• Title/Summary/Keyword: Deposited metal area

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A Study on Nano/Micro Pattern Fabrication of Metals by Using Mechanical Machining and Selective Deposition Technique (기계적 가공과 무전해 선택적 증착기술을 이용한 나노/마이크로 금속패턴 제작에 관한 연구)

  • Cho Sang-Hyun;Youn Sung-Won;Kang Chung-Gil
    • Journal of the Korean Society for Precision Engineering
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    • v.23 no.8 s.185
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    • pp.171-177
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    • 2006
  • This study was performed as a part of the research on the development of a maskless and electroless process for fabricating metal micro/nanostructures by using a nanoindenter and an electroless deposition technique. $2-{\mu}m$-deep indentation tests on Ni and Cu samples were performed. The elastic recovery of the Ni and Cu was 9.30% and 9.53% of the maximum penetration depth, respectively. The hardness and the elastic modulus were 1.56 GPa and 120 GPa for Ni and 1.51 GPa and 104 GPa for Cu. The effect of single-point diamond machining conditions such as the Berkovich tip orientation (0, 45, and $90^{\circ}$ ) and the normal load (0.1, 0.3, 0.5, 1, 3, and 5 mN), on both the deformation behavior and the morphology of cutting traces (such as width and depth) was investigated by constant-load scratch tests. The tip orientation had a significant influence on the coefficient of friction, which varied from 0.52-0.66 for Ni and from 0.46- 0.61 for Cu. The crisscross-pattern sample showed that the tip orientation strongly affects the surface quality of the machined are a during scratching. A selective deposition of Cu at the pit-like defect on a p-type Si(111) surface was also investigated. Preferential deposition of the Cu occurred at the surface defect sites of silicon wafers, indicating that those defect sites act as active sites for the deposition reaction. The shape of the Cu-deposited area was almost the same as that of the residual stress field.

Carbon nanotube field emission display

  • Chil, Won-Bong;Kim, Jong-Min
    • Electrical & Electronic Materials
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    • v.12 no.7
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    • pp.7-11
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    • 1999
  • Fully sealed field emission display in size of 4.5 inch has been fabricated using single-wall carbon nanotubes-organic vehicle com-posite. The fabricated display were fully scalable at low temperature below 415$^{\circ}C$ and CNTs were vertically aligned using paste squeeze and surface rubbing techniques. The turn-on fields of 1V/${\mu}{\textrm}{m}$ and field emis-sion current of 1.5mA at 3V/${\mu}{\textrm}{m}$ (J=90${\mu}{\textrm}{m}$/$\textrm{cm}^2$)were observed. Brightness of 1800cd/$m^2$ at 3.7V/${\mu}{\textrm}{m}$ was observed on the entire area of 4.5-inch panel from the green phosphor-ITO glass. The fluctuation of the current was found to be about 7% over a 4.5-inch cath-ode area. This reliable result enables us to produce large area full-color flat panel dis-play in the near future. Carbon nanotubes (CNTs) have attracted much attention because of their unique elec-trical properties and their potential applica-tions [1, 2]. Large aspect ratio of CNTs together with high chemical stability. ther-mal conductivity, and high mechanical strength are advantageous for applications to the field emitter [3]. Several results have been reported on the field emissions from multi-walled nanotubes (MWNTs) and single-walled nanotubes (SWNTs) grown from arc discharge [4, 5]. De Heer et al. have reported the field emission from nan-otubes aligned by the suspension-filtering method. This approach is too difficult to be fully adopted in integration process. Recently, there have been efforts to make applications to field emission devices using nanotubes. Saito et al. demonstrated a car-bon nanotube-based lamp, which was oper-ated at high voltage (10KV) [8]. Aproto-type diode structure was tested by the size of 100mm $\times$ 10mm in vacuum chamber [9]. the difficulties arise from the arrangement of vertically aligned nanotubes after the growth. Recently vertically aligned carbon nanotubes have been synthesized using plasma-enhanced chemical vapor deposition(CVD) [6, 7]. Yet, control of a large area synthesis is still not easily accessible with such approaches. Here we report integra-tion processes of fully sealed 4.5-inch CNT-field emission displays (FEDs). Low turn-on voltage with high brightness, and stabili-ty clearly demonstrate the potential applica-bility of carbon nanotubes to full color dis-plays in near future. For flat panel display in a large area, car-bon nanotubes-based field emitters were fabricated by using nanotubes-organic vehi-cles. The purified SWNTs, which were syn-thesized by dc arc discharge, were dispersed in iso propyl alcohol, and then mixed with on organic binder. The paste of well-dis-persed carbon nanotubes was squeezed onto the metal-patterned sodalime glass throuhg the metal mesh of 20${\mu}{\textrm}{m}$ in size and subse-quently heat-treated in order to remove the organic binder. The insulating spacers in thickness of 200${\mu}{\textrm}{m}$ are inserted between the lower and upper glasses. The Y\ulcornerO\ulcornerS:Eu, ZnS:Cu, Al, and ZnS:Ag, Cl, phosphors are electrically deposited on the upper glass for red, green, and blue colors, respectively. The typical sizes of each phosphor are 2~3 micron. The assembled structure was sealed in an atmosphere of highly purified Ar gas by means of a glass frit. The display plate was evacuated down to the pressure level of 1$\times$10\ulcorner Torr. Three non-evaporable getters of Ti-Zr-V-Fe were activated during the final heat-exhausting procedure. Finally, the active area of 4.5-inch panel with fully sealed carbon nanotubes was pro-duced. Emission currents were character-ized by the DC-mode and pulse-modulating mode at the voltage up to 800 volts. The brightness of field emission was measured by the Luminance calorimeter (BM-7, Topcon).

