• Title/Summary/Keyword: CrN film

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The Low Resistivity Gate Metals Formation of Thin Film Transistors by Selective CVD

  • Park, S.J.;Bae, N.J.;Kim, S.H.;Shin, H.K.;Choi, J.S.;Yee, J.G.;Choi, S.Y.
    • Journal of the Korean Vacuum Society
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    • v.4 no.S1
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    • pp.108-112
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    • 1995
  • Copper and aluminum selective deposition using (hfac)Cu(VTMS) and DMEAA precursors were performed in a warm-wall low pressure chemical vapour deposition reactor. The films of Cu and AI deposited on Corning 7059 glass and quartz with pattern of Cr seed metal. Selective deposition can be achieved at a pressure range of from 10-1 to 10 torr and substrate temperature range of 150-25$0^{\circ}C$. Selective deposition of Cu and AI by CVD is one of candidate for gate material formation fo larger area and high resolution plat panel displays.

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Tunable bragg filter of $Si_3N_4-SiO_2$ waveguide using thermooptic effect (열광학 효과를 이용한 $Si_3N_4-SiO_2$ 도파로 가변 브래그필터)

  • 이형종;정환재
    • Korean Journal of Optics and Photonics
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    • v.3 no.4
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    • pp.244-251
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    • 1992
  • Buried Bragg filters of single mode $Si_{3}N_{4}$ rib waveguide with a cover layer of $SiO_{2}$ and grating at the interface of $Si_{3}N_{4}$ and $SiO_{2}$ are designed and fabricated. Etching of the grating on $Si_{3}N_{4}$ waveguide core by buffered HF showed uniform etching with good control up to 1 nm. This buried type of Bragg filters are immune to contamination of the surface of device. The mode index and bandwidth of filters are determined by measurements of the transmission spectrum of Bragg filters and compared with that of calculation. Waveguide Bragg filters loaded with the micro-heater of Cr film and the cladding of silicone rubber are made to control the Brag wavelength of the filter. As a result the filter wavelength of the device moved by 0.41 nm for 10 mA current to the shorter side of wavelength proportional to the square of the current.

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The Behavior of Pitting Corrosion Associated with Microstructure of a Cast Lean Duplex Stainless Steel in Chloride Environments (염화물 환경에서 린 듀플렉스 스테인리스 주강의 미세조직과 연계한 공식 거동)

  • In-Sung Lee;Soon-Tae Kim;Chae-Jin Nam;Seung-Man Yang;In-Sung Cho;Seung-Mok Yoo
    • Journal of Korea Foundry Society
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    • v.43 no.5
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    • pp.230-240
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    • 2023
  • The pitting corrosion behavior of 329LD cast lean duplex stainless steel and CF3M cast austenitic stainless steel was investigated in chloride environments. The pitting corrosion resistance of the 329LD alloy was superior to that of the CF3M alloy because the pitting potential, passive region, and critical pitting temperature of the low Ni-low Mo 329LD alloy were higher than those of the high Ni-medium Mo commercial CF3M alloy. There are two main reasons for the enhancement of the pitting corrosion resistance of high Cr-low Momedium N 329LD alloy compared to the low Cr-medium Mo CF3M alloy: First, the pitting resistance equivalent number (PRENδ+γ) value of the 329LD alloy is higher than that of the CF3M alloy. Second, the passive region of the 329LD alloy is larger than that of the CF3M alloy. It indicates that the synergistic effect of the three elements by adding high Cr and low Mo-medium N to the 329LD alloy enhances the passivity of the passive film, thereby increasing the pitting corrosion resistance. It was verified that based on the PRENγ of austenite (γ) and PRENδ of ferrite (δ) values calculated using an N-factor of 16, the pitting corrosion of the 329LD alloy was selectively initiated at the γ-phases because PRENγ value of austenite (γ) was smaller than that of ferrite (δ), and finally propagated from the γ-phase to the δ-phase.

