• Title/Summary/Keyword: Cu disc

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Comparison of Cu wafer and Disc using the electrochemical and Friction method during the CMP (Chemical Mechanical Planarization) (CMP 공정중 전기화학적 방법과 마찰력을 이용하여 Cu wafer와 Disc의 특성 비교)

  • Kang, Young-Jae;Eom, Dae-Hong;Song, Jae-Hoon;Park, Jin-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07b
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    • pp.1300-1303
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    • 2004
  • Copper는 낮은 저항률과 높은 Electromigration 저항 때문에 반도체 소자에 배선 재료로 사용된다. CMP 공정을 이용 하여 Cu wafer의 여러 가지 특성을 파악하기에는 wafer의 소모량이 많고 고가가의 비용이 예상 되므로, 본 논문에서는 비용절감을 위하여 wafer를 Disc로 대체 하고자 실험을 진행 하였고 Cu wafer와 Disc의 비료 방법은 우선 PM-5 (Genitech. co) 장비를 이용하여 removal rate의 차이점을 알 아 보았으며, 서로의 etch rate을 reomval rate과 비교하였다. EG&G 273A를 통하여 Cu wafer와 disc의 corrosion potential과 $R_p$ (Polarization resistance)값을 서로 비교 하였다. 이 논문에서는 이러한 것들을 서로 비교 하여, Cu wafer와 disc에서의 상관관계를 알고자 하였으며, 만약에 Cu wafer와 disc의 특성이 비슷하다면, Cu wafer 대신에 disc를 이용 하여 실험하여도 되는지에 관하여 조사 하였다.

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Cu Via-Filling Characteristics with Rotating-Speed Variation of the Rotating Disc Electrode for Chip-stack-package Applications (칩 스택 패키지에 적용을 위한 Rotating Disc Electrode의 회전속도에 따른 Cu Via Filling 특성 분석)

  • Lee, Kwang-Yong;Oh, Tae-Sung
    • Journal of the Microelectronics and Packaging Society
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    • v.14 no.3
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    • pp.65-71
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    • 2007
  • For chip-stack package applications, Cu filling characteristics into trench vias of $75{\sim}10\;{\mu}m$ width and 3 mm length were investigated with variations of the electroplating current density and the speed of a rotating disc electrode (RDE). Cu filling characteristics into trench vias were improved with increasing the RDE speed. There was a Nernst relationship between half width of trench vias of Cu filling ratio higher than 95% and the minimum RDE speed, and the half width of trenches with 95% Cu filling ratio was linearly proportional to the reciprocal of root of the minimum RED speed.

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Compositing Modes and Microstructures of $Cu-X(=Al_2O_3,W)_p$ Composite by Centrifugal Spray-Cast Deposition (원심분사주조법에 의한 $Cu-X(=Al_2O_3,W)_p$ 복합재료의 미세조직 및 복합화)

  • Bae, Cha-Hurn;Jeong, Hae-Yong
    • Journal of Korea Foundry Society
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    • v.17 no.5
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    • pp.480-487
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    • 1997
  • Particle reinforced metal matrix composites(MMCs) via a centrifugal spray-cast deposition(CSD) process were fabricated by injecting second phase particles($Al_2O_3$<40${\mu}m$, W<17.3${\mu}m$) into copper melt on the atomizing disc. Compositing modes were investigated by combining microstructures and mathematical modeling between Cu droplets and the reinforced particles injected. The $Cu/W_P$ powders were shown that the W particles penetrate and get embedded in the Cu droplets. It is considered that the W particles composite preferentially in Cu melt on the atomizing disc. On the other hand, the $Al_2O_3$, particles did not penetrate into the Cu droplets on the atomizing disc but get attached in surface of Cu droplets during the flight. It is considered that the compositing may be attained in the flight distance which the relative velocity between Cu droplet and $Al_2O_3$, particle is maximum. The microstructure of the $Cu/W_P$ and the $Cu/(Al_2O_3)_p$ composite preform was strongly influenced by compositing modes of droplets, and after subsequent deposition it was comprised as it is called the dispersed type and the cell type of microstructure, respectively.

