• Title/Summary/Keyword: Defect Rate

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Improved Defect Control Problem using Scaled Down Silicon Oxide Stamps for Nanoimprint Lithography (나노임프린트 리소그래피를 위한 스케일 다운된 산화막 스탬프 제작과 패턴결함 개선에 관한 연구)

  • Park, Hyung-Seok;Choi, Woo-Beom;Sung, Man-Young
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.2
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    • pp.130-138
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    • 2006
  • We have investigated pattern scaling down of silicon stamps through the oxidation technique, During oxidizing the silicon stamps, silicon dioxide that has 300 nm and 500 nm thickness was grown, and critical deformations were not observed in the patterns. There was positive effect to reduce size of patterns because vertical and horizontal patterns have different orientation. We achieved pattern reduction rate of $26\%$. In addition, the formation of polymer patterns had been investigated with varied temperature and pressure conditions to improve the filling characteristics of polymers during nanoimprint lithography when pattern sizes were few micrometers. In these varied conditions, polymers had been affected by free space compensation and elastic stress relaxation for filling the cavities. Based on the results, defect control which is an important issue in the nanoimprint lithography were facilitated.

The process optimization of in-situ H$_2$ bake and GeH$_4$ clean in low temperature Si epitaxy using design of experiment (저온 Si계 에피 성장기술에서 실험계획법에 의한 in-situ H$_2$ bake 및 GeH$_4$ clean 공정 최적화)

  • 이경수
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1994.11a
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    • pp.54-58
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    • 1994
  • H$_2$ bake and GeH$_4$ clean are used as a in-situ pre-clean method in low temperature Si based epitaxial growth technology using rapid thermal processing chemical vapor deposition (RTPCVD). In this paper, the H$_2$ bake and GeH$_4$ clean processes are optimized for low surface defect density using Taguchi method. In H$_2$ bake process, the epitaxial growth temperature affects dominantly on the surface defect density, and the next affecting factors are H$_2$ bake temperature and rinse time in de-ionised water. In GeH$_4$ clean process, GeH$_4$ clean temperature affects most strongly on the surface defect density, and the minor factor is GeH$_4$flow rate. The optimum process conditions predicted fly Taguchi method agree well with tile experimental data in both in-situ clean processes.

Effect of Boundary Conditions of Failure Pressure Models on Reliability Estimation of Buried Pipelines

  • Lee, Ouk-Sub;Pyun, Jang-Sik;Kim, Dong-Hyeok
    • International Journal of Precision Engineering and Manufacturing
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    • v.4 no.6
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    • pp.12-19
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    • 2003
  • This paper presents the effect of boundary conditions in various failure pressure models published for the estimation of failure pressure. Furthermore, this approach is extended to the failure prediction with the aid of a failure probability model. The first order Taylor series expansion of the limit state function is used in order to estimate the probability of failure associated with each corrosion defect in buried pipelines for long exposure period with unit of years. A failure probability model based on the von-Mises failure criterion is adapted. The log-normal and standard normal probability functions for varying random variables are adapted. The effects of random variables such as defect depth, pipe diameter, defect length, fluid pressure, corrosion rate, material yield stress, material ultimate tensile strength and pipe thickness on the failure probability of the buried pipelines are systematically investigated for the corrosion pipeline by using an adapted failure probability model and varying failure pressure model.

성인의 선천성 심장질환의 외과적 교정

  • 김광호
    • Journal of Chest Surgery
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    • v.13 no.1
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    • pp.34-40
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    • 1980
  • Total 193 patients over 16 years of age who have underwent a surgical correction of congenital heart diseases during the period 1964 to September of 1979 were reviewed. 106 patients were male and 87 patients were female. 85 patients were in the ages of 16 years through 20 years. The oldest patient was 54 years old male who had atrial septal defect. The commonest defects were atrial septal defect that accounted for 66 cases [34.2%]. Ventricular septal defect was next one that accounted for 66 cases [34.2%]. Patients with tetralogy of Fallot defects were 34 cases [17.6%]. 25 cases had patent ductus arteriosus [13.0%]. Patients with pulmonary stenosis were 17 cases [8.8%] and transposition of the great arteries cases were 2 cases [1%]. There were 14 cases of operative death in this series. So operative mortality rate was 7.3%. The commonest cause of death was low output syndrome and next was renal failure. This reviewed series reveals the incidence of operable congenital heart defects appearing in adult cardiac surgical patients and an aggressive surgical approach can be justified with low operative mortality like as pediatric age group.

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A Retrospective study on upper single tooth implants (상악 단일 치아 임프란트의 후향적 연구)

  • Jo, Soo-Jin;Lee, Keun-Woo;Cho, Kyoo-Sung;Moon, Ik-Sang
    • Journal of Periodontal and Implant Science
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    • v.33 no.3
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    • pp.383-393
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    • 2003
  • The aim of this retrospective study was to compare the amount of marginal bone loss between upper anterior area and upper posterior area with 71 upper single-tooth restorations on 2 stage machined $Br{{\aa}}nemark$ implants since Jan 1995. The second aim was to compare the bone defect group which had dehiscence and fenetration and the others in the upper anterior region. The results were as follows. 1. The most frequent reason of missing tooth in the upper anterior region was trauma by 61%. While upper posterior region showed various reasons such as congenital missing, advanced periodontitis, trauma. 2. Peri-implantitis with fistula occurred 1 of 41 implants in the upper anterior group in 1 year after loading and 2 of 32 implants in the upper posterior group failed before loading. The 1 year success rate of upper anterior group was 97.56 %, and 93.75 % for upper posterior group. 3. The mean marginal bone loss in the upper anterior group was 0.44${\pm}$0.25 mm, while 0.57${\pm}$0.32 mm in the upper posterior group. There was statistically significant difference in the amount of mean marginal bone loss (P${\pm}$0.10 mm at one year, and 0.48${\pm}$0.26 mm for the control group. No statistically significant difference of mean marginal bone loss was showen between bone defect group and the others at implantation. According to the results, the upper anterior region showed less marginal bone loss than the upper posterior region. In case of missing single upper tooth, careful consideration on recipient residual ridge to determine proper implant diameter and length, sufficient healing time, proper loading would lead to implant success. Single tooth implants in the maxilla seemed to be an alternative to fixed partial dentures without damage to adjacent teeth.

