• 한국진공학회지
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• 제4권S1호
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• pp.108-112
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• 1995

Copper and aluminum selective deposition using (hfac)Cu(VTMS) and DMEAA precursors were performed in a warm-wall low pressure chemical vapour deposition reactor. The films of Cu and AI deposited on Corning 7059 glass and quartz with pattern of Cr seed metal. Selective deposition can be achieved at a pressure range of from 10-1 to 10 torr and substrate temperature range of 150-25$0^{\circ}C$. Selective deposition of Cu and AI by CVD is one of candidate for gate material formation fo larger area and high resolution plat panel displays.

• 한국해양환경ㆍ에너지학회지
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• 제7권2호
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• pp.75-81
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• 2004

고농도로 오염된 마산만 퇴적물 2.1×10/sup 6/ ㎥ 마산시 가포해역에 투기되었다. 준설토가 투기된 가포해역의 한 조석주기 동안 해수 중금속 농도는 Zn 1.15∼2.59, Cu 1.08∼1.96, Pb ND∼0.42 그리고 Ni 0.57∼1.35 ㎍/l로서 진해만의 평균 농도인 Zn 0.80, Cu 1.02, Pb 0.01 그리고 Ni 0.70 ㎎/l 와 비교할 때 높은 농도이었다. 가포지역 퇴적물 표층의 중금속 오염 수준을 미국 EPA 기준으로 평가한 결과 Non polluted∼Moderately polluted level 이었으며, Adverse Biological Effects 기준으로 평가하였을 때 Cu와 Zn은 ERL∼ERM, Cd, Cr, Pb 그리고 Ni은 ERL 수준이었다. 퇴적층별 중금속 함량은 상층부보다 하층부에서 중금속 농도가 높게 나타났으며 이러한 오염도 분포 경향은 상대적으로 오염도가 낮은 지역의 준설토가 투기지역 퇴적물의 상층부를 형성하고 있기 때문이다. 가포지역에서 채집된 굴에서 Zn 238.96, Cu 5.29, 바지락에서 Zn 17.71, Cu 1.00. 진주담치에서 Zn 187.98, Pb 0.28, Cr 0.15, Mn 4.23, Sr 1.45 그리고 Fe 100.33㎍/g wet wt.이 검출되어 투기장 외부 호안에서 채취된 시료보다 높은 경향을 나타내었다. 그러나 이와 같은 패류의 중금속 측정결과는 국립수산물품질검사원의 정밀검사기준(패류)인 Pb 2.0 및 Cd 2.0 ㎍/g과 비교하였을 때 기준치 이하에 해당하였다.

• 한국환경과학회지
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• 제17권1호
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• pp.29-36
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• 2008

A large amount of $2.1{\times}10^6m^3$ of polluted sediment was dredged from the Masan Bay and deposited in Gapo confined area, Masan, Korea. The six representative sediments were obtained and analyzed for issue components. The data was discussed with the species of benthos and their distribution. It was judged that toxicological effects of sediment analyzed ranged from ERL to ERM with copper and zinc, and ERL with cadmium, chrome, lead and nickel by the Adverse Biological Effects. The dredging index (DI) of sediments stabilized for 10 years since dumping the confined site was calculated and compared with the DI values of dredged sediment itself. DI values decreased from 0.67 to $0.07{\sim}0.18$, which reflects DI value less than 0.2 is good for benthos in the sediment by the natural recovery of dredged materials. The ecological recovery was confirmed in this confined area as a habitat of benthic organisms.

• 자원환경지질
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• 제31권6호
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• pp.509-518
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• 1998

Fly ashes have been deposited around Youngwol power plant until electrostatic precipitator was installed in 1981. Fresh fly ash samples from electrostatic precipitator and weathered fly ash from ash disposal site were collected from Youngwol power plant, along with 65 soil samples of nearby area to look into the influence of PFA deposit on the soils in surrounding area. In chemistry, EPA does not contain high level of toxic elements and there is no notable concentration of toxic elements in soil near power plant. Total concentrations of Co, Cr, Cu, V, and Zn are 13 ppm, 89 ppm, 73 ppm, 157 ppm and 57 ppm in PFA. Concentrations of theses elements in ash-rich soils are 15 ppm, 78 ppm, 60 ppm, 133 ppm and 68 ppm, and those in ash-poor soils are 19 ppm, 70 ppm, 38 ppm, 91 ppm and 97 ppm. But these metal elements are highly concentrated in magnetic fractions of EPA (Co, 129 ppm; Cr, 217 ppm; Cu, 210 ppm; V, 197 ppm; Zn 90 ppm). Considering the process of long-term weathering of PFA, potentially toxic substances from the ash could be leached into soils and groundwater.