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Studies on the Formation of Copper Complex of Sulfa-Drug III. Study on the Sensitivity of Copper Sulfa-Drug Complex on Microorganism. (Sulfa 제-Cu 착화합물의 형성에 관하여 III. Copper Sulfa-drug Complex 의 세균감수성)

  • 이왕규
    • YAKHAK HOEJI
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    • v.9 no.1_2
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    • pp.8-13
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    • 1965
  • The sensitivity on microorganisms of ten sulfa-drugs and their Cu-complexes was observed. Ericsson's disc method and modified tube dilution method were applied. Dimethylformamide was used for solvent of sulfa drugs. In general, original sulfa-drugs showed more sensitive patterns than its Cu-complexes except sulfadimethoxine-Cu complex which showed more sensitive patterns than its original drug with disc method.

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Sliding Wear and Corrosion Resistance of Copper-based Overhead Catenary for Traction Systems

  • Kwok, C.T.;Wong, P.K.;Man, H.C.;Cheng, F.T.
    • International Journal of Railway
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    • v.3 no.1
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    • pp.19-27
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    • 2010
  • In the present study, the electrical sliding wear and corrosion resistance of pure copper (Cu) and six age-hardened copper alloys (CuCr, CuZr, CuCrZr, CuNiSiCr, CuBe and CuBeNi) were investigated by a pin-on-disc tribometer and electrochemical measurement. Various copper-based alloys in the form of cylindrical pin were forced to slide against a counterface stainless steel disc in air under unlubricated condition at a sliding velocity of 31 km/h under normal load up to 20 N with and without electric current. The worn surface of and wear debris from the specimens were studied by scanning electron microscopy. Both mechanical wear and electrical arc erosion were the wear mechanisms for the alloys worn at 50 A. Owing to its good electrical conductivity, high wear and corrosion resistance, CuCrZr is a promising candidate as the overhead catenary material for electric traction systems.

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Study of anti wear resistance of Mo-Cu-N coatings deposited by reactive magnetron sputtering process with single alloying target (윤활조건에 따른 Mo-Cu-N 코팅의 마모특성에 관한 연구)

  • Mun, Gyeong-Il;Park, Hyeon-Jun;Lee, Han-Chan
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2017.05a
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    • pp.95.1-95.1
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    • 2017
  • In this study, it has been tried to make the single Mo-Cu alloying targets with the Cu showing the best surface hardness that was determined by investigation on the coatings with the double target process. The single alloying targets were prepared by powder metallurgy methods such as mechanical alloying and spark plasma sintering. The nanocomposite coatings were prepared by reactive magnetron sputtering process with the single alloying targets in $Ar+N_2$ atmosphere. The microstructure changes of the Mo-Cu-N coatings with diverse Cu contents were investigated by using XRD, SEM and EDS. The mechanical properties of the coatings were evaluated by using nano-indentor, scratch test, and ball on disc methods. Especially, the coated samples were tested by using various lubricating oil to compare the property of anti wear-resistance. In this study, the nano-composite MoN-Cu coatings prepared using an alloying target was eventually compared with the coatings from the multiple targets.

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Study on Ti-Cu-N thin film for improvement of mechanical propertiesn by copper doping (TiN 기지위에 Cu doping에 의한 Ti-Cu-N 박막의 기계적 특성 향상에 관한 연구)

  • 이혁민;김상식;박헌규;이호영;한전건
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2001.06a
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    • pp.13-13
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    • 2001
  • 현재 초고속 가공 공구의 국내 시장은 150억원이며 향후 3년 내에 1500억원으로 급성 장활 전망이다. 무윤활 초고속 가공을 실현하기 위해서는 윤활특성이 우수한 초고경도 코팅의 개발이 필요하며 이를 통해 기계설비의 수명향상과 폐유문제 해결을 기대할 수 있다. 기존의 고체윤활 코팅은 초고경도 코팅의 상부에 $MoS_2$, Graphite 등 윤활성 박막을 합성하였으나, 이들은 Hexagonal 구조의 연질 박막이며 수분이 존재하는 대기중에서는 윤활 및 내마모 특성이 급격히 저하된다. 환경친화 대체소재 개발의 일원으로 TiN, ZrN 박막 등이 이미 개발되었고 기계적 특성이 우수하여 널리 응용되고 있으나 아직 경도(약 20GPa 내외) 및 윤활성의 한계 (마찰계수 $\mu=O.6$)를 극복하지 못하고 있다. TiN박막 위의 Cu의 첨가는 TiN의 구조와 성질을 크게 변화시키는 것으로 알려져 있다. 따라서 본 연구에서는 TiN 기지 위에 Cu를 도핑함으로써 경도의 상승을 통환 내구력의 향상과 마찰계수의 감소를 통한 윤활성의 향상을 보고자하였다. TiN합성의 안정화를 위하여 magnetron sputtering과 arc ion pIatingd을 병용한 hybrid 공정을 이용하였다. Cu첨가에 따른 결정 성장 거동의 변화를 보기 위해 XRD 분석을 실행하였고, EDS 분석을 통해 Cu target 전류밀도에 의한 기지내의 Cu의 함량변화를 고찰하였으며, 경도 및 윤활특성을 고찰하기 위해서 경도 시험과 마모 시험(ball-on disc type test)를 하였다.