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Analysis of Surface Plasmon Resonance on Periodic Metal Hole Array by Diffraction Orders

  • Hwang, Jeong-U;Yun, Su-Jin;Gang, Sang-U;No, Sam-Gyu;Lee, Sang-Jun;Urbas, Augustine;Ku, Zahyun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.176-177
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    • 2013
  • Surface plasmon polaritons (SPPs) have attracted the attention of scientists and engineers involved in a wide area of research, microscopy, diagnostics and sensing. SPPs are waves that propagate along the surface of a conductor, usually metals. These are essentially light waves that are trapped on the surface because of their interaction with the free electrons of conductor. In this interaction, the free electrons respond collectively by oscillating in resonance with the light wave. The resonant interaction between the surface charge oscillation and the electromagnetic field of the light constitutes the SPPs and gives rise to its unique properties. In this papers, we studied theoretical and experimental extraordinary transmittance (T) and reflectance (R) of 2 dimensional metal hole array (2D-MHA) on GaAs in consideration of the diffraction orders. The 2d-MHAs was fabricated using ultra-violet photolithography, electron-beam evaporation and standard lift-off process with pitches ranging from 1.8 to $3.2{\mu}m$ and diameter of half of pitch, and was deposited 5-nm thick layer of titanium (Ti) as an adhesion layer and 50-nm thick layer of gold (Au) on the semiinsulating GaAs substrate. We employed both the commercial software (CST Microwave Studio: Computer Simulation Technology GmbH, Darmstadt, Germany) based on a finite integration technique (FIT) and a rigorous coupled wave analysis (RCWA) to calculate transmittance and reflectance. The transmittance was measured at a normal incident, and the reflectance was measured at variable incident angle of range between $30^{\circ}{\sim}80^{\circ}$ with a Nicolet Fourier transmission infrared (FTIR) spectrometer with a KBr beam splitter and a MCT detector. For MHAs of pitch (P), the peaks ${\lambda}$ max in the normal incidence transmittance spectra can be indentified approximately from SP dispersion relation, that is frequency-dependent SP wave vector (ksp). Shown in Fig. 1 is the transmission of P=2.2 um sample at normal incidence. We attribute the observation to be a result of FTIR system may be able to collect the transmitted light with higher diffraction order than 0th order. This is confirmed by calculations: for the MHAs, diffraction efficiency in (0, 0) diffracted orders is lower than in the (${\pm}x$, ${\pm}y$) diffracted orders. To further investigate the result, we calculated the angular dependent transmission of P=2.2 um sample (Fig. 2). The incident angle varies from 30o to 70o with a 10o increment. We also found the splitting character on reflectance measurement. The splitting effect is considered a results of SPPs assisted diffraction process by oblique incidence.

