• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.239-240
• /
• 2012

With advancements in semiconductor device technologies, manufacturing processes are getting more complex and it became more difficult to maintain tighter process control. As the number of processing step increased for fabricating complex chip structure, potential fault inducing factors are prevail and their allowable margins are continuously reduced. Therefore, one of the key to success in semiconductor manufacturing is highly accurate and fast fault detection and classification at each stage to reduce any undesired variation and identify the cause of the fault. Sensors in the equipment are used to monitor the state of the process. The idea is that whenever there is a fault in the process, it appears as some variation in the output from any of the sensors monitoring the process. These sensors may refer to information about pressure, RF power or gas flow and etc. in the equipment. By relating the data from these sensors to the process condition, any abnormality in the process can be identified, but it still holds some degree of certainty. Our hypothesis in this research is to capture the features of equipment condition data from healthy process library. We can use the health data as a reference for upcoming processes and this is made possible by mathematically modeling of the acquired data. In this work we demonstrate the use of recurrent neural network (RNN) has been used. RNN is a dynamic neural network that makes the output as a function of previous inputs. In our case we have etch equipment tool set data, consisting of 22 parameters and 9 runs. This data was first synchronized using the Dynamic Time Warping (DTW) algorithm. The synchronized data from the sensors in the form of time series is then provided to RNN which trains and restructures itself according to the input and then predicts a value, one step ahead in time, which depends on the past values of data. Eight runs of process data were used to train the network, while in order to check the performance of the network, one run was used as a test input. Next, a mean squared error based probability generating function was used to assign probability of fault in each parameter by comparing the predicted and actual values of the data. In the future we will make use of the Bayesian Networks to classify the detected faults. Bayesian Networks use directed acyclic graphs that relate different parameters through their conditional dependencies in order to find inference among them. The relationships between parameters from the data will be used to generate the structure of Bayesian Network and then posterior probability of different faults will be calculated using inference algorithms.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.16 no.8
• /
• pp.5550-5558
• /
• 2015

Recently, fuel cell with high energy efficiency and low CO2 emission is energetically interconnected with power system. Especially, FCGS(Fuel Cell Generation System) which usually operates at high temperature, is being developed and installed in the form of large scale system. However, it is reported that power system disturbances related to surge, harmonic and EMI have caused several problems such as malfunction of protection device and damage of control device in the large scale FCGS. In order to solve these problems, this paper presents a modeling of operation characteristics of FCGS by PSCAD/EMTDC, ETAP, P-SIM software. And also, this paper proposes countermeasure algorithms to prevent power system disturbances. From the simulation results, it is confirmed that the proposed algorithm is useful method for the stable operation of large scale FCGS.

• Journal of KIISE:Information Networking
• /
• v.33 no.4
• /
• pp.289-298
• /
• 2006

Algorithms for application-level multicast often use trees to deliver data from the source to the multiple receivers. With the tree structure, the throughput experienced by the descendant nodes will be determined by the performance of the slowest ancestor node. Furthermore, the failure of an ancestor node results in the suspension of the session of all the descendant nodes. This paper focuses on the transmission of data using multiple virtual forwarders, and suggests a scheme to overcome the drawbacks of the plain tree-based application layer multicast schemes. The proposed scheme elects multiple forwarders other than the parent node of the delivery tree. A receiver receives data from the multiple forwarders as well as the parent node and it can increase the amount of receiving data per time unit. The multiple forwarder helps a receiver to reduce the impact of the failure of an ancestor node. The proposed scheme suggests the forwarder selection algorithm to avoid the receipt of duplicate packets. We implemented the proposed scheme using MACEDON which provides a development environment for application layer multicast. We compared the proposed scheme with Bullet by applying the implementation in PlanetLab which is a global overlay network. The evaluation results show that the proposed scheme enhanced the throughput by 20 % and reduced the control overhead over 90 % compared with Bullet.

