• 제목/요약/키워드: Co-Cr-Ta박막

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Two-Step 방식을 이용한 수직자기 기록용 Co-Cr-Ta 박막의 제작 (Preparation of Co-Cr-Ta Thin Films using Two step Method For Perpendicular Magnetic recording Layer)

  • 박원효;공석현;제우성;최형욱;박용서;김경환
    • 한국전기전자재료학회논문지
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    • 제17권7호
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    • pp.793-796
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    • 2004
  • In order to improve c-axis crystalline orientation and high perpendicular coercivity of deposited ${Co}_77{Cr}_20{Ta}_3$perpendicualr recording layer, Two step method was investigated using a Facing Targets Sputtering System(FTS). The ${\Delta\theta}_50$ of ${Co}_77{Cr}_20{Ta}_3$recording layer deposited on seedlayer prepared at Room Temperature was as low as $5^\circ$, while that of the recording layer without seedlayer was about 11$^{\circ}$. The Two-Step method using ${Co}_77{Cr}_20{Ta}_3$seedlayer prepared at Room Temperature was shown to be very effective in controling the c-axis orientation of ${Co}_77{Cr}_20{Ta}_3$ recording layer with thin thickness.

하지층기판온도에 따른 CoCrTa/Si 이층박막의 특성변화 (Characteristics variation of CoCrTa/Si double layer thin film on variation of underlayer substrate temperature)

  • 박원효;김용진;금민종;가출현;손인환;최형욱;김경환
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.77-80
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    • 2001
  • Crystallographic and magnetic characteristics of CoCr-based magnetic thin film for perpendicular magnetic recording media were influenced on preparing conditions. In these, there is that substrate temperature was parameter that increases perpendicular coercivity of CoCrTa magnetic layer using recording layer. While preparation of CoCr-based doublelayer, by optimizing substrate temperature, we expect to increase perpendicular anisotropy of CoCr magnetic layer and prepare ferromagnetic recording layer with a good quality by epitaxial growth. CoCrTa/Si doublelayer showed a good dispersion angle of c-axis orientation $\Delta$$\theta$$_{50}$ caused by inserting amorphous Si underlayer which prepared at underlayer substrate temperature 250C. Perpendicular coercivity was constant, in-plane coercivity was controlled a low value about 2000e. This result implied that Si underlayer could restrain growth of initial layer of CoCrTa thin film, which showed bad magnetic properties effectively without participating magnetization patterns of magnetic layer. In case of CoCrTa/Si that prepared with ultra thin underlayer, crystalline orientation of CoCrTa was improved rather underlayer thickness 1nm, it was expected that amorphous Si layer played a important role in not only underlayer but also seed layer.t also seed layer.r.

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Co-Cr-(Ta)박막의 자기특성 (The magnetic characteristics of Co-Cr-(Ta) films)

  • Kim, K-H;Jang, K-U;Kim, J-H;S Nakagawa;M Naoe
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1996년도 추계학술대회 논문집
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    • pp.242-244
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    • 1996
  • The effects of $Co_{67}$C $r_{33}$ underlayer on the crystallographec and magnetic characteristics of the Co-Cr-Ta layer deposited on the underlayer was investigated. The diffraction intensity $I_{p(002)}$ of Co-Cr-Ta layers on the $Co_{67}$C $r_{33}$ layer was stronger than that of single layer and Co-Cr-Ta/Ti double layer. Therefore, the crystallinity of Co-Cr-Ta layer was improved by the $Co_{67}$C $r_{33}$ underlayers rather than Ti ones. However, the coercivity $H_{c}$ of Co-Cr-Ta layers deposited on $Co_{67}$C $r_{33}$ underlayer was as low as 250 Oe even at substrate temperature of 22$0^{\circ}C$. This $H_{c}$ decrease seems to be attributed to the effect of the $Co_{67}$C $r_{33}$ underlayer as well as interval time between deposition of the underlayer and the Co-Cr-Ta layer.yer.layer.yer.

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Sputter-textured Mo 박막이 CoCrTa/Cr 자기기록매체의 자기적 성질에 미치는 영향 (The Effect of Sputter-textured Mo Thin Film on Magnetic properties of CoCrTa/Cr Magnetic Recording Media)

  • 조성묵;남인탁
    • 산업기술연구
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    • 제21권A호
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    • pp.221-229
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    • 2001
  • The effect of Mo underlayer on the magnetic properties of CoCrTa/Cr films deposited on glass substrates were investigated. The coercivity increased and the coercivity squareness decreased by introducing Mo underlayer. The coercivity increase was attributed to the increase of in-plane c-axis orientation and magnetic isolation of Co grains deposited on Cr/Mo underlayer. The decrease of coercivity squarenesses seemed to be caused by the increase of magnetic isolation. The increase of magnetic isolation of Co grains was attributed to the diffusion of Mo atoms into grain boundaries of Co films and the physical isolation of Co grains. The coercivity of CoCrTa/Cr/Mo showed maximum values at Mo thickness of $400{\AA}$. The appearance of the maximum coercivity at that thickness was attributed to the development of strong $Co(10{\bar{1}}0)$ and $Co(10{\bar{1}}1)$ preferred orientation.

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$CoCr_{16.2}Pt_{10.8}Ta_4$ 합금박막의 Ti 우선증착에 따른 자기적 특성과 자구형상변화 (Magnetic properties and the shapes of magnetic domain for $CoCr_{16.2}Pt_{10.8}Ta_4$ alloy films with the prior deposition of Ti layer)

  • 이인선;김동원
    • 한국결정성장학회지
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    • 제10권1호
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    • pp.17-22
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    • 2000
  • 수직보자력이 크고 CoCrPt에 비하여 noise 저감 효과가 큰 것으로 알려진 CoCrPtTa계 합금박막의 수직이방성을 더욱 개선하기 위해 Ti를 우선 증착하였다. 본 연구에서는 Ti 두께 변화에 따른 비교적 높은 수직보자력치를 보였던 $CoCr_{16.2}Pt_{10.8}Ta_4$Ti/glass 시편에서 자기적 특성과 자구형상의 변화를 살펴보았다. 또한 VSM(Vibrating Sample Magnetometer)을 이용하여 M-H loop를 측정하였으며 자구형상은 MFM(Magnetic Force Microscopy)로 관찰하였다. 육방정 Ti가 하지층으로서 우선증착되면 bare glass 직접 증착되는 경우보다 CoCrPtTa 자성층의 수직이방성에 현저한 향상을 가져왔으며 Ti의 두께가 두꺼울수록 c-축 배향성도 개선되었다. MFM 결과에 의하면 Ti두레가 20 nm에서 90 nm로 증가함에 따라 자구형상이 연속적인 stripe type에서 mass type으로 분절된 형태로 변하였다. 이는 Ti의 증착이 비자성 Cr 편석 거동에 영향을 미쳐 자화반전시 인접 columnar grain의 자화벡터들간의 상호교환작용을 억제하는 자기적 분리 효과에 기여했음을 의미한다. 아울러 이와 같은 거동은 Ti가 CoCr계 자성층의 수직이방성을 개선하는데 있어서 형상자기이방성적인 측면에서의 기여가 현저함을 의미하기도 한다.

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