• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.96-97
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• 2012

In nitride and oxide film deposition, sputtered metals react with nitrogen or oxygen gas in a vacuum chamber to form metal nitride or oxide films on a substrate. The physical properties of sputtered films (metals, oxides, and nitrides) are strongly influenced by magnetron plasma density during the deposition process. Typical target power densities on the magnetron during the deposition process are ~ (5-30) W/cm2, which gives a relatively low plasma density. The main challenge in reactive sputtering is the ability to generate a stable, arc free discharge at high plasma densities. Arcs occur due to formation of an insulating layer on the target surface caused by the re-deposition effect. One current method of generating an arc free discharge is to use the commercially available Pinnacle Plus+ Pulsed DC plasma generator manufactured by Advanced Energy Inc. This plasma generator uses a positive voltage pulse between negative pulses to attract electrons and discharge the target surface, thus preventing arc formation. However, this method can only generate low density plasma and therefore cannot allow full control of film properties. Also, after long runs ~ (1-3) hours, depends on duty cycle the stability of the reactive process is reduced due to increased probability of arc formation. Between 1995 and 1999, a new way of magnetron sputtering called HIPIMS (highly ionized pulse impulse magnetron sputtering) was developed. The main idea of this approach is to apply short ${\sim}(50-100){\mu}s$ high power pulses with a target power densities during the pulse between ~ (1-3) kW/cm2. These high power pulses generate high-density magnetron plasma that can significantly improve and control film properties. From the beginning, HIPIMS method has been applied to reactive sputtering processes for deposition of conductive and nonconductive films. However, commercially available HIPIMS plasma generators have not been able to create a stable, arc-free discharge in most reactive magnetron sputtering processes. HIPIMS plasma generators have been successfully used in reactive sputtering of nitrides for hard coating applications and for Al2O3 films. But until now there has been no HIPIMS data presented on reactive sputtering in cluster tools for semiconductors and MEMs applications. In this presentation, a new method of generating an arc free discharge for reactive HIPIMS using the new Cyprium plasma generator from Zpulser LLC will be introduced. Data (or evidence) will be presented showing that arc formation in reactive HIPIMS can be controlled without applying a positive voltage pulse between high power pulses. Arc-free reactive HIPIMS processes for sputtering AlN, TiO2, TiN and Si3N4 on the Applied Materials ENDURA 200 mm cluster tool will be presented. A direct comparison of the properties of films sputtered with the Advanced Energy Pinnacle Plus + plasma generator and the Zpulser Cyprium plasma generator will be presented.

• Journal of The Korean Astronomical Society
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• v.33 no.2
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• pp.111-121
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• 2000

Many models of globular cluster formation assume the presence of cold dense clouds in early universe. Here we re-examine the Fall & Rees (1985) model for formation of proto-globular cluster clouds (PGCCs) via thermal instabilities in a protogalactic halo. We first argue, based on the previous study of two-dimensional numerical simulations of thermally unstable clouds in a stratified halo of galaxy clusters by Real et al. (1991), that under the protogalactic environments only nonlinear (${\delta}{\ge}1$) density inhomogeneities can condense into PGCCs without being disrupted by the buoyancy-driven dynamical instabilities. We then carry out numerical simulations of the collapse of overdense douds in one-dimensional spherical geometry, including self-gravity and radiative cooling down to T = $10^4$ K. Since imprinting of Jeans mass at $10^4$ K is essential to this model, here we focus on the cases where external UV background radiation prevents the formation of $H_2$ molecules and so prevent the cloud from cooling below $10^4$ K. The quantitative results from these simulations can be summarized as follows: 1) Perturbations smaller than $M_{min}\~(10^{5.6}\;M{\bigodot})(nh/0.05cm^{-3})^{-2}$ cool isobarically, where nh is the unperturbed halo density, while perturbations larger than $M_{min}\~(10^8\;M{\bigodot})(nh/0.05cm^{-3})^{-2}$ cool isochorically and thermal instabilities do not operate. On the other hand, intermediate size perturbations ($M_{min} < M_{pgcc} < M_{max}$) are compressed supersonically, accompanied by strong accretion shocks. 2) For supersonically collapsing clouds, the density compression factor after they cool to $T_c = 10^4$ K range $10^{2.5} - 10^6$, while the isobaric compression factor is only $10^{2.5}$. 3) Isobarically collapsed clouds ($M < M_{min}$) are too small to be gravitationally bound. For supersonically collapsing clouds, however, the Jeans mass can be reduced to as small as $10^{5.5}\;M_{\bigodot}(nh/0.05cm^{-3})^{-1/2}$ at the maximum compression owing to the increased density compression. 4) The density profile of simulated PGCCs can be approximated by a constant core with a halo of $p{\infty} r^{-2}$ rather than a singular isothermal sphere.

