• Title/Summary/Keyword: Deposition Growth Rate

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Growth behavior of Ti-Al-V-N Films Prepared by Dc Reactive Magnetron Sputtering (DC Reactive Magnetron Sputtering법에 의한 Ti-Al-V-N 박막의 성장거동)

  • Sohn, Yong-Un;Chung, In-Wha;Lee, Young-Ki
    • Korean Journal of Materials Research
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    • v.9 no.7
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    • pp.688-694
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    • 1999
  • Ti-6Al-4V-N films have been grown onto glass substrates by dc reactive magnetron sputtering from a Ti-6Al-4V-N alloy target at different nitrogen partial pressure, input powers and sputtering times. The influence of various sputtering conditions on structural properties of Ti-6Al-4V-N films was investigated by measuring their X-ray diffraction. The quaternary Ti-6Al-4V-N film is crystallizing in a face centered cubic TiN structure, the lattice parameter is smaller than the TiN parameter as titanium atoms of the TiN lattice are replaced by aluminum and vanadium atoms. The films show the (111) preferred orientation and the (111) peak intensity decreases as the nitrogen partial pressure is increased, but the intensity increases as the sputtering time is increased. The deposition rate and the grain size are alto related with the variation of various sputtering conditions.

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Effect of the oxygen flow ratio on the structural and electrical properties of indium zinc tin oxide (IZTO) films prepared by pulsed DC magnetron sputtering

  • Son, Dong-Jin;Nam, Eun-Kyoung;Jung, Dong-Geun;Ko, Yoon-Duk;Choi, Byung-Hyun;Kim, Young-Sung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.168-168
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    • 2010
  • Transparent conduction oxides (TCOs) films is extensively reported for optoelectronic devices application such as touch panels, solar cells, liquid crystal displays (LCDs), and organic light emitting diodes(OLEDs). Among the many TCO film, indium tin oxide(ITO) is in great demand due to the growth of flat panel display industry. However, indium is not only high cost but also its deposits dwindling. Therefore, many studies are being done on the transparent conductive oxides(TCOs). We fabricated a target of IZTO(In2O3:ZnO:SnO2=70:15:15 wt.%) reduced indium. Then, IZTO thin films were deposited on glass substrates by pulsed DC magnetron sputtering with various oxygen flow ratio. The substrate temperature was fixed at the room temperature. We investigated the electrical, optical, structural properties of IZTO thin films. The electrical properties of IZTO thin films were dependent on the oxygen partial pressure. As a result, the most excellent properties of IZTO thin films were obtained at the 3% of oxygen flow rate with the low resistivity of $7.236{\times}10^{-4}{\Omega}cm$. And also the optical properties of IZTO thin films were shown the good transmittance over 80%. These IZTO thin films were used to fabricated organic light emitting diodes(OLEDs) as anode and the device performances studied. The OLED with an IZTO anode deposited at optimized deposition condition showed good brightness properties. Therefore, IZTO has utility value of TCO electrode although it reduced indium and we expect it is possible for the IZTO to apply to flexible display due to the low processing temperature.

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Dependence of the Formation of $TiO_{2\pm}{\delta}$ Films on Plasma Process Variables (플라즈마 공정 변수가 $TiO_{2\pm}{\delta}$ 박막 형성에 미치는 영향)

  • Park, Sang-Gi;Gang, Bong-Ju;Lee, Won-Hui;Lee, Jae-Gap
    • Korean Journal of Materials Research
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    • v.10 no.11
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    • pp.732-737
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    • 2000
  • Plasma enhanced chemical vapor deposition of $TiO_{2$\pm}{\delta}$ has been carried out using TEMAT [tetrakis(ethylmethylamido) titanium] and $H_2$. Increasing the power from 300 W to 500 W produced the high density plasma, leading to the formation of TiO$_2$films with an increased ratio of Ti to O and a negligible amount of C and N. Applying the bias of 30W to the substrate in creased the growth rate of the film with a slightly increased content of Ti in the film. In addition, $H_2O$ was from either the residual gas in the gase pressure or $H_2(/He)$ gas and actively participated in the formation of $TiO_2$ films. Consequently, Ti ions created in the plasma could be a main contributor to $TiO_2$ formation with a slight amount of $H_2O(~10^{-4}Toor)$ in the ambient, which provided the dissociation of TEMAT.