• 기술사
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• 제38권6호
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• pp.1-9
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• 2005

The Republic of Korea (South) and the Peaples Republic of Korea (North) had agreed to exploit the North Korean rich natural resources starting from the year of 2006. Through this mutual agreement DPRK shall quarantee ROK's investment in the North Korean Mines and supply mineral products for the compasation of the financial investment supported by ROK. In the area of northern part of Korea, many kind of natural resources such as Magnesite, Iron, Gold & Silver, Copper, Lead & Zinc, and Coal are plentifully deposited. In the area of southern part of Korea, however, most kind of natural resources have been exhausted and so presently major minerals such as Gold & Silver, Copper, Lead & Zinc and Coal are being imported and relying on foreign countries in whole quantity of the requirement. On the other hand Northern Part of Korea is making very slow progress in mining and exploitation owing to the lack of investment even though there are rich deposits of natural resources. And in Southern Part of Korea, they have most advanced production facilities and technologies in the world in the fields of Mineral Floatation, Steel Manufacturing, Nonferrous Metal Smelting & Refining and those plants fabrications. A combination of Southern Technologies together with Financial Support and Northern rich natural resources & Labour Power will be a most hopeful, desirable and mutually required 'South-North economic Cooperation' as the mining industries are labour intensive.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.161-161
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• 2011

Titanium (IV) dioxide (TiO2) is one of the most attractive d-block transition metal functional oxides. Many applications of TiO2 such as dye-sensitized solar cells and photocatalyst have been widely investigated. To utilize solar energy efficiently, TiO2 should be well-aligned with a high surface area and promote the charge separation as well as electron transport. Herein, the TiO2 nanotubes were successfully fabricated by a template-directed method. The electrospun PEO(Polyethylene oxide, Molecular weight, 400k)fibers were used as a soft template for coating with titanium dioxide using an atomic layer deposition (ALD) technique. The deposition was conducted onto a template at 50$^{\circ}C$ by using titaniumisopropoxide [Ti(OCH(CH3)2)4; TTIP] as precursors of TiO2. While the as-deposited TiO2 layers onto PEO fibers were completely amorphous with atomic layer deposition, the TiO2 layers after calcination at 500$^{\circ}C$ for 1 h were properly converted into polycrystalline nanostructured hallow TiO2 nanotube. The TiO2 nanotube with high surface area can be easily handled and reclaimed for use in future applications related to solar cell fabrications.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.90.2-90.2
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• 2013

Vertically-aligned silicon nanostructure arrays (SNAs) have been drawing much attention due to their useful electrical properties, large surface area, and quantum confinement effect. SNAs are typically fabricated by chemical vapor deposition, reactive ion etching, or wet chemical etching. Recently, metal-assisted chemical etching process, which is relatively simple and cost-effective, in combination with nanosphere lithography was recently demonstrated for vertical SNA fabrication with controlled SNA diameters, lengths, and densities. However, this method exhibits limitations in terms of large-area preparation of unperiodic nanostructures and SNA geometry tuning independent of inter-structure separation. In this work, we introduced the layerby- layer deposition of polyelectrolytes for holding uniformly dispersed polystyrene beads as mask and demonstrated the fabrication of well-dispersed vertical SNAs with controlled geometric parameters on large substrates. Additionally, we present a new means of building in vitro neuronal networks using vertical nanowire arrays. Primary culture of rat hippocampal neurons were deposited on the bare and conducting polymer-coated SNAs and maintained for several weeks while their viability remains for several weeks. Combined with the recently-developed transfection method via nanowire internalization, the patterned vertical nanostructures will contribute to understanding how synaptic connectivity and site-specific perturbation will affect global neuronal network function in an extant in vitro neuronal circuit.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.281.1-281.1
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• 2016

