• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.241.1-241.1
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• 2013

최근 고집적화된 금속-산화막 반도체 metal oxide semiconductor (MOS) 소자는 크기가 점점 작아짐에 따라 얇은 산화막과 다양한 High-K 물질과 전극에 대하여 연구되고 있다. 이러한 소자의 열적 안정성과 균일성을 얻기 위해 다양한 열처리 방법이 사용되고 있으며, 일반적인 열처리 방법으로는 conventional thermal annealing (CTA)과 rapid thermal annealing (RTA)이 많이 이용되고 있다. 본 실험에서는 microwave radiation에 의한 열처리로 소자의 특성을 개선시킬 수 있다는 사실을 확인하였고, 상대적으로 $100^{\circ}C$ 이하의 저온에서도 공정이 이루어지기 때문에 열에 의한 소자 특성의 열화를 억제할 수 있으며, 또한 짧은 처리 시간 및 공정의 단순화로 비용을 효과적으로 절감할 수 있다. 본 실험에서는 metal-oxide-silicon (MOS) 구조의 capacitor를 제작한 다음, 기존의 CTA나 RTA 처리가 아닌 microwave radiation을 실시하여 MOS capacitor의 전기적인 특성에 미치는 microwave radiation 효과를 평가하였다. 본 실험은 p-type Si 기판에 wet oxidation으로 300 nm 성장된 SiO2 산화막 위에 titanium/aluminium (Ti/Al) 금속 전극을 E-beam evaporator로 형성하여 capacitance-voltage (C-V) 특성 및 current-voltage (I-V) 특성을 평가하였다. 그 결과, microwave 처리를 통해 flat band voltage와 hysteresis 등이 개선되는 것을 확인하였고, microwave radiation 파워와 처리 시간을 최적화하였다. 또한 일반적인 CTA 열처리 소자와 비교하여 유사한 전기적 특성을 확인하였다. 이와 같은 microwave radiation 처리는 매우 낮은 온도에서 공정이 이루어짐에도 불구하고 시료 내에서의 microwave 에너지의 흡수가 CTA나 RTA 공정에서의 열에너지 흡수보다 훨씬 효율적으로 이루어지며, 결과적으로 산화막과 실리콘 기판의 계면 특성 개선에 매우 효과적이라는 것을 나타낸다. 따라서, microwave radiation 처리는 향후 저온공정을 요구하는 nano-scale MOSFET의 제작 및 저온 공정이 필수적인 display 소자 제작의 해결책으로 기대한다.

• Journal of Environmental Science International
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• v.17 no.5
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• pp.493-500
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• 2008

This paper describes the adsorption/desorpton efficiency of a modified activated carbon by irradiated microwave to treat toluene. By employing microwave energy, the regeneration time was considerably shortened compared with conventional thermal heating regeneration. New adsorbent called ACB (Activated Carbon-Bentonite) was prepared from powder activated carbon with mixing bentonite as a binder. Specific surface area, average pore size and total pore volume of ACB were calculated from the nitrogen adsorption/desorption isotherm. The surface of ACB was characterized with scanning electron microscope(SEM). The results showed that the specific surface area, total pore volume, average pore size of ABC was not influenced by regenerating cycle with microwave irradiation. Toluene was adsorbed onto ACB which desorbed by MW irradiation. Absorption capacity of ACB was 0.117 $g_{toluene}/g_{ACB}$. Desorption efficiency of toluene increased as higher microwave output was applied.

• Carbon letters
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• v.3 no.4
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• pp.205-209
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• 2002

In the reaction of gas-solid phases, the microwave energy plays a role as a catalyst, because it causes friction between adjacent molecules and enables an unique characteristics of interior heating of the materials. When the dipole gases are adsorbed inside of the pore of carbon materials, the gases are decomposed by the microwave energy and reacted with the carbon atoms. Using this principle, we could make the activated carbon from coconut shell within 20 minute, and this residence time for activation is about 1/16 of rotary kiln. The BET surface area of activated carbon made by microwave is about $1,100m^2/g$ similar to conventional method of rotary kiln. In this study, the power of microwave generator was 400~1000W, and the gas for activation was steam mainly.

• 한국신재생에너지학회:학술대회논문집
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• 2011.11a
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• pp.108.2-108.2
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• 2011

This presentation shows energy-efficiency of microwave-accelerated esterification of free fatty acid with a heterogeneous catalyst by net microwave power measurement. In the reaction condition of 5wt% sulfated zirconia and 1:20 molar ratio of oil to methanol at $60^{\circ}C$ and atmospheric pressure, more than 90% conversion of the esterification was achieved in 20 minutes by microwave heating, while it took about 130 minutes by conventional heating. Electric energy consumption for the microwave heating in this accelerated esterification was only 67% of estimated minimum heat energy demand because of significantly reduced reaction time.