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A Study of Sliding Friction and Wear Properties for Bronze added $Cu_2S$ as Solid Lubricants (고체윤활제 $Cu_2S$첨가 소결청동의 미끄럼 마찰마모특성 연구)

  • Lee, Han-Young;Ikenaga, Akira
    • Tribology and Lubricants
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    • v.23 no.2
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    • pp.66-72
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    • 2007
  • [ $MoS_2$ ], is a well-known metal sulfide applied as solid lubricants and an additive to prolong the life of sintered bearings under severe conditions. However, the high price of $MoS_2$ limited its wide application. This study is aimed to investigate the possibility far application to solid lubricants for $Cu_2S$ as a substitute of $MoS_2$. Bronzes added $Cu_2S$ and $MoS_2$, are produced by powder metallurgy in this study, and then evaluated their friction and wear properties., as well as sintered bronze. The sliding wear test using pin-on-disc type machine, was conducted at several sliding speeds for three type test pieces sintered bronzes added $Cu_2S$ and $MoS_2$, and sintered bronze without lubricants. Addition of $Cu_2S$ to bronze leads to relatively good friction properties, although it is not so good as addition of $MoS_2$. However, the wear properies of sintered bronze added $Cu_2S$ are better than that of sintered bronze added $MoS_2$.

Tribological Characteristics of C/C-SiC-Cu Composite and Al/SiC Composite Materials under Various Contact Conditions (접촉 조건에 따른 C/C-SiC-Cu복합재와 Al/SiC복합재의 마모 특성에 관한 연구)

  • Kim, Byung-Kook;Shin, Dong-Gap;Kim, Chang-Lae;Goo, Byeong-Choon;Kim, Dae-Eun
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.41 no.1
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    • pp.21-30
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    • 2017
  • The surface temperature of disc brakes varies during braking, which can affect the friction and wear behavior of braking systems. In order to develop an efficient braking system, the friction and wear behaviors of brake materials need to be clearly understood. In this work, the friction and wear behavior of the C/C-SiC-Cu composite and the Al/SiC composite, which are used in disc braking systems, were investigated. Both the surface temperature and contact pressure were studied. A pin-on-reciprocating tribotester was used for this purpose, in order to control temperature and load. Results showed that the friction varied significantly with temperature and sliding distance. It was found that a transfer layer of compacted wear debris formed on the wear track of the two materials. These layers caused the surface roughness of the wear track to increase. The outcome of this work is expected to serve as a basis for the development of braking systems under various operating conditions.

The Wear Properties of the Precipitation Hardened Al-Pb-Cu Bearing Alloys (석출경화된 Al-Pb-Cu계 베어링 합금의 마모거동)

  • 홍택기;허무영;임대순;안성욱
    • Tribology and Lubricants
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    • v.9 no.2
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    • pp.56-62
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    • 1993
  • Al-Pb-Cu and Al-Si-Pb-Cu bearing alloys were produced by forced-stirring method and water-cooled copper mold casting to investigate the effect of the precipitation hardening on the wear properties. Sliding of produced alloy pin against a steel disc were performed under various applied loads. Lowering the wear rate and material transfer phenomena were explained by the strengthening of $\theta'$ precipitates on AI matrix. The transmission electron microscope observation reveals the role of the precipitates in the alloys with Cu. The movement of dislocations was hindered by precipitates which resulted in the reduction of plastic deformation at the worn surfaces.