• Title/Summary/Keyword: Czochralski method

Search Result 146, Processing Time 0.029 seconds

A numerical study on the effects of the asymmetric cusp magnetic field in 8 inch silicon single crystal growth by Czochralski method (초크랄스키법에 의한 8인치 실리콘 단결정 성장시 비대칭 커스프자장의 영향에 관한 연구)

  • 이승철;정형태;윤종규
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.6 no.1
    • /
    • pp.1-10
    • /
    • 1996
  • A numerical study was conducted on the effects of the cusp magnetic field in 8" silicon single crystal grwoth by Czochralski method. For a damping effects simulation by magnetic field, low reynolds number ${\kappa} - {\varepsilon}$ model was adopted. Symmetrci cusp magnetic field has a effect of damping streamline crystal, is lowerd with the increasing cusp magnetic field intensity. The uniformity of the oxygen concentration was improved. The asymmetirc cusp magnetic field increased the oxygen concentration however, oxygen concentration distribution in the radial direction was remained uniform. Suitable combination of symmetric and asymmetric cusp magnetic fields could give uniform and low oxygen concentration in the axial direction.tion.

  • PDF

Growth of new piezoelectric single crystals by the czochralski method (Czochralki법에 의한 신압전단결정의 성장)

  • An, Jin-Ho;Joo, Kyung;Jung, Yong-Sun;Auh, Keun-Ho
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.10 no.6
    • /
    • pp.394-399
    • /
    • 2000
  • Langasite (LGS) is a material hoped to meet needs required of new base materials for future communication devices (e.g.SAW filters). In this study, synthesis of new materials was pursued by developing new compounds with the host structure of Langasite in hopes to obtain materials with improved characteristics; compounds including $La_3$$Ta_{0.5}$$Ga_{5.5}$$O_{14}$(LTG)and $La_3$$Nb_{0.25}$$Ta_{0.25}$$Ga_{5.5}$$O_{14}$(LNTG) were synthesized by solid state reactions. Characteristics of the compound synthesized in question were determined. The single crystals of Langasite-type were grown using the Czochralski method. The growth conditions for LTG and LNTG were studied and were found to be similar to those of LGS. The growth characteristics of LNTG were observed by studying etch pit formation density along the crystal length.

  • PDF

Evaluation of Mechanical Backside Damage of Silicon Wafer by Minority Carrier Recombination Lifetime and Photo-Acoustic Displacement Method

  • Park, Chi-Young;Cho, Sang-Hee
    • Proceedings of the Korea Association of Crystal Growth Conference
    • /
    • 1997.10a
    • /
    • pp.155-159
    • /
    • 1997
  • We investigated the effect of mechanical backside damage in Czochralski silicon wafer. The intensity of mechanical damage were evaluated by minority carrier recombination lifetime by a laser excitation/microwave reflection photoconductance decay method, photo-acoustic displacement method, X-ray section topography, and wet oxidation/preferential etch methods. The data indicate that the higher the mechanical damage intensity, the lower the minority carrier lifetime, and the photoacoustic displacement values are also increased proportionally.

  • PDF

Finite element analysis for czochralski growth process of sapphire single crystal (사파이어 단결정의 초크랄스키 성장공정에 대한 유한요소분석)

  • Lim, S.J.;Shin, H.Y.;Kim, J.H.;Im, J.I.
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.21 no.5
    • /
    • pp.193-198
    • /
    • 2011
  • Recently sapphire crystals are used in LED applications. The Czochralski (CZ) growth process is one of the most important techniques for growing high quality sapphire single crystal. A successful growth of perfect single crystals requires the control of heat and mass transport phenomena in the CZ growth furnace. In this study, the growth processes of the sapphire crystal in an inductively heated CZ furnace have been analyzed numerically using finite element method. The results shown that the high temperature positions moved from the crucible surface to inside the melt and the crystal-melt interface changed to the flat shape when the rpm was increased. Also the crystal-melt interface shape has been influenced by the shoulder shape of the grown crystal during the initial stage.

Effect of oxygen concentration and oxygen precipitation of the single crystalline wafer on solar cell efficiency (단결정 실리콘에서 산소농도에 따른 산소석출결함 변화와 태양전지 효율에 미치는 영향)

  • Lee, Song Hee;Kim, Sungtae;Oh, Byoung Jin;Cho, Yongrae;Baek, Sungsun;Yook, Youngjin
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.24 no.6
    • /
    • pp.246-251
    • /
    • 2014
  • Recent studies have shown methods of improving solar cell efficiency. Especially on single crystalline silicon wafer which is high-efficiency solar cell material that has been widely studied. Interstitial oxygen (Oi) is the main impurity in the Czochralski (Cz) growing method, and excess of this can form precipitates during cell fabrication. We have demonstrated the effect of Oi impurity and oxygen precipitation concentration of the wafer on Cz-silicon solar cell efficiency. The result showed a decrease in cell efficiency as Oi and oxygen precipitation increase. Moreover, we have found that the critical point of [Oi] to bring higher cell efficiency is at 14.5 ppma in non-existent Bulk Micro Defect (BMD).

