• 한국생산제조학회지
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• 제22권4호
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• pp.747-754
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• 2013

This study introduces a recently designed desktop-sized NC turning system and its components. This machine is designed for the ultra-precise turning of parts with a diameter of 0.5-20 mm with minimum space usage for the machine. This study aims to achieve submicron-level accuracy of movements and good rigidity of the machine for precision machining using the desktop-sized machine. The components such as the main machine structure, air bearing servo spindle, and XZ stage with needle roller guides are designed, and the designed machine is built with a PC-based CNC controller. Its static and dynamic stiffness performances and positioning resolutions are tested. Through machining tests with single-crystal diamond tools, a form error less than $0.8{\mu}m$ and surface roughness (Ra) of $0.03{\mu}m$ for workpieces are obtained.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.434-437
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• 2005

Chemical Mechanical Polishing (CMP) has become an essential step in the overall semiconductor wafer fabrication technology. In general, CMP is a surface planarization method in which a silicon wafer is rotated against a polishing pad in the presence of slurry under pressure. The polishing pad, generally a polyurethane-based material, consists of polymeric foam cell walls, which aid in removal of the reaction products at the wafer interface. It has been found that the material removal rate of any polishing pad decreases due to the so-called 'pad glazing' after several wafer lots have been processed. Therefore, the pad restoration and conditioning has become essential in CMP processes to keep the urethane polishing pad at the proper friction coefficient and to allow effective slurry transport to the wafer surface. Diamond pad conditioner employs a single layer of brazed bonded diamond crystals. Due to the corrosive nature of the polishing slurry required in low pH metal CMP such as copper, it is essential to minimize the possibility of chemical interaction between very low pH slurry (pH <2) and the bond alloy. In this paper, we report an exceptional protective coated conditioner for in-situ pad conditioning in low pH Cu CMP process. The protective Cr-coated conditioner has been tested in slurry with pH levels as low as 1.5 without bond degradation.

• Journal of Welding and Joining
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• 제25권1호
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• pp.42-48
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• 2007

For high performance and structural stability, application of high strength steel has continuously increased. However, the change of the base metal gives rise to problems with the accuracy management of the welded structure. It is attributed to the martensite phase transformation of the high strength low alloy steel weldment. The purpose of this study is to establish the predictive equation of transverse shrinkage and residual stress for the HY-100 weldment. In order to do it, high speed quenching dilatometer tests were performed to define a coefficient of thermal expansion(CTE) at the heating and cooling stage of HY-100 with various cooling rates. Uncoupled thermal-mechanical finite element(FE) models with CTE were proposed to evaluate the effect of the martensite phase transformation on transverse shrinkage and residual stresses at the weldment. FEA results were verified by comparing with experimental results. Based on the results of extensive FEA and experiments, the predictive equation of transverse shrinkage and longitudinal shrinkage force at the HY-100 weldment were formulated as the function of welding heat input/in-plane rigidity and welding heat input respectively.

• 한국자기학회지
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• 제4권2호
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• pp.150-153
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• 1994

본 연구에서는 2쌍의 헬름홀쯔코일을 사용하여 비본형 시편의 종방향 및 횡방향으로 자기장 을 인가한 상태에서 열처리한 Co-계 비정질 합금 VITROVAC 6030의 보자력 노이즈를 측정하였다. 시편의 종방향 및 횡방향으로 dc 자기장을 인가한 상태에서 열처리한 시편의 경우, 보자력노이즈는 자화주파수 가 1~100 kHz 범위에서 거의 변화하지 않았으며, 시편의 종방향으로 ac 자기장을 횡방향으로는 dc자기 장을 인가한 상태에서 열처리한 시편의 경우의 보자력 노이즈는 자화주파수의 거듭제곱으로 감소하는 경 향을 보였다. 또한 자구핵형성이 일어날 경우 보자력 노이즈는 크게 증가하며 자화주파수의 거듭제곱으 로 감소하는 경향을 보였다.

