• Journal of the Semiconductor & Display Technology
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• v.8 no.2
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• pp.15-21
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• 2009

Atmospheric pressure plasma equipment was successfully applied to the flip chip BGA manufacturing process to improve the uniformity of flux printing process. The problem was characterized as shrinkage of the printed flux layer due to insufficient surface energy of the flip chip BGA substrate. To improve the hydrophilic characteristics of the flip chip BGA substrate, remote DBD type atmospheric pressure plasma equipment was developed and adapted to the flux print process. The equipment enhanced the surface energy of the substrate to reasonable level and made the flux be distributed over the entire flip chip BGA substrate uniformly. This research was the first adaptation of the atmospheric pressure plasma equipment to the flip chip BGA manufacturing process and a lot of possible applications are supposed to be extended to other PCB manufacturing processes such as organic cleaning, etc.

• Korean Chemical Engineering Research
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• v.56 no.1
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• pp.125-132
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• 2018

The direct synthesis of $C_2$ chemical directly from methane was studied by employing catalysts with ordered mesopores in a dielectric barrier discharge plasma reactor. The reaction was carried out using MgO/OMA (ordered mesoporous alumina), $MgO/{\gamma}-Al_2O_3$ and $MgO/{\alpha}-Al_2O_3$ as catalysts. When MgO/OMA was applied, it showed excellent performance in the plasma reactor using pulse-type power supply and the selectivity of $C_2$ chemicals was measured as 67%. The effects of metal oxide type, textural property of support, alumina phase and power supply type on catalytic performance were investigated especially in terms of $C_2$ chemical formation. BET (Brunauer, Emmett, Teller), X-ray diffraction, transmission electron microscope and thermogravimetric analysis were used to investigate the characterization of the catalyst before and after the reaction.

• Journal of Korean Society of Water and Wastewater
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• v.33 no.4
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• pp.243-250
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• 2019

This objective of this study was to investigate the degradation characteristics of phenol, a refractory substance, by using a submerged dielectric barrier discharge (DBD) plasma reactor. To indirectly determine the concentration of active species produced in the DBD plasma, the dissolved ozone was measured. To investigate the phenol degradation characteristics, the phenol and chemical oxygen demand (COD) concentrations were evaluated based on pH and the discharge power. The dissolved ozone was measured based on the air flow rate and power discharged. The highest dissolved ozone concentration was recorded when the injected air flow rate was 5 L/min. At a discharge power of 40W as compared to 70W, the dissolved ozone was approximately 2.7 - 6.5 times higher. In regards to phenol degradation, the final degradation rate was highest at about 74.06%, when the initial pH was 10. At a discharged power of 40W, the rate of phenol decomposition was observed to be approximately 1.25 times higher compared to when the discharged power was 70W. It was established that the phenol degradation reaction was a primary reaction, and when the discharge power was 40W as opposed to 70W, the reaction rate constant(k) was approximately 1.72 times higher.

• Journal of Environmental Science International
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• v.23 no.3
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• pp.369-378
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• 2014

Effect of improvement of the dielectric barrier discharge (DBD) plasma system on the inactivation performance of bacteria were investigated. The improvement of plasma reactor was performed by combination with the basic plasma reactor and UV process or combination with the basic plasma reactor and circulation system which was equipped with gas-liquid mixer. Experimental results showed that tailing effect was appeared after the exponential decrease in basic plasma reactor. There was no enhancement effect on the Ralstonia Solanacearum inactivation with combination of basic plasma process and UV process. The application of gas-liquid mixing device on the basic plasma reactor reduced inactivation time and led to complete sterilization. The effect existence of gas-liquid mixing device, voltage, air flow rate (1 ~ 5 L/min), water circulation rate (2.8 ~ 9.4 L/min) in gas-liquid mixing plasma, plasma voltage and UV power of gas-liquid mixing plasma+UV process were evaluated. The optimum air flow rate, water circulation rate, voltage of gas-liquid mixing system were 3 L/min, 3.5 L/min and 60 V, respectively. There was no enhancement effect on the Ralstonia Solanacearum inactivation with combination of gas-liquid mixing plasma and UV process.

