• Title/Summary/Keyword: Coating Sputtering

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Characteristics of Rhenium-Iridium coating thin film on tungsten carbide by multi-target sputter

  • Cheon, Min-Woo;Kim, Tae-Gon;Park, Yong-Pil
    • Journal of Ceramic Processing Research
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    • v.13 no.spc2
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    • pp.328-331
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    • 2012
  • With the recent development of super-precision optical instruments, camera modules for devices, such as portable terminals and digital camera lenses, are increasingly being used. Since an optical lens is usually produced by high-temperature compression molding methods using tungsten carbide (WC) alloy molding cores, it is necessary to develop and study technology for super-precision processing of molding cores and coatings for the core surface. In this study, Rhenium-Iridium (Re-Ir) thin films were deposited onto a WC molding core using a sputtering system. The Re-Ir thin films were prepared by a multi-target sputtering technique, using iridium, rhenium, and chromium as the sources. Argon and nitrogen were introduced through an inlet into the chamber to be the plasma and reactive gases. The Re-Ir thin films were prepared with targets having a composition ratio of 30 : 70, and the Re-Ir thin films were formed with a 240 nm thickness. Re-Ir thin films on WC molding core were analyzed by scanning electron microscope (SEM), atomic force microscope (AFM), and Ra (the arithmetical average surface roughness). Also, adhesion strength and coefficient friction of Re-Ir thin films were examined. The Re-Ir coating technique has received intensive attention in the coating processes field because of promising features, such as hardness, high elasticity, abrasion resistance and mechanical stability that result from the process. Re-Ir coating technique has also been applied widely in industrial and biomedical applications. In this study, WC molding core was manufactured, using high-performance precision machining and the effects of the Re-Ir coating on the surface roughness.

Recent progress of Ergonomics Studying in CRTs Design and Manufacturing

  • Wu, Mingli;Duan, Cheng
    • 한국정보디스플레이학회:학술대회논문집
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    • 2004.08a
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    • pp.450-452
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    • 2004
  • This paper analyzes some important achievements in Ergonomics field in CRT industry. After introducing principal regulatory requirements for CRTs, including ISO 9241 and TCO standards, the paper indicates some theoretical research in ergonomics of the display devices, such as new contrast parameter for appraising the display devices and effects of environment on visual performance at the ergonomic. Then, as the pivot of this paper, some practical progress, in the ergonomics field in CRT manufacturing , are described, such as vacuum sputtering process for advanced CRTs, new developed wet process for getting the multi-coating layers on surface of the panel.

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Plastic Substrate for Flexible Display

  • Kim, In-Sun;Hwang, Hee-Nam;Choi, Jae-Moon;Yeom, Eun-Hee;Park, Yong-Ho
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.995-997
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    • 2005
  • A plastic substrate for flexible display is developed. The gas barrier and optical properties of the substrate is improved through depositing silicon oxide/nitride layer and coating polymer layer on plastic film by sputtering process and wet coating process. Roll to roll processes will guarantee the productivity in the whole production process of the plastic substrate.

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Characteristics of Large Area ITO/PET Fabricated by Vacuum Web Coater (진공 웹코터로 제작된 대면적 ITO/PET의 특성 연구)

  • Kim, Ji-Hwan;Park, Dong-Hee;Kim, Jong-Bin;Byun, Dong-Jin;Choi, Won-Kook
    • Korean Journal of Materials Research
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    • v.17 no.10
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    • pp.516-520
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    • 2007
  • Indium tin oxide, which is used as transparent conducting layer in flexible device, is deposited on PET film by a magnetron sputtering in 300 mm wide roll-to-roll process (vacuum web coating). Sheet resistance, specific resistance and transmittance is differed by sputtering parameters such as working pressures, oxygen partial pressure, and thickness of ITO layer. ITO layer is deposited about 90 nm at roll speed of 0.24 m/min and its sputtering power is 3 kW. From the XRD spectrum deposited ITO layer is verified as amorphous. Under working pressure varied from $3{\times}10^{-4}\;Torr$ to $2{\times}10^{-3}\;Torr$, sheet resistance is lowest at the working pressure of $1{\times}10^{-3}\;Torr$ and its value is from $110\;{\Omega}/{\square}$ to $260\;{\Omega}/{\square}$ at the thickness of 90 nm. Oxygen partial pressure also varies sheet resistance and is optimized at the regime from 0.2% ($1.8{\times}10^{-6}\;Torr$) to 0.6% ($6{\times}10^{-6}\;Torr$). In this oxygen partial pressure sheet resistance is lower than $150\;{\Omega}/{\square}$. As ITO layer thickness increases, sheet resistance decreases down to $21\;{\Omega}/{\square}$ and specific resistance is about $7.5{\times}10.4{\Omega}cm$ in 340 nm thickness ITO layer. Transmittance is measured at the wavelength of 550 nm and is about 90% for 180 nm thickness ITO/PET.