Crack growth behavior of fatigue surface crack initiated from a small surface defect (작은 表面缺陷에서 發생.成長하는 表面疲勞균열의 成長特性에 관한 硏究)

  • 서창민;권오헌;이정주
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.11 no.2
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    • pp.191-197
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    • 1987
  • It has been well known that the fracture mechanics can be applied to large through crack growth. But the growth rate of small surface cracks initiated from a small defect under rotary bending fatigue tests can not be treated as a function of stress intensity factor range. In this paper, to investigate the growth behavior of surface small fatigue cracks in the view-point of both fracture mechanics and strength of materials, the fatigue test has been carried out on two kinds of plain carbon steels with a small surface defect. Applying the concept of the cyclic strain intensity factor range .DELTA. $K_{\epsilon}$/$_{t}$ to the analysis of small surface fatigue crack growth, it is found that the relationship between cyclic strain intensity factor range and crack growth rate shows linear relation on logarithmic coordinates regardless of defect sizes and two kinds of carbon steels.s.s.

A Study on Effect of Shot Peening on Fracture Toughness of Spring Steel (스프링강의 파괴인성에 미치는 쇼트피닝 효과에 관한 연구)

  • Ha, K.J.;Park, K.D.
    • Journal of Power System Engineering
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    • v.7 no.2
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    • pp.66-72
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    • 2003
  • Recently, the steel parts used at the aerospace and automobile industries are required to be used light weight parts. Therefore, used material, steel have to be a high stress, which is an indispensable condition in this field. At the consideration of parts design, high hardness of the lightweight parts have an benefit of saving fuel and material. A high stress of metal has a point of difference according to the shape of design, external cyclic load and condition of vibration. A crack generates on the surface of metal or under yield stress by defect of inner metal defect or surface defect and slowly, this crack grow stable growth. Finally, rapidity failure phenomena is happen. Fatigue failure_phenomena, which happen in metal, bring on danger in human life and property therefor, anti-fatigue failure technology take an important part of current industries Currently, the shot peening is used for removing the defect from the surface of steel and improving the fatigue strength on surface. Therefore, this paper investigated the effect on frcature toughness using shot peening which is improve the resistance of crack growth and crack expansion rate by fatigue that make a compressive residual stress on surface.

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Analysis of Error Rate in the Variations of Shearing Amount in Measuring the Internal Defect using a Shearography (전단간섭계를 이용한 압력용기 내부 결함 측정시 전단량 변화에 따른 오차분석)

  • Hong, Kyung-Min;Kang, Young-June;Choi, In-Young;Ahn, Yong-Jin;Yoon, Suk-Bum
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.21 no.5
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    • pp.726-732
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    • 2012
  • Pipe and Pressure Vessels that is used in power plant and chemical industry have many Internal Defects that is corrosion caused by the flow of fluid. These Internal Defects that have possibility of explosion are very dangerous because it can not see from the outside. This days many companys using NDT method to find an Internal Defect. Most of the NDT methods have limitations that are constraint of shape and materials. But Sheargoraphy have many advantages compared conventional NDT method. It has very fast measuring speed, non-destructive and non contacting measurement. As well as it hasn't constraint of shape and materials. As a paper on the analysis of measurement of error, the important factors were the Shearing Amount and pressure, and discovered measurement of the Internal Defect of the object by using shearography. The optimal Shearing Amount and pressure was discovered and utilized.

The Effect of Oxide Layer Thickness to the Scale Defects Generation during Hot finish Rolling (열연사상 압연시 스케일 결함발생에 미치는 산화피막 두께의 영향)

  • 민경준
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 1999.08a
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    • pp.412-422
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    • 1999
  • Scale defects generated on the strip surface in a tandem finishing mill line are collected from the strip trapped among the production mills by freezing the growing scale on the strip by the melt glass coating and shutting down the line simultaneously. The samples observed of its cross sectional figure showed the process of scale defect formation where the defects are formed at the base metal surface by thicker oxidized scale during each rolling passes. The properties of the oxidized layer growth both at rolling and inter-rolling are detected down sized rolling test simulating carefully the rolling condition of the production line. The thickness of the oxidized layer at each rolling pass are simulated numerically. The critical scale thickness to avoid the defect formation is determined through the expression of mutual relation between oxidized layer thickness and the lanks of the strip called quality for the scale defects. The scale growth of scale less than the critical thickness and also to keep the bulk temperature tuning the water flow rate and cooling time appropriately. Two units of Inerstand Cooler are designed and settled among the first three stands in the production line. Two units of scale defect is counted from the recoiled strip and the results showed distinct decrease of the defects comparing to the conventionaly rolled products.

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