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The Status of 3D Printing Industry and Researches on Exposure to Hazards When Using Metal Materials (3D프린팅 산업 및 금속소재 사용시 유해인자 노출 연구 현황)

  • Hae Dong Park;Leejun HUH
    • Journal of the Korea Safety Management & Science
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    • v.25 no.1
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    • pp.7-14
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    • 2023
  • We attempted to provide an overview of the laws and current state of the 3D printing industry in South Korea and around the world, using the annual industry surveys and the Wohler report. Additionally, we reviewed articles relating to the potential exposure to hazards associated with 3D printing using metal materials. In South Korea, there were 406 3D printing-related businesses, employing 2,365 workers, and the market size was estimated at 455.9 billion won in 2021. Globally, the average growth rate of the 3D printing industry market over the past 10 years was 27.4%, and the market size was estimated at $11.8 billion in 2019. The United States had the highest cumulative installation ratio of industrial 3D printers, followed by China, Japan, Germany, and South Korea. A total of 6,168 patents related to 3D printing were registered in the US between 2010 and 2019. Harmful factors during metal 3D printing was mainly evaluated in the powder bed fusion and direct energy deposition printing types, and there is a case of material extrusion type with metal additive filaments. The number, mass, size distribution, and chemical composition of particles were mainly evaluated. Particle concentration increases during the opening of the chamber or post-processing. However, operating the 3D printer in a ventilated chamber can reduce particle concentration to the background level. In order to have a safe and healthy environment for 3D printing, it is necessary to accumulate and apply knowledge through various studies.

The Influence of Oxygen Gas Flow Rate on Growth of Tin Dioxide Nanostructures (이산화주석 나노구조물의 성장에서 산소가스 유량이 미치는 영향)

  • Kim, Jong-Il;Kim, Ki-Chul
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.19 no.10
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    • pp.1-7
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    • 2018
  • Tin dioxide, $SnO_2$, is applied as an anode material in Li-ion batteries and a gas sensing materials, which shows changes in resistance in the presence of gas molecules, such as $H_2$, NO, $NO_2$ etc. Considerable research has been done on the synthesis of $SnO_2$ nanostructures. Nanomaterials exhibit a high surface to volume ratio, which means it has an advantage in sensing gas molecules and improving the specific capacity of Li-ion batteries. In this study, $SnO_2$ nanostructures were grown on a Si substrate using a thermal CVD process with the vapor transport method. The carrier gas was mixed with high purity Ar gas and oxygen gas. The crystalline phase of the as-grown tin oxide nanostructures was affected by the oxygen gas flow rate. The crystallographic property of the as-grown tin oxide nanostructures were investigated by Raman spectroscopy and XRD. The morphology of the as-grown tin oxide nanostructures was confirmed by scanning electron microscopy. As a result, the $SnO_2$ nanostructures were grown directly on Si wafers with moderate thickness and a nanodot surface morphology for a carrier gas mixture ratio of Ar gas 1000 SCCM : $O_2$ gas 10 SCCM.

Characterization of SiC nanowire Synthesized by Thermal CVD (열 화학기상증착법을 이용한 탄화규소 나노선의 합성 및 특성연구)

