• Title/Summary/Keyword: Coherence time

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Plasma Etching Process based on Real-time Monitoring of Radical Density and Substrate Temperature

  • Takeda, K.;Fukunaga, Y.;Tsutsumi, T.;Ishikawa, K.;Kondo, H.;Sekine, M.;Hori, M.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.93-93
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    • 2016
  • Large scale integrated circuits (LSIs) has been improved by the shrinkage of the circuit dimensions. The smaller chip sizes and increase in circuit density require the miniaturization of the line-width and space between metal interconnections. Therefore, an extreme precise control of the critical dimension and pattern profile is necessary to fabricate next generation nano-electronics devices. The pattern profile control of plasma etching with an accuracy of sub-nanometer must be achieved. To realize the etching process which achieves the problem, understanding of the etching mechanism and precise control of the process based on the real-time monitoring of internal plasma parameters such as etching species density, surface temperature of substrate, etc. are very important. For instance, it is known that the etched profiles of organic low dielectric (low-k) films are sensitive to the substrate temperature and density ratio of H and N atoms in the H2/N2 plasma [1]. In this study, we introduced a feedback control of actual substrate temperature and radical density ratio monitored in real time. And then the dependence of etch rates and profiles of organic films have been evaluated based on the substrate temperatures. In this study, organic low-k films were etched by a dual frequency capacitively coupled plasma employing the mixture of H2/N2 gases. A 100-MHz power was supplied to an upper electrode for plasma generation. The Si substrate was electrostatically chucked to a lower electrode biased by supplying a 2-MHz power. To investigate the effects of H and N radical on the etching profile of organic low-k films, absolute H and N atom densities were measured by vacuum ultraviolet absorption spectroscopy [2]. Moreover, using the optical fiber-type low-coherence interferometer [3], substrate temperature has been measured in real time during etching process. From the measurement results, the temperature raised rapidly just after plasma ignition and was gradually saturated. The temporal change of substrate temperature is a crucial issue to control of surface reactions of reactive species. Therefore, by the intervals of on-off of the plasma discharge, the substrate temperature was maintained within ${\pm}1.5^{\circ}C$ from the set value. As a result, the temperatures were kept within $3^{\circ}C$ during the etching process. Then, we etched organic films with line-and-space pattern using this system. The cross-sections of the organic films etched for 50 s with the substrate temperatures at $20^{\circ}C$ and $100^{\circ}C$ were observed by SEM. From the results, they were different in the sidewall profile. It suggests that the reactions on the sidewalls changed according to the substrate temperature. The precise substrate temperature control method with real-time temperature monitoring and intermittent plasma generation was suggested to contribute on realization of fine pattern etching.

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Research for Time Variation of $C_{20}$ Using GRACE and SLR Measurements (GRACE 및 SLR 자료를 이용한 $C_{20}$의 시계열 변화 연구)

  • Huang, He;Yun, Hong-Sic;Lee, Dong-Ha
    • Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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    • v.26 no.5
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    • pp.513-518
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    • 2008
  • The research of global-scale mass redistribution and it changed by Earth gravity filed variation observations, including Earth's oblateness $J_2$(also called low degree spherical harmonic coefficient $C_{20}$), is in continuous progress. Recently, the comparative analysis of geodetic observation SLR can be made by the development of GRACE and other time-variable gravity measurements. In this study, $C_{20}$ time series changes in the value of comparative analysis was got by GRACE monthly Gravity filed model (CSR RL04) for the period April 2002 to May 2008. And comparative analysis the harmonic coefficients of $C_{20}$ was obtained from SLR observations. Signal analysis for two time-series data was made by wavelet transform, CWT(continuous wavelet transform), XWT(cross wavelet transform) and WTC(wavelet coherence) methods. The results indicate that GRACE and SLR values for $C_{20}$ had both decreasing trend, as well as SLR data represent the annual frequencies, and GRACE was semiannual variations. In addition, the results of GRACE and SLR had a strong correlation with the XWT and WTC in an annual cycle.

Uniform Design Development for School Advertisement - Focused on Ewha Womans University - (학교 홍보를 위한 유니폼 디자인 개발- 이화여자대학교를 중심으로 -)

  • Lee, Min-Jung;Kim, Hyun-Jung;Lee, Un-Young;Lee, In-Seong
    • The Research Journal of the Costume Culture
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    • v.17 no.5
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    • pp.780-790
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    • 2009
  • The study analyzed the characteristic of school uniform, focusing on Ewha Woman's University of Seoul, reflected present trend as well as characteristic and symbol of school and developed uniform design for advertising Ewha Woman's University. The purpose of this study is to propose uniform that can be discriminated from that of other university and increase advertisement effect with mental superiority and pride in university by trying uniform design development, which can provide school and student with satisfaction, and reflecting present trend as well as characteristic and symbol of school. The study is meaningful because it can be basic materials for various uniform designs, connecting function, symbol and trend to uniform development. The uniform for school advertisement was manufactured in a way to reflect characteristic and image of school, escape from fixed idea preferring traditional design in the past and reflect trend. It is expected that the uniform created with symbolic image of school will give high advertisement effect and improve school image by providing student with sense of coherence and discriminated feeling in various events and the meeting with other school students. Moreover, the student wearing the uniform with splendid design will feel mental superiority and have pride in school at the same time. In conclusion, the uniform reflecting trend is proper for the uniform of advertisement helper representing school as long as it can reflect characteristic and image of school. It will be also helpful for developing wider design and more splendid uniform because the study can create the motive to apply trend to other uniform that does not adopt trend.

