• Tribology and Lubricants
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• 제34권6호
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• pp.226-234
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• 2018

Copper chemical mechanical planarization (CMP) has become a key process in integrated circuit (IC) technology. The results of copper CMP depend not only on the mechanical abrasion, but also on the slurry chemistry. The slurry used for Cu CMP is known to have greater chemical reactivity than mechanical material removal. The Cu CMP slurry is composed of abrasive particles, an oxidizing agent, a complexing agent, and a corrosion inhibitor. Citric acid can be used as the complexing agent in Cu CMP slurries, and is widely used for post-CMP cleaning. Although many studies have investigated the effect of citric acid on Cu CMP, no studies have yet been conducted on the interfacial friction characteristics and step height reduction in CMP patterns. In this study, the effect of citric acid on the friction characteristics and step height reduction in a copper wafer with varying pattern densities during CMP are investigated. The prepared slurry consists of citric acid ($C_6H_8O_7$), hydrogen peroxide ($H_2O_2$), and colloidal silica. The friction force is found to depend on the concentration of citric acid in the copper CMP slurry. The step heights of the patterns decrease rapidly with decreasing citric acid concentration in the copper CMP slurry. The step height of the copper pattern decreases more slowly in high-density regions than in low-density regions.

• 반도체디스플레이기술학회지
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• 제21권2호
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• pp.38-44
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• 2022

Plasma density in semiconductor fabrication equipment becomes higher to achieve the improved the throughput of the process, but the increase of surface corrosion of the ceramic coated chamber wall has been observed by the increased plasma density. Plasma chamber wall coating with aerosol deposition prefer to be firm and uniform to prevent the potential creation of particle inside the chamber from the deformation of the coating materials, and the aerosol discharge nozzle is a good control factor for the deposited coating condition. In this paper, we investigated the design of the nozzle of the aerosol deposition to form a high-quality coating film. Computational fluid dynamics (CFD) study was employed to minimize boundary layer effect and shock wave. The degree of expansion, and design of simulation approach was applied to found out the relationship between the divergence angle and nozzle length as the key parameter for the nozzle design. We found that the trade-off tendency between divergence angle and nozzle length through simulation and quantitative analysis, and present the direction of nozzle design that can improve the uniformity of chamber wall coating.

• Geomechanics and Engineering
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• 제29권3호
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• pp.229-236
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• 2022

In this study, a model experiment and field experiment was conducted to introduce the optimal tensile force when constructing a non-open cut tunnel according to the ground conditions of sandy soil. CMR (Concrete Modular Roof) method is economical because of the high precision and excellent durability, and corrosion resistance, and the inserted parts can be used as the main structure of a tunnel. In addition the CMR method has a stable advantage in interconnection because the concrete beam is press-fitted compared to the NTR (New Tubular Roof) method, and the need for quality control can be minimized. The ground conditions were corrected by adjusting the relative density of sandy soil during the construction of non-open cut tunnels, and after introducing various tensile forces, the surface settlement according to excavation was measured, and the optimal tensile force was derived. As a result of the experiment, the amount of settlement according to the relative density was found to be minor. Furthermore, analysis of each tensile force based on loose ground conditions resulted in an average decrease of approximately 22% in maximum settlement when the force was increased by 0.8 kN per segment. Considering these results, it is indicated that more than 2.0 kN tensile force per segment is recommended for settlement of the upper ground.

• 한국분말재료학회지
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• 제30권3호
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• pp.223-232
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• 2023

Metal additive manufacturing (AM) has transformed conventional manufacturing processes by offering unprecedented opportunities for design innovation, reduced lead times, and cost-effective production. Aluminum alloy, a material used in metal 3D printing, is a representative lightweight structural material known for its high specific strength and corrosion resistance. Consequently, there is an increasing demand for 3D printed aluminum alloy components across industries, including aerospace, transportation, and consumer goods. To meet this demand, research on alloys and process conditions that satisfy the specific requirement of each industry is necessary. However, 3D printing processes exhibit different behaviors of alloy elements owing to rapid thermal dynamics, making it challenging to predict the microstructure and properties. In this study, we gathered published data on the relationship between alloy composition, processing conditions, and properties. Furthermore, we conducted a sensitivity analysis on the effects of the process variables on the density and hardness of aluminum alloys used in additive manufacturing.