  • Jung, M.W.;Kim, M.K.;Song, W.;Jung, D.S.;Choi, W.C.;Park, C.J.
    • Journal of the Korean Vacuum Society
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    • v.19 no.4
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    • pp.307-313
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    • 2010
  • One-dimensional cubic phase silicon carbide nanowires (${\beta}$-SiC NWs) were efficiently synthesized by thermal chemical vapor deposition (TCVD) with mixtures containing Si powders and nickel chloride hexahydrate $(NiCl_2{\cdot}6H_2O)$ in an alumina boat with a carbon source of methane $(CH_4)$ gas. SEM images are shown that the growth temperature (T) of $1,300^{\circ}C$ is not enough to synthesize the SiC NWs owing to insufficient thermal energy for melting down a Si powder and decomposing the methane gas. However, the SiC NWs could be synthesized at T>$1,300^{\circ}C$ and the most efficient temperature for growth of SiC NWs is T=$1,400^{\circ}C$. The synthesized SiC NWs have the diameter with an average range between 50~150 nm. Raman spectra clearly revealed that the synthesized SiC NWs are forming of a cubic phase (${\beta}$-SiC). Two distinct peaks at 795 and $970 cm^{-1}$ in Raman spectra of the synthesized SiC NWs at T=$1,400^{\circ}C$ represent the TO and LO mode of the bulk ${\beta}$-SiC, respectively. XRD spectra are also supported to the Raman spectra resulting in the strongest (111) peaks at $2{\Theta}=35.7^{\circ}$, which is the (111) plane peak position of 3C-SiC. Moreover, the gas flow rate of 300 sccm for methane is the optimal condition for synthesis of a large amount of ${\beta}$-SiC NW without producing the amorphous carbon structure shown at a high methane flow rate of 800 sccm. TEM images are shown two kinds of the synthesized ${\beta}$-SiC NWs structures. One is shown the defect-free ${\beta}$-SiC NWs with a (111) interplane distance of 0.25 nm, and the other is the stacking-faulted ${\beta}$-SiC NWs. Also, TEM images exhibited that two distinct SiC NWs are uniformly covered with $SiO_2$ layer with a thickness of less 2 nm.

Effect of Seleniferous Whole Crop Barley Silage on Growth Performance, Blood and Carcass Characteristics, and Tissue Selenium Deposition in Finishing Hanwoo Steers (셀레늄 강화 청보리 사일리지 급여가 비육기 거세한우의 생산성, 혈액성상 및 도체특성과 조직 내 셀레늄 축적에 미치는 영향)

  • Hwangbo, Soon;Jo, Ik Hwan;Kim, Guk Won;Choi, Chang Weon;Lee, Sung Hoon
    • Journal of The Korean Society of Grassland and Forage Science
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    • v.33 no.4
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    • pp.281-289
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    • 2013
  • This study was conducted to investigate the effects of feeding seleniferous whole crop barley silage (WCBS) on the growth performance, blood and carcass characteristics, and tissue selenium deposition infinishing Hanwoo steers. A total of 20 growing Hanwoo steers were selected and assigned to one of the following feed groups: control (0.1 ppm Se), T1 (0.3 ppm Se), T2 (0.9 ppm Se), and T3 (0.9 ppm of inorganic Se). Five steers were allocated to each treatment group, and the trial lasted for 90 days. All experimental diets combined seleniferous and/or non-seleniferous WCBS up to a ratio of 30%. For the T3 diet, 0.9 ppm Se in the form of sodium selenite was added to the control diet. Dietary level and type of selenium did not affect feed intake and body weight gain. Blood total lipid and triglyceride concentrations were significantly (p<0.05) lower in the T2 group than in control. Blood immunoglobulin G concentration increased significantly (p<0.05) with increasing levels of dietary selenium; concentrations were significantly (p<0.05) higher in T2 and T3 than in control. Blood selenium concentration was the highest (p<0.05) in T2. No significant difference was observed in dressing rate, ribeye area, marbling score, meat color and fat color. Further, no association was found between levels and chemical form of dietary selenium and quality and quantity of meat. To the contrary, tissue selenium content in kidney, liver, and hind leg increased significantly (p<0.05) with increasing levels of selenium; however, feeding inorganic selenium did not introduce a significant increase in tissue selenium content of finishing Hanwoo steers. The results indicated that the selenium present in seleniferous WCBS was an effectively absorbable selenium source, suitable for increasing tissue selenium content in beef. Approximately 100 g of hind leg muscle from steers fed on the T2 diet met approximately 69% of the recommended daily selenium requirements.