• 마이크로전자및패키징학회지
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• 제23권4호
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• pp.79-85
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• 2016

It is imperative to find environment-friendly coatings as an alternative to the currently used hexavalent chromate conversion coatings for the purpose of improving the anti-corrosion properties of aluminum alloys. Hence, in this study, the corrosion properties of a trivalent chromate conversion coating solution are analyzed and measured. Because of the presence of multiple components in trivalent chromate conversion coating solutions, it is difficult to control plating, attributed to their mutual organic relationship. It is of significance to determine the concentrations of the components present in these coatings; hence, qualitative and quantitative analysis is required. The coating solution contained not only an environment-friendly component chromium(III), but also zirconium, fluorine, sulfur, and potassium, in the coating film. These metals are confirmed to produce a film with improved corrosion resistance to form a thin layer. The excellent corrosion resistance for the trivalent chromate solution is attributed to various inorganic and organic additives.

• Journal of Welding and Joining
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• 제16권2호
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• pp.93-99
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• 1998

The effects of welding conditions of gas metal arc welding on the elements loss of solid wire, oxygen content and impact toughness of weld metals were studied. Deoxidizing elements loss was increased with increase of arc voltage in both short-circuit transfer mode and globular transfer mode. It is believed that increase of arc voltage results in increase of reaction time between elements in the droplet and surrounding gas at the end of wire and in the arc column. Based on the thermodynamic equilibrium model, the oxygen content of weld metal can be predicted with the content of silicon and manganese as following : [%O] = $K([%Si][%Mn])^{-0.25}$, K = -15518/T+6.01. The equilibrium temperature was dependent on shielding gas, and it was 187$0^{\circ}C$ for $CO_2$ gas and 180$0^{\circ}C$ for 20%$CO_2$-80%Ar gas. The oxygen content of weld metal which shows maximum impact toughness was varied with deoxidizing alloy system of wires, 0.041 wt% for Si-Mn type wire and 0.026 wt% for Si-Mn-Ti type wire.

• 한국기계가공학회지
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• 제12권6호
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• pp.37-44
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• 2013

Friction stir welding (FSW) is a solid state joining technique that has expanded rapidly since its development in 1991 and has numerous applications in a wide variety of industries. This paper introduces the basic principles of friction stir welding (FSW) and presents a survey of the latest technologies and applications in the field. The basic principles that are discussed include the terminology, tool/workpiece processes, FSW merits and process variants. In particular, the process variants including the rotation speed and traveling speed are discussed, which include the defect-free zone in an oxygen free copper and Al alloy, respectively. Multiple aspects of the FSW machine are developed, including a horizontal 2D FSW machine and a hybrid complex FSW machine. The latest applications are introduced, with an emphasis on the recent advances in the aerospace, automotive, and IT display industries. Finally, the direction for future research and potential applications are examined.

• 센서학회지
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• 제30권3호
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• pp.165-169
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• 2021

The objective of this study was to fabricate a novel hydrophobic stent for reducing restenosis by employing electron beam equipment. The stent was fabricated from a CoCr alloy tube by using a femtosecond laser and was treated with argon plasma. Subsequently, the stent's surface specification changed from hydrophilic to hydrophobic. Application of the electron beam offers several advantages such as a short processing time, whole surface reforming, and enhancement of material properties. As the surface of the stent was rendered hydrophobic, it can provide equivalent or enhanced mechanical properties and greater functionality with a higher radial force at the extended stent in a blood vessel. The obtained results corresponding to the mechanical properties indicate that the contact angle increased to approximately 130°, and the radial force increased to approximately 3 N. Furthermore, cell culture experiments were conducted for verifying whether cells were cultured on the surface-modified CoCr surface. Based on the obtained results, it is believed that an effective reduction in the restenosis of inserted vascular stents is possible.