• The Journal of Korean Institute of Communications and Information Sciences
• /
• v.28 no.11C
• /
• pp.1077-1087
• /
• 2003

In this paper, we proposed an architecture of a cryptosystem with various operating modes for the network security and implemented in hardware using the ASIC library. For configuring a cryptosystem, the standard block ciphers such as AES, SEED and 3DES were included. And the implemented cryptosystem can encrypt and decrypt the data in real time through the wired/wireless network with the minimum latency time (minimum 64 clocks, maximum 256 clocks). It can support CTR mode which is widely used recently as well as the conventional block cipher modes such as ECB, CBC and OFB, and operates in the multi-bit mode (64, 128, 192, and 256 bits). The implemented hardware has the expansion possibility for the other algorithms according to the network security protocol such as IPsec and the included ciphering blocks can be operated simultaneously. The self-ciphering mode and various ciphering mode can be supported by the hardware sharing and the programmable data-path. The global operation is programmed by the serial communication port and the operation is decided by the control signals decoded from the instruction by the host. The designed hardware using VHDL was synthesized with Hynix 0.25$\mu\textrm{m}$ CMOS technology and it used the about 100,000 gates. Also we could assure the stable operation in the timing simulation over 100㎒ using NC-verilog.

• Journal of KIISE:Databases
• /
• v.29 no.1
• /
• pp.34-43
• /
• 2002

Since traditional static metadata set like Dublin Core has static metadata attributes about bibliography information, integration of metadata for various metadata, problems about standard and extension of metadata must be considered for applying it to new environment. Specially, as event-driven metadata write method included the notion of e-commerce come out for interoperability in digital libraries, traditional metadata management which cannot distinguish between different kinds of update operations to new extension of metadata set occurs unsuitable waiting of update operation. So, improvement is needed about it. In this paper, we show whether alleviative transaction consistency can be applied to digital library or not. Also it would divide newer metadata into static metadata attribute connected in read operation within user read-only transaction and dynamic metadata attribute in update operation within dynamic(e-commerce) update transactions. We propose newer metadata management algorithm considered in classfication of metadata attributes and dynamic update transaction. Using two version for minimal maintenance cost and ARU(Appended Refresh Unit) for dynamic update transaction, to minimize conflict between read and write operations shows fast response time and high recency ratio. As a result of the performance evaluation, we show our algorithm is proved to be better than other algorithms in newer metadata environments.

• Journal of IKEEE
• /
• v.5 no.1 s.8
• /
• pp.100-110
• /
• 2001

In this paper, we investigated several buffer management schemes for the design of shared-memory type ATM switches, which can enhance the utilization of switch resources and can support quality-of-service (QoS) functionalities. Our results show that dynamic threshold (DT) scheme demonstrate a moderate degree of robustness close to pushout(PO) scheme, which is known to be impractical in the perspective of hardware implementation, under various traffic conditions such as traffic loads, burstyness of incoming traffic, and load non-uniformity across output ports. Next, we considered buffer management strategies to support QoS functions, which utilize parameter values obtained via connection admission control (CAC) procedures to set tile threshold values. Through simulations, we showed that the buffer management schemes adopted behave well in the sense that they can protect regulated traffic from unregulated cell traffic in allocating buffer space. In particular, it was observed that dynamic partitioning is superior in terms of QoS support than virtual partitioning.

• Journal of IKEEE
• /
• v.24 no.1
• /
• pp.33-39
• /
• 2020

In this paper, we propose the design technique of the vehicle's load weight measuring system using tire pressure, which is one of the physical elements of tires. The proposed technique consists of four processes: noise correction by load and vibration, gas flow correction, data mixer and weight conversion. Noise correction by load and vibration eliminates noise that increases the tire's internal pressure due to external shocks and vibrations produced by the vehicle while it is in motion. In the gas flow correction process, the noise of the internal pressure of the tire is increased due to the temperature rise of the ground with respect to the data obtained through the noise correction process due to the load and vibration. In the data mixer process, the load and pressure on the tolerances the empty, median and the full load are classified according to the change in pressure of the tire that is delivered perpendicular to the tire in the event of cargo. In the weight conversion process, weight is expressed by weight through weight conversion algorithms using noise correction results by load and vibration and gas flow correction. The weight conversion algorithm calculates the weight conversion factor, which is the slope of the linear function with respect to the load and pressure change, and converts the weight. In order to evaluate the accuracy of the loading weight measurement system of the vehicle using the tire pneumatic system technique proposed in this paper, we propose the design technique of the vehicle's load weight measuring system using tire pressure, which is one of the physical elements of tires.. Noise correction results by load and vibration and gas flow data correction results showed reliable results. In addition, repeated weight precision test showed better weight accuracy than the standard value of 90% of domestic companies.