• 한국분말재료학회지
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• 제30권5호
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• pp.436-441
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• 2023

Molybdenum-tungsten (Mo-W) alloy sputtering targets are widely utilized in fields like electronics, nanotechnology, sensors, and as gate electrodes for TFT-LCDs, owing to their superior properties such as high-temperature stability, low thermal expansion coefficient, electrical conductivity, and corrosion resistance. To achieve optimal performance in application, these targets' purity, relative density, and grain size of these targets must becarefully controlled. We utilized nanopowders, prepared via the Pechini method, to obtain uniform and fine powders, then carried out spark plasma sintering (SPS) to densify these powders. Our studies revealed that the sintered compacts made from these nanopowders exhibited outstanding features, such as a high relative density of more than 99%, consistent grain size of 3.43 ㎛, and shape, absence of preferred orientation.

• Steel and Composite Structures
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• 제50권4호
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• pp.475-487
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• 2024

The usage of fiber-reinforced polymer materials increases in the construction sector due to their advantages in terms of high mechanical strength, lightness, corrosion resistance, low density and high strength/density ratio, low maintenance and painting needs, and high workability. In this study, it is aimed to improve mechanical properties of GFRP box profiles, produced by pultrusion method, by filling the polymer concrete into them. Within the scope of study, hybrid use of polymer concrete produced with GFRP box profiles was investigated. Hybrid pressure and bending specimens were produced by filling polymer concrete (polyester resin manufactured with natural sand and stone chips) into GFRP box profiles having different cross-sections and dimensions. Behavior of the produced hybrid members was investigated under bending and compression tests. Hollow GFRP_xx profiles, polymer-filled hybrid members, and nominative polymeric concrete specimens were tested as well. The behavior of the specimens under pressure and bending tests, and their load bearing capacities, deformations and changes in toughness were observed. According to the test results; It was deduced that hybrid design has many advantages over its component materials as well as superior physical and mechanical properties.

• 농업과학연구
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• 제49권4호
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• pp.857-869
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• 2022

Eggs are considered an excellent complete food because they contain many major energy sources, including protein. Eggs are one of the most widely consumed foods worldwide, and egg consumption is steadily increasing. Eggs are generally classified according to their quality and weight. Various characteristics of eggs must be considered for the design and effective utilization of equipment used for the transport, processing, packaging, and storage of eggs. In this study, egg surface area, volume, density, etc. were measured according to the grade of the egg. The values of several geometrical properties that were measured tended to increase with increasing egg grade. The smallest grade eggs had the lowest shell thickness and density. The electrical conductivity of the eggshell and its contents was measured with a self-made electrode and equipment. The egg shell showed properties similar to insulators, and as the thickness increased, the electrical conductivity tended to increase. The electrical conductivity of the egg yolk showed almost constant values under all conditions. The electrical conductivity of the egg white and mixture was particularly low at 0.1 kHz. Fouling and electrode corrosion occurred in a low frequency region due to the egg white. In this study, various geometric and electrical characteristics of eggs were measured, and based on this, factors that could serve as new indicators for egg processed production were analyzed and investigated.

• 한국표면공학회지
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• 제41권5호
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• pp.232-239
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• 2008

The dental orthodontic mini-screw requires good mechanical properties and high corrosion resistance for implantation in the bone. The purpose of this study was to investigate the electrochemical characteristics of TiN and ZrN coated orthodontic mini-screws, mini-screws were used for experiment. Ion plating was carried out for mini-screw using Ti and Zr coating materials with nitrogen gas. Ion plated surface of each specimen w as o bserved with f ield emission scanning e lectron microscopy ( FE-SEM), e nergy dispersive x-ray spectroscopy (EDX), and electrochemical tester. The surface of TiN and ZrN coated mini-screw were more smooth than that of other kinds of non-coated mini-screw due to dercrease of machined defects. The corrosion current density of the TiN and ZrN coated mini-screw decreased compared to non-coated sample. The corrosion potential of TiN and ZrN coated mini-screw were higher than that of non-coated mini-screw in 0.9% NaCl solution. The pitting corrosion resistance increased in the order of ZrN coated, TiN coated and non-coated wire. Pitting potential of ZrN coated mini-screw was the highest in the other specimens.