• Journal of The Korean Astronomical Society
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• v.44 no.5
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• pp.151-160
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• 2011

We present a study searching for globular cluster systems (GCSs) of two face-on low surface bright- ness galaxies (LSBGs), UGC 5981 and UGC 6614. Based on HSTWFPC2 images of F555Wand F814W filters, we detect 12 and 18 GC candidates for UGC 5981 and UGC 6614, respectively. Although these two LSBGs have very different bulge properties, they have very similar specific frequencies ($S_N$) of 0.1. However, $S_N$ ~ 0.1 is quite small even for their late morphological types, albeit within errors. This suggests that LSBGs have had star formation histories lacking dominant initial starburst events while accumulating their stellar masses through sporadic star formation activities.

• The Bulletin of The Korean Astronomical Society
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• v.40 no.2
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• pp.28.1-28.1
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• 2015

Open clusters are one of stellar systems consisting of a few hundreds to thousands of stars. The cluster members are, in general, believed to be a coeval stellar population at the same distance, and therefore they have almost the same properties in chemical composition and kinematics. Owing to these advantages, the clusters are utilized in many astronomy studies, such as the calibrations of distance and stellar age scales, assessments of stellar evolution theories, and the chemical evolution of the Galactic disk. Young open clusters are, inter alia, superb objects to study star formation process as most of stars are known to be formed in clusters. In this talk, I will review the uses of these young open clusters in star formation studies based on the ongoing work of our research group on the stellar initial mass function, an age spread problem, mass accretion rate of pre-main sequence stars, and a feedback of high-mass stars on surroundings.

• Proceedings of the KSME Conference
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• 2002.08a
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• pp.503-506
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• 2002

Electrorheological fluids(ERFs) show a rapid and reversible increase in viscosity by applied electric field. It is called the electrorheological effect (ER effect). The reason for ER effect is the induction of an electric dipole in each particle, leading to the formation of clusters in the direction of the field, which resist fluid flow. Generally, the behavior of ER fluids has been modeled on those of Bingham fluids. But there are some differences between Bingham fluids and ER fluids. The visualization of ER fliuds are presented and ER effects by the forming, growing and breaking of clusters are discussed. In the low shear rate area, the pressure drop is measured by a pressure sensor and the formation of ER particles is visualized by video camera. The reason for the nonlinear behavior of ER fluids at low shear rate is explained through results of visualization.

• Journal of The Korean Astronomical Society
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• v.16 no.1
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• pp.7-17
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• 1983

During the period between January and November in 1982, UBV photoelectric observations were made for 48 stars in NGC 2264, 66 stars in IC 1805 and 22 stars in IC 348. From these observations, various physical parameters such as distance, mean color excess, total-to-selective extinction ratio and mean age of the clusters were determined. Making use of these parameters, the star formation rates were examined for IC 348 and NGC 2264. The overall formation rate is found to be increase rapidly during the period of the active star formation. The age spread (ranging from $5\times10^6$ yrs to $10^7$ yrs) of stars in a given cluster appears to be real which occurs in the extremely young open clusters.