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Study on Liquid Crystal Displays Utilizing Kerr effect (액정의 Kerr 효과를 이용한 액정표시소자 연구)

  • Kim, Min-Su;Kang, Byeong-Gyun;Jung, Jun-Ho;Ha, Kyung-Su;Song, Eun-Gyoung;Yoon, Suk-In;Kim, Mi-Young;Lee, Myong-Hoon;Lee, Seung-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.295-296
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    • 2009
  • There are various application of liquid crystal materials to devices, especially, blue phase liquid crystal (BPLC) and nano-structured liquid crystal mixture have been studied recently because BPs existing temperature range has been expanded by polymer-stabilization and liquid crystal has been confined in room which has certain coherence length so that their particular characters, such as fast response time and optically isotropic state at no electric field, could apply to advanced liquid crystal display devices. However, there is an crucial problem which is high operating voltage from low Kerr constant and limited electric field utilization using in-plain electric field. In this paper, we will analyze cell structure in the way of using electric field and show effective electric field utilization to reduce operating voltage.

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Grouping-based 3D Animation Data Compression Method (군집화 기반 3차원 애니메이션 데이터 압축 기법)

  • Choi, Young-Jin;Yeo, Du-Hwan;Klm, Hyung-Seok;Kim, Jee-In
    • 한국HCI학회:학술대회논문집
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    • 2008.02a
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    • pp.461-468
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    • 2008
  • The needs for visualizing interactive multimedia contents on portable devices with realistic three dimensional shapes are increasing as new ubiquitous services are coming into reality. Especially in digital fashion applications with virtual reality technologies for clothes of various forms on different avatars, it is required to provide very high quality visual models over mobile networks. Due to limited network bandwidths and memory spaces of portable devices, it is very difficult to transmit visual data effectively and render realistic appearance of three dimensional images. In this thesis, we propose a compression method to reduce three dimensional data for digital fashion applications. The three dimensional model includes animation of avatar which require very large amounts of data over time. Our proposed method utilizes temporal and spatial coherence of animation data, to reduce the amount. By grouping vertices from three dimensional models, the entire animation is represented by a movement path of a few representative vertices. The existing three dimensional model compression approaches can get benefits from the proposed method by reducing the compression sources through grouping. We expect that the proposed method to be applied not only to three dimensional garment animations but also to generic deformable objects.

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An Analysis of the Vibration Characteristics through the Human Body (인체 내부에서의 진동 전달특성 분석)

  • 전종원;진용옥
    • The Journal of the Acoustical Society of Korea
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    • v.19 no.7
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    • pp.59-65
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    • 2000
  • This paper describes the analysis of vibration characteristics through the human body as the research for voice therapy and diagnosis. The oscillation signal is not external forces but the self-voice to be pronounced the vowels ('a', 'e', 'i', 'o', 'u'). The experiment system consists of microphones, accelerometers and amplifiers. The input data are stored by the computer. At the same time, the voice is stored by the microphone and the vibration signal of the human body is stored by accelerometer. The 63 points are appointed in head, neck, trunk of human body. The positions and number of times are changeable by the purpose. The analysis parameters are amplitude, phase, fundamental. frequency, formant and the correlation of vibration signal and voice is measured by coherence function. The results show that the vibration signals have characteristic vibration in the positions of human body.

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A Data Scheduling Method for Minimizing User Access Time in Uniform Wireless Broadcasting (균등 무선 방송에서 사용자 접근 시간 최소화를 위한 데이터 스케쥴링 기법)

  • Jeong, Yeon-Don;Kim, Myeong-Ho
    • Journal of KIISE:Software and Applications
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    • v.26 no.9
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    • pp.1085-1094
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    • 1999
  • 이동 분산 환경에서는 무선 데이타 전송 기법을 통하여 사용자들에게 다양한 정보들을 전달하게 된다. 본 논문은 균등 무선 데이타 방송 환경에서, 빠른 시간에 방송데이타를 접근할 수 있는 방법에 대하여 기술한다. 이를 위하여 무선 방송 데이타의 스케쥴링 문제를 정의하고, 어떤 질의가 접근하는 데이타들의 응집 정도를 나타내는 `질의 거리(Query Distance: QD)'라는 측정 기준을 제시한다. 제안한 질의 거리를 사용하여 각 질의의 우선 순위에 따라 해당 질의가 접근하는 데이타 집합을 방송 스케쥴에 추가하면서 스케쥴을 구성하는 데이타 스케쥴링 기법을 제시한다. 데이타 집합의 스케쥴 구성 과정에서 우선 순위가 높은 질의의 질의 거리를 최소화하면서 낮은 우선 순위 질의들의 질의 거리를 줄이는 스케쥴 확장 규칙들을 사용한다. 예를 이용하여 제안하는 방법에 대하여 설명한 후, 실험을 통해 제안한 방법의 성능을 평가한다.Abstract In mobile distributed systems the data on the air can be accessed by a lot of clients. This paper describes the way clients access the broadcast data in short latency in uniform wireless broadcasting environment. We define the problem of wireless data scheduling and propose a measure, named Query Distance(QD), which represents the coherence degree of data set accessed by a query. By using the measure, we give a data scheduling method that constructs the broadcast schedule by appending each query's data set in greedy way. When constructing the schedule, we use schedule expansion rules that reduce the QD's of lower-frequency queries while minimizing the QD's of the higher-frequency ones. With the use of examples we illustrate the mechanism of the proposed method and we test the performance of our method.