AN ELECTROCHEMICAL STUDY ON THE CORROSION RESISTANCE OF THE VARIOUS IMPLANT METALS (수종 임플랜트 금속의 내식성에 관한 전기화학적 연구)

  • Jeon Jin-Young;Kim Yung-Soo
    • The Journal of Korean Academy of Prosthodontics
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    • v.31 no.3
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    • pp.423-446
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    • 1993
  • Titanium and its alloys are finding increasing use in medical devices and dental implants. The strong selling point of titanium is its resistance to the highly corrosive body fluids in which an implant must survive. This corrosion resistance is due to a tenacious passive oxide or film which exists on the metal's surface and renders it passive. Potentiodynamic polarization measurement is one of the most commonly used electro-chemical methods that have been applied to measure corrosion rates. And the potentiodynamic polarization test supplies detailed information such as open circuit, rupture, and passivation potential. Furthermore, it indicates the passive range and sensitivity to pitting corrosion. This study was designed to compare the corrosion resistance of the commonly used dental implant materials such as CP Ti, Ti-6A1-4V, Co-Cr-Mo alloy, and 316L stainless steel. And the effects of galvanic couples between titanium and the dental alloys were assessed for their useful-ness-as. materials for superstructure. The working electrode is the specimen , the reference electrode is a saturated calomel electrode (SCE), and the counter electrode is made of carbon. In $N_2-saturated$ 0.9% NaCl solutions, the potential scanning was performed starting from -800mV (SCE) and the scan rate was 1 mV/sec. At least three different polarization measurements were carried out for each material on separate specimen. The galvanic corrosion measurements were conducted in the zero-shunt ammeter with an implant supraconstruction surface ratio of 1:1. The contact current density was recorded over a 24-hour period. The results were as follows : 1. In potential-time curve, all specimens became increasingly more noble after immersion in the test solution and reached between -70mV and 50mV (SCE) respectively after 12 hours. 2. The Ti and Ti alloy in the saline solution were most resistant to corrosion. They showed the typical passive behavior which was exhibited over the entire experimental range. Therefore no breakdown potentials were observed. 3. Comparing the rupture potentials, Ti and Ti alloy had the high(:st value (because their break-down potentials were not observed in this study potential range ) followed by Co-Cr-Mo alloy and stainless steel (316L). So , the corrosion resistance of titanium was cecellent, Co-Cr-Mo alloy slightly inferior and stainless steel (316L) much less. 4. The contact current density sinks faster than any other galvanic couple in the case of Ti/gold alloy. 5. Ag-Pd alloy coupled with Ti yielded high current density in the early stage. Furthermore, Ti became anodic. 6. Ti/Ni-Cr alloy showed a relatively high galvanic current and a tendency to increase.

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Characteristics of Groundwater Quality for Agricultural Irrigation in Plastic Film House Using Multivariate Analysis (다변량분석법을 이용한 시설재배지 지하수 수질 특성)

  • Kim, Jin-Ho;Choi, Chul-Mann;Lee, Jong-Sik;Yun, Sun-Gang;Lee, Jung-Taek;Cho, Kwang-Rae;Lim, Su-Jung;Choi, Seung-Chul;Lee, Gyeong-Ja;Kwon, Yeu-Seok;Kyung, Ki-Chon;Uhm, Mi-Jeong;Kim, Hee-Kwon;Lee, You-Seok;Kim, Chan-Yong;Lee, Seong-Tae;Ryu, Jong-Su
    • Korean Journal of Environmental Agriculture
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    • v.27 no.1
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    • pp.1-9
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    • 2008
  • The main purpose of this study is to accumulate the fundamental data representing groundwater of plastic film houses by means of water quality and its multivariate statistical analysis. Groundwater samples were collected in every two years since 2000 to 2004 from total 211 sites. According to the result of water quality analysis, ground water quality was suitable for irrigation purpose averagely. Correlation analysis showed that EC was highest positively correlated with $Mg^{2+}$ to 0.810(p<0.01), 0.776(p<0.01) in April and July, respectively. $NO_3-N$ was highest positively correlated with T-N to 0.794(p<0.01) in October. This result shows that it can lead to a different result even in similar case sometimes. Four factors were extracted through factor analysis in April and July, but five factors were extracted in October. The proportions of cumulative variance by the factor were 64.9, 60.2, and 70.7 in April, July, and October, respectively. The first factor was highly related to anions and cations such as $Ca^{2+},\;Mg^{2+},\;Cl^-,\;{SO_4}^{2-}$, and EC in contrast to that of stream water. According to the cluster analysis, 211 sites are classified into four groups. Common type of ground water quality was shown in group A. The pH and $PO_4-P$ were highest in Group B. The anions and cations were highest in Group C. $COD_{Cr}$ was highest in Group D.