• Journal of Korea Water Resources Association
• /
• v.36 no.2
• /
• pp.195-209
• /
• 2003

Spatial-Stochastic Neural Networks Model(SSNNM) is used to estimate long-term streamflow in the parallel reservoir groups. SSNNM employs two kinds of backpropagation algorithms, based on LMBP and BFGS-QNBP separately. SSNNM has three layers, input, hidden, and output layer, in the structure and network configuration consists of 8-8-2 nodes one by one. Nodes in input layer are composed of streamflow, precipitation, pan evaporation, and temperature with the monthly average values collected from Andong and Imha reservoir. But some temporal differences apparently exist in their time series. For the SSNNM training procedure, the training sets in input layer are generated by the PARMA(1,1) stochastic model and they covers insufficient time series. Generated data series are used to train SSNNM and the model parameters, optimal connection weights and biases, are estimated during training procedure. They are applied to evaluate model validation using observed data sets. In this study, the new approaches give outstanding results by the comparison of statistical analysis and hydrographs in the model validation. SSNNM will help to manage and control water distribution and give basic data to develop long-term coupled operation system in parallel reservoir groups of the Upper Nakdong River.

• Korean Journal of Clinical Pharmacy
• /
• v.12 no.1
• /
• pp.29-38
• /
• 2002

Hypertension is an important public health problem because it increases the risk of stroke, angina, myocardial infarction, heart failure, and end-stage renal disease. If it is not actively treated, morbidity and mortality increase with hypertension-induced complications and quality of life decreases. This study was to evaluate the use of antihypertensive drugs and blood pressure changes and to compare algorithms chosen (or the 1st and 2nd line therapy of hypertension based on the JNC VI recommendations. The medical charts of 222 patients with essential hypertension at St. Vincent's Hospital in Suwon from January 1997 to January 2000 were reviewed retrospectively. Data collection and analysis included baseline BP underlying diseases and complications, administered antihypertensives, BP changes, changes of antihypertensive regimen, and adverse effects with treatments. As results, the higher BP the patients had, the more frequent they had target organ damages and clinical cardiovascular diseases. Mean duration to reduce blood pressure less than 140/90 mmHg was 8 weeks in $85.3\%$ of the patients. The rate of control in BP was $82.4\%$ at 6 months. The major antihypertensive drugs prescribed were calcium channel blockers $(61.8\%)$ , ACE inhibitors $(19.1\%),\;\beta-blockers\;(13.7\%)$ and diuretics $(5.3\%)$ as the 1st-line monotherapy. The methods of treatment used as the 1st-line therapy were monotherapy$(59\%)$ and combination therapy $(41\%)$. Blood pressure change was significantly greater for combination therapy than monotherapy$(-26.2\pm21.4\;vs.\;-18.56\pm16.7$ mmHg for systolic blood pressure; P<0.003, $-16.9\pm13.2\;vs.\;-9.2\pm12.8$ mmHg for diastolic blood pressure; p<0.001). When blood pressure was not completely controlled with the first antihypertensive selected, the 2nd line therapy had 4 options: addition of 2nd agent from different class; $66.2\%$, substitution with another drug, $21.9\%$ increase dose $11.9\%$ continue first regimen $27.9\%$ Calcium channel blockers were the most frequently prescribed agents. This was not comparable to the JNC VI guideline which recommended diuretics and $\beta-blockers$ for the 1st-line therapy. Most of patients achieved the goal BP and maintained it until 6 months, but the remaining patients should be controlled more tightly to improve their BP with combination of life style modification, patient education, and pharmacotherapy.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.17 no.1
• /
• pp.684-692
• /
• 2016

In the manufacturing process of the LQFP/TQFP (Low-profile Quad Flat Package/Thin Quad Flat Package), the requirement of a 3 dimensional inspection is increasing rapidly and a 3D inspection of the shape of a chip has become an important report of quality control. This study developed a 3 dimensional measurement system based on PMP (Phase Measuring Profilometry) for an inspection of the LQFP/TQFP chip and image processing algorithms. The defects of the LQFP/TQFP chip were classified according to the dimensions. The 2 dimensional optical system was designed by the dorm illumination to achieve constant light distribution, In the 3 dimensional optical system, PZT was used for moving 90 degree in phase. The problem of 2 ambiguity was solved from the measured moir? pattern using the ambiguity elimination algorithm that finds the point of ambiguity and refines the phase value. The proposed 3D measurement system was evaluated experimentally.