• Journal of Oral Medicine and Pain
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• 제32권4호
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• pp.365-373
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• 2007

구강건조증 환자에서 자주 발생하는 구강 연조직과 경조직의 손상은 구강건조증 환자의 삶의 질에 심각한 문제를 일으킨다. 타액선의 기능을 완전히 상실한 구강건조증 환자의 경우 인공타액은 유일한 처치법임에도 불구하고, 현재 통용되고 있는 인공타액은 환자들의 기대치에 비해 많이 부족한 실정이다. 본 연구는 CMC 용액과 인공타액의 점도와 습윤성을 비교함으로써 향후 이상적인 인공타액의 개발에 필요한 정보를 얻고자 시행되었다. CMC를 타액모방완충용액(simulated salivary buffer, SSB)과 증류수에 용해시켜 동물 mucin 용액을 완성한 후, 이를 인체 전타액, 인체 개별 타액선 타액, 그리고 CMC를 주성분으로 하는 인공타액인 Salivart 및 Moi-Stir와 비교 분석하였다. 점도는 cone-and-plate digital viscometer로 검체 당 6개의 전단율에서 측정하였고, 습윤성은 아크릴릭 레진과 Co-Cr alloy 표면 위에서의 접촉각 측정을 통해 평가하여 다음과 같은 결론을 얻었다. 1. CMC 용액의 점도는 CMC 농도에 비례하여 증가하였으며, 0.5% CMC 용액의 점도는 비자극성 전타액의 점도와 유사하였다. 반면에 CMC 용액의 접촉각은 점도와는 반대로 CMC 농도를 증가시킴에 따라 감소하였다. 2. 인체 타액의 점도는 전단율 증가에 따라 감소하는 non-Newtonian fluid의 특성을 나타내었다. 다양한 전단율에서의 평균 점도는 자극성 이하선 타액, 자극성 전타액, 비자극성 전타액, 자극성 악하선-설하선 타액의 순으로 증가하였다. 3. 인체 타액의 접촉각은 점도와는 반대로 자극성 이하선 타액, 자극성 전타액, 비자극성 전타액, 자극성 악하선-설하선 타액의 순으로 감소하였다. 4. 타액모방완충용액에 용해시킨 CMC를 가열하여 변성시킨 경우 점도가 감소하였다 (P < 0.01, 전단율 $90s^{-1}$). 5. 인체 타액의 아크릴릭 레진 표면에서의 접촉각은 인체 타액의 Co-Cr alloy 표면에서의 접촉각보다 유의하게 작은 것으로 나타났다 (P < 0.01). 6. 인체 타액의 아크릴릭 레진 표면에서의 접촉각은 CMC 용액의 아크릴릭 레진 표면에서의 접촉각보다 유의하게 작은 것으로 나타났다 (P < 0.01). 이번 연구에서 CMC 용액의 유동학적 성질을 객관적으로 확인할 수 있었으며, 이상의 결과를 종합하여 보면 CMC는 향후 효과적인 인공타액의 개발에 있어서도 중요한 역할을 수행 할 것으로 기대된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.354.1-354.1
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• 2016

Nanoporous gold (NPG) is a very promising material in various fields such as sensor, actuator, and catalysis because of its high surface to volume ratio and conducting nature. In this study, we fabricated a NPG based amperometric sensor on a glass substrate by means of co-sputtering of Au and Si. During the sputtering process, we found the optimum conditions for heat treatment to reduce the residual stress and to improve adhesion between NPG films and the glass substrate. Subsequently, Si was selectively etched from Au-Si alloy by KOH solution, which forms nanoporous structures. Scanning electron microscopy (SEM) and auger electron spectroscopy (AES) were used to estimate the structure of NPG films and their composition. By employing appropriate heat treatments, we could make very stable NPG films. We tested the performance of NPG sensor with aniline molecules, which shows high sensitivity for sensing low concentration of aniline.