• The Bulletin of The Korean Astronomical Society
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• v.39 no.1
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• pp.27-27
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• 2014

The past three decades have witnessed a renaissance in the field of extragalactic globular clusters (GCs). GC systems have now been investigated in galaxies ranging from dwarfs to giants and spanning all the morphological types. Detailed studies of GCs provide strong constraints on galaxy formation that can be obtained in the near-field. In this talk I will review some of the pivotal studies performed with the HST and large ground-based telescopes and state-of-the-art simulations. Also, I will attempt to introduce my new solution to a long-standing puzzle in this field----the origin of GC bimodality in color. I will show that the theory gives a simple, cohesive explanation for the key observations of extragalactic GCs. The implication of the results will be discussed in the context of formation of GC systems and their parent galaxies.

• The Bulletin of The Korean Astronomical Society
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• v.37 no.2
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• pp.70.2-70.2
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• 2012

Ram pressure is known as one of the most efficient mechanisms to deplete the atomic gas of galaxies in the cluster environment. However, the influence of the ram pressure on the molecular gas is not yet clear. Since the molecular gas resides in the galactic center, thus in the deeper potential well, and has higher surface density than the atomic hydrogen, it has been known as that the molecular gas is not easily affected and/or stripped away by the ICM-ISM interaction. To investigate the influence of the ram pressure on the gas properties of galaxies, we compare HI and $^{12}CO$(J=1-0) distribution of NGC 4654 which is experiencing on-going ram pressure and shows distinct HI, CO, optical, and $H_2$ features due to the ram pressure. We discuss the possibilities of H2 formation from HI by the ram pressure and also the star formation activities.

• Journal of the Korean association of regional geographers
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• v.12 no.3
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• pp.364-381
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• 2006

Strategies for regional development has been implemented by facilitating the cultural industry since the mid 1990s. The government of Gyeongbuk attempted to establish the cluster of cultural industries and to enhance the capability of cultural industries. However, infrastructure of the industries is still weak. The most cultural industries are small-sized enterprises and are in low value-added production link in the value chain. This research examines the situation of cultural industries and then to recommend the direction of cluster of cultural industries in Gyeongbuk. The cluster of cultural industries in Gyeongbuk needs to be decentralized integration. Cultural industries in Gyeongbuk are found in dispersed regions with own cultural and industrial characteristics. The hub of cluster of cultural industries should be formulated to promote network among cultural industrial complexes in dispersed regions; thus, the hub is able to provide knowledge and information for the cultural industrial firms in Gyeongbuk. The supporting center as the hub of cluster has to input more energy to establish the on-line and off-line network among firms, and between firms and innovation agencies such as universities, cultural industrial organizations, and local governments. The cultural industrial cluster should be linked with IT cluster in Gumi and cluster of Daegu cultural industries to upgrade the value chain of cultural industries.

• The Korean Journal of Applied Statistics
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• v.34 no.6
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• pp.905-922
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• 2021

Cluster analysis is one of unsupervised learning techniques used for discovering clusters when there is no prior knowledge of group membership. K-means, one of the commonly used cluster analysis techniques, may fail when the number of variables becomes large. In such high-dimensional cases, it is common to perform tandem analysis, K-means cluster analysis after reducing the number of variables using dimension reduction methods. However, there is no guarantee that the reduced dimension reveals the cluster structure properly. Principal component analysis may mask the structure of clusters, especially when there are large variances for variables that are not related to cluster structure. To overcome this, techniques that perform dimension reduction and cluster analysis simultaneously have been suggested. This study proposes probabilistic reduced K-means, the transition of reduced K-means (De Soete and Caroll, 1994) into a probabilistic framework. Simulation shows that the proposed method performs better than tandem clustering or clustering without any dimension reduction. When the number of the variables is larger than the number of samples in each cluster, probabilistic reduced K-means show better formation of clusters than non-probabilistic reduced K-means. In the application to a real data set, it revealed similar or better cluster structure compared to other methods.