• Journal of Advanced Marine Engineering and Technology
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• 제13권2호
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• pp.43-63
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• 1989

Various kinds of corrosion prevention methods have been developed. It is known that the method of electrochemical protection is more effective and economical than any other method on the large scale metal structures in corrosive solutions. Strong acid solutions such as nitric and sulfuric acid solutions are often used in industries, and the expensive stainless steel is almost exclusively used for the equipment that comes in contact with such acid solutions. However, it is more reasonable that carbon steel is used rather than stainless steel depending upon concentration of those acid solutions from the economical viewpoint. In this study, the typical strong acid solution such as nitric and sulfuric acid solutions are chosen for the experiment and the selected materials of specimen are the stainless steels of SUS 304L and SUS 316L, the carbon steels of SS 41, SM 50 and RA 32, and highly pure lead. Electrochemical protection diagrams can be drawn with data from the external cathodic and anodic polarization curves of SUS 304L, SUS 316L and SM 50 steels in 5-60% nitric acid solutions and from those polarization curves of SS 41, RA 32, SM 50 and SUS 316L steels, and highly pure lead in 2.5-98% sulfuric acid solutions at the slow scanning rate. The data obtained with using the determination method of the optimum cathodic protection potential, the Tafel extrapolation method and the characteristics of anodic polarization curves. The main results obtained from the diagrams are as follows: 1) In nitric acid solution : (1) Corrosion potentials exist in each of those corrosion zones on the stainless steels in the lower concentration than about 12% solutions and on the high tensile strength steels in the lower concentration than about 30% solutions, but the corrosion current (density) in each zone is small on the above mentioned former steels and large on the latter ones. (2) The stainless steels can be self-passivated in the higher concentration than 15% solutions, and the high tensile strength steels gives rise to the same phenomenon in the higher concentration than 35% solutions. (3) The stainless steels in the lower concentration than 60% solutions and the high tensile strength steels in the higher concentration than 35% solutions can be used without protection, but the latter steels must ve protected anodically in the lower conccentration than about 30% solutions. 2) In sufuric acid solution : (1) The carbon steels can be self-passivated in the higher concentration than 45% solutions, and the SUS 316L steel in higher concentration than 75% solutions and the lead in all concentration solutions also gives rise to the same phenomenon. (2) The lead in the lower concentration than 80% solutions and the SUS 316L steel in the higher concentration than 80% solutions can be used without protection. (3) The carbon steels in the higher concentration than 50% solutions also can be used without protecting economically, but the SUS 316L steel in the 20-70% solutions are considerably corrosive without protecting anodically.

• 콘크리트학회논문집
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• 제29권1호
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• pp.109-116
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• 2017

본 연구에서는 콘크리트 중의 철근부식의 보수로 전기방식법을 적용할 경우의 탈염, 부식복원 및 구조거동을 효과적이고 정량적으로 평가하였다. $160{\times}160{\times}1000mm$의 콘크리트 시편을 제작하였으며 피복두께 20 mm의 원형철근 3본을 매립하였으며 콘크리트 타설 시 염소이온 5.0%를 혼입하여 철근부식을 가속한 뒤 전기방식을 인가하였다. 전기방식 전류는 직류 $750mA/m^2$를 2, 4, 8주간 인가하였다. 결과로서 탈염효과는 인가 기간에 따라 증가하였으며 최대 탈염비는 8주간의 인가 시 64.7-83.7%로 측정되었다. 이는 시멘트계에서 염소이온의 50-60%가 고정화됨을 고려할 때, 일정량의 고정화된 염소이온 역시 탈염된 것으로 판단된다. 또한 부식상태는 8주간의 전기방식 이후에도 $6.5mA/m^2$의 부식 전류 및 330 mV (vs. SCE)의 부식전위를 나타내 여전히 부식이 존재함을 확인하였다. 구조거동에 있어 부식의 증가로 인해 콘크리트의 최대하중은 증가하였으나, 전기방식을 적용함에 따라 오히려 최대하중은 감소하였으나 Control시편보다는 상회한 값을 나타내 전기방식이 구조적 악영향은 없음을 확인하였다.