• Proceedings of the KIEE Conference
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• 2005.11a
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• pp.122-124
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• 2005

The flat panel lamp is used as back light. It is perceived the best type for the wide size LCD of back light system. However, the flat panel lamp has high value of heat. So it need to improve efficiency. Therefore, more researches are requested for the back light of the flat panel lamp. In this paper, the properties of spectrum is investigated according to change in frequency from 30kHz to 60kHz using power supplies voltage with changing from 500V to 700V. As a result, main spectrum peak of plasma showed in 450[nm], 630[nm], 750[nm] and spectrum peak of 750nm is the highest.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.488-488
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• 2012

상압에서 12인치 실리콘 웨이퍼 표면처리가 가능한 장치를 개발하였다. 배치타입 공정으로 플라즈마 발생 전극은 직경 340 mm의 대면적 원형 형태을 가지고 있다. 시스템은 탈부착이 가능한 플라즈마 모듈부와 공정챔버로 나누어지며 균일도를 높이기 위해 웨이퍼스테이지는 가열, 회전 및 축간 조절이 가능하게 설계하였다. 플라즈마발생은 DBD 전극방식을 채용하고 있으며 공정가스흐름 및 전극배열 등을 연구하였다. 또한, 기판 온도, 가스 조합 등의 공정파리미터를 변화시켜가며 높은 애슁 속도 및 균일도를 얻기 위한 실험이 진행되었다. 주파수 15 kHz, 인가 파워 7 kW, 시편 가열 온도 95도, 60 rpm, 80 spm에서 분당 200 nm의 PR제거율을 확인하였다.

• Journal of Environmental Science International
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• v.26 no.6
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• pp.711-717
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• 2017

Dielectric Barrier Discharge (DBD) plasma is a new technique for use in environmental pollutant degradation, which is characterized by the production of hydroxyl radicals as the primary degradation species. Due to the short lifetime of the chemically active species generated during the plasma reaction, the dissolution of the plasma gas has a significant effect on the reaction performance. The plasma reaction performance can be enhanced by combining the basic plasma reactor with a homogenizer system in which the bubbles are destroyed and turned into micro-bubbles. For this purpose, the improvement of the dissolution of plasma gas was evaluated by measuring the RNO (N-dimethyl-4-nitrosoaniline, an indicator of the generation of OH radicals). Experiments were conducted to evaluate the effects of the diameter, rotation speed, and height of the homogenizer, pore size, and number of the diffuser and the applied voltage on the plasma reaction. The results showed that the RNO removal efficiency of the plasma reactor combined with a homogenizer is two times higher than that of the conventional one. The optimum rotor size and rotation speed of the homogenizer were 15.1 mm, and 19,700 rpm, respectively. Except for the lowest pore size distribution of $10-16{\mu}m$, the pore size of the diffuser showed little effect on RNO removal.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.553-553
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• 2013

