• 대한전자공학회논문지
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• 제23권2호
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• pp.243-248
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• 1986

The impurities in As and Ga sources and the contamination of the GaAs substrate prior to growing of MBE GaAs epitaxial layer have been investigated using RHEED, AES and RGA methods. The as source was contaminated by H2O, CO, CO2 and AsO, and the Ga source was contaminated by H2, H2O, CO and CO2. These contaminants could easily be removed by prebaking the source. On the other hand, GaAs substrate was contaminated principally carbon and oxygen. The oxygen could easily be removed by heating the substrate above 480\ulcorner, and the carbon could also be reduced by sputtering the substrate with 1ke V Ar+. The chemically etched substrate surface prior to growing the layer was rough, but it was made to be smooth and clean by heating it above 530 \ulcorner.

• 방사성폐기물학회지
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• 제21권4호
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• pp.531-541
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• 2023

The Wolsong Nuclear Power Plant (NPP) operates an on-site spent fuel dry storage facility using concrete silo and vertical module systems. This facility must be safely maintained until the spent nuclear fuel (SNF) is transferred to an external interim or final disposal facility, aligning with national policies on spent nuclear fuel management. The concrete silo system, operational since 1992, requires an aging management review for its long-term operation and potential license renewal. This involves comparing aging management programs of different dry storage systems against the U.S. NRC's guidelines for license renewal of spent nuclear fuel dry storage facilities and the U.S. DOE's program for long-term storage. Based on this comparison, a specific aging management program for the silo system was developed. Furthermore, the facility's current practices-periodic checks of surface dose rate, contamination, weld integrity, leakage, surface and groundwater, cumulative dose, and concrete structure-were evaluated for their suitability in managing the silo system's aging. Based on this review, several improvements were proposed.

• 한국환경보건학회지
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• 제38권3호
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• pp.213-222
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• 2012

Objectives: This study was undertaken in order to evaluate by work space zoning and structure the concentrations of biological contaminants in the indoor air of domestic office buildings. Methods: Air samples were collected in the office spaces of 15 office buildings in Seoul from June 28 to July 28, 2011. Prior to the sampling, each office was classified into 'open-plan office', 'cellular office' and 'mixed office' according to the work space zoning. To evaluate the biological contamination of indoor air, total suspended bacteria (TSB), Gram positive bacteria (GPB), Staphylococcus aureus (S.A), Methicillin-resistant Staphylococcus aureus (MRSA), Gram negative bacteria (GNB) and fungi were investigated. During the sampling, temperature, relative humidity and carbon dioxide ($CO_2$) were measured. Results: The TSB concentrations ($GM{\pm}GSD$) were $452({\pm}1.3)cfu/m^3$ in open-plan offices, $366({\pm}1.3)cfu/m^3$ in cellular offices and $287({\pm}1.5)cfu/m^3$ in mixed offices, and there were significant differences between the three groups (p<0.05). The highest concentrations ($GM{\pm}GSD$) of fungi were found in the indoor air of cellular offices $128({\pm}1.0)cfu/m^3$, which was at least three times higher than the concentrations in mixed offices $43({\pm}1.0)cfu/m^3$ (p<0.05). Conclusions: Microbiological contamination in the indoor air of office buildings by work space structure was the highest with the open-plan office layout which includes no high walls or doors separating the occupants.

• 한국지하수토양환경학회지:지하수토양환경
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• 제22권1호
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• pp.1-12
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• 2017

Nitrate ($NO_3^-$), a common surface water and groundwater pollutant, poses a serious environmental problem in regions with intensive agricultural activities and dense population. It is thus important to identify the source of nitrate contamination to better manage water quality. Due to the distinct isotope compositions of nitrate among different origins, the dual isotope analysis (${\delta}^{15}N$ and ${\delta}^{18}O$) of nitrate has been widely applied to track contamination sources. This paper provided the underlying backgrounds in the isotope analysis of nitrate, which included typical ranges of ${\delta}^{15}N$ and ${\delta}^{18}O$ from various nitrate sources, isotope fractionation, the analytical methods used to concentrate nitrate from samples, and the potential limitations of the dual isotope analysis along with the resolutions. To enhance the applicability of the dual isotope analysis as well as increase the ability to interpret field data, this paper also introduced several case studies. Furthermore, other environmental tracers including ${\delta}^{11}B$ and $Cl^-/Br^-$ ratios were discussed to accompany the dual isotope analysis for better assignment of contamination sources even when microbial transformation of nitrate and/or mixing between contaminant plumes occur.

• 한국환경과학회지
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• 제14권1호
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• pp.23-32
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• 2005

Surface sediments (0$\~$4 cm) were sampled at 40 stations from Ulsan Bay and its adjacent areas of Korea, to evaluate the contamination by sewage-derived organic matters using fecal sterols. Some sterols were quantified by gas chromatography coupled to mass spectrometry (GC/MS). Total concentrations of eight sterols (co­prostanol, cholesterol, cholestanol, epicholestanol, epicoprostanol, ${\beta}-sitosterol,$ brassicasterol, and stigmasterol) in the sediments from Ulsan Bay and its vicinity varied from 929 to 23,444 ng/g dry weight. The most predom­inant sterols were cholesterol and coprostanol, accounting for $33\~72{\%}$ of total sterols. The concentration of coprostanol known as the indicator of human feces ranged from 141 to 8,257 ng/g dry weight. In particular, the coprostanol concentrations in the sediments from Jansaengpo Harbor and Taehwa River exceeded the value of 1,000 ng/g dry weight, suggesting that these areas could be considered as the hot-spot zones by municipal sewage contamination. Some molecular indices and multivariate data analysis were used to assess the origin of these sterols in the sediments. Results showed that the major routes of sewage contamination in Ulsan Bay and its vicinity were the input through Jansaengpo Harbor and Taehwa River.