Geographical Study on the Boundary Dispute of Ieodo Sea between Korea and China (한.중 간 이어도해(海) 영유권(領有權)분쟁에 관한 지리학적 고찰)

  • Song, Sung-Dae
    • Journal of the Korean Geographical Society
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    • v.45 no.3
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    • pp.414-429
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    • 2010
  • With regard to Ieodo, South Korea and China argue that Ieodo belongs to their territory respectively, considering its history. However, both parties haven't suggested concrete evidence to support their argument. Even if they suggest corroborative facts, they are distorted or exaggerated like myth. Therefore, it is important by what side primitive title and effective control are exercised in settling the problem of Ieodo. The issue was to suggest coherence logic by finding concrete geographical facts in the East China Seat the time of applying a method of boundary decision followed by the marine act, namely principle of median line and principle of equidistance. China has argued that China should occupy most of continental shelf in the East China Sea on the basis of silt, a deposit of the continent. However, the base of the East China Sea is a part of Eurasian Plate. In addition, a geographical contribution to formation of the continent shelf by the Korean Peninsula is equal to the Chinese Continent. Ieodo is 'Island of mythos' in China, but is 'Island of legend' suggested by concrete facts in South Korea. Therefore, its cultural titile and primitive title are belonged to South Korea, before its historical title.

MASK: Multi-frequency AGN Survey with the KVN

  • Jung, Taehyun;Zhao, Guangyao;Kim, Minsun;Sohn, Bong Won;Byun, Do-Young;Wagner, Jan;Wajima, Kiyoaki;Cea, Christian Saez de;Kwon, Woojin;Lee, Jeong Ae;Cho, Ilje;Jeong, Dawoon;Kim, Dongjin;Ryu, Dongsoo
    • The Bulletin of The Korean Astronomical Society
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    • v.41 no.2
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    • pp.32.3-32.3
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    • 2016
  • Available VLBI sources at high frequencies (e.g. >22GHz) are very limited - mainly due to atmospheric fluctuations that degrade coherence time and a power-law energy distribution of particles in case of AGNs. However, simultaneous multi-frequency VLBI receiving system of the Korean VLBI Network (KVN) and its powerful VLBI phase calibration technique offer benefits in finding more weak sources at millimeter wavelengths. Based on this aspect, multi-frequency AGN survey with the KVN (MASK) project, which aims to densify an existing a VLBI catalog of extragalactic radio sources at 22/43/86/129GHz is proposed as a KVN legacy program. We selected 1220 sources of AGNs that include known VLBI sources and new fringe-detected sources using the KVN at K-band (22GHz). Among them, 138 sources were observed as pilot experiments at 22/43/86/129GHz simultaneously and excellent VLBI detection results are achieved. Therefore, we expect that MASK will open a new era in VLBI science at millimeter wavelengths by providing unprecedented number of available sources in the Universe.

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INTERFEROMETRIC MONITORING OF GAMMA–RAY BRIGHT ACTIVE GALACTIC NUCLEI II: FREQUENCY PHASE TRANSFER

  • ALGABA, JUAN-CARLOS;ZHAO, GUANG-YAO;LEE, SANG-SUNG;BYUN, DO-YOUNG;KANG, SIN-CHEOL;KIM, DAE-WON;KIM, JAE-YOUNG;KIM, JEONG-SOOK;KIM, SOON-WOOK;KINO, MOTOKI;MIYAZAKI, ATSUSHI;PARK, JONG-HO;TRIPPE, SASCHA;WAJIMA, KIYOAKI
    • Journal of The Korean Astronomical Society
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    • v.48 no.5
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    • pp.237-255
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    • 2015
  • The Interferometric Monitoring of Gamma–ray Bright Active galactic nuclei (iMOGABA) program provides not only simultaneous multifrequency observations of bright gamma–ray detected active galactic nuclei (AGN), but also covers the highest Very Large Baseline Interferometry (VLBI) frequencies ever being systematically monitored, up to 129 GHz. However, observation and imaging of weak sources at the highest observed frequencies is very challenging. In the second paper in this series, we evaluate the viability of the frequency phase transfer technique to iMOGABA in order to obtain larger coherence time at the higher frequencies of this program (86 and 129 GHz) and image additional sources that were not detected using standard techniques. We find that this method is applicable to the iMOGABA program even under non–optimal weather conditions.