Glucose Sensors Using Lipoic Acid Self-Assembled Monolayers

  • Kim, Ji Yeong;Nakayama, Tadachika;Kim, Jae-Hun;Kim, Sang Sub
    • Journal of Sensor Science and Technology
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    • v.23 no.5
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    • pp.295-298
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    • 2014
  • A novel approach to fabricating high-performance glucose sensors is reported, which is based on the process of self-assembled monolayers (SAMs). In this study, we have particularly used ${\alpha}$-lipoic acid (LA) SAMs for the glucose sensors. To our best knowledge, this study is the first one to use LA as SAMs for this purpose. N-hydroxysuccinimide (NHS) and 1-ethyl-3-(3-dimethylaminopropyl) carbodiimide (EDC) were deliberately attached at the same time on the LA SAM. Then, glucose oxidase ($GO_X$) and horseradish peroxidase (HRP) were sequentially immobilized. Thus, the HRP/$GO_X$/NHS-EDC/LA-SAM/Au/Cr/glass working electrode was developed. The glucose-sensing capability of the fabricated sensor was systematically measured by the use of cyclic voltammetry in the range of 1-30 mM glucose in phosphate-buffered saline. The result showed a good sensitivity, that is, as high as $27.5{\mu}A/(mM{\cdot}cm^2)$. This result conspicuously demonstrates that LA can be one of promising substances for use as SAMs for accurately monitoring trace levels of glucose concentration in human blood.

Bioinspired superhydrophobic steel surfaces

  • Heo, Eun-Gyu;O, Gyu-Hwan;Lee, Gwang-Ryeol;Mun, Myeong-Un
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.509-509
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    • 2011
  • Superhydrophobic surfaces on alloyed steels were fabricated with a non-conventional method of plasma etching and subsequent water immersion procedure. High aspect ratio nanopatterns of nanoflake or nano-needle were created on the steels with various Cr content in its composition. With CF4 plasma treatment in radio-frequence chemical vapor deposition (r.-f. CVD) method, steel surfaces were etched and fluorinated by CF4 plasma, which induced the nanopattern evolution through the water immersion process. It was found that fluorine ion played a role as a catalyst to form nanopatterns in water elucidated with XPS and TEM analysis. The hierarchical patterns in micro- and nano scale leads to superhydrophobic properties on the surfaces by deposition of a hydrophobic coating with a-C:H:Si:O film deposited with a gas precursor of hexamethlydisiloxane (HMDSO) with its lower surface energy of 24.2 mN/m, similar to that of curticular wax covering lotus surfaces. Since this method is based on plasma dry etching & coating, precise patterning of surface texturing would be potential on steel or metal surfaces. Patterned hydrophobic steel surfaces were demonstrated by mimicking the Robinia pseudoacacia or acacia leaf, on which water was collected from the humid air using a patterned hydrophobicity on the steels. It is expected that this facile, non-toxic and fast technique would accelerate the large-scale production of superhydrophobic engineering materials with industrial applications.

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Friction Characteristics of DLC and WC/C (DLC와 WC/C의 마찰특성)

  • Kim, Dong-Wook;Kim, Kyung-Woong
    • Tribology and Lubricants
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    • v.27 no.6
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    • pp.308-313
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    • 2011
  • In this study, friction tests were performed in order to investigate the effect of sliding velocity and normal load on the friction characteristics of DLC (a-C:H) and WC/C (a-C:H:W) using a ball-on-disk type friction tester. DLC and WC/C were deposited on AISI 52100 steel balls. Friction tests against carburized SCM 415 Cr-Mo steel disks were carried out under various sliding velocity (0.1, 0.78, 1.56, 3.13, 6.25, 12.5, 25, 50 and 100 mm/s) and normal load (2.4, 4.8 and 9.6 N) conditions while the relative humidity was 20~40 % R.H. and air temperature was $16{\sim}24^{\circ}C$. As results, kinetic friction coefficients of DLC and WC/C were obtained under each test condition. The results show that the kinetic friction coefficients of DLC and WC/C generally increase with the increase in sliding velocity. And, under the same sliding velocity condition, the kinetic friction coefficients are almost constant regardless of normal load. In addition, the kinetic friction coefficients of DLC are lower than those of WC/C under the same test conditions.

