 경우와 소단을 설치한 경우를 비교하였다. 본 연구에서는 토석류의 퇴적 특성 중 도달거리, 총 이동거리 및 이동비에 대한 분석을 진행하였다. 먼저 수로경사 변화에 따른 토석류의 퇴적 특성을 분석하였고, 토사체적농도 변화에 따른 토석류의 퇴적 특성을 분석하였다. 또한, 소단을 설치하지 않은 경우를 기준으로 소단을 설치한 경우의 퇴적 특성 변화율을 산정하였다. 실험결과, 수로경사와 토사체적농도가 토석류의 퇴적 특성에 상당한 영향을 미치는 것을 확인하였다. 또한, 사면에 소단을 설치할 경우 토석류의 도달거리와 이동비가 크게 감소하였으며, 총 이동거리가 증가하였다. 이는 소단을 설치하는 것이 토석류의 이동을 지연시키고, 토석류의 잠재적인 이동성을 감소시키는 것을 의미한다. 본 연구의 결과는 토석류의 퇴적 특성을 이해하는 데 유용한 정보를 제공할 것이며, 나아가 소단의 설계에 도움을 줄 것으로 기대된다.

• 한국시뮬레이션학회논문지
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• 제17권2호
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• pp.13-19
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• 2008

본 연구에서는 드레인 부근의 채널 영역에서 접합 전계를 줄이는 Buffered deposition 구조의 소자를 제안하였다. Buffered deposition 구조의 소자 제작은 첫 번째 게이트를 식각한 후에 NM1(N-type Minor1) 이온주입을 하고 다시 HLD막과 질화막을 덮어 식각하여 제작하였다. 이러한 Buffered deposition 구조는 전계를 줄이기 위한 버퍼층으로 되어 있으며 Buffered deposition 소자의 여러 가지 구조의 Hot carrier 수명을 비교하였으며 열화 특성도 분석하여 10년간의 Hot carrier 수명을 만족함을 증명하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1991년도 하계학술대회 논문집
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• pp.171-173
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• 1991

the poly silicon film was deposited by APCVD. and then the deposition mechanism and electrical characteristics was investigated for that film. The grain phase, the deposition rate, and the etch characteristics were evaluated according to the deposition conditions. The criteria temperature of surface morphology state was $730^{\circ}C {\sim}780^{\circ}C$ between the mirror phase grain and the powder phase grain.

• 대한전기학회논문지
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• 제41권7호
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• pp.760-765
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• 1992

The material properties and the TFT characteristics fabricated on SiOS12T substrate by LPCVD using SiHS14T gas were investigated. The deposition rate showed Arrhenius behavior with an activation energy of 31Kcal/mol. And the transition temperature form amorphous to crystalline deposition was observed at 570$^{\circ}C$-580$^{\circ}C$. The strong(220) texture was observed as the deposition temperature increases. XRD analysis showed that the film texture of the as-deposited polycrystalline silicon does not change after annealing at 850$^{\circ}C$. The fabricated TFT's based on the as-deposited amorphous film showed superior electrical characteristics to those of the as-deposited polycrystalline films. It is considered that the different electrical characteristics result from the difference of flat band voltage(VS1FBT) due to the interface trap density between the gate oxide and the active channel.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.1906-1911
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• 2007

It has been well known that pool boiling CHF in nanofluids compared to pure water significantly increase due to the deposition of nanoparticles on heater surface. This study concerns the characteristics of the nanoparticle deposition layer and its influence on CHF. Pool boiling experiments were carried out with 0.01vol.% water-$TiO_2$ nanofluids to obtain various nanoparticle-deposited heaters. CHF on the prepared heaters was measured during pool boiling in pure water. The heater surfaces were visualized using scanning electron microscope (SEM) and also characterized using contact angle and capillarity. The results showed that the CHF enhancement in nanofluids was completely dependent upon the structural and physicochemical characteristics of the nanoparticle deposition layer.

• Journal of Advanced Marine Engineering and Technology
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• 제32권1호
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• pp.57-65
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• 2008

The characteristics of soot deposition on the cold wall in laminar diffusion flames have been numerically analyzed with a two-dimension with the FDS (Fire Dynamics Simulator). In particular, the effects of surrounding air temperature and wall temperature have been discussed. The fuel for the flame is an ethylene ($C_2H_4$). The surrounding oxygen concentration is 35%. Surrounding air temperatures are 300K, 600K, 900K and 1200K. Wall temperatures are 300K, 600K and 1200K. The soot deposition length defined as the relative approach distance to the wall per a given axial distance is newly introduced as a parameter to evaluate the soot deposition tendency on the wall. The result shows that soot deposition length is increased with increasing the surrounding air temperatures and with decreasing the wall temperature. And the numerical results led to the conclusion that it is essential to consider the thermophoretic effect for understanding the soot deposition on the cold wall properly.

• 설비공학논문집
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• 제18권12호
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• pp.1033-1038
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• 2006

We carried out the experiments on particle deposition onto the cleanroom wall panels. And then we investigated the particle deposition characteristic coefficients for electrostatic voltages and particle size. It was found that there is little difference in characteristics of the particle deposition between the steel panel and the anti-static coating panel. In case of that the particle size is under $1.0{\mu}m$, the particle deposition characteristic coefficient becomes larger as the electrostatic voltage induced to the cleanroom wall panel is increasing. Where in case of that the particle size is over $3.0{\mu}m$, the particle deposition characteristic coefficients do not show any differences with the electrostatic voltages. It is due to that the electrostatic force is the major particle transport mechanism for submicron particles, while the gravitational settling is the major particle transport mechanism for overmicron particles when the electro-static voltages are induced to the cleanroom wall panel.

• 소성∙가공
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• 제24권4호
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• pp.272-279
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• 2015

The characteristics of the laser metal deposition parameters were studied to enhance the deposition efficiency using a diode pumped disk laser. STD61 hot tool steel plate and Fe based AISI M2 alloy were used as a substrate and powder for the laser metal deposition, respectively. Among the laser metal deposition parameters the laser power, track pitch and powder feed rate were used to estimate the deposition efficiency. From the experimental results, the deposition efficiency was shown to be excellent when 1.8kW laser power 500um track pitch and 10g/min of the powder feed rate were used. For this optimal condition the average hardness of the deposition track was approximately 830HV, and this value is 30~50% better than the hardness of the commercially produced tool steel after heat treatment.