• Title/Summary/Keyword: Conductive atomic force microscopy (C-AFM)

Search Result 6, Processing Time 0.026 seconds

Advanced atomic force microscopy-based techniques for nanoscale characterization of switching devices for emerging neuromorphic applications

  • Young-Min Kim;Jihye Lee;Deok-Jin Jeon;Si-Eun Oh;Jong-Souk Yeo
    • Applied Microscopy
    • /
    • v.51
    • /
    • pp.7.1-7.9
    • /
    • 2021
  • Neuromorphic systems require integrated structures with high-density memory and selector devices to avoid interference and recognition errors between neighboring memory cells. To improve the performance of a selector device, it is important to understand the characteristics of the switching process. As changes by switching cycle occur at local nanoscale areas, a high-resolution analysis method is needed to investigate this phenomenon. Atomic force microscopy (AFM) is used to analyze the local changes because it offers nanoscale detection with high-resolution capabilities. This review introduces various types of AFM such as conductive AFM (C-AFM), electrostatic force microscopy (EFM), and Kelvin probe force microscopy (KPFM) to study switching behaviors.

The study about phase phase change material at nano-scale using c-AFM method (c-AFM 기술을 이용한 나노급 상변화 소자 특성 평가에 대한 연구)

  • Hong, Sung-Hoon;Lee, Heon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2010.06a
    • /
    • pp.57-57
    • /
    • 2010
  • In this study, nano-sized phase change materials were evaluated using nanoimprint lithography and c-AFM technique. The 200nm in diameter phase change nano-pillar device of GeSbTe, AgInSbTe, InSe, GeTe, GeSb were successfully fabricated using nanoimprint lithography. And the electrical properties of the phase change nano-pillar device were evaluated using c-AFM with pulse generator and voltage source.

  • PDF

Alternative Optimization Techniques for Shallow Trench Isolation and Replacement Gate Technology Chemical Mechanical Planarization

  • Stefanova, Y.;Cilek, F.;Endres, R.;Schwalke, U.
    • Transactions on Electrical and Electronic Materials
    • /
    • v.8 no.1
    • /
    • pp.1-4
    • /
    • 2007
  • This paper discusses two approaches for pre-polishing optimization of oxide chemical mechanical planarization (CMP) that can be used as alternatives to the commonly applied dummy structure insertion in shallow trench isolation (STI) and replacement gate (RG) technologies: reverse nitride masking (RNM) and oxide etchback (OEB). Wafers have been produced using each optimization technique and CMP tests have been performed. Dishing, erosion and global planarity have been investigated with the help of conductive atomic force microscopy (C-AFM). The results demonstrate the effectiveness of both techniques which yield excellent planarity without dummy structure related performance degradation due to capacitive coupling.

Local surface potential and current-voltage behaviors of $Cu(In,Ga)Se_2$ thin-films with different Ga/(In+Ga) content (Ga/(In+Ga) 함량비에 따른 $Cu(In,Ga)Se_2$ 박막의 국소적 영역에서의 표면 퍼텐셜과 전류-전압 특성 연구)

  • Kim, G.Y.;Jeong, A.R.;Jo, W.;Jo, H.J.;Kim, D.H.;Sung, S.J.;Hwang, D.K.;Kang, J.K.;Lee, D.H.
    • 한국태양에너지학회:학술대회논문집
    • /
    • 2012.03a
    • /
    • pp.149-152
    • /
    • 2012
  • $Cu(In,Ga)Se_2$ (CIGS) is one of the most promising photovoltaic materials because of large conversion efficiency which has been achieved with an optimum Ga/(In+Ga) composition in $CuIn_{1-x}Ga_xSe_2$ (X~0.3). The Ga/(In+Ga) content is important to determine band gap, solar cell performances and carrier behaviors at grain boundary (GB). Effects of Ga/(In+Ga) content on physical properties of the CIGS layers have been extensively studied. In previous research, it is reported that GB is not recombination center of CIGS thin-film solar cells. However, GB recombination and electron-hole pair behavior studies are still lacking, especially influence of with different X on CIGS thin-films. We obtained the GB surface potential, local current and I-V characteristic of different X (00.7 while X~0.3 showed higher potential than 100 mV on GBs. Higher potential on GBs appears positive band bending. It can decrease recombination loss because of carrier separation. Therefore, we suggest recombination and electron-hole behaviors at GBs depending on composition of X.

  • PDF

Structural and Electrical Properties of RaRuO$_3$ Thin Film for Electrode of Ferroelectric Capacitors (강유전체 캐패시터 전극으로의 BaRuO$_3$박막의 구조적 및 전기적 특성)

  • 박봉태;구상모;문병무
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.12 no.1
    • /
    • pp.56-61
    • /
    • 1999
  • Highly conductive oxide films of BaRuO$_3$ have been grown heteroepitaxially on (100) LaAlO$_3$ single crystalline substrates by using pulsed laser deposition. The films are c-axis oriented with an in-plane epitaxial relationship of <010><100>BaRuO$_3$ // <110>LaAlO$_3$. Atomic force microscopy (AFM) observation shows that they consist of a fine-arranged network of grains and have a mosaic microstructure. Generally temperature-dependent resistivity shows the transition from metallic curve to semiconductor-metallic twofold curve by the deposition conditions for Ru oxide based materials like SrRuO$_3$, CaRuO$_3$, BaRuO$_3$, etc.. This twofold curve comes from the structural similarity of Ru oxide based materials including BaRuO$_3$. We find that the distance of Ru-Ru bonding in the unit cell of BaRuO$_3$ as well as the grain boundary scattering could be the two important causes of these interesting conductive properties.

  • PDF

Replacement of ITO for efficient organic polymer solar cells (ITO를 대체한 고효율 유기박막 태양전지)

  • Kim, Jae Ryoung;Park, Jin Uk;Lee, Bohyun;Lee, Pyo;Lee, Jong-Cheol;Moon, Sang-Jin
    • 한국신재생에너지학회:학술대회논문집
    • /
    • 2010.06a
    • /
    • pp.69.1-69.1
    • /
    • 2010
  • We have fabricated organic photovoltaic cells (OPVs) with highly conductive poly 3,4-ethylenedioxythiophene : poly styrenesulfonate (PEDOT:PSS) layer as an anode without using transparent conducting oxide (TCO), which has been modified by adding some organic solvents like sorbitol (So), dimethyl sulfoxide (DMSO), N-methyl-pyrrolidone (NMP), dimethylformamide (DMF), and ethylene glycol (EG). The conductivity of PEDOT:PSS film modified with each additive was enhanced by three orders of magnitude. According to atomic force microscopy (AFM) study, conductivity enhancement might be related to better connections between the conducting PEDOT chains. TCO-free solar cells with modified PEDOT:PSS layer and the active layer composed of poly(3-hexylthiophene) (P3HT) and phenyl [6,6] C61 butyric acid methyl ester (PCBM) exhibited a comparable device performance to indium tin oxide (ITO) based organic solar cells. The power conversion efficiency (PCE) of the organic solar cells incorporating DMSO, So + DMSO and EG modified PEDOT:PSS layer reached 3.51, 3.64 and 3.77%, respectively, under illumination of AM 1.5 (100mW/$cm^2$).

  • PDF