A Study on Bismuth tri-iodide for X-ray direct and digital imagers (직접방식 엑스선 검출기를 위한 $BiI_3$ 특성 연구)

  • Lee, S.H.;Kim, Y.S.;Kim, Y.B.;Jung, S.H.;Park, J.K.;Jung, W.B.;Jang, M.Y.;Mun, C.W.;Nam, S.H.
    • Journal of the Korean Society of Radiology
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    • v.3 no.2
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    • pp.27-31
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    • 2009
  • Now a days, the Medical X-ray equipments has become digitalized from analog type such as film, cassette to CR, DR. And many scientists are still researching and developing the Medical X-ray equipment. In this study, we used the Bismuth tri-iodide to conversion material for digital X-ray equipments and we couldn't get the satisfying result than previous study, but it opened new possibility to cover the disadvantage of a-Se is high voltage aplly and difficultness of make. In this paper, we use $BiI_3$ powder(99.99%) as x-ray conversion material and make films that have thickness of 200um and the film size is $3cm{\times}3cm$. Also, we deposited an ITO(Indium Tin Oxide) electrode as top electrode and bottom electrode using a Magnetron Sputtering System. To evaluate a characteristics of the produced films, an electrical and structural properties are performed. Through a SEM analysis, we confirmed a surface and component part. And to analyze the electrical properties, darkcurrent, sensitivity and SNR(Signal to Noise Ratio) are measured. Darkcurrent is $1.6nA/cm^2$ and sensitivity is $0.629nC/cm^2$ and this study shows that the electrical properties of x-ray conversion material that made by screen printing method are similar to PVD method or better than that. This results suggest that $BiI_3$ is suitable for a replacement of a-Se because of the reduced manufacture processing and improved yield.

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Growth and photocurrent properties for ZnIn2S4 single crystal thin film by Hot Wall Epitaxy method (Hot Wall Epitaxy (HWE)법에 의한 ZnIn2S4 단결정 박막 성장과 광전류 특성)

  • 박창선;홍광준
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.156-156
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    • 2003
  • 수평 전기로에서 ZnIn$_2$S$_4$ 다결정을 합성하여 HWE(Hot Wall Epitaxy)방법으로 2nIn2S4단결정 박막을 반절연성 GaAs(100)기판 위에 성장시켰다. ZnIn2S4 단결정 박막은 증발원의 온도를 610 $^{\circ}C$, 기판의 온도를 450 $^{\circ}C$로 성장시켰고 성장 속도는 0.5 $\mu\textrm{m}$/hr로 확인되었다. ZrIn2S4 단결정 박막의 결정성의 조사에서 10 K에서 광발광(photoluminescence) 스펙트럼이 433 nm (2.8633eV)에서 exciton emission스펙트럼이 가장 강하게 나타났으며, 또한 이중결정 X-선 요동곡선(DCRC)의 반폭치(FWHM)도 133 arcsec로 가장 작아 최적 성장 조건임을 알 수 있었다. Hall 효과는 van der Pauw방법에 의해 측정되었으며, 온도에 의존하는 운반자 농도와 이동도는 293K에서 각각 8.51$\times$$10^{17}$ electron/$cm^{-3}$ 291 $\textrm{cm}^2$/v-s였다. ZnIn2S4 단결정 박막의 광전류 단파장대 봉우리들로부터 10 K에서 측정된 $\Delta$Cr(crystal field splitting)은 0.1678 eV, $\Delta$So(spin orbit coupling)는 0.0148 eV였다. 10 K의 광발광 측정으로부터 고품질의 결정에서 볼 수 있는 free exciton 과 매우 강한 세기의 중성 주개 bound exciton등의 피크가 관찰되었다. 이때 중성 주개 bound exciton의 반치폭과 결합 에너지는 각각 9 meV와 26 meV 였다. 또한 Haynes rule에 의해 구한 불순물의 활성화 에너지는 130 meV 였다.다.

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