• Advances in environmental research
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• 제2권2호
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• pp.155-166
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• 2013

A preliminary investigation to establish the status of contamination of trace metals in the Western coast of Ghana was conducted prior to the commercial production of crude oil in the area. The study revealed the presence of heavy metals such as Pb (4.00-79.64 mg/kg), As (8.81-236 mg/kg), Cu (12.86-108.06 mg/kg), V (28.07-953.32 mg/kg), Zn (7.08-264.25 mg/kg), Cr (101.69-1366.62 mg/kg), Ni (42.41-451.43 mg/kg), Mn (16.77-1890.45mg/kg), Br (7.66-142.78 mg/kg), Ti (542.03-19960 mg/kg) and Fe (7472.88-97120 mg/kg) at six sites sampled along the coast. With the exception of Ti and Fe which showed no variation in metal concentration, the rest of the metals varied significantly among the sampled locations. Potential ecological risk of metals particularly of Co, As and Br which exhibited extreme enrichment of the sediments indicates considerable metal pollution in the studied areas. The degree of contamination is of particular concern especially to benthic biota that inhabit this environment for survival.

• 설비공학논문집
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• 제21권5호
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• pp.273-281
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• 2009

In recent semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems represents about 45% of the total air conditioning load required to maintain a clean room environment. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery from the exhaust air is therefore useful for reducing the outdoor air conditioning load for a clean room. In the present work, an energy-efficient outdoor air conditioning system was proposed to reduce the outdoor air conditioning load by utilizing an air washer to recover heat from the exhaust air. The proposed outdoor air conditioning system consisted mainly of a preheating coil, an air washer, two stage cooling coils, a reheating coil, a humidifier and two heat recovery cooling coils inserted into the air washer and connected to a wet scrubber. It was shown from the lab-scale experiment with outdoor air flow of $1,000\;m^3/h$ that the proposed system was more energy-efficient for the summer and winter operations than an outdoor air conditioning system with a simple air washer.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.114-114
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• 2008

반도체 device의 성능을 향상시키기 위하여 패턴은 더욱 더 고 집적화 되고 배선 또한 다층배선 구조를 가지게 되었으며 요구되는 선폭 또한 더욱 미세화 되어 CMP 공정이 도입되게 되었다. 이러한 CMP 공정에 사용되는 소모품으로는 크게 세 가지의 중요한 부분으로 나눌 수 있다. 그것은 slurry와 pad, conditioner이다. 그중에 pad conditioning 공정은 CMP 공정시 pad의 마모에 따라 감소하는 removal rate(RR)값을 회복시키기 위한 공정으로 마모된 pad의 표면을 활성화 시켜주는 중요한 공정이다. 하지만 pad conditioning 공정을 장시간 진행하게 되면 conditioner 표면에 오염물이 발생하게 되며, 오염물로 인하여 wafer표면에 scratch 및 defect을 발생시키는 원인이 될 수 있다. 이러한 문제점을 보완하기 위하여 conditioner의 표면을 변화시켜 공정중의 오염이 발생하지 않도록 하는 것이 중요하다. 본 논문에서는 oxide CMP 실험을 통하여 conditioner표면에 오염물이 발생함을 확인하였으며 energy dispersive spectroscopy(EDS) 분석을 통하여 주오염물의 성분이 oxide slurry중 silica임을 확인하였다. Conditioner의 표면을 소수성으로 만들기 위하여 self assembled monolayer(SAM) 방법을 이용하여 표면에 코팅을 하였으며, 소수성 박막이 코팅된 conditioner와 코팅되지 않은 conditioner의 비교 실험을 통하여 오염 정도를 비교하였다.

• 한국환경과학회지
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• 제6권6호
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• pp.679-688
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• 1997

In order to analyze the water quality variation of surface water around the Sudokwon landfill site, seasonal variations of water temperature, pH, DO. HOD, COD, SS, NH3-N, NO2-N, and NO3-N were examined at 10 sites from January to December, 1996. It was found that the estimates of COD, DO. SS, and $NH_3-N$ were Increased compared with the results of environmental Impact assessment carried out In 1988. Higher estimates of COD, DO, and SS were due to Industrial and agricultural wastewater, and the Increase of NH3-N at Jangdo reservoir strate was due to the leachate from the landfill. In particular, the estimate of 55 was found to be increased by the soil wash from the landfill during the heavy rainy days.

• 환경영향평가
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• 제17권6호
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• pp.321-333
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• 2008

Considering risks and artificial enrichments of metals in the soils of the study area, the study aims to analyze geology, grain size and geochemistry. Geology is mainly composed of gneisses and phyllites of metamorphic rocks, sandstones, siltstones, shales, tuffs of sedimentary ones and granites and andesites of igneous ones in the area. In the area, mean contents of metals are not meaningful in accordance with petrogenesis. The soil textures of the area are of S, lS and sL of sandy soil, L, scL, cL of loam and C, zC and sC of clayey soil. Mean contents of Ni, Cr, Co and Cu are meaningfully high in loam and clayey soil relative to sandy soil, whereas Ni, Zn, Cd contents are higher in clayey soil than in loam. Those differences imply the metallic contents are dependent to grain size. Based on the metal contents in the soils of the study area, Cu and Zn in loams and Pb in sandy soils are corresponded to soil contamination warning standards, and As showing 75mg/kg of maximum content in loams is assigned to soil contamination countermeasure standards, respectively. Artificial enrichment factor minimized wall rock and grain size relations is over 1 in Cr, Ni and Cu, but the factor is below 1 in average of other metals.