• Journal of the Korean Ceramic Society
• /
• v.28 no.7
• /
• pp.517-524
• /
• 1991

The CVD process of BPSG (BoroPhosphoSilicate Glass) and its thin film properties were studied. B2H6, PH3, SiH4 and O2 gases were reacted in a AP (Atmospheric Pressure) CVD system in the temperature range of 300℃ and 460℃. The interaction of B2H6 and PH3 was studied from the deposition rate and dopant incorporation change point of view. The dependency of BPSG step coverage on the temperature was changed with different O2/(B2H6+PH3+SiH4) ratio. Finally, the boundary which distinguishes the stable BPSG's from the ones that react with Di (Deionized) water or cleaning chemicals such as H2SO4, HCl, H2O2, NH4OH etc could be defined.

• Journal of the Semiconductor & Display Technology
• /
• v.2 no.2
• /
• pp.9-15
• /
• 2003

This paper proposes a thickness measurement method of silicon-oxide and poly-silicon film deposited on 12" silicon wafer for spin etcher. Halogen lamp is used as a light source for generating a wide-band spectrum, which is guided and focused on the wafer surface through a optical fiber cable. Interference signal from the film is detected by optical sensor to determine the thickness of the film using spectrum analysis and several signal processing techniques including curve-fitting and adaptive filtering. Test wafers with three kinds of priori-known films, polysilicon(300 nm), silicon-oxide(500 nm) and silicon-oxide(600 nm), are measured while the wafer is spinning at 20 Hz and DI water flowing on the wafer surface. From experiment results the algorithm presented in the paper is proved to be effective with accuracy of maximum 0.8% error.rror.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.30 no.3 s.246
• /
• pp.255-261
• /
• 2006

Flow characteristics of DI water in a microchannel with a stenosis were investigated using .a micro PIV system with varying flow rate. The width and depth of the PDMS micro-channel were $100{\mu}m\;and\;50{\mu}m$, respectively. To Investigate flow characteristics in the micro-stenosis, the same experiment was carried out in a straight microchannel under the same flow rate. The measured mean velocity fields were almost symmetric with respect to the channel centerline. The experimental results are well agreed with the theoretical Hagen-Poiseuille profile. In the contraction part of the micro-stenosis, the oncoming flow is accelerated rapidly and the maximum velocity occurs at the throat, almost 4.99 time faster than that without the stenosis.

• Proceedings of the SAREK Conference
• /
• 2006.06a
• /
• pp.162-167
• /
• 2006

Nanofluid is a kind of new engineering material consisting of nanoparticles dispersed in base fluid. Nanofluids could have various applications such as magnetic fluids, heat exchanger working fluids, lubricants, drug delivery and so on in present study, various nanoparticles, such as MWCNT (Multi-walled Carbon Nanotube), fullerene, copper oxide, and silicon dioxide are used to produce nanofluids. As base fluids, DI-water, ethylene glycol, oil, and silicon oil are used. To investigate the thermo-physical properties of nanofluids, thermal conductivity and kinematic viscosity are measured. Stability estimation of nanofluid is conducted with UV-vis spectrophoto-meter. In this study, the high pressure homogenizer is the most effective method to produce nanofluid with the prepared nanoparticle and base fluid. Excellently stable nanofluids are produced with the magnetron sputtering system. Thermal conductivity of nanofluid increases with increasing particle volume fraction except water-based fullerene nanofluid which has lower thermal conductivity than base fluid due to its lower thermal conductivity, 0.4 W/mK. The experimental results can't be predicted by Jang and Choi model.

• Journal of the Korean Society for Precision Engineering
• /
• v.26 no.11
• /
• pp.138-145
• /
• 2009

A suspended membrane micro fluidic heat flux sensor that is able to measure the heat flow rate was designed and fabricated by a complementary-metal-oxide-semiconductor-compatible process. The combination of a thirty-junction gold and nickel thermoelectric sensor with an ultralow noise preamplifier, low pass filter, and lock-in amp has enabled the resolution of 50 nW power and provides the sensitivity of $11.4\;mV/{\mu}W$. The heater modulation method was used to eliminate low frequency noises from sensor output. It is measured with various heat flux fluid of DI-water to test as micro fluidic application. In order to estimate the heat generation of samples from the output measurement of a micro fluidic heat-flux sensor, a methodology for modeling and simulating electro-thermal behavior in the micro fluidic heat-flux sensor with integrated electronic circuit is presented and validated. The electro-thermal model was constructed by using system dynamics, particularly the bond graph. The electro-thermal system model in which the thermal and the electrical domain are coupled expresses the heat generation of samples converts thermal input to electrical output. The proposed electro-thermal system model shows good agreement with measured output voltage response in transient state and steady-state.

• Journal of the Society of Cosmetic Scientists of Korea
• /
• v.45 no.3
• /
• pp.307-317
• /
• 2019

To develop sustainable new natural anti-aging ingredients from Korean native plants, we investigated the cultivation potential of Nymphoides indica using the eco-friendly aquaponics system, and tested the anti-aging effects from N. indica extracts. N. indica could be grown in aquaponics system using floating leaved deep water culture method, and propagated through rhizome propagation. It was confirmed that the nitrate ($80{\mu}g/mL$), potassium ($63.5{\mu}g/mL$) and water temperature ($25^{\circ}C$) greatly affected the cultivation of the N. indica. In addition, synergistic effects were found when two major components (3,7-di-O-methylquercetin-4'-O-${\beta}$-glucoside & sweroside) were present at more than about $5{\mu}g/mL$. The extract had a significant effect on the recovery of skin cells damaged by environmental pollutant such as $benzo[{\alpha}]pyrene$, ammonium nitrate, formaldehyde. It also suppressed $PGE_2$, $TNF-{\alpha}$ and COX-2, and inhibited the production of MMP-1. Taken together, the results suggested that the standardized extracts of N. indica cultivated in the aquaponics has considerable potential as a new cosmetics ingredient with an anti-aging effect.

