• 제목/요약/키워드: Conversion layer

검색결과 713건 처리시간 0.032초

열 원자층 식각법을 이용한 박막 재료 식각 연구 (Thermal Atomic Layer Etching of the Thin Films: A Review )

  • 조현희;이서현;윤은서;서지은;이진우;한동훈;남서아;한정환
    • 한국분말재료학회지
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    • 제30권1호
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    • pp.53-64
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    • 2023
  • Atomic layer etching (ALE) is a promising technique with atomic-level thickness controllability and high selectivity based on self-limiting surface reactions. ALE is performed by sequential exposure of the film surface to reactants, which results in surface modification and release of volatile species. Among the various ALE methods, thermal ALE involves a thermally activated reaction by employing gas species to release the modified surface without using energetic species, such as accelerated ions and neutral beams. In this study, the basic principle and surface reaction mechanisms of thermal ALE?processes, including "fluorination-ligand exchange reaction", "conversion-etch reaction", "conversion-fluorination reaction", "oxidation-fluorination reaction", "oxidation-ligand exchange reaction", and "oxidation-conversion-fluorination reaction" are described. In addition, the reported thermal ALE processes for the removal of various oxides, metals, and nitrides are presented.

고효율 실리콘 박막태양전지를 위한 신규 수소저감형 비정질실리콘 산화막 버퍼층 개발 (A Novel Hydrogen-reduced P-type Amorphous Silicon Oxide Buffer Layer for Highly Efficient Amorphous Silicon Thin Film Solar Cells)

  • 강동원
    • 전기학회논문지
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    • 제65권10호
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    • pp.1702-1705
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    • 2016
  • We propose a novel hydrogen-reduced p-type amorphous silicon oxide buffer layer between $TiO_2$ antireflection layer and p-type silicon window layer of silicon thin film solar cells. This new buffer layer can protect underlying the $TiO_2$ by suppressing hydrogen plasma, which could be made by excluding $H_2$ gas introduction during plasma deposition. Amorphous silicon oxide thin film solar cells with employing the new buffer layer exhibited better conversion efficiency (8.10 %) compared with the standard cell (7.88 %) without the buffer layer. This new buffer layer can be processed in the same p-chamber with in-situ mode before depositing main p-type amorphous silicon oxide window layer. Comparing with state-of-the-art buffer layer of AZO/p-nc-SiOx:H, our new buffer layer can be processed with cost-effective, much simple process based on similar device performances.

모델변환을 이용한 비즈니스 프로세스 프레임워크 5레이어 모델 자동 구축 방안 (Automatic 5 Layer Model construction of Business Process Framework(BPF) with M2T Transformation)

  • 서채연;김영철
    • 한국인터넷방송통신학회논문지
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    • 제13권1호
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    • pp.63-70
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    • 2013
  • 기존 연구에서는 비즈니스 프로세스 프레임워크에서 정보 추출 및 검색을 위해 비즈니스 프로세스 시스템 질의 언어(BPSQL)를 제안했고, 기존 질의(Query)언어를 그대로 사용하기 위해 비즈니스 프로세스 프레임워크 내 각 레이어 정보들을 테이블화했지만, 레이어 정보의 스펙을 가지고 데이터베이스 구축을 수작업하는 단점이 있다. 이런 문제를 해결하기 위해 메타모델 기반의 모델-텍스트 변환기법을 적용하여, 5 레이어의 비즈니스 프로세스 모델 스키마 기반의 구축 자동 방법을 제안한다. 이를 위한 단계절차는 전체 구조와 데이터베이스 스키마의 메타 모델 정의, 모델 변형 규칙 정의 순이다. 통합정보시스템 설계의 메타 모델링을 통한 각 레이어 스펙정의와 전체 레이어 모델정보 테이블 스키마 스펙을 정의하고, 이 두 스펙 정의를 가지고 모델-텍스트 변환기법을 통해 자동으로 전체 시스템이 구축 된다. 이를 통해서 통합정보시스템 구축이 효율적으로 될 수 있다.

Fabrication High Covered and Uniform Perovskite Absorbing Layer With Alkali Metal Halide for Planar Hetero-junction Perovskite Solar Cells