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Drainage and Treatment Characteristics of Runoff by Media (여재에 따른 도로면 유출수의 배수 및 처리특성)

  • Kim, Seog-gu;Yun, Sang-Ieen;Kim, Young-im;Lee, Yong-jae;Kim, Ree-ho;Kim, Jong-oh
    • Journal of Korean Society on Water Environment
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    • v.20 no.5
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    • pp.500-505
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    • 2004
  • While more attention has been paid in recent years to urban point source pollution control, no considerable measures have been taken to control urban non-point source pollution. Contaminants from non-point sources deposited on urban impermeable surfaces such as road and highway are easily released to the public waters by rainfall, leading to the deterioration in water quality in urban area. The present study investigated a system using filter media to reduce the level of contamination in urban road runoff. Three different media, designated as J-P (polypropylene, blowing type), B-P (polypropylene, fiber type), and P-F (Polyvinyl alcohol, cube and sheet type) were evaluated on the basis of pollutant removal efficiency as well as hydraulic property. Experiments were peformed using a 1/4-scale treatment unit at various pollutant roading and rainfall intensity with real rainwater runoff collected from road surfaces. The results at different rainfall intensities shows that the medium J-P is superior to the other media for water permeability. J-P was not blocked at 10 mm/hr rainfall and its permeability was stable. On the other hand, B-P and P-F resulted in substantial overflow ratio even at I mm/hr rainfall intensity. Comparing treatment efficiencies for suspended solids, all media showed similar removal ranged from 91 % to 95%. However, J-P seems to be better than the other media considering its higher water permeability. J-P and P-F, both hydrophobic, yielded over 76% of heavy metal removal. But, the hydrophilic media B-P showed much smaller removal ranging from 26% to 47%. This indicates that J-P and P-F are beneficial to remove heavy metal due to their hydrophobic property. The treatment efficiencies over PAHs (poly aromatic hydrocarbons) showed the similar removal efficiency ranging from 66% to 97% for all three media.

Au-Ag-bearing Ore Mineralization at the Geochang Hydrothermal Vein Deposit (거창 열수 맥상광상의 함 금-은 광화작용)

  • Hong, Seok Jin;Lee, Sunjin;Choi, Sang-Hoon
    • Economic and Environmental Geology
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    • v.55 no.2
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    • pp.171-181
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    • 2022
  • The Geochang Au-Ag deposit is located within the Yeongnam Massif. Within the area a number of hydrothermal quartz and calcite veins were formed by narrow open-space filling of parallel and subparallel fractures in the granitic gneiss and/or gneissic granite. Mineral paragenesis can be divided into two stages (stage I, ore-bearing quartz vein; stage II, barren calcite vein) by major tectonic fracturing. Stage I, at which the precipitation of major ore minerals occurred, is further divided into three substages (early, middle and late) with paragenetic time based on minor fractures and discernible mineral assemblages: early, marked by deposition of pyrite with minor pyrrhotite and arsenopyrite; middle, characterized by introduction of electrum and base-metal sulfides with minor sulfosalts; late, marked by hematite with base-metal sulfides. Fluid inclusion data show that stage I ore mineralization was deposited between initial high temperatures (≥380℃ ) and later lower temperatures (≤210℃ ) from H2O-CO2-NaCl fluids with salinities between 7.0 to 0.7 equiv. wt. % NaCl of Geochang hydrothermal system. The relationship between salinity and homogenization temperature indicates a complex history of boiling, fluid unmixing (CO2 effervescence), cooling and dilution via influx of cooler, more dilute meteoric waters over the temperature range ≥380℃ to ≤210℃. Changes in stage I vein mineralogy reflect decreasing temperature and fugacity of sulfur by evolution of the Geochang hydrothermal system with increasing paragenetic time. The Geochang deposit may represents a mesothermal gold-silver deposit.