• Clean Technology
• /
• v.8 no.4
• /
• pp.205-215
• /
• 2002

Can industry has grown up with growth of packing industry and its recycling activation in recent years. But profit has became low by oversupply. Therefore, can industry needs a reduction of environmental load and official loss by an optimization of process in order to maintain its competitiveness. In this study, the main issues of aluminium can production was investigated by life cycle assessment. As a result of LCA, it examined closely by main issues that reduce defective cans and remove tramp oil. In the present work, it was recommended that setup of R/O system, sterillizing tramp oil separation, and heating system of DI water. The ROI investigated 6.4 months. The operating cost with the advanced processes could be reduced annually by 300 million won.

• Journal of the Korean Magnetics Society
• /
• v.18 no.5
• /
• pp.174-179
• /
• 2008

The measurement dissolution sensor system using GMR-SV device with magnetic sensitivity of 0.8 %/Oe and Mg-film thick of 200 nm and Mg-foil thick of 50 mm was fabricated and characterized. During the water dissolving process of Mg-film and Mg-foil, the subtle variation of magnetic field by the decrease of current in solenoid was detected by the GMR-SV sensor. The variations of Mg bubble number and ORP as a function of time for three different kinds of edible, tap, and distilled water, are measured and compared. A After 45 min, the speed of fast dissolving Mg was shown the order of edible > tap > DI water. The variation of output magnetoresistance as a function of dissolved time of Mg-film and Mg-foil for edible water, which is composed of mineral content of $0.8{\sim}5.4\;mg/l$ was investigated. The response times for the dissolution in edible water were 5 min and 20 min, respectively. From the measurement of dissolving time and speed for Mg-film and Mg-foil using GMR-SV device, the mineral Mg sensor system in edible water can be possible to develop.

• Journal of Advanced Marine Engineering and Technology
• /
• v.37 no.7
• /
• pp.701-710
• /
• 2013

The purpose of this study is to investigate experimentally the effect of low purity methanol (LPM) on performance and smoke emission characteristics by using a four-cycle, four-cylinder, water-cooled, direct injection diesel engine with EGR system. The experiments are performed by the change of engine load in the engine load ranges of 25 to 100% with an interval of 25% under the constant engine speed of 2000 rpm. The LPM in the fuel blends contained 24.88% water by volume. The blended fuel ratios of diesel oil to LPM are maintained at 100/0, 95/5, 90/10 and 85/15% on the volume basis. In this paper, EGR rates are varied in three conditions of 0, 12.8 and 16.5%. The result shows that the brake power of a blended fuel with 15% LPM is reduced more 11.1% than that of the neat diesel oil at the full load with the EGR rate of 16.5%. At this condition, also, the brake specific fuel consumption (BSFC) is increased by 3.2%, the exhaust gas temperature is decreased by 10.7%, the smoke opacity is decreased by 18.7% and the brake thermal efficiency is increased by 7.3%. The sharp reduction of smoke opacity for a blended fuel with the LPM content of 15% at the full load without EGR system is observed by 68.4% compared with that of the neat diesel oil due to the high oxygen content of LPM.

• Safety and Health at Work
• /
• v.1 no.2
• /
• pp.175-182
• /
• 2010

Objectives: This study examined how ethanolamines (EAs) with the same functional alcohol group ($HOCH_2CH_2$), such as mono-EA (MEA), di-EA (DEA), and tri-EA (TEA), in water-based metalworking fluids (wbMWFs) are vaporized, condensed, and transformed by heat generated during metalworking. Methods: Two types of experimental apparatus were manufactured to achieve these objectives. Results: Vaporization tests using a water bath showed that the vaporization rate increased markedly from $0.19\;mg/m^2{\cdot}min$ at $23.5^{\circ}C$ to $8.04\;mg/m^2{\cdot}min$ at $60^{\circ}C$. Chamber tests with a heat bulb revealed that "spiked" MEA was fully recovered, while only 13.32% of DEA and no TEA were recovered. Interestingly, non-spiked types of EAs were detected, indicating that heat could convert EAs with more alcohol groups (TEA or DEA) into other EAs with fewer group(s) (DEA or MEA). The EA composition in fresh fluid was 4% DEA, 66% TEA, and 30% MEA, and in used fluids (n = 5) was 12.4% DEA, 68% TEA, and 23% MEA. Conversion from TEA into DEA may therefore contribute to the DEA increment. Airborne TEA was not detected in 13 samples taken from the central coolant system and near a conveyor belt where no machining work was performed. The DEA concentration was $0.45\;mg/m^3$ in the only two samples from those locations. In contrast, airborne MEA was found in all samples (n = 53) regardless of the operation type. Conclusion: MEAs easily evaporated even when MWFs were applied, cleaned, refilled, and when they were in fluid storage tanks without any metalworking being performed. The conversion of TEA to DEA and MEA was found in the machining operations.