초고진공중에 있어서 Tribo-Coating 막의 윤활특성

  • 김형자;가등강가;전태옥;박홍식
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1992.06a
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    • pp.71-76
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    • 1992
  • 초고진공중에 있어서의 기계, 기기의 설계에 있어서 마찰의 제어는 가장 중요한 과제의 하나이다. 지금까지 그 마찰면의 윤활을 위해서는 고체 윤활제로서 Au, Ag 등 $MoS_2$ 피막이 많이 쓰여져 왔다. 또한 그것들의 피막 형성법으로서 Plasma Coating, Sputtering 및 Ion-Plating 등의 여러가지 피막형성법이 개발되어 왔다. 그러나 어느 경우도 형성된 $수\mum$의 피막의 마모에 의한 유한의 수명이 존재하고, 마찰게수의 면에서도 아직 충분하다고 말 할수 없는 것이 현상이다. 이것에 대하여 필자들은 우주에 있어서 사용을 목적으로 새로운 피막 형성법으로서 Tribo-Coating법을 개발하여 그 유효성을 나타내어 왔다. 본 연구에서는 초고진공중에 있어서 Tribo-Coating법에 의한 In막의 윤활 특성에 영향을 미치는 지배적 제인자의 역활을 밝히고져한다.

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A Study on the Friction Characteristics of Tappet by Low Friction Coating (저마찰 박막코팅 적용 타펫 부품의 마찰 특성에 관한 연구)

  • Seo, Joon-Ho;Lim, Dae-Soon;Na, Byung-Chul
    • Tribology and Lubricants
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    • v.25 no.4
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    • pp.265-269
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    • 2009
  • The wear of the contact in the tappet accounts for the greatest portion of entire friction loss of an engine, leading to the occurrence of abnormal wear. The coated specimens for earn-tappet wear test were producted by using PVD-Sputtering coating method. It examined the friction characteristics occurring between the earn and the tappet by using the dedicated wear tester and found that the friction torque value was reduced through comparison testing with the existing part when the low friction coating was applied. So application of the low friction coating to actual vehicles will reduce the fuel economy and occurrence of noise-vibration.

CrN/AlSiN multilayer coatings의 고온안정성 및 특성에 관한 연구

  • Kim, Yeong-Su;Kim, Gwang-Seok;Kim, Seong-Min;Heo, Yong-Gang;Lee, Sang-Yul
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2008.11a
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    • pp.47-47
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    • 2008
  • Cr and AlSi (Si=20 and 66 at.%) target들을 이용하여 Closed-field unbalanced magnetron sputtering (CFUBMS)으로 증착된 주기($\Lambda$)가 2.3 nm에서 8.0nm인 CrN/AlSiN multilayer coatings의 crystal structure, 화학적 조성, 및 기계적 특성을 glow discharge optical emission spectroscopy (GDOES), X-ray diffractometry (XRD), X-ray photoelectron spectroscopy (XPS) and nano-indenter 등의 분석장비를 이용하여 분석하였다. 고온안정성을 시험하기 위하여 $800^{\circ}C$$1000^{\circ}C$ 공기중 에서 30분 열처리하였다. CrN/AlSiN multilayer coatings의 고온안정성은 Si조성이 증가함에 따라 향상되었다. Si이 18.2 at.%함유된 coating이 가장 우수한 고온안정성을 갖고 있다.

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Al2O3 Coating on Transparent Polycarbonate Substrates for the Hard-coating Application (투명 폴리카보네이트 보호코팅을 위한 산화알루미늄 박막)

  • Kim, Hun;Nam, Kyoung-Hee;Jang, Dong-Su;Lee, Jung-Joong
    • Journal of Surface Science and Engineering
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    • v.40 no.4
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    • pp.159-164
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    • 2007
  • Transparent aluminum oxide films were deposited on polycarbonate (PC) substrates by inductively coupled plasma (ICP) assisted reactive sputtering. the oxygen flow rate was regulated by controlling the target voltage with a proportional integrate derivative controller. The PC substrate was treated with plasma prior to the deposition in order to the enhance the adhesive strength of the $Al_2O_3$ film. The characteristics of hardness, structure, density, transmittance, deposition rate, surface roughness and residual stress were investigated to estimate the possibility for the hard coating.

Real Time Analysis of Friction/Wear Characteristics of Metal Coatings with a Tribo-tester Installed in an SEM (SEM 내부에 설치된 트라이보 시험기를 통한 금속 코팅의 실시간 마찰/마모 특성 분석)

  • Kim, Hae-Jin;Kim, Dae-Eun;Kim, Chang-Lae
    • Tribology and Lubricants
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    • v.34 no.6
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    • pp.318-324
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    • 2018
  • This study aims to visualize the friction and wear behaviors of metal coatings in real time. The main mechanism of wear is identified by observing all the processes in which wear occurs. The friction coefficients of the moments are monitored to confirm the relationship between the friction and wear characteristics of the coating. Thin Ag coatings, which are several hundred nanometers in thickness, are prepared by depositing Ag atoms on silicon substrates through a sputtering method. A pin-on-disk-type tribo-tester is installed inside a scanning electron microscope (SEM) to evaluate the friction and wear characteristics of the Ag coating. A fine diamond pin is brought into contact with the Ag coating surface, and a load of 20 mN is applied. The contact pressure is calculated to be approximately 15 GPa. The moments of wear caused by the sliding motion are visualized, and the changes in the friction characteristics according to each step of wear generation are monitored. The Ag coating can be confirmed to exhibit a wear phenomenon by gradually peeling off the surface of the coating on observing the friction and wear characteristics of the coating in real time inside the SEM. This can be explained by a typical plowing-type wear mechanism.