• Food Science of Animal Resources
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• v.25 no.2
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• pp.149-155
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• 2005

This study was conducted to investigate effects of cooking method on physicochemical characteristics and qualities of hamburger patties processed with ground pork/beef meat $(20\%\;fat)$. Hamburger patties were cooked by electric griddling, fan frying, microwave, conventional cooking, and charbroiling. Cooking rates were affected by cooking methods, had the highest in patties cooked in microwave oven. Hamburger patties by microwaving were also higher moisture content, but were lower protein and fat content compared to other methods. Electric griddling and microwaving were higher cooking yield, lower diameter changes in patties than other methods, but pan frying showed the opposite effects. Higher values of hardness and brittleness in pan frying than those of other methods were showed, but pan frying had the highest overall acceptability in sensory evaluations.

• Food Science and Preservation
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• v.4 no.1
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• pp.17-25
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• 1997

The effects of microwave treatment on the perservation of foods, such as a seaweed soup and sea stoned radish shreds, were studied. Microwave treatment of microbial cell suspensions revealed that viable cells decreased dramatically when heated to 6$0^{\circ}C$. However, it was unlikely that microwave treatment to 60 is enough to decrease the viable cell counts efficiently in a seaweed soup and radish shreds. It was thought that microwave heating to at least 7$0^{\circ}C$ as a final temperature was an important factor to reduce microbial cell counts in foods. When foods were heated to 7$0^{\circ}C$ with a repetitive 15 sec "on" followed by 30 sec "off", no big differences were observed in viable counts during storage at 2$0^{\circ}C$ for 3 days, as compared to those treated with a full power. The microwave treatment with three stages was designed to solve problems associated with variations depending on food volumes and difficulties of heat diffusion in a solid food to be irradiated with a microwave oven. The three stage method was found to have a similar efficiency in the reduction of viable cell counts in foods to microwave treatment at a full power and to conventional methods, such as water bath heating or boiling for 3 min with a gas range.in with a gas range.

• Journal of the Korean Ceramic Society
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• v.32 no.3
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• pp.331-340
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• 1995

Microwave (Hybrid) Heating (MHH) was used to oxidize and sinter Al-Al2O3 powder mixture. For 25 v/o Al specimen and 35 v/o Al specimen, the total processing to produce low-shrinkage reaction bonded alumina was carried out within 1 hour even though conventional furnace process took more than 10 hours. Compared with conventional fast firing process, MHH process increased more than 40% oxidation at the same temperature, and these high oxidation rates were thought to be caused by the surface ohmic current on Al particles.

• Proceedings of the KIPE Conference
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• 2000.07a
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• pp.90-94
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• 2000

A conventional power supply to drive a microwave oven has ferro-resonant transformer and high voltage capacitor(HVC). Though it is simple transformer is bulky heavy and has low-efficiency. To improve this defect a high frequency switching inverter-type power supply has been investigated an developed. in recent years. But because of it's additional circuit and devices inverter-type power supply is more expensive than conventional one. In this paper The design procedure of a novel HVC embedded high frequency transformer is proposed for down-sizing and cost reduction. Also transformer equivalent circuit model is derived by FEM analysis and parameter measurements. And the operation of proposed HVC embedded transformer is verified by simulation and experimental results.

• KIEE International Transaction on Electrical Machinery and Energy Conversion Systems
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• v.3B no.1
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• pp.16-22
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• 2003

This paper presents an application of an impedance boundary condition to 3D vector finite element analysis of a multi-port cylidrical microwave cavity using Snell's law. Computing memory benefits and computing time reduction are obtained from this method compared with the conventional finite element method(FEM). To verify the method, a high permittivity scatterer in free space is analyzed and compared with the results of conventional (FEM). In addition, this method has been analyzed several types of cavities, including water load, to demonstrate the validity and accuracy of the program.

• Proceedings of the KIEE Conference
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• 2001.04a
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• pp.293-296
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• 2001

A conventional power supply to drive a microwave oven has ferro-resonant transformer and high voltage capacitor(HVC). Though it is simple, transformer is bulky, heavy and has low-efficiency. To improve this defect, a high frequency inverter type power supply has been investigated and developed in recent years. But, because of additional control circuit and switching device, inverter-type power supply is more expensive than conventional one. In this study, The design procedure of a novel HVC embedded high frequency transformer is proposed for down-sizing and cost reduction of Inverter-type power supply. Also, equivalent circuit mode] is derived by FEM analysis and impedance measurements. And the operation of proposed HVC embedded transformer is verified by simulations and experimental results.