A Study on the Resistve Switching Characteristic of Parallel Memristive Circuit of Lithium Ion Based Memristor and Capacitor (리튬 이온 기반 멤리스터 커패시터 병렬 구조의 저항변화 특성 연구)

  • Kang, Seung Hyun;Lee, Hong-Sub
    • Journal of the Microelectronics and Packaging Society
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    • v.28 no.4
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    • pp.41-45
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    • 2021
  • In this study, in order to secure the high reliability of the memristor, we adopted a patterned lithium filament seed layer as the main agent for resistive switching (RS) characteristic on the 30 nm thick ZrO2 thin film at the device manufacturing stage. Lithium filament seed layer with a thickness of 5 nm and an area of 5 ㎛ × 5 ㎛ were formed on the ZrO2 thin film, and various electrode areas were applied to investigate the effect of capacitance on filament type memristive behavior in the parallel memristive circuit of memristor and capacitor. The RS characteristics were measured in the samples before and after 250℃ post-annealing for lithium metal diffusion. In the case of conductive filaments formed by thermal diffusion (post-annealed sample), it was not available to control the filament by applying voltage, and the other hand, the as-deposited sample showed the reversible RS characteristics by the formation and rupture of filaments. Finally, via the comparison of the RS characteristics according to the electrode area, it was confirmed that capacitance is an important factor for the formation and rupture of filaments.

Characteristics of Element Geochemistry in Ulleung Basin Sediments During the Late Quaternary (제4기 후기 동안 동해 울릉분지 퇴적물내 원소 함량 특성과 기원지 연구)

  • Um, In-Kwon;Choi, Man-Sik;Shin, Hyung-Sun
    • The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
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    • v.14 no.2
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    • pp.69-79
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    • 2009
  • Major and trace elements were analyzed in three core sediments to investigate geochemical characteristics of East Sea sediments and provenance changes during late Quaternary in Ulleung Basin. Comparing with Yellow and South Sea sediments, contents of major elements were generally similar while contents of trace elements were significantly different. Furthermore, within this basin, there were some variabilities in trace element compositions. In the western slope sediments (WS), Mo was enriched over 6 times as much as other sites. On the other hand, Zr, Nb, Hf and Ta were enriched in basin sediments (Basin), and Ca and Cs were enriched in southern slope sediments (SS). After excluding elements derived from biogenic, authigenic and diagenetic origins, the lithogenic elements (K, Ti, Cs, Zr, Nb, Hf and Ta) could be classified into three groups from the comparison of element/Al ratios among cores. The first group consisted of elements (K and Ti) that showed the nearly similar element/Al ratios among three cores. The second group contained Cs which showed significant difference between two slope sediments. The third group elements (Zr, Nb, Hf and Ta) showed highly enriched in basin relative to both slope areas. The depth profiles of metal/Al ratios in basin sediments provided the following interpretation for the compositions of sediment and their variation. From 10,000 yr B.P. to 7,000 yr B.P. two lithogenic components (volcanic ashes and western slope sediments) were mixed and deposited in the basin. After 7,000 yr B.P., however, southern slope sediments were mixed with volcanic ashes and deposited in basin area. This event of source change is nearly close to inflow period of the Tsushima Warm Current to Ulleung Basin. Thus, it might be suggested that element geochemistry in Ulleung basin sediment indicate the change of current system in the study area.

Distribution of Organic Carbon, Organic Nitrogen, and Heavy Metals in Lake Shihwa Sediments (시화호 퇴적물의 유기탄소, 유기질소 및 중금속 함량과 분포)

  • Kang, Jeong-Won;Hang, Dae-Byuk;Park, Yong-Ahn;Choi, Jung-Hoon
    • The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
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    • v.5 no.4
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    • pp.276-284
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    • 2000
  • Distributions of organic carbon (Co$_{org}$), organic nitrogen (N$_{org}$), and heavy metals (Zn, Pb, Cr, Cu, Mn) were investigated in Lake Shihwa sediments. Surface and core samples were collected in April and September, 1997 and March, 1998 for the study. The results show that these components contents are variable with sampling timeand station. In surface sediments, both Co$_{org}$ and N$_{org}$ have similar distribution pattern in which their high contents found in stations located near the land, indicating that the streams and industrial wastes seem to act as point sources. The C$_{org}$ contents are linearly related with those of heavy metals. It appears, therefore, that the distribution of heavy metals may be partly controlled by a complex interplay of biogenic, terrestial, and anthropogenic factors. The C/N ratios from three stations are in the range of 3-32, with an average of 13.2. Vertical profiles of heavy metals in sediment cores are similar to those of C$_{org}$ and N$_{org}$. Copper content of sediments is enriched compared to that of reported value before dike construction, but Zn and Mn are not deposited considerably. Especially, Pb content show less variable. Currently, anthropogenic effects of industrial complex may not reached to drainage gate area where heavy metal contents are comparable with those adjacent to coastal sediments.

