• Journal of Surface Science and Engineering
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• v.53 no.3
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• pp.124-129
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• 2020

This study is for the development of high temperature ALD SiO₂ film process, optimized for gap-fill process in manufacturing memory products, using a space-divided PE-ALD system equipped with an independent control dual plasma system and orbital moving unit. Space divided PE-ALD System has high productivity, and various applications can be applied according to Top Lid Design. But space divided ALD system has a limitation to realize concentric deposition map due to process influence due to disk rotation. In order to solve this problem, we developed an orbit rotation moving unit in which disk and wafer. Also we used Independent dual plasma system to enhance thin film properties. Improve productivity and film density for gap-fill process by having deposition and surface treatment in one cycle. Optimize deposition process for gap-fill patterns with different depths by utilizing our independently controlled dual plasma system to insert N₂and/or He plasma during surface treatment, Provide void-free gap-fill process for high aspect ratio gap-fill patterns (up to 50:1) with convex curvature by adjusting deposition and surface treatment recipe in a cycle.

• Korean Journal of Environment and Ecology
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• v.27 no.1
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• pp.11-21
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• 2013

We tried to find out the core feeding site of the Red-crowned Crane(Grus japonensis) in Cheorwon, Korea by using analysis techniques which are MCP(minimum convex polygon), KDE(kernel density estimation), LoCoH(local nearest-neighbor convex-hull). And, We discussed the difference and meaning of result among analysis methods. We choose the data of utilization distribution from distribution map of Red-crowned Crane in Cheorwon, Korea at $17^{th}$ February 2012. Extent of the distribution area was $140km^2$ by MCP analysis. Extents of core feeding area of the Red-crowned Crane were $33.3km^2$($KDE_{1000m}$), $25.7km^2$($KDE_{CVh}$), $19.7km^2$($KDE_{LSCVh}$), according to the 1000m, CVh, LSCVh in value of bandwidth. Extent, number and shape complexity of the core area has decreased, and size of each core area have decreased as small as the bandwidth size(default:1000m, CVh: 554.6m, LSCVh: 329.9). We would suggest the CVh value in KDE analysis as a proper bandwidth value for the Red-crowned crane's core area zoning. Extent of the distribution range and core area have increased and merged into the large core area as a increasing of k value in LoCoH analysis. Proper value for the selecting core area of Red-crowned Crane's distribution was k=24, and extent of the core area was $18.2km^2$, 16.5% area of total distribution area. Finally, the result of LoCoH analysis, we selected two core area, and number of selected core area was smaller than selected area of KDE analysis. Exact value of bandwidth have not been used in studies using KDE analysis in most articles and presentations of the Korea. As a result, it is needed to clarify the exact using bandwidth value in KDE studies.

• Journal of Korean Society of Forest Science
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• v.75 no.1
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• pp.32-37
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• 1986

In order to get the fundamental information that could be useful to judge the potentiality of occurrence of rapid shallow landslide in the objective slope, factors selected on Jinhae regions in Korea, where many landslides were caused by heavy rainfall of daily 465 mm and hourly 52mm in August 1979, was carried out through the multiple statistics of quantification method (II) by the electronic computer. The net system with $2{\times}2cm$ unit mesh was overlayed with the contour map of scale 1:5000. 74 meshes of landslides and 119 meshes of non-landslide were sampled out to survey the state of vegetative cover and geomorphological conditions, those were divided into 6 items arid 27 categories. As a result, main factors that would lead to landslide were shown in order of vegetation, slope type, slope position, slope, aspect and numbers of stream. Particularly, coniferous forest of 10 years old, concave slope and foot of mountain were main factors making slope instability. On the contrary, coniferous forest of 20-30 years old, deciduous forest, convex slope and summit contributed to the stable against Landslide. The boundary value between two groups of existence and none of landslides was -0.123, and its prediction was 72%. It was well predicted to divide into two groups of them.

• Korean Institute of Interior Design Journal
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• v.21 no.3
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• pp.182-193
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• 2012

The percentage of senior citizens is increasing in Korea and it is expected to become an "aging society". Problems with the elderly are becoming a big concern, such as physical and mental illness, losing their jobs and having difficulties at home. But, the silver generation, as they are being known, has changed a lot these days. With the aid of medical developments, the elderly's lifespan has become longer, making them more independent and active. Senior Welfare Center's are places where the elderly can spend their golden years in comfort, meaningfully. Senior Welfare Center's these days provide many different programs, which naturally lead to an increase in elderly users. With the rise in welfare centers and users, research on the subject also grew. As this topic has only recently become an issue, there were not many spatial structure studies considering elderly movement. Therefore, there should be spatial structure research that considers older users space awareness and how it can be managed effectively. The goal of this study is to present basic resources for providing a comfortable senior welfare center for elders. This will be based on quantitative analysis derived from spatial structure research along with special construction characteristics based on the institution's general plan. As a research method, Senior Welfare Center's will be categorized into corridor type, hall type, and hybrid types which then be reproduced into a j-graph. Based on this, special structure characteristics and connection links will be comprehended. Then the connection link will be analyzed based on the space syntax result calculated from each type's integration, connectivity, control value, and intelligibility. The analysis result shows that Senior Welfare Center j-graph's average arrangement is hybrid>corridor>hall types. Those elders lacking awareness need easily perceivable spatial structure's and hall type's would be the best choice to increase their awareness as it has high articulation. However, hall type's would be difficult to construct with the size increase, so hybrid type would be the next logical solution. Space with relatively high articulation will need to be planned in hybrid type's where rest areas can be created within the halls in the Welfare Center in connection to its corridors.