A Study of Optimum Growth Rate on Large Scale Ingot CCz (Continuous Czochralski) Growth Process for Increasing a Productivity (생산성 증대를 위한 대구경 잉곳 연속 성장 초크랄스키 공정 최적 속도 연구)

  • Lee, Yu-Ri;Roh, Ji-Won;Jung, Jae Hak
    • Korean Chemical Engineering Research
    • /
    • v.54 no.6
    • /
    • pp.775-780
    • /
    • 2016
  • Recently, photovoltaic industry needs a new design of Czochralski (Cz) process for higher productivity with reasonable energy consumption as well as solar cell's efficiency. If the process uses the large size reactor for increasing productivity, it is possible to produce a 12-inch, rather than the 8-inch. Also the continuous czochralski process method can be maximized to increase productivity. In this study, it was designed to improve the yield value of ingot with optimal condition which reduce consumption of electrical power. It has increased the productivity of the 12-inch ingot process condition by using CFD simulation. I have found optimal growth rate, by comparing each growth rate the interface shape, Temperature gradient, power consumption. As a result, the optimal process parameters of the growth furnace has been derived to improve for the productivity and to reduce energy. This study will contribute to the improvement of the productivity in the solar cell industry.

Accelerated testing for evaluating bubble quality within quartz glass crucibles used for manufacturing silicon single crystal ingots (실리콘 단결정 잉곳 제조용 석영유리 도가니 내 기포 품질평가를 위한 가속시험)

  • Gyu Bin Lee;Seung Min Kang;Jae Ho Choi;Young Min Byeon;Hyeong-Jun Kim
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.33 no.3
    • /
    • pp.91-96
    • /
    • 2023
  • To verify the quality of bubbles during the use of quartz glass crucibles (QC), an appropriate accelerated testing method was proposed. The bubble state of discarded waste crucibles obtained from actual Czochralski (Cz) processes was analyzed, and optimal heat treatment conditions were suggested by varying temperature, pressure, and time using the QC test piece. By subjecting the samples to heat treatment at 1450℃, 0.4 Torr, and 40 hours, it was possible to control the bubble size and density to a similar level as those generated in the actual Cz process. In particular, by selecting a relatively lower pressure of 0.4 Torr compared to the typical range of 10~20 Torr applied in the Cz process, the time required for accelerated bubble formation testing could be reduced. However, it was determined that increasing the heat treatment temperature to 1550℃ led to the phenomenon of Ostwald ripening, resulting in larger bubbles and a rapid decrease in density. Therefore, it was concluded that it was not a suitable condition for the desired b ake test.

INVESTIGATION OF DOMAIN STRUCTURES IN $LiNbO_3$ SINGLE CRYSTALS GROWN BY CZOCHRALSKI METHOD

  • Do, Won-Joong;Kyung Joo;Shin, Kwang-Bo;Auh, Keun-Ho
    • Proceedings of the Korea Association of Crystal Growth Conference
    • /
    • 1998.06a
    • /
    • pp.111-114
    • /
    • 1998
  • Lithium Niobate {{{{ { LiNbO}_{ 3} }}}} single crystals grown by Czichralski method at the congruent composition, have ferroelectric microdomains. These microdomins were investigated by chemical etching with hydrofluoric acid (HF) AND NITRIC ACID ({{{{ { HNO}_{3 } }}}}), and by us ing optical microscopy, scanning electron microscopy and atomic force microscopy

  • PDF

Crystal Growth and Spectroscopic Investigation of Yb,Er:$YCa_4O{(BO_3)}_3$ for 1.55$\mu m$ Laser

  • Jeong, Suk-Jong;Yu, Young-Moon
    • Proceedings of the Optical Society of Korea Conference
    • /
    • 1999.08a
    • /
    • pp.220-221
    • /
    • 1999
  • Single crystals of Yttrium Calcium Oxyborate (YCOB) doped with different concentrations of Er3+ and Yb3+ ions were growth by Czochralski method. High qualities of crystals in morphology and transparency were obtained . Analysis on crystal structure and lattice parameters were performed by X-ray diffraction method. It was found that congruent melting composition is YCA4.2O1.2(BO3)3. Absorption and fluorescence properties of grown crystals were also reported.

  • PDF

Spinel$(MgAl_2O_4)$ single crystal growth by floating zone method (Floating zone 법에 의한 Spinel$(MgAl_2O_4)$단결정 성장)

  • Seung Min Kang;Byong Sik Jeon;Keun Ho Orr
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.4 no.3
    • /
    • pp.325-335
    • /
    • 1994
  • The spinel $MgO.Al_20_3$ single crystals were grown by FZ (floating zone) method. Its melting point is about, $2135^{\circ}C$ and is important to the process of the growth from the melt. There have been some reports of the growth by Czochralski and Verneuil method. However, this study is the first trial to the spinel crystal with the application of FZ method. In this study, $MgAl_2O_4$ spinel crystals were grown by using FZ method which uses the ellipsoidal mirror furnace having infrared halogen lamps as a heat source. With dopants of transition metal ions, it was possible to melt the feed rod which does not absorb the infrared rays due to the transparent properties to infrared ray of spinel itself and the red, green and blue colored spinel single crystals could be grown more easily. As a conclusion, the purpose of this study is to find the spinel single crystal growth mechanism with respect to th growth interfaces and molten zone stability and to characterize the state of growth resulting from the concavity to the melt of interfaces.

  • PDF