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Reconstruction of Changes in Eolian Particle Deposition Across the Mid-Pleistocene Transition in the Central Part of the North Pacific (중기 플라이스토세 전이기 전후 북태평양 중앙 해역 퇴적물에 기록된 풍성 퇴적물 입자 퇴적 양상 변화 복원)

  • Lee, Sojung;Seo, Inah;Hyeong, Kiseong
    • Ocean and Polar Research
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    • v.41 no.4
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    • pp.275-288
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    • 2019
  • We investigated flux, grain size distribution, Nd-Sr isotope composition, mineral composition, and trace metal composition (REEs and Sc) of inorganic silicate fraction (ISF, mainly Asian dust with an unrestricted amount of volcanic materials) deposited during 600~1000 ka across the Mid-Pleistocene Transition at core NPGP 1401-2A (32°01'N, 178°59'E, 5205m) taken from the central part of the North Pacific. Our results reveal about a 2-fold increase in ISF flux after 800 ka, which is associated with an increase in La/Sc and a decrease in mean grain size. Asian dusts are finer than volcanic materials and La/Sc increases with the enhanced contribution of Asian dusts. Thus, increased flux after 800 ka can be explained by the increased contribution of Asian dusts relative to volcanic materials, likely due to an intensified Westerly Jet (WJ) and the drying of the Asian continent after the MPT. Mean grain size of ISF varies systematically in relation to glacial-interglacial cycles with a decrease during glacial stages, which is consistent with the previous results in the study area. Such a cyclical pattern is also attributed to the increase in the relative contribution of Asian dusts over volcanic components in glacial stages due to intensified WJ and drying of the Asian continent. Thus, it can be concluded that climate changes that had occurred across the MPT were similar to those of interglacial to glacial transitions at least in terms of the dust budget. Different from the Shatsky Rise, however, compositional changes associated with glacial-interglacial mean grain size fluctuations are not observed in Nd-Sr isotope ratios and trace element composition in our study of the Hess Rise. This may be attributed to the location of the study site far (> 4,000 km) from the volcanic sources. The volcanic component at the study site comprises less than 10% and varies within 3% over glacial-interglacial cycles. Such a small variation was not enough to imprint geochemical signals.

Mineralogy and Geochmistry of the Sanjeon Au-Ag Deposit, Wonju Area, Korea (산전 금-은 광상에 관한 광물 및 지화학적 연구)

  • Se-Hyun Kim
    • Economic and Environmental Geology
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    • v.32 no.5
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    • pp.445-454
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    • 1999
  • The Sanjeon Au-Ag deposit consists of three subparallel hydrothermal quartz-calcite veins which filled fault-related fractures (generally $N20^{\circ}$ to 35"W-trending and $70^{\circ}$ to $80^{\circ}$ SW-dipping) within quartz porphyry. The vein mineralization shows an apparent variation of mineral assemblages with paragenetic time: (1) early, white quartz + pyrite + arsenopyrite + brown sphalerite, (2) middle, white (vein) to clear quartz (vug) + base-metal sulfides + electrum + argentite, (3) late, calcite + pyrite + native silver. Mineralogic and fluid inclusion data indicate that gold-silver minerals were deposited at temperatures from 2l $0^{\circ}$ to $250^{\circ}$ with salinities of 4 to 5 wt. % equiv. NaCl and log fS2 values from -14.0 to -12.2 atm. The linear relationship between homogenization temperature and salinity data indicates that gold-silver deposition was a result of meteoric water mixing. Ore mineralization occurred at pressure conditions of about 70 bars, which corresponds to the mineralization depths of about 260 m to 700 m. There is a remarkable decrease of the calculated 1)180 values of water from 1.3 to -9.7%0 in hydrothermal fluid with increasing paragenetic time. This indicates a progressive increase of meteoric water influx in the hydrothermal system at the Sanjeon deposit. Oxygen-hydrogen, sulfur, and carbon isotope values of hydrothermal fluids indicate that the ore mineralization was formed largely from meteoric waters with the contribution of sulfur and carbon from a deep igneous source.

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