• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.31-32
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• 2005

Ge 농도가 30%인 SiGe 위에 Ni-Pd 합금을 이용한 새로운 Ni-Germanosilicide의 방법을 제안하여 열안정성 향상에 대해 연구하였다. 새롭게 제안한 Ni-Pd 합금을 이용하여 3 가지 구조 (Ni-Pd, Ni-Pd/TiN, Ni-Pd/Co/TiN) 중 Cobalt 다층구조를 사용한 구조 (Ni-Pd/Co/TiN)가 면저항이 가장 낮고 안정한 silicide 특성을 갖는 것을 나타냈으며, 고온열처리 $700^{\circ}C$, 30분에서도 낮고 안정한 면저항 특성을 유지시켜 열안정성을 개선하였다.

• Journal of the Korean Magnetics Society
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• v.22 no.1
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• pp.1-5
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• 2012

We investigate the exchange bias effect in $[Pd/Co]_5$ superlattice structures which are representative system of the perpendicular magnetic anisotropy. We fabricate Si/$[Pd/Co]_5$/FeMn structures, and study the exchange bias variations by measuring hysteresis loop variations with thickness of FeMn layer. In order to optimize the perpendicular magnetic anisotropy, we fix the thickness of Pd with 1.1 nm and investigate the dependence of the perpendicular magnetic anisotropy on the ferromagnetic Co layer thickness. As results, we find that the biggest coercivity in 0.3 nm of Co layer without FeMn layer. The biggest exchange bias field is found for 0.3 nm of Co layer when we change the Co thickness with fixed FeMn thickness. When we vary thickness of FeMn layer, the biggest coercivity is found for 5 nm of FeMn layer. No exchange bias is observed when the FeMn layer is thinner than 3 nm, and the exchange bias field increases with FeMn layer thickness continuously up to 15 nm.

• Journal of the Microelectronics and Packaging Society
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• v.10 no.3
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• pp.1-7
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• 2003

The crystallized stable cobalt silicide$(CoSi_2)$ films were prepared on $poly-Si/SiO_2/Si$substrates for the application of inkjet printing head as a heating element with omega shape. The structural images and temperature resistance coefficient were investigated. The value of temperature resistance coefficient of the heating element was found to be about $0.0014/^{\circ}C$. The maximum power of the heating element was 2 W at the applied voltage of 2 V, 10 kHz in frequency and $1{\mu}s$ in pulse width. From the investigation of fatigue property according to the repeated applied voltages, there was no drastic changes in the resistances of heating element under the condition of $10^8$ pulsed cycles at below 15 V biased voltage. In contrast, the resistance of heating element was greatly increased at $10^6$ pulsed cycles when the heating element was operated at 17 V.