• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.159-160
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• 2008

• Proceedings of the KWS Conference
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• 2007.11a
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• pp.351-353
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• 2007

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.11
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• pp.939-945
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• 2002

The rise throughput and the stability in the device fabrication can be obtained by applying chemical mechanical polishing (CMP) process in 0.18 $\mu\textrm{m}$ semiconductor device. However, it still has various problems due to the CMP equipment. Especially, among the CMP components, process variables are very important parameters in determining the removal rate and non-uniformity. In this paper, we studied the DOE (design of experiment) method in order to get the optimized CMP equipment variables. Various process parameters, such as table and head speed, slurry flow rate and down force, have investigated in the viewpoint of removal rate and non-uniformity. Through the above DOE results, we could set-up the optimal CMP process parameters.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.05c
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• pp.228-232
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• 2002

The rise throughput and the stability in the device fabrication can be obtained by applying chemical mechanical polishing(CMP) process in 0.18 ${\mu}m$ semiconductor device. However it does have various problems due to the CMP equipment. Especially, among the CMP components, process variables are very important parameters in determining removal rate and non-uniformity. In this paper, We studied the DOE(design of experiment) method for the optimized CMP process. Various process variations, such as table and head speed, slurry flow rate and down force, have investigated in the viewpoint of removal rate and non-uniformity. Through the above DOE results, we could set-up the optimal process parameters.

• 한국전산유체공학회:학술대회논문집
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• 2007.04a
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• pp.125-129
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• 2007

In this paper a method for the design optimization for helicopter rotor blade in hover is studied Numerical analysis of aerodynamic characteristics of the flow around a rotor blade is analysed by usign panel method and CFD code based on Navier-Stokes equation. The result is validated by comparing with existing experimental result. Optimization methods RSM(Response Surface Method) and DOE(Design of Experiments) are applied in combination. The object functions are power, twist angle, taper ratio, and thrust. The optimized result showed a decrease of 17% of the power required.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2011.04a
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• pp.735-741
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• 2011

In the early phase of vehicle development, CAE is conducted as tool for vehicle performance assessment. To maintain acceptable road noise performance, solution for reduced vehicle sensitivity is required. Chassis interface dynamic stiffness characteristics are key component to isolating vibration and noise of road from the vehicle interior. This research provide how to set up the optimized dynamic characteristics under noise effect through DFSS study. CAE-based DOE is performed to build prediction math model, CMS process involves DOE to achieve very fast run times while giving results very comparable. Minimized $95^{th}$ percentile of performance distribution is applied to minimize vehicle sensitivity and road noise levels variation during the optimization process. Finally, the results of optimization were reviewed for performance and robustness.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.21 no.7
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• pp.674-681
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• 2011

In the early phase of vehicle development, CAE is conducted as tool for vehicle performance assessment. To maintain acceptable road noise performance, solution for reduced vehicle sensitivity is required. Chassis interface dynamic stiffness characteristics are key component to isolating vibration and noise of road from the vehicle interior. This research provide how to set up the optimized dynamic characteristics under noise effect through DFSS study. CAE-based DOE is performed to build prediction math model, CMS process involves DOE to achieve very fast run times while giving results very comparable. Minimized 95th percentile of performance distribution is applied to minimize vehicle sensitivity and road noise levels variation during the optimization process. Finally, the results of optimization were reviewed for performance and robustness.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.1369-1370
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.1333-1334
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• 2010

• Journal of the Korean Society of Propulsion Engineers
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• v.2 no.2
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• pp.99-107
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• 1998

A test on venturi-type premixer of ASE120 engine combustor has been performed to evaluate its mixing performance. Cold air was supplied into the premixer through the fuel nozzle and mixed with the hot air from the compressor exit. The measured temperature of the mixed air was used to evaluate the mixedness. DOE(Design of Experiment) technique was utilized to make a test matrix of variables and to determine the optimum combination of variables, which was verified through a confirmation test.