  • Lee, Hongseuk;Kim, Areum;Kwon, Hyeok-chan;Moon, Jooho
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.427-427
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    • 2016
  • Organic-inorganic hybrid perovskite have attracted significant attention as a new revolutionary light absorber for photovoltaic device due to its remarkable characteristics such as long charge diffusion lengths (100-1000nm), low recombination rate, and high extinction coefficient. Recently, power conversion efficiency of perovskite solar cell is above 20% that is approached to crystalline silicon solar cells. Planar heterojunction perovskite solar cells have simple device structure and can be fabricated low temperature process due to absence of mesoporous scaffold that should be annealed over 500 oC. However, in the planar structure, controlling perovskite film qualities such as crystallinity and coverage is important for high performances. Those controlling methods in one-step deposition have been reported such as adding additive, solvent-engineering, using anti-solvent, for pin-hole free perovskite layer to reduce shunting paths connecting between electron transport layer and hole transport layer. Here, we studied the effect of alkali metal halide to control the fabrication process of perovskite film. During the morphology determination step, alkali metal halides can affect film morphologies by intercalating with PbI2 layer and reducing $CH3NH3PbI3{\cdot}DMF$ intermediate phase resulting in needle shape morphology. As types of alkali metal ions, the diverse grain sizes of film were observed due to different crystallization rate depending on the size of alkali metal ions. The pin-hole free perovskite film was obtained with this method, and the resulting perovskite solar cells showed higher performance as > 10% of power conversion efficiency in large size perovskite solar cell as $5{\times}5cm$. X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and inductively coupled plasma optical emission spectrometry (ICP-OES) are analyzed to prove the mechanism of perovskite film formation with alkali metal halides.

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Improved Photovoltaic Performance of Inverted Polymer Solar Cells using Multi-functional Quantum-dots Monolayer

  • Moon, Byung Joon;Lee, Kyu Seung;Kim, Sang Jin;Shin, Dong Heon;Oh, Yelin;Lee, Sanghyun;Kim, Tae-Wook;Park, Min;Son, Dong Ick;Bae, Sukang
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.400.1-400.1
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    • 2016
  • Interfacial engineering approaches as an efficient strategy for improving the power conversion efficiencies (PCEs) of inverted polymer solar cells (iPSCs) has attracted considerable attention. Recently, polymer surface modifiers, such as poly(ethyleneimine) (PEI) and polyethylenimine ethoxylated (PEIE), were introduced to produce low WF electrodes and were reported to have good electron selectivity for inverted polymer solar cells (iPSCs) without an n-type metal oxide layer. To obtain more efficient solar cells, quantum dots (QDs) are used as effective sensitizers across a broad spectral range from visible to near IR. Additionally, they have the ability to efficiently generate multiple excitons from a single photon via a process called carrier multiplication (CM) or multiple exciton generation (MEG). However, in general, it is very difficult to prepare a bilayer structure with an organic layer and a QD interlayer through a solution process, because most solvents can dissolve and destroy the organic layer and QD interlayer. To present a more effective strategy for surpassing the limitations of traditional methods, we studied and fabricated the highly efficient iPSCs with mono-layered QDs as an effective multi-functional layer, to enhance the quantum yield caused by various effects of QDs monolayer. The mono-layered QDs play the multi-functional role as surface modifier, sub-photosensitizer and electron transport layer. Using this effective approach, we achieve the highest conversion efficiency of ~10.3% resulting from improved interfacial properties and efficient charge transfer, which is verified by various analysis tools.

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Towards Thermally Stable Tandem Organic Solar Cells

  • Yang, Feng;Wang, Sihan;Kim, Ji-Hwan;Kim, Yong-Sang
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.410.2-410.2
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    • 2016
  • Tandem structure is promising in organic solar cells because of its double open-circuit voltage (VOC) and efficient photon energy conversion. In a typical tandem device, the two single sub-cells are stacked and connected by an interconnecting layer. The fabrication of two sub-cells are usually carried out in a glovebox filled with nitrogen or argon gas, which makes it expensive and laborious. We report a glovebox-free fabricated inverted tandem organic solar cells wherein the tandem structure comprises sandwiched interconnecting layer based on p-doped hole-transporting, metal, and electron-transporting materials. Complete fabrication process of the tandem device was performed outside the glove box. The tandem solar cells based on poly(3-hexylthiophene) (P3HT) and (6,6)-phenyl C61-butyric acid methyl ester (PCBM) can realize a high VOC, which sums up of the two sub-cells. The tandem device structure was ITO/ZnO/P3HT:PCBM/PEDOT:PSS/MoO3/Au/Al/ZnO-d/P3HT:PCBM/PEDOT:PSS/Ag. The separate sub-cells were morphologically and thermally stable up to 160 oC. The high stability of the active layer benefits in the fabrication processes of tandem device. The performance of tandem organic solar cells comes from the sub-cells with an 50 nm thick active layer of P3HT:PCBM, achieving an average power conversion efficiency (PCE) of 2.9% (n=12) with short-circuit current density (JSC) = 4.26 mA/cm2, VOC = 1.10 V, and fill factor (FF) = 0.62. Based on these findings, we propose a new method to improve the performance and stability of tandem organic solar cells.