Transition metal dichalcogenides (TMDCs) are promising layered structure materials for next-generation nano electronic devices. Many investigation on the FET device using TMDCs channel material have been performed with some integrated approach. To use TMDCs for channel material of top-gate thin film transistor(TFT), the study on high-k dielectrics on TMDCs is necessary. However, uniform growth of atomic-layer-deposited high-k dielectric film on TMDCs is difficult, owing to the lack of dangling bonds and functional groups on TMDC's basal plane. We demonstrate the effect of remote oxygen plasma pretreatment of large area synthesized few-layer MoSe2 on the growth behavior of Al2O3, which were formed by atomic layer deposition (ALD) using tri-methylaluminum (TMA) metal precursors with water oxidant. We investigated uniformity of Al2O3 by Atomic force microscopy (AFM) and Scanning electron microscopy (SEM). Raman features of MoSe2 with remote plasma pretreatment time were obtained to confirm physical plasma damage. In addition, X-ray photoelectron spectroscopy (XPS) was measured to investigate the reaction between MoSe2 and oxygen atom after the remote O2 plasma pretreatment. Finally, we have uniform Al2O3 thin film on the MoSe2 by remote O2 plasma pretreatment before ALD. This study can provide interfacial engineering process to decrease the leakage current and to improve mobility of top-gate TFT much higher.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.361.2-361.2
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• 2014

Transition metal dichalcogenides (MoS2, WS2, WSe2, MoSe2, NbS2, NbSe2, etc.) are layered materials that can exhibit semiconducting, metallic and even superconducting behavior. In the bulk form, the semiconducting phases (MoS2, WS2, WSe2, MoSe2) have an indirect band gap. Recently, these layered systems have attracted a great deal of attention mainly due to their complementary electronic properties when compared to other two-dimensional materials, such as graphene (a semimetal) and boron nitride (an insulator). However, these bulk properties could be significantly modified when the system becomes mono-layered; the indirect band gap becomes direct. Such changes in the band structure when reducing the thickness of a WS2 film have important implications for the development of novel applications, such as valleytronics. In this work, we report for the controlled synthesis of large-area (~cm2) single-, bi-, and few-layer WS2 using a two-step process. WOx thin films were deposited onto a Si/SiO2 substrate, and these films were then sulfurized under vacuum in a second step occurring at high temperatures ($750^{\circ}C$). Furthermore, we have developed an efficient route to transfer these WS2 films onto different substrates, using concentrated HF. WS2 films of different thicknesses have been analyzed by optical microscopy, Raman spectroscopy, and high-resolution transmission electron microscopy.

• 한국해양학회지
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• 제25권4호
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• pp.182-188
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• 1990

낙동강 하구역에서의 중금속 분포와 퇴적작용에 대한 연구를 1987년 10월부터 1988년 9월에 걸쳐 수행하였다. 연구지역의 퇴적환경은 하구환경이며 입도분석 특성에 따라 모래섬, 수로 및 조간대 지역으로 분류된다. 모래섬의 퇴적물은 뜬짐, 틤짐, 굴 르기 상태로 운반되었으며, 조간대는 주로 뜬점과 틤틔짐으로 이동되었다. 수로의 퇴적 물은 거의 굴르기와 약간의 뜬짐 상태로 운반되었다. 모래섬은 강한 파도의 영향을 받 으며, 그 후방에 놓인 조간대는 약한 조류의 영향을 받는다. 수중에서 Cu, Cd, $Cr^{6+}$, Pb, Zn의 농도는 각각 최고의 27.9, 6.7, 20.4, 16.3, 37.3 ppb를 기록하였으며, 퇴적물에서는 20.0, 1.65, 25.4, 15.4 132.9 ppm을 나타내었다. 이들 중금속의 재첩 (V. Muller)에 의한 총섭취인자는 각각 1600, 310, 310, 490, 7900g이었다.