Effect of the processing variables on the formation of $Pb(Sc_{1/2}Nb_{1/2})O_3$ thin layers ($Pb(Sc_{1/2}Nb_{1/2})O_3$ 박막 형성에 미치는 공정변수의 영향)

  • Park, Kyung-Bong;Kwon, Seung-Hyeop;Kim, Tae-Huei
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.19 no.2
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    • pp.70-74
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    • 2009
  • Effect of the processing variables on the formation of $Pb(Sc_{1/2}Nb_{1/2})O_3$(hereafter PSN) thin layers prepared on Pt(111)/Ti/$SiO_2$/Si substrates using the sol-gel and the spin coating method has been studied. After each deposition, the coated films were heated at $370^{\circ}C$ for 5 min. Then they were finally sintered at temperature range of $600{\sim}700^{\circ}C$ by RTA(rapid thermal annealing). The final multilayered films showed a (111) preferred orientation. On a while, the layer-by-layer crystallization of multilayered amorphous thin films without the intermediate heating exhibited a (100) preferred orientation. In case of heat treatment in the tube furnace with the heating rate of $4^{\circ}C/min$, (100) and (111) oriented thin layers were formed simultaneously. The microstructure of the deposited films were dense and crack-free with thickness of 300nm, irrespective of the processing variables.

Phase transformation and magnetic properties of NiFe thin films on Si(100) wafer and SiO2/Si(100) substrate by co-sputtering (Si(100) wafer와 SiO2/Si(100) 기판에 동시 스퍼터링법으로 증착된 NiFe 합금 박막의 상변화 및 자기적 특성)

  • Kang, Dae-Sik;Song, Jong-Han;Nam, Joong-Hee;Cho, Jeong-Ho;Chun, Myoung-Pyo
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.20 no.5
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    • pp.216-220
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    • 2010
  • Ni-Fe alloys have various applications such as thin film inductor, thin film transformer, magnetic head's shield case, etc. Magnetic properties of Ni-Fe thin films depend on the process parameters such as thickness, contents, deposition rate, substrates, etc. In this study, NiFe films with a thickness of about 150nm were deposited on Si(100) wafer and $SiO_2$/Si(100) substrate at room temperature by a DC magnetron co-sputtering using Fe and Ni targets. Their phase formation and magnetic properties as a function of annealing temperature were investigated with XRD, FE-SEM and VSM. The assputtered films have BCC structure. With increasing annealing temperature, NiFe thin film for $SiO_2$/Si(100) substrate transformed completely from BCC to FCC phase above $500^{\circ}C$, but some BCC phase remained above $500^{\circ}C$ on Si(100) wafer. For samples annealed at $450^{\circ}C$, squareness ratio of NiFe thin film shows peak value and its saturation magnetization is around 0.0118 emu, which means that the optimum annealing temperature of NiFe thin film seems to be $450^{\circ}C$. The saturation magnetization of films decreased rapidly above the annealing temperature of $500^{\circ}C$ due to phase transformation from BCC to FCC phase.

Electrical and Optical Properties of the GZO Transparent Conducting Layer Prepared by Magnetron Sputtering Technique (마그네트론 스퍼터링법으로 제작된 GZO 투명전도막의 전기적 및 광학적 특성)

  • No, Im-Jun;Kim, Sung-Hyun;Shin, Paik-Kyun;Lee, Kyung-Il;Kim, Sun-Min;Cho, Jin-Woo
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.24 no.4
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    • pp.110-115
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    • 2010
  • Transparent conducting gallium-doped zinc oxide (GZO) thin films which were deposited on Corning glass substrate using an Gun-type rf magnetron sputtering deposition technology. The GZO thin films were fabricated with an GZO ceramic target (Zn : 97[wt%], $Ga_2O_3$ : 3[wt%]). The GZO thin films were deposited by varying the growth conditions such as the substrate temperature, oxygen pressure. Among the GZO thin films fabricated in this study, the one formed at conditions of the substrate temperature of 200[$^{\circ}C$], Ar flow rate of 50[sccm], $O_2$ flow rate of 5[sccm], rf power of 80[W] and working pressure of 5[mtorr] showed the best properties of an electrical resistivity of $2.536{\times}10^{-4}[{\Omega}{\cdot}cm]$, a carrier concentration of $7.746{\times}10^{20}[cm^{-3}]$, and a carrier mobility of 31.77[$cm^2/V{\cdot}S$], which indicates that it could be used as a transparent electrode for thin film transistor and flat panel display applications.