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Effect of MoO3 Thickness on the Electrical, Optical, and structural Properties of MoO3 Graded ITO Anodes for PEDOT:PSS-free Organic Solar Cells

  • Lee, Hye-Min;Kim, Seok-Soon;Chung, Kwun-Bum;Kim, Han-Ki
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.478.1-478.1
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    • 2014
  • We investigated $MoO_3$ graded ITO electrodes for organic solar cells (OSCs) without PEDOT:PSS buffer layer. The effect of $MoO_3$ thickness on the electrical, optical, and structural properties of $MoO_3$ graded ITO anodes prepared by RF/DC magnetron co-sputtering system using $MoO_3$ and ITO targets was investigated. At optimized conditions, we obtained $MoO_3$ graded ITO electrodes with a low sheet resistance of 13 Ohm/square, a high optical transmittance of 83% and a work function of 4.92 eV, comparable to conventional ITO films. Due to the existence of $MoO_3$ on the ITO electrodes, OSCs fabricated on $MoO_3$ graded ITO electrode without buffer layer successfully operated. Although OSCs fabricated on ITO anode without buffer layer showed a low power conversion efficiency of 1.249%, OSCs fabricated on $MoO_3$ graded ITO electrode without buffer layer showed a outstanding cell performance of 2.545%. OSCs fabricated on the $MoO_3$ graded ITO electrodes exhibited a fill factor of 61.275%, a short circuit current of 7.439 mA/cm2, an open circuit voltage of 0.554 V, and a power conversion efficiency of 2.545%. Therefore, $MoO_3$ graded ITO electrodes can be considered a promising transparent electrode for cost efficient and reliable OSCs because it could eliminate the use of acidic PEDOT:PSS buffer layer.

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ZnO를 대체 가능한 새로운 Viologen 유도체가 적용된 역구조 고분자 태양전지 (ZnO-free Inverted Polymer Solar Cells Based on New Viologen Derivative as a Cathode Buffer Layer)

  • 김윤환;김동근;김주현
    • 공업화학
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    • 제27권5호
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    • pp.512-515
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    • 2016
  • 새로운 viologen 유도체인 1,1'-bis(3,4-dihydroxybutyl)-[4,4'-bipyridine]-1,1'-diium bromide (V-Pr-2OH)을 합성하여 PTB7 : $PC_{71}BM$ Blend를 기반으로 하는 inverted polymer solar cells (iPSCs)에 cathode buffer layer로 적용하였다. V-Pr-2OH이 cathode buffer layer로 적용된 PSCs (ITO/V-Pr-2OH/PTB7 : $PC_{71}BM/MoO_3/Ag$)의 power conversion efficiency (PCE)는 7.28%이었다. V-Pr-2OH이 없는 iPSCs (ITO/ZnO/PTB7 : $PC_{71}BM/MoO_3/Ag$)의 PCE (7.41%)에 상응하는 값이다. 그러므로 본 연구에서는 높은 열처리 공정이 필요한 ZnO가 배제된, 즉 높은 온도의 열처리 없이도 제작 가능한 PSC에 대한 가능성을 보여주고 있다.

Flower like Buffer Layer to Improve Efficiency of Submicron-Thick CuIn1-xGaxSe2 Solar Cells

  • Park, Nae-Man;Cho, Dae-Hyung;Lee, Kyu-Seok
    • ETRI Journal
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    • 제37권6호
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    • pp.1129-1134
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    • 2015
  • In this article, a study of a flower like nanostructured CdS buffer layer for improving the performance of a submicron-thick $CuIn_{1-x}Ga_xSe_2$ (CIGS) solar cell (SC) is presented. Both its synthesis and properties are discussed in detail. The surface reflectance of the device is dramatically decreased. SCs with flower like nanostructured CdS buffer layers enhance short-circuit current density, fill factor, and open-circuit voltage. These enhancements contribute to an increase in power conversion efficiency of about 55% on average compared to SCs that don't have a flower like nanostructured CdS buffer layer, despite them both having the same CIGS light absorbing layer.

Spatio-temporal Charge Distribution in Electric Double Layer Capacitors observed by pulsed Electro Acoustic Method

  • Sung, Youl-Moon
    • Transactions on Electrical and Electronic Materials
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    • 제8권4호
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    • pp.182-187
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    • 2007
  • The use of the pulsed electro acoustic (PEA) method allowed us to perform the direct observations of spatio-temporal charge distributions in Electric double layer capacitors (EDLCs) based on polarizable nanoporous carbonaceous electrode. The negative charge density became the maximum, about $205C/m^3$ at the region where was near to collector layer in EDLCs for case $V_{DC}=2.5V$, while the positively charged density became the maximum, about $61.1C/m^3$ at the region where it was located around the cathode layer. The performance of the best sample was found to be better in terms of the charge density (Cs) and specific energy ($E_s$) with a maximum value of ${\sim}8.4F/g$ and 26 Wh/kg. The $C_s$ obtained from the PEA method agreed well with that from the energy conversion method. The PEA measurement used here is a very useful method to quantitively investigates the spatio-temporal charge distribution in EDLCs.