상압 플라즈마 기술은 표면처리, 온존 발생장치, VOC (Volatile Organic compound) 제거등 다양한 산업분야에서 응용되고 있다. 상압플라즈마 기술 또한 DBD (Dielectric barrier discharge), Griding Arc, SDIP (Surface Discharge Induced Plasma) 등 다양한 기술들이 개발되어져 왔다. VOC를 제거하기 위한 다양한 플라즈마 기술중 특히 BDB 방법과 SDIP 기술들은 플라즈마에 의한 VOC 분해 뿐만 아니라 오존 발생을 통하여 VOC성분을 분해하는 것으로 알려져 있으며 효율이 매우 뛰어난 것으로 보고 되고 있다. 그러나 BDB 방전의 경우 방전이 발생하는 간격이 매우 작아 공기를 정화시키기 위해 좁은 유로를 통하여 일정넓이를 이동하여하 하기 때문에 압력감소가 심하며 이를 개선하기위해 다단으로 설계할 경우 구조가 복잡하고 가격이 고가인 단점이 있다. 본 연구에서는 두 개의 면 전극이 마주보는 형태로 된 DBD 구조의 단점을 보완하기 위하여 빗살무늬 모양의 다층구조의 선형전극으로 구조를 변화시켜 전극에 의한 압력감소를 방지하고 효율적으로 플라즈마 및 오존을 발생시킬 수 있는 VOC제거용 상압 플라즈마 발생장치를 개발하였다. 또한 플라즈마 발생 및 오존발생량이 우수한 것으로 알려져 있는 SDIP 장치 또한 제작하여 비교 평가를 하였다. 제작된 플라즈마 발생장치는 60 Hz와 20kHz의 교류 고압파워 서플라이를 이용하여 플라즈마 발생실험을 진행하였다. 선행 연구에서는 60 Hz의 고압 파워 서플라이를 이용하여도 플라즈마 방전이 잘 된다고 보고되었는데 본 실험에서 60 Hz 파워 서플라이를 사용할 경우 15 kV 이상이 인가될 때 아주 약하게 오존이 발생하는 현상이 관찰되었으나 육안으로 구분이 될 만큼의 플라즈마 방전은 발생하지 않았다. 20kHz의 고압파워 서플라이를 사용한 경우에는 비교적 낮은 전압인 7 kV에서 방전이 관찰되었으며 분당 22 mg의 오존이 발생하였다. SDIP를 이용한 경우 플라즈마가 발생하는 조건은 SDIP의 기하학적 형상에 많이 의존하게 된다. 본 실험에 SDIP 장치는 매우 낮은 전압에서 방전을 시작하였다. 기존의 DBD와는 다르게 1.7 kV에서 플라즈마 발생하였으며 1.8 kV에서 정상적인 플라즈마 방전이 발생하였다. 이때 분당 3.1 mg의 오존이 발생하였다. 오존 발생양은 앞에 빗살형 플라즈마 방전장치에 비하여 낮은데 인가되는 전력을 고려하면 입력된 전기 에너지당 오존발생양은 비슷한 수준이였다.

• Journal of Advanced Marine Engineering and Technology
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• v.40 no.10
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• pp.929-934
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• 2016

Plasma technology has long been regarded as a key essential tool in many industrial and technological sectors. However, the advancement of plasma technology in marine applications has not been fully realized yet. Herein, we present a short overview on the recent trends in utilization of plasma technology for air-pollution treatment in marine diesel exhaust. Four non-thermal plasma system, including electron beam dry scrubber (EBDS), dielectric barrier discharge (DBD), electron beam-microwave (EB-MW) plasma hybrid system, and plasma-catalytic hybrid system, are described with emphasis on their efficiency in removals of $NO_x$ and $SO_x$ gases. Non-thermal plasma has the great potential to be an efficient and environmentally compatible technique in simultaneous removals of $NO_x$ and $SO_x$ gases from the exhaust of marine diesel engine in the future.

• 한국연소학회:학술대회논문집
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• 2002.06a
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• pp.179-184
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• 2002

Interaction between flames and non-thermal plasmas of DBD type has been experimentally investigated. Vigorous streamers were observed under flame conditions because of the increase of reduced field (electrical) at high temperature as well as the seeding of free electrons and ions generated inside the flame. Flame lengths were significantly shortened as the applied voltage increased on account of intense mixing by ionic winds and soot-induced flows. Flame luminosities severely decreased under plasma conditions, which means the reduction of soot, since the residence time was reduced because of the flame shortening. Temperature and major species concentrations measured by FTIR were not changed despite the plasma generation. which shows overall chemistries were not affected by non-thermal plasmas.